TWD125341S1 - Top panel for microwave introduction window of plasma processing apparatus - Google Patents

Top panel for microwave introduction window of plasma processing apparatus

Info

Publication number
TWD125341S1
TWD125341S1 TW095300471F TW95300471F TWD125341S1 TW D125341 S1 TWD125341 S1 TW D125341S1 TW 095300471 F TW095300471 F TW 095300471F TW 95300471 F TW95300471 F TW 95300471F TW D125341 S1 TWD125341 S1 TW D125341S1
Authority
TW
Taiwan
Prior art keywords
creation
disc body
chamfered
disc
enlarged cross
Prior art date
Application number
TW095300471F
Other languages
Chinese (zh)
Inventor
太田欣也
田才忠
北川淳一
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD125341S1 publication Critical patent/TWD125341S1/en

Links

Abstract

【物品用途】;本創作的物品是一種電漿處理裝置之微波導入窗用頂板,其用途主要是作為導入微波施以電漿處理所用的頂板。;【創作特點】;本創作基本上為一圓盤體,如前視圖所示,主要係由三個大小不同的直徑以及厚度所形成的圓盤體,該圓盤體的大徑部份其厚度較厚,且上下兩邊緣均施以倒角處理,位於該圓盤體的上方向上形成一直徑略小且厚度較薄的淺圓形突部,且位於該圓盤體的下方則向下形成一厚度較厚的錐形凸緣(如A-A剖面圖及B-B放大剖面圖所示),於上方的淺圓形突部乃如B-B放大剖面圖所示,與主圓盤體銜接的部份施以圓角處理,而上邊緣則施以倒角處理,並且如C-C放大剖面圖所示,於中央形成一淺凹狀小圓孔,該小圓孔的上方同樣施以倒角處理,底緣則施以圓角處理;綜上所述,本創作的某些設計雖是功能上的需求,但卻在整體造形上形成特殊且深具科技感之意象,確為一理想美觀之設計。;[Purpose of the article]; The article of this creation is a top plate for a microwave introduction window of a plasma treatment device, and its main purpose is to be used as a top plate for introducing microwaves for plasma treatment. ; [Features of the creation]; This creation is basically a disc body, as shown in the front view, mainly formed by three disc bodies of different diameters and thicknesses. The thickness of the large diameter part of the disc body is relatively thick, and the upper and lower edges are chamfered. A shallow circular protrusion with a slightly smaller diameter and thinner thickness is formed upward on the upper part of the disc body, and a thicker conical convex edge is formed downward on the lower part of the disc body (as shown in the A-A cross-sectional view and the B-B enlarged cross-sectional view), at As shown in the B-B enlarged cross-section, the shallow circular protrusion on the top is rounded at the part connected to the main disc, and the upper edge is chamfered. As shown in the C-C enlarged cross-section, a shallow concave small circular hole is formed in the center, and the top of the small circular hole is also chamfered, and the bottom edge is rounded. In summary, although some designs of this creation are functional requirements, the overall shape forms a special and technological image, which is indeed an ideal and beautiful design. ;

TW095300471F 2005-07-29 2006-01-26 Top panel for microwave introduction window of plasma processing apparatus TWD125341S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005022108 2005-07-29

Publications (1)

Publication Number Publication Date
TWD125341S1 true TWD125341S1 (en) 2008-10-11

Family

ID=39530491

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095300471F TWD125341S1 (en) 2005-07-29 2006-01-26 Top panel for microwave introduction window of plasma processing apparatus

Country Status (2)

Country Link
US (1) USD571832S1 (en)
TW (1) TWD125341S1 (en)

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Also Published As

Publication number Publication date
USD571832S1 (en) 2008-06-24

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