JP2579111B2 - Compact optical scanner driven by electrostatic force - Google Patents
Compact optical scanner driven by electrostatic forceInfo
- Publication number
- JP2579111B2 JP2579111B2 JP4334064A JP33406492A JP2579111B2 JP 2579111 B2 JP2579111 B2 JP 2579111B2 JP 4334064 A JP4334064 A JP 4334064A JP 33406492 A JP33406492 A JP 33406492A JP 2579111 B2 JP2579111 B2 JP 2579111B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- axis
- electrostatic
- drive electrode
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Facsimile Scanning Arrangements (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、物体の探査、把握を行
うためのレ−ザレ−ダ用のスキャナとして、またファク
シミリやプリンタ−の書き込み用として、また将来の光
コンピュ−ティングに代表される光情報処理分野に利用
する１軸方向，２軸方向走査光スキャナに関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is typified as a scanner for a laser radar for exploring and grasping an object, for writing in a facsimile or a printer, and for future optical computing. The present invention relates to a one-axis and two-axis scanning optical scanner used in the optical information processing field.
【０００２】[0002]
【従来の技術】以下、従来の２軸方向走査光スキャナに
ついて図８，９，１０をもちいて説明する。図８，９，
１０において、５１はレ−ザ光源、５２はＸ軸方向ミラ
−、５３はＹ軸方向ミラ−、５４はポリゴンミラ−、５
５はディスク型ホログラムスキャナである。以上のよう
に構成された２軸方向走査光スキャナについて、その動
作について説明する。図８は、レ−ザ光源５１からでた
レ−ザ光がＸ軸方向のミラ−５２とＹ軸方向のミラ−５
３を回転変位させることにより２軸方向走査する、ガル
バノメ−タスキャナを二つ組み合わせた構成や、図９に
示すようにポリゴンミラ−５４とガルバノメ−タスキャ
ナにより回転変位するＹ軸方向ミラ−５３を組み合わせ
た構成や、図１０に示すようにディスク型ホログラムス
キャナ５５とガルバノメ−タスキャナにより回転変位す
るＹ軸方向ミラ−５３を組み合わせた構成が知られてい
る。2. Description of the Related Art A conventional two-axis scanning light scanner will be described below with reference to FIGS. 8, 9,
In FIG. 10, reference numeral 51 denotes a laser light source; 52, an X-axis mirror; 53, a Y-axis mirror; 54, a polygon mirror;
Reference numeral 5 denotes a disk type hologram scanner. The operation of the biaxial scanning light scanner configured as described above will be described. FIG. 8 shows that a laser beam emitted from a laser light source 51 is a mirror 52 in the X-axis direction and a mirror 5 in the Y-axis direction.
A configuration in which two galvanometer scanners are combined to scan in two axes by rotating and displacing 3 or a combination of a polygon mirror 54 and a Y-axis direction mirror 53 which is rotationally displaced by the galvanometer scanner as shown in FIG. And a combination of a disk-type hologram scanner 55 and a mirror 53 in the Y-axis direction which is rotationally displaced by a galvanometer scanner as shown in FIG.
【０００３】つぎに、近年の１軸方向走査の光スキャナ
については、マイクロマシンの研究が盛んに行われるよ
うになり、シリコンマイクロマシニングを用いた小型光
スキャナが作られている。例えば、静電型シリコンねじ
り振動子（富士電気，中川ほか）、日本機械学会第６８
期全国大会講演会講演論文集Ｖｏｉ．Ｄ、（１９９０）
などである。[0003] In recent years, micromachines have been actively studied for optical scanners for scanning in one axis direction in recent years, and small optical scanners using silicon micromachining have been manufactured. For example, electrostatic silicon torsional vibrator (Fuji Electric, Nakagawa et al.), 68th Japan Society of Mechanical Engineers
Annual Conference Lectures Voi. D, (1990)
And so on.
【０００４】以下、従来の１軸走査の小型光スキャナに
ついて、図１１，１２を用いて説明する。図１１は、静
電型シリコンねじり振動子の外観図である。振動子４１
は、可動板４２とスパンバウンド４３と枠４４からな
り、厚さ０．３ｍｍのシリコンからエッチングにより一
体形成している。可動板４２とスパンバウンド４３の厚
さは２０μｍである。シリコン振動子４１は、電極を形
成したガラス基板４５にスペ−サ４６を挟んで接着して
いる。A conventional one-axis scanning small optical scanner will be described below with reference to FIGS. FIG. 11 is an external view of the electrostatic silicon torsional vibrator. Vibrator 41
Is composed of a movable plate 42, a spanbound 43, and a frame 44, and is integrally formed by etching from silicon having a thickness of 0.3 mm. The thickness of the movable plate 42 and the span bound 43 is 20 μm. The silicon oscillator 41 is bonded to a glass substrate 45 on which electrodes are formed, with a spacer 46 interposed therebetween.
【０００５】図１２は、静電型シリコンねじり振動子の
運動状態を示した断面図である。Ｓ字型のスパンバウン
ド４３で支持された可動板４２と電極間に電圧を印加す
ると、両者の間に静電力が働き、可動板４２はスパンバ
ウンド４３を軸として電極に静電吸引され振動する。FIG. 12 is a cross-sectional view showing a motion state of the electrostatic silicon torsional vibrator. When a voltage is applied between the movable plate 42 supported by the S-shaped spanbound 43 and the electrodes, an electrostatic force acts between the two, and the movable plate 42 is electrostatically attracted to the electrodes about the spanbound 43 and vibrates. .
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、２軸方
向走査光スキャナについては、上記の構成では、数多く
の部品からなり構造が複雑であり、又ミラ−部の駆動の
ためのアクチェ−タが大きく、全体を小型化することが
困難である。However, with respect to the two-axis scanning light scanner, the above-mentioned structure is composed of a large number of components and has a complicated structure, and an actuator for driving the mirror is large. It is difficult to make the whole smaller.
【０００７】静電型シリコンねじり振動子の場合は、小
型であるが、２軸方向走査は出来ない。また１軸方向走
査光スキャナとして考えると、走査角度を増加させるに
したがい、駆動電圧が高くなる。逆に、駆動電圧を制限
して走査角度増加させると、スパンバウンドの機械的強
度が低下するなどの問題がある。The electrostatic silicon torsional vibrator is small in size, but cannot scan in two axes. In addition, when considered as a one-axis direction scanning light scanner, as the scanning angle increases, the driving voltage increases. Conversely, increasing the scan angle by limiting the drive voltage has the problem of lowering the mechanical strength of the spanbound.
【０００８】本発明は、上記従来例の課題を解決するも
ので、半導体プロセス加工を用いて、ミラ−やアクチェ
−タを形成し、超小型，低電圧駆動（広走査角度）の１
軸方向走査，２軸方向走査光スキャナを提供することを
目的とする。The present invention solves the above-mentioned problems of the prior art. A mirror or an actuator is formed by using a semiconductor process, and the ultra-compact, low-voltage drive (wide scan angle) is realized.
It is an object of the present invention to provide an axial scanning and biaxial scanning optical scanner.
【０００９】[0009]
【課題を解決するための手段】この目的を達成するため
に本発明は、入射光を反射し、Ｘ軸および前記Ｘ軸に直
交するＹ軸の方向に走査可能なミラー部材と、前記ミラ
ー部材を前記ミラー部材の略中心部でピボット状に支持
する第１のピボット状支持部材と、前記ミラ−部材の略
中心部を通る前記Ｙ軸の方向に前記ミラー部材の一対の
端部から延在して、前記ミラー部材を支持するＸ軸走査
用梁部材と、前記Ｘ軸走査用梁部材の前記ミラー部材と
反対側の端部が連絡し、前記ミラー部材を取り囲むよう
に形成された静電吸引部材と、前記静電吸引部材の一対
の端部に連絡し前記ミラ−部材の中心部を通り前記Ｘ軸
の方向に前記ミラー部材の一対の端部から延在して、前
記ミラー部材を支持するＹ軸走査用梁部材と、前記Ｙ軸
走査用梁部材をピボット状に支持する第２のピボット状
支持部材と、前記Ｙ軸走査用梁部材の前記静電吸引部材
と反対側の端部が連絡した第１の基板部材と、前記ミラ
ー部材と対向して設けられ、前記ミラー部材を駆動する
静電力を印加可能なＸ軸方向駆動電極と、前記静電吸引
部材に対向して設けられ、前記静電吸引部材を駆動する
静電力を印加可能なＹ軸方向駆動電極と、前記ミラー部
材とＸ軸方向駆動電極とを絶縁し、前記静電吸引部材と
Ｙ軸方向駆動電極とを絶縁する絶縁部材と、前記Ｘ軸方
向駆動電極、Ｙ軸方向駆動電極および前記絶縁部材が設
けられた第２の基板部材と、前記Ｘ軸方向駆動電極およ
びＹ軸方向駆動電極に連絡され前記第２の基板部材内に
配された配線部材とを有し、前記ミラー部材、前記Ｘ軸
走査用梁部材、前記静電吸引部材、前記Ｙ軸走査用梁部
材および前記第１の基板部材は同一のシリコン部材から
一体物として形成され、前記ミラー部材と前記静電吸引
部材とは独立に変位可能な２軸方向走査可能な静電力駆
動小型光スキャナである。または、入射光を反射し、第
１の軸の方向に走査可能なミラー部材と、前記ミラー部
材を前記ミラー部材の略中心部でピボット状に支持する
ピボット状支持部材と、前記ミラ−部材の略中心部を通
り前記第１の軸と直交する第２の軸の方向に前記ミラー
部材の一対の端部から延在して、前記ミラー部材を支持
する走査用梁部材と、前記走査用梁部材をピボット状に
支持する第２のピボット状支持部材と、前記走査用梁部
材の前記ミラー部材と反対側の端部が連絡した第１の基
板部 材と、前記走査用梁部材に連絡され、前記ミラー部
材を取り囲むように形成された静電吸引部材と、前記ミ
ラー部材と対向して設けられ、前記ミラー部材を駆動す
る静電力を印加可能なミラー部材用駆動電極と、前記静
電吸引部材に対向して設けられ、前記静電吸引部材を駆
動する静電力を印加可能な静電吸引部材用駆動電極と、
前記ミラー部材とミラー部材用駆動電極とを絶縁し、前
記静電吸引部材と静電吸引部材用駆動電極とを絶縁する
絶縁部材と、前記ミラー部材用駆動電極および静電吸引
部材用駆動電極並びに前記絶縁部材が設けられた第２の
基板部材とを有し、前記ミラー部材、前記走査用梁部
材、前記静電吸引部材および前記第１の基板部材は、同
一のシリコン部材から一体物として形成され、前記ミラ
ー部材と前記静電吸引部材とは独立に変位可能な１軸方
向走査可能な静電力駆動小型光スキャナである。これら
の場合、さらに、第１の基板部材に反射防止膜を有する
ガラス基板が設けられ、前記ガラス基板で封止される前
記ミラー部の周辺の空間が真空であることが好適であ
る。また、ミラー部材は、複数個設けられ、前記ミラー
部材は、同一平面上で、直線的、または平面的に配列さ
れている構成であってもよい。 SUMMARY OF THE INVENTION To achieve this object, the present invention reflects an incident light and directs it to an X-axis and the X-axis.
A mirror member capable of scanning in the direction of the intersecting Y axis;
-The member is pivotally supported at the approximate center of the mirror member.
A first pivot-shaped supporting member, and a mirror member.
A pair of mirror members in the direction of the Y-axis passing through a central portion.
X-axis scanning extending from an end to support the mirror member
Beam member, the mirror member of the X-axis scanning beam member,
The opposite ends communicate and surround the mirror member
And a pair of the electrostatic suction member
Through the center of the mirror member and the X-axis
Extending from the pair of ends of the mirror member in the direction of
A Y-axis scanning beam member for supporting the mirror member;
A second pivot shape for supporting the scanning beam member in a pivot shape
A support member and the electrostatic attraction member of the Y-axis scanning beam member
A first substrate member, the end of which is opposite to the first substrate member;
A mirror member for driving the mirror member
An X-axis direction drive electrode capable of applying an electrostatic force;
A member is provided to face the member and drives the electrostatic suction member
A Y-axis direction drive electrode to which electrostatic force can be applied, and the mirror unit
Material and the X-axis direction drive electrode are insulated from each other,
An insulating member for insulating the Y-axis direction drive electrode from the X-axis direction;
Direction drive electrode, Y-axis direction drive electrode and the insulating member.
The second substrate member, the X-axis direction driving electrode,
And connected to the Y-axis direction drive electrode and in the second substrate member.
The mirror member, and the X-axis.
Scanning beam member, electrostatic attraction member, Y-axis scanning beam portion
The material and the first substrate member are made of the same silicon member.
The mirror member and the electrostatic attraction are formed as one piece.
Electrostatic drive capable of biaxial scanning that can be displaced independently of the member
It is a moving small optical scanner. Or, it reflects the incident light and
A mirror member capable of scanning in the direction of one axis, and the mirror unit
A material is pivotally supported at a substantially central portion of the mirror member.
A pivot-shaped support member and a substantially central portion of the mirror member are passed through.
Mirror in a direction of a second axis orthogonal to the first axis.
Extends from a pair of ends of the member to support the mirror member
Scanning beam member to be scanned and the scanning beam member
A second pivotal support member for supporting, and the scanning beam portion
A first base connected to an end of the member opposite the mirror member;
A plate member, is contacted to the scanning beam member, said mirror unit
An electrostatic attraction member formed to surround the material;
A mirror member for driving the mirror member.
A mirror member drive electrode capable of applying an electrostatic force,
An electrostatic attraction member is provided to face the electrostatic attraction member, and drives the electrostatic attraction member.
A driving electrode for an electrostatic attraction member capable of applying a moving electrostatic force,
Insulating the mirror member and the mirror member drive electrode,
The electrostatic attraction member is insulated from the drive electrode for the electrostatic attraction member.
Insulating member, drive electrode for mirror member and electrostatic suction
A second drive electrode provided with a member drive electrode and the insulating member;
A substrate member, the mirror member, the scanning beam portion
The material, the electrostatic suction member and the first substrate member are the same.
The mirror is formed as one body from one silicon member.
-Axle direction in which the member and the electrostatic suction member can be displaced independently
This is a small optical scanner driven by electrostatic force that can scan in the opposite direction. these
In the case of (1), the first substrate member further has an anti-reflection film.
Before the glass substrate is provided and sealed with the glass substrate
It is preferable that the space around the mirror section is a vacuum.
You. Further, a plurality of mirror members are provided, and
The members can be arranged on the same plane, linearly or planarly.
Configuration may be used.
【００１０】[0010]
【作用】本発明は、上記構成によって、シリコン基板上
に形成されたミラ−が、駆動電極に電圧を印加すること
で、Ｘ軸，Ｙ軸の２軸方向走査可能となり、半導体レ−
ザ光は二次元走査される。全体が超小型な２軸方向走査
光スキャナを提供することができる。また複数本の静電
吸引部を持つことにより、従来よりも低電圧で、広走査
角度の１軸方向走査光スキャナを提供することができ
る。さらに、これら光スキャナのミラ−部を真空中で動
作させることにより、高速応答が可能になる。そして、
これらミラ−を、単一ではなく直線的にまた平面的に配
列することで、プリンタ−の書き込み用や光情報分野用
として、従来にない小型でまったく新しい光スキャナデ
バイスを提供することができる。According to the present invention, the mirror formed on the silicon substrate can scan in two directions of the X-axis and the Y-axis by applying a voltage to the driving electrode by the above-mentioned structure.
The light is scanned two-dimensionally. An ultra-small two-axis scanning light scanner can be provided as a whole. Further, by having a plurality of electrostatic suction units, it is possible to provide a one-axis direction scanning light scanner with a lower voltage and a wider scanning angle than before. Further, by operating the mirror section of these optical scanners in a vacuum, a high-speed response is possible. And
By arranging these mirrors in a straight line or in a plane, instead of a single mirror, it is possible to provide an unprecedented compact and completely new optical scanner device for writing in a printer or for the optical information field.
【００１１】[0011]
（実施例１）以下、本発明の第１の実施例について図面
を参照しながら説明する。図１は、本発明の第１の実施
例における小型の２軸方向走査可能な静電力駆動光スキ
ャナの（ａ）平面図と（ｂ）断面図である。Embodiment 1 Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIGS. 1A and 1B are a plan view and a sectional view, respectively, of a small-sized electrostatically driven optical scanner capable of scanning in two axial directions according to a first embodiment of the present invention.
【００１２】図１において、１はミラ−部、２はシリコ
ン基板、３はＸ軸走査用の梁、４はＸ軸方向駆動電極、
５は電極基板、６は絶縁膜、７は支持スペ−サ部、８は
駆動電極配線部、９はＹ軸走査用の梁、６０はＹ軸方向
静電吸引部、６１はＹ軸方向駆動電極である。 ミラ−
部１は、Ｘ軸走査用の梁３と一体で構成され、さらにＸ
軸走査用の梁３の他の端は、Ｙ軸方向静電吸引部６０と
一体で構成され、Ｙ軸方向静電吸引部６０は、Ｙ軸走査
用の梁９と一体で構成され、さらにＹ軸走査用の梁９の
他の端は、シリコン基板２と一体で構成されており、こ
れらすべてシリコンで形成されている。ミラ−部１の下
部にはＸ軸方向駆動電極４が、またＹ軸方向静電吸引部
６０の下部にはＹ軸方向駆動電極６１が配置されてお
り、これら駆動電極は、電極基板５に形成されている。
駆動電極配線部８は、ミラ−部１などに対して駆動電極
よりも距離を隔てて形成され、駆動電極配線部８による
静電力がミラ−部１に作用しないよう電極基板５の内部
配線により形成されている。In FIG. 1, 1 is a mirror portion, 2 is a silicon substrate, 3 is a beam for X-axis scanning, 4 is an X-axis direction driving electrode,
5 is an electrode substrate, 6 is an insulating film, 7 is a support spacer portion, 8 is a drive electrode wiring portion, 9 is a beam for Y-axis scanning, 60 is a Y-axis direction electrostatic suction portion, and 61 is a Y-axis direction drive. Electrodes. Mira
The unit 1 is formed integrally with a beam 3 for X-axis scanning.
The other end of the beam 3 for axial scanning is formed integrally with the electrostatic attraction unit 60 in the Y-axis direction. The electrostatic suction unit 60 in the Y-axis direction is formed integrally with the beam 9 for Y-axis scanning. The other end of the beam 9 for scanning the Y-axis is integrally formed with the silicon substrate 2, and is entirely formed of silicon. An X-axis direction drive electrode 4 is arranged below the mirror unit 1, and a Y-axis direction drive electrode 61 is arranged below the Y-axis direction electrostatic suction unit 60. These drive electrodes are arranged on the electrode substrate 5. Is formed.
The drive electrode wiring section 8 is formed at a distance from the mirror section 1 and the like, which is larger than the drive electrode, and the internal wiring of the electrode substrate 5 prevents the electrostatic force generated by the drive electrode wiring section 8 from acting on the mirror section 1. Is formed.
【００１３】電極基板５上のＸ軸方向駆動電極４とＹ軸
方向駆動電極６１と、ミラ−部１とＹ軸方向静電吸引部
６０との間には、駆動電極の絶縁用の絶縁膜６とミラ−
部１を支え、ミラ−部１と駆動電極間のギャップをきめ
る支持スペ−サ部７が形成されており、支持スペ−サ部
７は、電極基板５上に形成されており、シリコン基板２
は、支持スペ−サ部７と接着されている。An insulating film for insulating drive electrodes is provided between the X-axis drive electrode 4 and the Y-axis drive electrode 61 on the electrode substrate 5 and between the mirror unit 1 and the Y-axis electrostatic attraction unit 60. 6 and Mira
A support spacer section 7 for supporting the section 1 and defining a gap between the mirror section 1 and the drive electrode is formed. The support spacer section 7 is formed on the electrode substrate 5 and the silicon substrate 2
Are adhered to the support spacer portion 7.
【００１４】以上のように構成された２軸方向走査可能
な静電力駆動小型光スキャナについて、次にその動作に
ついて説明する。Next, the operation of the small-sized electrostatic-power-driven optical scanner capable of scanning in two axial directions configured as described above will be described.
【００１５】ミラ−部１は、Ｘ軸方向駆動電極４に電圧
を印加することにより、その静電力を受け、Ｘ軸走査用
の梁３と支持スペ−サ部７を支点として、光をＸ軸方向
に走査する動作をする。次にＹ軸方向駆動電極６１に電
圧を印加すると、Ｙ軸方向静電吸引部６０が、その静電
力を受けて、Ｙ軸走査用の梁９と支持スペ−サ部７を支
点として、光をＹ軸方向に走査する動作をする。ミラ−
部１はＹ軸方向静電吸引部６０と一体となり光をＹ軸方
向に走査する動作をする。以上の電圧印加を同時に行う
ことにより、ミラ−部１で反射光を２軸方向走査するこ
とができる。The mirror 1 receives the electrostatic force by applying a voltage to the driving electrode 4 in the X-axis direction, and transmits the light to the X-axis scanning beam 3 and the supporting spacer 7 as a fulcrum. An operation of scanning in the axial direction is performed. Next, when a voltage is applied to the Y-axis direction drive electrode 61, the Y-axis direction electrostatic attraction unit 60 receives the electrostatic force and causes the Y-axis scanning beam 9 and the support spacer unit 7 to serve as a fulcrum. Is operated in the Y-axis direction. Mira
The unit 1 operates integrally with the Y-axis direction electrostatic suction unit 60 to scan light in the Y-axis direction. By performing the above voltage application simultaneously, the mirror unit 1 can scan the reflected light in two axial directions.
【００１６】以上のように、本実施例によれば、シリコ
ン基板２上に形成したミラ−部１を、Ｘ軸，Ｙ軸方向の
駆動電極に電圧を印加することで、静電力により吸引さ
せ、レ−ザ光を２軸方向走査可能な静電力駆動小型光ス
キャナを提供することができる。As described above, according to this embodiment, the mirror portion 1 formed on the silicon substrate 2 is attracted by electrostatic force by applying a voltage to the drive electrodes in the X-axis and Y-axis directions. Thus, it is possible to provide an electrostatic force driven small optical scanner capable of scanning laser light in two axial directions.
【００１７】（実施例２）以下、本発明の第２の実施例
について図面を参照して説明する。図２は、本発明の第
２の実施例における小型の１軸方向走査可能な静電力駆
動光スキャナの（ａ）平面図と（ｂ）断面図である。(Embodiment 2) Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. FIG. 2A is a plan view and FIG. 2B is a sectional view of a small-sized electrostatic-power-driven optical scanner capable of scanning in one axial direction according to a second embodiment of the present invention.
【００１８】図２において、１はミラ−部、２はシリコ
ン基板、１０は第１の梁、１１は第１の静電吸引部、１
２は第２の梁、１３は第２の静電吸引部、１４はミラ−
部の梁、１５は支持スペ−サ部、１６は電極基板、１７
は絶縁膜、１８はミラ−駆動電極、１９は第２の静電吸
引部駆動電極、２０は第１の静電吸引部駆動電極であ
る。シリコン基板２上に、ミラ−部１と一体でミラ−部
の梁１４が形成され、ミラ−部の梁１４と一体で、前記
ミラ−部１を囲むように第２の静電吸引部１３と第２の
梁１２が形成され、さらに第２の梁１２と一体で前記の
第２の静電吸引部１３を囲むように第１の静電吸引部１
１と第１の梁１０が形成されている。In FIG. 2, 1 is a mirror portion, 2 is a silicon substrate, 10 is a first beam, 11 is a first electrostatic suction portion, 1
2 is a second beam, 13 is a second electrostatic suction unit, 14 is a mirror.
Part, 15 is a support spacer part, 16 is an electrode substrate, 17
Is an insulating film, 18 is a mirror drive electrode, 19 is a second electrostatic attraction unit drive electrode, and 20 is a first electrostatic attraction unit drive electrode. A mirror part beam 14 is formed on the silicon substrate 2 integrally with the mirror part 1, and a second electrostatic suction part 13 is formed integrally with the mirror part beam 14 so as to surround the mirror part 1. And the second beam 12 are formed, and the first electrostatic attraction unit 1 is integrally formed with the second beam 12 so as to surround the second electrostatic attraction unit 13.
1 and a first beam 10 are formed.
【００１９】図２の（ｂ）に示すように、ミラ−部１の
下部には、ミラ−駆動電極１８が配置され、同様に第２
の静電吸引部１３の下部には、第２の静電吸引部駆動電
極１９が、第１の静電吸引部１１の下部には、第１の静
電吸引部駆動電極２０が配置されている。これら駆動電
極は電極基板１６に形成されている。シリコン基板２と
電極基板１６との間には、駆動電極の絶縁用の絶縁膜１
７と、ミラ−部１を支え、ミラ−部１と駆動電極間のギ
ャップを決める支持スペ−サ部１５が形成されている。
電極基板１６の上に支持スペ−サ部１５が形成され、シ
リコン基板２は、支持スペ−サ部１５と接着されてい
る。As shown in FIG. 2B, a mirror drive electrode 18 is arranged below the mirror portion 1, and a mirror drive electrode 18 is similarly provided.
A second electrostatic attraction unit driving electrode 19 is arranged below the electrostatic attraction unit 13, and a first electrostatic attraction unit driving electrode 20 is arranged below the first electrostatic attraction unit 11. I have. These drive electrodes are formed on the electrode substrate 16. An insulating film 1 for insulating drive electrodes is provided between the silicon substrate 2 and the electrode substrate 16.
7 and a support spacer portion 15 which supports the mirror portion 1 and determines a gap between the mirror portion 1 and the drive electrode.
The support spacer 15 is formed on the electrode substrate 16, and the silicon substrate 2 is bonded to the support spacer 15.
【００２０】以上のように構成された１軸走査可能な静
電力駆動小型光スキャナについて、次に、その動作につ
いて、図３を用いて説明する。図３は、１軸走査可能な
静電力駆動小型光スキャナの動作を説明するための説明
図である。Next, the operation of the small-sized electrostatic-power-driven optical scanner capable of uniaxial scanning configured as described above will be described with reference to FIG. FIG. 3 is an explanatory diagram for explaining the operation of the electrostatically driven small optical scanner capable of uniaxial scanning.
【００２１】図３において、第１の静電吸引部駆動電極
２０に電圧を印加すると、第１の静電吸引部１１が吸引
され、第１の静電吸引部駆動電極２０に密着する。この
とき、第２の静電吸引部１３およびミラ−部１は、第１
の静電吸引部１１と同じだけ変位している。次に第２の
静電吸引部駆動電極１９に電圧を印加すると、第２の静
電吸引部１３が吸引され、第２の静電吸引部駆動電極１
９に密着する。このときミラ−部１は、第２の静電吸引
部１３と同じだけ変位している。さらにミラ−駆動電極
１８に電圧を印加すると、ミラ−部１が吸引されて、ミ
ラ−駆動電極１８に密着する。以上のように動作させる
ことにより、ミラ−部１だけを単体で変位させるよりも
低電圧で駆動することができる。また同電圧であれば、
各梁の部分ですこしづつねじれが生じることで、広い走
査角度を得ることができる。In FIG. 3, when a voltage is applied to the first electrostatic attraction unit driving electrode 20, the first electrostatic attraction unit 11 is attracted and adheres to the first electrostatic attraction unit driving electrode 20. At this time, the second electrostatic suction unit 13 and the mirror unit 1
Are displaced by the same amount as the electrostatic suction unit 11 of FIG. Next, when a voltage is applied to the second electrostatic attraction unit driving electrode 19, the second electrostatic attraction unit 13 is attracted and the second electrostatic attraction unit driving electrode 1 is applied.
Close contact with 9. At this time, the mirror unit 1 is displaced by the same amount as the second electrostatic suction unit 13. When a voltage is further applied to the mirror drive electrode 18, the mirror portion 1 is sucked and adheres to the mirror drive electrode 18. By operating as described above, it is possible to drive at a lower voltage than when only the mirror unit 1 is displaced alone. If the voltage is the same,
A wide scan angle can be obtained by slightly twisting each beam portion.
【００２２】図４は、本発明の第２の実施例における小
型の１軸方向走査可能な静電力駆動光スキャナの他のミ
ラ−部形状を示す平面図である。図４において、１はミ
ラ−部、２１は第１の静電吸引部、２２は第２の静電吸
引部、２３は第３の静電吸引部、２４は第４の静電吸引
部、２５は支持スペ−サ部である。FIG. 4 is a plan view showing another mirror portion shape of a small electrostatic driven optical scanner capable of scanning in one axial direction according to the second embodiment of the present invention. In FIG. 4, 1 is a mirror unit, 21 is a first electrostatic attraction unit, 22 is a second electrostatic attraction unit, 23 is a third electrostatic attraction unit, 24 is a fourth electrostatic attraction unit, 25 is a support spacer section.
【００２３】この形状においても、第１の静電吸引部か
ら第４の静電吸引部まで順次電圧を印加することによ
り、ミラ−部１は、低電圧駆動で、広い走査角度を得る
ことができる。また今回の例では、駆動電極は、静電吸
引部に対応して分割して構成したが、全体をまとめて一
つの電極としてもよい。ただし、分割することにより、
より複雑で、高度な駆動制御を行うことができる。Also in this configuration, by applying a voltage sequentially from the first electrostatic attraction unit to the fourth electrostatic attraction unit, the mirror unit 1 can obtain a wide scanning angle with low voltage driving. it can. Further, in this example, the drive electrodes are divided so as to correspond to the electrostatic suction unit, but may be collectively formed as one electrode. However, by dividing,
More complicated and advanced drive control can be performed.
【００２４】以上のように、本実施例によれば、シリコ
ン基板に形成したミラ−部１とその周囲に形成した複数
の静電吸引部を、前記ミラ−部１および複数の静電吸引
部に対応した駆動電極により、順次電圧を印加すること
により、従来のミラ−部１を単体で駆動するよりも、低
電圧駆動ができ、また広い走査角度を得ることができる
小型の１軸方向走査可能な静電力駆動光スキャナを提供
することができる。 （実施例３）以下、本発明の第３の実施例について図面
を参照しながら説明する。図５は、本発明の第３の実施
例における小型の１軸または２軸方向走査可能な光スキ
ャナの断面図である。図５において、１はミラ−部、２
はシリコン基板、４はＸ軸方向駆動電極、５は電極基
板、７は支持スペ−サ、８は駆動電極配線部、３０は真
空部、３１はガラス基板である。As described above, according to this embodiment, the mirror unit 1 formed on the silicon substrate and the plurality of electrostatic suction units formed around the mirror unit 1 are combined with the mirror unit 1 and the plurality of electrostatic suction units. By applying a voltage sequentially by the drive electrodes corresponding to the above, a smaller voltage can be driven and a wider scanning angle can be obtained than in the conventional mirror unit 1 alone by driving the mirror unit 1 alone. A possible electrostatic drive optical scanner can be provided. (Embodiment 3) Hereinafter, a third embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a sectional view of a small optical scanner capable of scanning in one or two axes in the third embodiment of the present invention. In FIG. 5, 1 is a mirror part, 2
Is a silicon substrate, 4 is an X-axis direction drive electrode, 5 is an electrode substrate, 7 is a support spacer, 8 is a drive electrode wiring section, 30 is a vacuum section, and 31 is a glass substrate.
【００２５】電極基板５にＸ方向駆動電極４とその駆動
電極配線部８が形成されており、さらにその上に支持ス
ペ−サ部７が成形され、前記支持スペ−サ部７とミラ−
部１を有するシリコン基板２が接着されており、さらに
シリコン基板２の支持スペ−サ部７と接着されている面
と反対側の面に、反射防止膜をつけたガラス基板３１が
接合されており、接合の方法としては、真空チャンバ内
において、ガラス基板３１とシリコン基板２の陽極接合
を行う。したがって、ミラ−部１の周囲の空間は真空部
３０となる。An X-direction drive electrode 4 and its drive electrode wiring portion 8 are formed on an electrode substrate 5, and a support spacer portion 7 is formed thereon, and the support spacer portion 7 and the mirror are formed.
A silicon substrate 2 having a portion 1 is bonded, and a glass substrate 31 provided with an antireflection film is bonded to a surface of the silicon substrate 2 opposite to a surface bonded to the support spacer portion 7. As a bonding method, anodic bonding of the glass substrate 31 and the silicon substrate 2 is performed in a vacuum chamber. Therefore, the space around the mirror part 1 becomes the vacuum part 30.
【００２６】前記の構造において、駆動電極に電圧を印
加し、ミラ−部１を動作させると、真空中のため、応答
性が向上する。またミラ−部１の酸化もなく鏡面が保た
れる。またミラ−部１の上面にガラス基板３１があるこ
とにより、ゴミなどに対しても強くなる。In the above structure, when a voltage is applied to the drive electrode to operate the mirror unit 1, the response is improved because of the vacuum. Further, the mirror surface is maintained without oxidation of the mirror portion 1. Further, the presence of the glass substrate 31 on the upper surface of the mirror portion 1 makes the mirror portion 1 more resistant to dust and the like.
【００２７】以上のように、本実施例によれば、ガラス
基板と電極基板にはさまれたミラ−部の存在する空間
が、真空であることにより、ミラ−部の動作の応答性が
向上し、またミラ−面の酸化やゴミによる汚れにも強い
小型の１軸または２軸方向走査可能な光スキャナを提供
することができる。As described above, according to this embodiment, the responsiveness of the operation of the mirror portion is improved because the space in which the mirror portion between the glass substrate and the electrode substrate exists is a vacuum. Also, it is possible to provide a small-sized optical scanner capable of scanning in one or two axes, which is resistant to oxidation of the mirror surface and contamination by dust.
【００２８】（実施例４）以下、本発明の第４の実施例
について図面を参照しながら説明する。図６は、本発明
の第４の実施例における小型の１軸方向走査可能な光ス
キャナを複数個、直線的に配列したところを示す平面図
である。(Embodiment 4) Hereinafter, a fourth embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a plan view showing a linear arrangement of a plurality of small optical scanners capable of scanning in one axial direction in the fourth embodiment of the present invention.
【００２９】図６において、１はミラ−部、３２は１軸
方向走査光スキャナ、３３は第１列のミラ−アレイ、３
４は第２列のミラ−アレイ、３７はＹ軸走査用の梁であ
る。図６のように、Ｙ軸走査用の梁３７で支持されたミ
ラ−部１を持つ１軸方向走査光スキャナ３２を、第１列
のミラ−アレイ３３のように配列し、さらに第２列のミ
ラ−アレイ３４を第１列のミラ−アレイ３３に対して、
ミラ−部１間ピッチの１／２だけずらして配列すること
により、より高密度にミラ−部１を配列したのと同等の
動作をさせることができる。このように配列したもの
は、プリンタ−などの書き込み用ヘッドとして、利用す
ることができる。In FIG. 6, 1 is a mirror section, 32 is a one-axis scanning light scanner, 33 is a first-row mirror array,
4 is a mirror array in the second row, and 37 is a beam for Y-axis scanning. As shown in FIG. 6, a one-axis direction scanning light scanner 32 having a mirror portion 1 supported by a beam 37 for Y-axis scanning is arranged like a mirror array 33 in a first row, and further a second row. Mirror array 34 with respect to mirror array 33 in the first row,
By arranging the mirror units 1 at half the pitch between the mirror units 1, the same operation as the arrangement of the mirror units 1 with higher density can be performed. Those arranged in this manner can be used as a writing head of a printer or the like.
【００３０】図７は、本発明の第４の実施例における小
型の２軸方向走査可能な光スキャナを複数個、平面的に
配列したところを示す平面図である。図７において、１
はミラ−部、３５は２軸方向走査光スキャナ、３６は面
状配列光スキャナである。中央のミラ−部１を有する２
軸方向走査光スキャナ３５を平面的に配置し、面状配列
光スキャナ３６を構成した。この面状配列光スキャナ３
６は、非常に薄いディスプレイとして、また将来の光コ
ンピュ−ティング用の光情報処理素子として使用するこ
とが考えられる。FIG. 7 is a plan view showing a planar arrangement of a plurality of small optical scanners capable of biaxial scanning in the fourth embodiment of the present invention. In FIG. 7, 1
Is a mirror section, 35 is a biaxial scanning optical scanner, and 36 is a planar array optical scanner. 2 with central mirror 1
An axial scanning light scanner 35 was arranged in a plane, and a planar array light scanner 36 was formed. This planar array optical scanner 3
6 is considered to be used as a very thin display and as an optical information processing element for future optical computing.
【００３１】以上のように、本実施例によれば、１軸ま
たは２軸方向走査可能な光スキャナを複数個、直線的ま
たは平面的に配列したことにより、単一の光スキャナで
はできない小型で新しい光スキャナデバイスを提供する
ことができる。As described above, according to the present embodiment, by arranging a plurality of optical scanners capable of scanning in one axis or two axes in a linear or planar manner, it is possible to reduce the size of a single optical scanner. A new optical scanner device can be provided.
【００３２】[0032]
【発明の効果】以上のように本発明は、ミラー部材、梁
部材や静電吸引部材が同一のシリコン基板から形成され
た一体構造を有することにより、量的生産性に優れた半
導体プロセス加工により製造することができ、かつミラ
ー部材、梁部材や静電吸引部材といった主要構成要素の
相対位置関係を、きわめて精度よく規定することができ
る。よって、きわめて量産適合性の高い高精度の１軸や
２軸の静電力駆動小型光スキャナを提供することができ
る。また、ミラー部材のみに静電力を印加するのではな
く、ミラー部材を取り囲むように独立に変位可能な静電
吸引部材を設けることにより、１軸のみならず２軸の走
査を可能としたり、１軸であってもより大きな走査範囲
を有する静電力駆動小型光スキャナを提供することがで
きる。そして、ミラー部材や梁部材を支持する支持部材
をピボット状にすることにより、よりスムーズな走査を
可能とする静電力駆動小型光スキャナを提供することが
できる。さらに、駆動電極の配線をミラー部材や静電吸
引部材よりも遠い側の基板中に配することにより、配線
自体が走査に影響を与えることのない静電力駆動小型光
スキャナを提供することができる。As described above, according to the present invention, the mirror member and the beam are provided.
The members and electrostatic suction members are formed from the same silicon substrate.
With an integrated structure, a semi-product with excellent quantitative productivity
Can be manufactured by conductor process processing, and
-Main components such as members, beams and electrostatic suction members
Relative positional relationship can be defined with extremely high accuracy
You. Therefore, high-precision single-axis
It is possible to provide a two-axis electrostatic drive small optical scanner.
You. Also, instead of applying electrostatic force only to the mirror member,
And can be independently displaced to surround the mirror member.
By providing a suction member, not only one axis but also two axes
Scanning, and a larger scanning range even with one axis
It is possible to provide an electrostatic drive small optical scanner with
Wear. And a support member for supporting the mirror member and the beam member
Pivoting makes scanning smoother
To provide a small optical scanner driven by electrostatic force
it can. In addition, the wiring of the drive electrode can be
By arranging in the board farther from the pulling member, wiring
Electrostatically driven miniature light that does not itself affect scanning
Ru it is possible to provide a scanner.
【００３３】また、これら光スキャナのミラー部を、真
空中で動作させることにより、高速応答が可能になる。
さらに、これらミラー部材を複数設け、直線的にまたは
平面的に配列することで、プリンタ−の書き込み用ヘッ
ドや光情報分野用デバイスとして、従来にない小型で全
く新しい光スキャナデバイスを提供することができる。 Further, the mirror portion of optical scanner, by operating in a vacuum, allowing high-speed response.
Further, by providing a plurality of these mirror members and arranging them in a linear or planar manner, it is possible to provide an unprecedented compact and completely new optical scanner device as a writing head of a printer or a device for the optical information field. it can.
【図１】（ａ）本発明の第１の実施例における小型の２
軸方向走査可能な静電力駆動光スキャナの平面図 （ｂ）同実施例における小型の２軸方向走査可能な静電
力駆動光スキャナの断面図FIG. 1 (a) shows a compact 2 in the first embodiment of the present invention.
Plan view of an electrostatically driven optical scanner capable of scanning in the axial direction (b) Cross-sectional view of a small electrostatically driven optical scanner capable of scanning in the two axial directions in the embodiment
【図２】（ａ）本発明の第２の実施例における小型の１
軸方向走査可能な静電力駆動光スキャナの平面図 （ｂ）同実施例における小型の１軸方向走査可能な静電
力駆動光スキャナの断面図FIG. 2 (a) shows a compact 1 according to a second embodiment of the present invention.
Plan view of an electrostatically driven optical scanner capable of scanning in the axial direction (b) Cross-sectional view of a small electrostatically driven optical scanner capable of scanning in one axial direction in the embodiment
【図３】同実施例における小型の１軸方向走査可能な静
電力駆動光スキャナの動作を説明するための説明図FIG. 3 is an explanatory diagram for explaining the operation of the small electrostatic-power driven optical scanner capable of scanning in one axial direction in the embodiment.
【図４】同実施例における小型の１軸方向走査可能な静
電力駆動光スキャナの他のミラ−形状を示す平面図FIG. 4 is a plan view showing another mirror shape of the small electrostatically driven optical scanner capable of scanning in one axial direction in the embodiment.
【図５】本発明の第３の実施例における小型の１軸また
は２軸方向走査可能な光スキャナの断面図FIG. 5 is a cross-sectional view of a small one-axis or two-axis scanable optical scanner according to a third embodiment of the present invention.
【図６】本発明の第４の実施例における小型の１軸方向
走査可能な光スキャナを複数個、直線的に配列したとこ
ろを示す平面図FIG. 6 is a plan view showing a linear arrangement of a plurality of small optical scanners capable of scanning in one axial direction according to a fourth embodiment of the present invention;
【図７】同実施例における小型の２軸方向走査可能な光
スキャナを複数個、平面的に配列したところを示す平面
図FIG. 7 is a plan view showing a planar arrangement of a plurality of small optical scanners capable of scanning in two axial directions in the embodiment.
【図８】従来のガルバノメ−タスキャナ式の２軸方向走
査光スキャナの概念斜視図FIG. 8 is a conceptual perspective view of a conventional two-axis scanning light scanner of a galvanometer scanner type.
【図９】従来のポリゴンミラ−とガルバノメ−タスキャ
ナによる２軸方向走査光スキャナの概念斜視図FIG. 9 is a conceptual perspective view of a conventional two-axis scanning light scanner using a polygon mirror and a galvanometer scanner.
【図１０】従来のホログラムスキャナとガルバノメ−タ
スキャナによる２軸方向走査光スキャナの概念斜視図FIG. 10 is a conceptual perspective view of a conventional two-axis scanning light scanner using a hologram scanner and a galvanometer scanner.
【図１１】従来の静電型シリコンねじり振動子の外観図FIG. 11 is an external view of a conventional electrostatic silicon torsional vibrator.
【図１２】従来の静電型シリコンねじり振動子の運動状
態を示した断面図FIG. 12 is a sectional view showing a motion state of a conventional electrostatic silicon torsional vibrator.
１ ミラ−部 ２ シリコン基板 ３ Ｘ軸走査用の梁 ４ Ｘ軸方向駆動電極 ５ 電極基板 ６ 絶縁膜 ７ 支持スペ−サ部 ８ 駆動電極配線部 ９ Ｙ軸走査用の梁 １０ 第１の梁 １１ 第１の静電吸引部 １２ 第２の梁 １３ 第２の静電吸引部 １４ ミラ−部の梁 １５ 支持スペ−サ部 １６ 電極基板 １７ 絶縁膜 １８ ミラ−駆動電極 １９ 第２の静電吸引部駆動電極 ２０ 第１の静電吸引部駆動電極 ２１ 第１の静電吸引部 ２２ 第２の静電吸引部 ２３ 第３の静電吸引部 ２４ 第４の静電吸引部 ２５ 支持スペ−サ部 ３０ 真空部 ３１ ガラス基板 ３２ １軸方向走査光スキャナ ３３ 第１列のミラ−アレイ ３４ 第２列のミラ−アレイ ３５ ２軸方向走査光スキャナ ３６ 面状配列光スキャナ ３７ Ｙ軸走査用の梁 ４１ 振動子 ４２ 可動板 ４３ スパンバウンド ４４ 枠 ４５ ガラス基板 ４６ スペ−サ ５１ レ−ザ光源 ５２ Ｘ軸方向ミラ− ５３ Ｙ軸方向ミラ− ５４ ポリゴンミラ− ５５ ディスク型ホログラムスキャナ ６０ Ｙ軸方向静電吸引部 ６１ Ｙ軸方向駆動電極 DESCRIPTION OF SYMBOLS 1 Mirror part 2 Silicon substrate 3 X-axis scanning beam 4 X-axis direction drive electrode 5 Electrode substrate 6 Insulating film 7 Support spacer part 8 Drive electrode wiring part 9 Y-axis scanning beam 10 First beam 11 1st electrostatic attraction section 12 2nd beam 13 2nd electrostatic attraction section 14 Beam of mirror section 15 Support spacer section 16 Electrode substrate 17 Insulating film 18 Mirror drive electrode 19 Second electrostatic attraction Unit drive electrode 20 first electrostatic attraction unit drive electrode 21 first electrostatic attraction unit 22 second electrostatic attraction unit 23 third electrostatic attraction unit 24 fourth electrostatic attraction unit 25 support spacer Unit 30 Vacuum unit 31 Glass substrate 32 One-axis scanning light scanner 33 First-row mirror array 34 Second-row mirror array 35 Two-axis scanning light scanner 36 Planar array light scanner 37 Beam for Y-axis scanning 41 Vibrator 42 Movable plate 43 Span bound 4 frame 45 glass substrate 46 space - Sa 51 Le - The light source 52 X-axis direction mirror - 53 Y-axis direction mirror - 54 Polygon mirror - 55 disk hologram scanner 60 Y-axis direction electrostatic attraction portion 61 Y-axis direction driving electrodes
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平４−211217（ＪＰ，Ａ) 特開 平４−211218（ＪＰ，Ａ) 特開 平３−174112（ＪＰ，Ａ) ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-211217 (JP, A) JP-A-4-211218 (JP, A) JP-A-3-174112 (JP, A)
Claims (4)
直交するＹ軸の方向に走査可能なミラー部材と、前記ミ
ラー部材を前記ミラー部材の略中心部でピボット状に支
持する第１のピボット状支持部材と、前記ミラ−部材の
略中心部を通る前記Ｙ軸の方向に前記ミラー部材の一対
の端部から延在して、前記ミラー部材を支持するＸ軸走
査用梁部材と、前記Ｘ軸走査用梁部材の前記ミラー部材
と反対側の端部が連絡し、前記ミラー部材を取り囲むよ
うに形成された静電吸引部材と、前記静電吸引部材の一
対の端部に連絡し前記ミラ−部材の中心部を通り前記Ｘ
軸の方向に前記ミラー部材の一対の端部から延在して、
前記ミラー部材を支持するＹ軸走査用梁部材と、前記Ｙ
軸走査用梁部材をピボット状に支持する第２のピボット
状支持部材と、前記Ｙ軸走査用梁部材の前記静電吸引部
材と反対側の端部が連絡した第１の基板部材と、前記ミ
ラー部材と対向して設けられ、前記ミラー部材を駆動す
る静電力を印加可能なＸ軸方向駆動電極と、前記静電吸
引部材に対向して設けられ、前記静電吸引部材を駆動す
る静電力を印加可能なＹ軸方向駆動電極と、前記ミラー
部材とＸ軸方向駆動電極とを絶縁し、前記静電吸引部材
とＹ軸方向駆動電極とを絶縁する絶縁部材と、前記Ｘ軸
方向駆動電極、Ｙ軸方向駆動電極および前記絶縁部材が
設けられた第２の基板部材と、前記Ｘ軸方向駆動電極お
よびＹ軸方向駆動電極に連絡され前記第２の基板部材内
に配された配線部材とを有し、前記ミラー部材、前記Ｘ
軸走査用梁部材、前記静電吸引部材、前記Ｙ軸走査用梁
部材および前記第１の基板部材は同一のシリコン部材か
ら一体物として形成され、前記ミラー部材と前記静電吸
引部材とは独立に変位可能で２軸方向走査可能な静電力
駆動小型光スキャナ。1. An apparatus for reflecting incident light on an X axis and the X axis.
A mirror member capable of scanning in the direction of the orthogonal Y axis;
The mirror member is pivotally supported at a substantially central portion of the mirror member.
A first pivot-shaped support member for holding the mirror member;
A pair of the mirror members in the direction of the Y axis passing through a substantially central portion.
X-axis extending from the end of the mirror to support the mirror member
Inspection beam member and the mirror member of the X-axis scanning beam member
And the other end communicates to surround the mirror member.
An electrostatic attraction member formed as described above and one of the electrostatic attraction members.
The end of the mirror member and the X
Extending from the pair of ends of the mirror member in the direction of the axis,
A Y-axis scanning beam member for supporting the mirror member;
Second pivot for pivotally supporting an axis scanning beam member
Support member and the electrostatic attraction unit of the Y-axis scanning beam member
A first substrate member connected at the end opposite to the material,
A mirror member for driving the mirror member.
An X-axis direction driving electrode capable of applying an electrostatic force,
A pull member is provided to drive the electrostatic suction member.
A Y-axis direction drive electrode capable of applying an electrostatic force, and the mirror
The member and the X-axis direction drive electrode are insulated from each other,
An insulating member for insulating the electrode and the Y-axis direction drive electrode;
Direction drive electrode, Y-axis direction drive electrode and the insulating member
The provided second substrate member, the X-axis direction drive electrode and
And the second substrate member connected to the Y-axis direction drive electrode.
The mirror member, the X
Axis scanning beam member, the electrostatic suction member, the Y-axis scanning beam
The member and the first substrate member are the same silicon member
The mirror member and the electrostatic absorption
An electrostatically driven small optical scanner capable of being displaced independently of the pulling member and capable of scanning in two axial directions.
可能なミラー部材と、前記ミラー部材を前記ミラー部材
の略中心部でピボット状に支持するピボット状支持部材
と、前記ミラ−部材の略中心部を通り前記第１の軸と直
交する第２の軸の方向に前記ミラー部材の一対の端部か
ら延在して、前記ミラー部材を支持する走査用梁部材
と、前記走査用梁部材をピボット状に支持する第２のピ
ボット状支持部材と、前記走査用梁部材の前記ミラー部
材と反対側の端部が連絡した第１の基板部材と、前記走
査用梁部材に連絡され、前記ミラー部材を取り囲むよう
に形 成された静電吸引部材と、前記ミラー部材と対向し
て設けられ、前記ミラー部材を駆動する静電力を印加可
能なミラー部材用駆動電極と、前記静電吸引部材に対向
して設けられ、前記静電吸引部材を駆動する静電力を印
加可能な静電吸引部材用駆動電極と、前記ミラー部材と
ミラー部材用駆動電極とを絶縁し、前記静電吸引部材と
静電吸引部材用駆動電極とを絶縁する絶縁部材と、前記
ミラー部材用駆動電極および静電吸引部材用駆動電極並
びに前記絶縁部材が設けられた第２の基板部材とを有
し、前記ミラー部材、前記走査用梁部材、前記静電吸引
部材および前記第１の基板部材は、同一のシリコン部材
から一体物として形成され、前記ミラー部材と前記静電
吸引部材とは独立に変位可能で１軸方向走査可能な静電
力駆動小型光スキャナ。2. Reflecting incident light and scanning in a direction of a first axis.
A possible mirror member and the mirror member
Pivot-like support member that pivotally supports at the approximate center
And passing through a substantially central portion of the mirror member and directly in contact with the first axis.
A pair of ends of the mirror member in the direction of the second axis
A scanning beam member extending from and supporting the mirror member
A second pivot for pivotally supporting the scanning beam member.
A bot-shaped support member and the mirror portion of the scanning beam member
A first substrate member connected at an end opposite to the material,
The inspection beam member is communicated so as to surround the mirror member.
An electrostatic attraction member made form, the opposite to the mirror member
And an electrostatic force for driving the mirror member can be applied.
Opposing the mirror member drive electrode and the electrostatic attraction member
And an electrostatic force for driving the electrostatic suction member.
A drive electrode for the electrostatic attraction member that can be added,
The drive electrode for the mirror member is insulated from the electrostatic attraction member.
An insulating member that insulates the drive electrode for the electrostatic suction member,
Same as the drive electrode for the mirror member and the drive electrode for the electrostatic suction member
And a second substrate member provided with the insulating member.
And the mirror member, the scanning beam member, and the electrostatic suction
The member and the first substrate member are the same silicon member
From the mirror member and the electrostatic member.
An electrostatic driven small optical scanner that can be displaced independently of the suction member and scans in one axis.
有するガラス基板が設けられ、前記ガラス基板で封止さ
れる前記ミラー部の周辺の空間が真空である請求項１ま
たは２記載の静電力小型駆動小型光スキャナ。3. An anti-reflection film on the first substrate member.
A glass substrate is provided and sealed with the glass substrate.
2. A space around the mirror portion is vacuum.
Or a compact optical scanner driven by electrostatic force according to item 2 .
ラー部材は、同一平面上で、直線的、または平面的に配
列されている請求項１から３のいずれかに記載の静電力
駆動小型光スキャナ。4. A mirror member is provided in plural, and said mirror member is provided.
Color members may be arranged on the same plane, linearly or
4. The miniaturized optical scanner driven by electrostatic force according to claim 1, which is arranged in a line .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4334064A JP2579111B2 (en) | 1992-12-15 | 1992-12-15 | Compact optical scanner driven by electrostatic force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4334064A JP2579111B2 (en) | 1992-12-15 | 1992-12-15 | Compact optical scanner driven by electrostatic force |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06180428A JPH06180428A (en) | 1994-06-28 |
| JP2579111B2 true JP2579111B2 (en) | 1997-02-05 |
Family
ID=18273107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4334064A Expired - Fee Related JP2579111B2 (en) | 1992-12-15 | 1992-12-15 | Compact optical scanner driven by electrostatic force |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2579111B2 (en) |
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|---|---|---|---|---|
| US8553306B2 (en) | 2007-03-15 | 2013-10-08 | Ricoh Company, Ltd. | Optical deflector and optical device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06180428A (en) | 1994-06-28 |
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