KR102720145B1 - Slide docking type mobile test handler apparatus - Google Patents

Abstract

According to one embodiment of the present invention, a slide docking type mobile test handler device is characterized by including: a docking main body having a table-shaped bottom with casters, an empty space formed so that a test facility can be selectively inserted in the front-back direction, a space provided inside the top in a box shape for loading a test object, and at least one robot arm for loading or unloading the test object to or from the test facility; a pair of guide block units provided in parallel along the front-back direction on the left and right sides of the test facility; and an align roller unit provided in the lower empty space of the docking main body and docking the docking main body to the test facility without play while sliding in a state of being settled on the surface of the guide block unit as the lower empty space of the docking main body is inserted into the test facility.

Description

Slide docking type mobile test handler apparatus {Slide docking type mobile test handler apparatus}

The present invention relates to a slide docking type mobile test handler device, and more specifically, to a slide docking type mobile test handler device which is freely moved by a worker to a desired test facility in a state where a test object is loaded separately from the test facility, and the test facility and the handler device are simultaneously docked and aligned to a set height using a docking rail pre-installed on each test facility, so that there is no inconvenience of having to transport the test object separately each time using an unmanned transport vehicle as in the past or having to separately teach a picker robot, etc. for each docking, and thus work efficiency is greatly improved.

Typically, semiconductor chips are manufactured by forming microcircuits on a substrate, called a wafer, through a series of semiconductor manufacturing processes, and the manufactured semiconductor devices undergo quality inspection to determine whether they are defective.

That is, semiconductor devices manufactured through a certain assembly process are finally subjected to a test process to check whether they perform a specific function. A test handler is used in the above test process, and tests are performed by returning a certain number of semiconductor devices and contacting them with a test head, and the devices are classified and loaded by grade based on the test results.

Fig. 1 is a conceptual diagram of a conventional test handler viewed from a plane. Referring to this, the test handler is configured to include a loading section (11), a soak chamber (12), a test chamber (13), a desoak chamber (14), an unloading section (15), etc.

In the above loading section (11), semiconductor devices loaded on a customer tray are loaded onto a test tray.

In the above soak chamber (12), semiconductor devices loaded on a test tray are preheated or precooled depending on the test environment before being tested, and the test tray is translated toward the test chamber (13).

In general, semiconductor devices are used in various temperature environmental conditions. Therefore, it is necessary to test whether they can be used in such various environmental conditions. In the soak chamber (12), the semiconductor devices are preheated or precooled so that they can be subjected to such various environmental conditions. This preheating or precooling in the soak chamber (12) is performed in the process of the test tray being translated toward the test chamber (13).

Therefore, the soak chamber (12) must have a translational travel distance, i.e., the full length (width) of the soak chamber, to allow time for the semiconductor device to be properly preheated or precooled before being tested.

In the above test chamber (13), a test tray is pressed against a tester (21) docked (coupled) at the rear of the test chamber (13), so that a semiconductor device loaded on the test tray is supplied to the tester (21) (more specifically, the semiconductor device comes into contact with the contact socket of the tester) to perform a test, and a temperature environment according to the test conditions is created in the test chamber (13).

In the above-described de-soak chamber (14), the heated or cooled semiconductor devices transferred from the test chamber (13) are reduced to room temperature. In addition, in the above-described unloading section (15), the semiconductor devices loaded on the test tray from the above-described de-soak chamber (14) are classified by test grade and loaded onto an empty customer tray, thereby completing the test.

However, the conventional test handler device described above is installed in the form of a fixed facility and includes all test facilities such as a loading section, a soak chamber, a test chamber, a de-soak chamber, and an unloading section inside the test handler device, so that the device is excessively large, and since the test object must be transported to the test handler device each time using an AGV device, there is a problem in that the test processing efficiency is reduced.

Korean Patent No. 0772446 (registered on October 26, 2007)

Accordingly, the present invention has been made to solve the above problems, and the purpose of the present invention is to provide a slide docking type mobile test handler device which is capable of freely moving a test subject loaded in a separate state from the test facility to a desired test facility by a worker, and which docks and aligns the test subject and the handler device simultaneously at a set height using guide rails provided on each test facility, thereby eliminating the inconvenience of having to transport the test subject separately each time using an unmanned transport vehicle as in the past or having to separately teach a picker robot, etc., each time docking, thereby significantly improving work efficiency.

In order to achieve the above object, according to one embodiment of the present invention, the present invention comprises: a docking body having a table-shaped bottom with casters, an empty space formed so that a test facility can be selectively inserted in the front-back direction, a space provided inside the top in a box shape for loading a test object, and at least one robot arm for loading or unloading the test object into the test facility; a pair of guide block units provided in parallel along the front-back direction on the left and right sides of the test facility; and an align roller unit provided in the lower empty space of the docking body and sliding while being settled on the surface of the guide block unit when the lower empty space of the docking body is inserted into the test facility, thereby docking the docking body to the test facility without any play.

Additionally, according to one embodiment, the guide block unit is characterized in that it is formed in a square rod shape.

In addition, according to one embodiment, the alignment roller unit includes a vertical alignment roller that rolls while being seated on an upper surface of the guide block unit; and a horizontal alignment roller that rolls while being in contact with a side surface of the guide block unit.

In addition, according to one embodiment, the alignment roller unit further includes a vertical clamp for fixing the test facility and the docking body in a vertical direction without shaking; and a horizontal clamp for fixing the test facility and the docking body, after docking is completed, in a horizontal direction without shaking.

As described above, the slide docking type mobile test handler device of the present invention is freely moved by a worker to a desired test facility while loading a test object separately from the test facility, and the docking and alignment of the test facility and the handler device are simultaneously performed at a set height using a docking rail pre-installed on each test facility. Therefore, there is no inconvenience of having to transport the test object separately each time using an unmanned transport vehicle as in the past or having to separately teach a picker robot, etc. for each docking, so that work efficiency is greatly improved.

In addition, for the reasons described above, the present invention has the additional effects of high productivity, quick delivery, and a simple manufacturing process while reducing manufacturing costs due to a reduction in tact time.

Figure 1 is a conceptual diagram of a conventional test handler viewed from a plane.
Figure 2 is a perspective view showing the slide docking type mobile test handler device of the present invention together with the test equipment, showing the state before docking.
Figure 3 is a right side view of Figure 2, showing the state after docking.
Figure 4 is an enlarged perspective view of the 'A' portion of Figure 2.
Figure 5 is an enlarged perspective view of the 'B' portion of Figure 3.
Figure 6 is an enlarged plan perspective view of a docking unit according to the present invention.
Figures 7a and 7b are enlarged perspective views of the clamp unit of Figure 6.

The terminology used herein is only used to describe particular embodiments and is not intended to be limiting of the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. As used herein, the terms "comprises" or "has" or "comprising" and the like are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the present specification, but should be understood to not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

Unless otherwise defined herein, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and should not be interpreted in an idealized or overly formal sense, unless expressly defined otherwise herein.

Hereinafter, with reference to the attached drawings, the configuration and operational relationship of a slide docking type mobile test handler device according to one embodiment of the present invention will be specifically examined.

FIG. 2 is a perspective view showing a slide docking type mobile test handler device of the present invention together with a test facility, showing a state before docking, FIG. 3 is a right side view of FIG. 2, showing a state after docking, FIG. 4 is an enlarged perspective view of a main part of part ‘A’ of FIG. 2, FIG. 5 is an enlarged perspective view of a main part of part ‘B’ of FIG. 3, FIG. 6 is an enlarged perspective view of a docking unit according to the present invention, and FIGS. 7a and 7b are enlarged perspective views of the clamp unit of FIG. 6.

Referring to the above drawings 2 to 7b, a configuration according to one embodiment of the present invention will be examined. The slide docking type mobile test handler device (1000) of the present invention largely includes a docking body (1100), a guide block unit (1200), and an alignment roller unit (1300).

First, the docking main body (1100) is provided with a caster (1150) on the table-shaped bottom (1101) and an empty space (1101a) is formed so that a test facility (TM) can be selectively inserted in the forward and backward directions, and a space (not shown) in which a test object (not shown) is loaded is provided inside the box-shaped top (1102), and at least one robot arm (not shown) is provided for loading or unloading the test object to the test facility (TM).

In addition, the guide block unit (1200) is provided in pairs in parallel along the front-back direction on the left and right sides of the test facility (TM).

According to one embodiment, the guide block unit (1200) may be implemented in a square rod shape. However, the cross-sectional shape of the guide block unit (1200) is not limited to a square rod shape, and may be a circular or polygonal shape.

In addition, the alignment roller unit (1300) is provided in the lower empty space (1101a) of the docking main body (1100), and when the lower empty space (1101a) of the docking main body (1100) is fitted into the test equipment (TM), it slides while being seated on the surface of the guide block unit (1200), thereby docking the docking main body (1100) to the test equipment (TM) without any play.

According to one embodiment, the alignment roller unit (1300) includes a vertical alignment roller (1310) that is mounted on an upper surface of the square rod-shaped guide block unit (1200) and moves in a rolling motion; and a horizontal alignment roller (1320) that is in contact with a side surface of the guide block unit (1200) and moves in a rolling motion.

In addition, the alignment roller unit (1300) further includes a vertical clamp (1330) for fixing the test facility (TM) and the docking body (1100) in a vertical direction without shaking; and a horizontal clamp (1340) for fixing the test facility (TM) and the docking body (1100) after docking without shaking in a horizontal direction.

Hereinafter, the process of docking the slide docking type mobile test handler device (1000) of the present invention configured as described above to a test facility (TM) will be examined as follows.

First, referring to FIG. 1, in order to dock the handler device (1000) of the present invention to one of a plurality of test facilities (TM), a worker can hold a handle (not shown) provided on one side of a docking body (1100) and push the docking body (1100) to move it. At this time, since a plurality of casters (1150) are installed at the bottom of the docking body (1100), movement between test facilities (TM) is manually performed by the worker's manpower.

Next, when the worker pushes the empty space (1101a) at the bottom (1101) of the docking main body (1100) into alignment with the test equipment (TM), the test equipment (TM) is inserted while sliding into the empty space (1101a) at the bottom (1101) of the docking main body (1100).

That is, since a pair of guide block units (1200) are installed in parallel on the left and right sides of the test facility (TM), the alignment roller unit (1300) of the docking main body (1100) comes into contact with and rolls on the upper and lower surfaces of the guide block unit (1200), and the docking main body (1100) is aligned and docked by being fitted onto the test facility (TM).

Continuing, the worker completes the final docking by fitting and locking the vertical clamp (1330) and horizontal clamp (1340) provided on the docking body (1100) into the hook (1350, see FIG. 7b) of the test facility (TM) in the aligned and docked state as described above.

Meanwhile, after completing a test on one test facility (TM) through the above-described process, the handler device (1000) of the present invention can be separated from the test facility (TM) in the reverse order of the above-described process, and then the docking body (1100) can be moved to another test facility (TM) to perform the test, and docking and testing can be performed again.

Therefore, the slide docking type mobile test handler device (1000) of the present invention having the above-described configuration is freely moved by a worker to a desired test facility (TM) while loading a test object (not shown) separately from the test facility (TM), and the docking and alignment of the test facility (TM) and the handler device (1000) are simultaneously performed at a set height using a docking rail (guide block unit) pre-installed on each test facility, so that there is no inconvenience of having to transport the test object every time using an unmanned transport vehicle as in the past or having to separately perform teaching using a picker robot (not shown) for each docking, so that work efficiency is greatly improved.

In addition, for the reasons described above, the present invention can obtain the additional effects of high productivity, quick delivery, and reduced manufacturing costs due to a simple manufacturing process and reduced tact time.

In addition, the present invention is not limited to only the above-described embodiment, and the same effect can be created even when the detailed configuration, number, and arrangement structure of the device are changed. Therefore, it is stated that those with ordinary skill in the art can add, delete, and modify various configurations within the scope of the technical idea of the present invention.

1000: (Invention) Slide docking type mobile test handler device
1100 : Docking body
1101, 1102, 1101a: (bottom, top, empty space of docking body)
1150 : Caster
1200 : Guide Block Unit
1300 : Align roller unit
1310, 1320: Vertical alignment roller, horizontal alignment roller
1330, 1340, 1350: Vertical clamp, horizontal clamp, hook
TM : Test facility

Claims (4)

A docking body having an empty space formed on the bottom in the form of a table so that a test facility can be selectively inserted in the forward and backward directions with casters provided, and a space provided on the inside of the top in the form of a box so that a test object can be loaded, and at least one robot arm provided for loading or unloading the test object to the test facility;
A pair of guide block units installed parallel to each other along the front-back direction on the left and right sides of the above test equipment; and
An alignment roller unit is provided in the lower empty space of the docking main body, and when the lower empty space of the docking main body is fitted into the test facility, the alignment roller unit slides while being seated on the surface of the guide block unit, thereby docking the docking main body to the test facility without any play;
The above guide block unit is formed in a square rod shape,
The above alignment roller unit,
A vertical alignment roller that moves in a rolling manner while being seated on the upper surface of the above guide block unit; and
A horizontal alignment roller that is moved in a rolling motion while in contact with the side surface of the above guide block unit;
Slide docking type mobile test handler device. delete delete In paragraph 1,
The above alignment roller unit,
A vertical clamp for fixing the test equipment and docking body in a vertical direction without shaking; and
Further comprising a horizontal clamp for fixing the docked test equipment and the docking body in a horizontal direction without shaking;
Slide docking type mobile test handler device.

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