SG168403A1 - Sawjig clamper - Google Patents

Sawjig clamper

Info

Publication number
SG168403A1
SG168403A1 SG200401172-2A SG2004011722A SG168403A1 SG 168403 A1 SG168403 A1 SG 168403A1 SG 2004011722 A SG2004011722 A SG 2004011722A SG 168403 A1 SG168403 A1 SG 168403A1
Authority
SG
Singapore
Prior art keywords
clamping
substrate
base plate
sawjig
clamper
Prior art date
Application number
SG200401172-2A
Inventor
Yong Yoong Ming
Original Assignee
Advanced Systems Automation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Systems Automation Ltd filed Critical Advanced Systems Automation Ltd
Priority to SG200401172-2A priority Critical patent/SG168403A1/en
Publication of SG168403A1 publication Critical patent/SG168403A1/en

Links

Landscapes

  • Sawing (AREA)

Abstract

A clamping assembly for relieving warpage of a substrate by clamping the substrate on a base plate is provided. A gripper loading the substrate onto the base plate is fitted with clamping releasing means operable to align with and release clamping means on the base plate. A system incorporating a plurality of said clamping assembly is also provided to improve sawing of an encapsulated substrate. Fig 3a-b
SG200401172-2A 2004-01-20 2004-01-20 Sawjig clamper SG168403A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200401172-2A SG168403A1 (en) 2004-01-20 2004-01-20 Sawjig clamper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200401172-2A SG168403A1 (en) 2004-01-20 2004-01-20 Sawjig clamper

Publications (1)

Publication Number Publication Date
SG168403A1 true SG168403A1 (en) 2011-02-28

Family

ID=43859910

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200401172-2A SG168403A1 (en) 2004-01-20 2004-01-20 Sawjig clamper

Country Status (1)

Country Link
SG (1) SG168403A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100943A (en) * 1984-10-24 1986-05-19 Hitachi Ltd Vacuum processing equipment
US5775000A (en) * 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
US6333858B1 (en) * 1999-05-01 2001-12-25 Mirae Corporation Carrier module
US6635516B1 (en) * 1999-10-08 2003-10-21 Nikon Corporation Substrate dropping prevention mechanism and substrate inspection device provided therewith

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100943A (en) * 1984-10-24 1986-05-19 Hitachi Ltd Vacuum processing equipment
US5775000A (en) * 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
US6333858B1 (en) * 1999-05-01 2001-12-25 Mirae Corporation Carrier module
US6635516B1 (en) * 1999-10-08 2003-10-21 Nikon Corporation Substrate dropping prevention mechanism and substrate inspection device provided therewith

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