CN2655477Y - Laser diode pumping picosecond active mode-locking solid plane waveguide laser - Google Patents
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Abstract
一种激光二极管泵浦皮秒主动锁模固体平面波导激光器，其特征在于该激光器包括由全反射镜和输出耦合镜构成的谐振腔，在该谐振腔内置有平面波导工作介质、激光二极管泵浦源、光纤透镜、柱面镜和调制器，所说的平面波导工作介质是一块Nd：YAG晶体，上、下两面各被不掺杂Nd离子的YAG包边，两端面切成布儒斯特角，所述的激光二极管泵浦源的组成为：多个激光二极管组成的列阵、带有多条窄缝的反射镜和一全反射镜构成一矩形反射泵浦室，在窄缝的反射镜和全反射镜之间平行设置该波导工作介质。
A laser diode pumped picosecond active mode-locked solid planar waveguide laser, characterized in that the laser comprises a resonant cavity composed of a total reflection mirror and an output coupling mirror, a planar waveguide working medium, a laser diode pump source, an optical fiber lens, a cylindrical mirror and a modulator are built into the resonant cavity, the planar waveguide working medium is a piece of Nd:YAG crystal, the upper and lower surfaces are respectively edged by YAG not doped with Nd ions, and the two end surfaces are cut into Brewster angles, the laser diode pump source is composed of: an array composed of multiple laser diodes, a reflector with multiple narrow slits and a total reflection mirror to form a rectangular reflection pump chamber, and the waveguide working medium is arranged in parallel between the reflector of the narrow slit and the total reflection mirror.
Description
技术领域：Technical field:
本实用新型涉及固体平面波导激光器，特别是一种激光二极管泵浦皮秒主动锁模固体平面波导激光器。The utility model relates to a solid plane waveguide laser, in particular to a laser diode pumped picosecond active mode-locked solid plane waveguide laser.
背景技术：Background technique:
自从1965年实现激光锁模以来，几年间，锁模光脉冲宽度从皮秒量级，达到亚皮秒量级(10-13s)。到了80年代有了重大突破，1981年，美国贝尔实验室的R.L.Fork等人提出碰撞锁模理论，并在六镜环形腔中实现了碰撞锁模，得到稳定的90fs的光脉冲序列。采用光脉冲压缩技术后，获得了6fs的光脉冲。90年代自锁模技术的出现，在掺钛蓝宝石自锁模激光器中得到了8.5fs的超短光脉冲序列。Since the realization of laser mode-locking in 1965, the pulse width of mode-locked light has increased from picosecond level to sub-picosecond level (10 -13 s) in a few years. There was a major breakthrough in the 1980s. In 1981, RL Fork and others from Bell Laboratories in the United States proposed the theory of collision mode locking, and realized collision mode locking in a six-mirror annular cavity, and obtained a stable 90fs optical pulse sequence. After using the optical pulse compression technology, a 6fs optical pulse is obtained. With the emergence of self-mode-locking technology in the 1990s, an ultra-short optical pulse sequence of 8.5 fs was obtained in a titanium-sapphire self-mode-locked laser.
事实上，超短脉冲技术的发展经历了主动锁模、被动锁模、同步泵浦锁模、碰撞锁模(CPM)，以及90年代出现的加成脉冲锁模(APM)或耦合腔锁模(CCM)、自锁模等阶段。In fact, the development of ultrashort pulse technology has experienced active mode locking, passive mode locking, synchronous pump mode locking, collision mode locking (CPM), and additive pulse mode locking (APM) or coupled cavity mode locking that appeared in the 1990s. (CCM), self-locking and other stages.
超短(脉宽为皮秒和飞秒量级)、超强(功率为太瓦和拍瓦量级)激光脉冲，经光学系统聚焦后，焦点上功率密度高达1018～1021W·cm-2，从而打开了一个崭新的学科领域——强场物理的大门。利用超短、超强激光，可以在实验室中创造出超高功率密度、超强电场、超强磁场、超高密度辐射场、超高光压、超高电子加速度和超高温度等极端物理条件，开展相对论等离子体非线性光学、电子加速器、高次谐波、实验天体物理学、非线性量子电动力学以及ICF快点火等前沿科学的理论和实验研究工作。Ultrashort (pulse width on the order of picoseconds and femtoseconds), ultra-intensive (power on the order of terawatts and petawatts) laser pulses, after being focused by the optical system, the power density at the focus is as high as 10 18 to 10 21 W·cm -2 , thus opening the door to a brand-new subject field—strong field physics. Using ultra-short and ultra-intense lasers, extreme physical conditions such as ultra-high power density, ultra-strong electric field, ultra-strong magnetic field, ultra-high-density radiation field, ultra-high light pressure, ultra-high electron acceleration and ultra-high temperature can be created in the laboratory , to carry out theoretical and experimental research on cutting-edge science such as relativistic plasma nonlinear optics, electron accelerators, high-order harmonics, experimental astrophysics, nonlinear quantum electrodynamics, and ICF fast ignition.
为了使这些激光器台式化，近几年来，大力发展激光二极管泵浦固体激光器。二极管泵浦固体激光器的工作可追溯到20世纪60年代初。1964年，Keys等人在4K温度下，用GaAs二极管激光泵浦U3+:CaF2，得到了2.613μm的激光输出。1972年，Danielmeyer等人完成了室温下用二极管激光泵浦Nd:YAG的试验。In order to make these lasers desktop, in recent years, vigorously develop laser diode-pumped solid-state lasers. Work on diode-pumped solid-state lasers dates back to the early 1960s. In 1964, Keys et al pumped U 3+ :CaF 2 with a GaAs diode laser at a temperature of 4K, and obtained a laser output of 2.613 μm. In 1972, Danielmeyer et al. completed the experiment of pumping Nd:YAG with a diode laser at room temperature.
到了20世纪80年代，随着二极管激光输出功率的不断提高，激光二极管泵浦固体激光的研究工作已取得了长足的进展。激光二极管泵浦固体激光器的发展，强烈地刺激了大功率激光二极管(LD)的发展，1986年输出功率只有100mW，1988年实验室水平就提高到了8W，商品达到5W，1989年达到10W，到1993年已达到30W连续波阵列，美国光谱二极管公司研制出连续功率为120W的LD列阵。还报导已研制出准连续运转的LD阵列，其功率达到1500W，功率密度为3kW/cm2的水平。器件的结构形式已从单条LD发展成一维LD阵列、二维LD阵列、二维堆叠阵列。LD的结构由较简单的增益波导结构发展为折射率波导结构，量子阱结构等，而辐射波长已从770～990nm(GaAlAs)向红外900～1000nm(InGaAs)和可见光630～680nm(AlGaInP)扩展。By the 1980s, with the continuous improvement of the output power of diode lasers, the research work of laser diode-pumped solid-state lasers has made great progress. The development of laser diode-pumped solid-state lasers has strongly stimulated the development of high-power laser diodes (LD). In 1986, the output power was only 100mW. In 1988, the laboratory level was raised to 8W, and the product reached 5W. In 1993, it reached 30W continuous wave array, and American Spectrum Diode Company developed an LD array with a continuous power of 120W. It is also reported that a quasi-continuous operation LD array has been developed, its power reaches 1500W, and its power density is at the level of 3kW/cm 2 . The structural form of the device has developed from a single LD to a one-dimensional LD array, a two-dimensional LD array, and a two-dimensional stacked array. The structure of LD has developed from a relatively simple gain waveguide structure to a refractive index waveguide structure, a quantum well structure, etc., and the radiation wavelength has expanded from 770-990nm (GaAlAs) to infrared 900-1000nm (InGaAs) and visible light 630-680nm (AlGaInP) .
二极管泵浦固体激光器，特别是平面波导激光器综合了二极管激光器重量轻、体积小和固体激光器高储能等优点，使得在一个结构紧凑、性能稳定、全固体化的器件上实现高功率、高光束质量、高效率、高稳定性和长寿命工作成为可能，是固体激光器一个有生命力的发展方向。Diode-pumped solid-state lasers, especially planar waveguide lasers, combine the advantages of light weight and small volume of diode lasers and high energy storage of solid-state lasers, enabling high-power, high-beam lasers to be realized on a compact, stable, and fully solid-state device. The possibility of quality, high efficiency, high stability and long life is a viable development direction of solid-state lasers.
2002年，J.R.Lee等人采用面泵浦技术，用10个激光二极管棒泵浦(长为60mm，宽为11mm，厚为200μm，包边厚400μm)Nd:YAG激光器获得150W输出，光—光转换效率达35％，采用正支共焦非稳腔，光束亮度增加26倍，功率仅降低12％。In 2002, J.R.Lee and others used surface pumping technology to pump 10 laser diode rods (60mm in length, 11mm in width, 200μm in thickness, and 400μm in wrapping thickness) Nd:YAG lasers to obtain 150W output, light-light The conversion efficiency is up to 35%, and the positive branch confocal unstable cavity is used, the beam brightness is increased by 26 times, and the power is only reduced by 12%.
很遗憾的是，这种固体平面波导激光器，迄今以准连续方式工作，在一定程度上阻止了它的应用和发展。当然，波导激光器由于波导厚度较薄，通常最大厚度为200μm，因此在腔内衍射损耗很大，波导面距后腔镜约为1mm左右，在这1mm范围内，几乎不能插入任何光学元件，这给波导激光器向短脉冲方向发展设置了障碍。It is a pity that this solid planar waveguide laser works in a quasi-continuous mode so far, which prevents its application and development to a certain extent. Of course, due to the thin waveguide thickness of the waveguide laser, usually the maximum thickness is 200 μm, the diffraction loss in the cavity is very large, and the distance between the waveguide surface and the rear cavity mirror is about 1mm. Within this 1mm range, almost no optical components can be inserted. It sets obstacles to the development of waveguide lasers in the direction of short pulses.
发明内容：Invention content:
本实用新型要解决的技术问题是针对上述现有技术的不足，提供一种激光二极管泵浦皮秒主动锁模固体平面波导激光器，The technical problem to be solved by the utility model is to provide a laser diode pumped picosecond active mode-locked solid planar waveguide laser for the above-mentioned deficiencies in the prior art.
本实用新型的技术构思是：在波导激光器谐振腔内插入一柱面扩束镜系统，将波导激光器的输出光束在厚度方向上扩大10倍，从而减低衍射损耗，然后再进行主动锁模。The technical idea of the utility model is: insert a cylindrical beam expander mirror system in the resonant cavity of the waveguide laser, expand the output beam of the waveguide laser by 10 times in the thickness direction, thereby reducing the diffraction loss, and then carry out active mode locking.
所谓主动锁模采用的是周期性调制谐振腔参量的方法，即在腔内插入一个受外部信号控制的调制器，用一定的调制频率，周期性地改变谐振腔内振荡模的振幅或相位。当选择的调制频率与纵模间隔相等时，对各个模的调制会产生边频，其频率与两个相邻纵模的频率一致。由于模之间的相互作用，使所有的模在足够的调制下达到同步，形成锁模序列脉冲。The so-called active mode locking adopts the method of periodically modulating the parameters of the resonant cavity, that is, inserting a modulator controlled by an external signal in the cavity, and using a certain modulation frequency to periodically change the amplitude or phase of the oscillation mode in the resonant cavity. When the selected modulation frequency is equal to the spacing of the longitudinal modes, the modulation of each mode will produce side frequencies whose frequency is consistent with the frequency of two adjacent longitudinal modes. Due to the interaction between the modes, all the modes are synchronized under sufficient modulation to form a mode-locked sequence of pulses.
本实用新型的技术解决方案是：The technical solution of the utility model is:
一种激光二极管泵浦皮秒主动锁模固体平面波导激光器，其特征在于该激光器包括由全反射镜和输出耦合镜构成的谐振腔，在该谐振腔内置有平面波导工作介质、激光二极管泵浦源、光纤透镜、柱面镜和调制器，所说的平面波导工作介质是一块Nd:YAG晶体，上、下两面各被不掺杂Nd离子的YAG包边，两端面切成布儒斯特角，所述的激光二极管泵浦源的组成为：多个激光二极管组成的列阵、带有多条窄缝的反射镜和一全反射镜构成矩形反射泵浦室，在窄缝的反射镜和全反射镜之间平行设置该平面波导工作介质。A laser diode pumped picosecond active mode-locked solid planar waveguide laser is characterized in that the laser includes a resonant cavity composed of a total reflection mirror and an output coupling mirror, and a planar waveguide working medium, a laser diode pumped Source, fiber optic lens, cylindrical mirror and modulator. The working medium of the planar waveguide is a piece of Nd:YAG crystal. Angle, the composition of described laser diode pumping source is: the array that a plurality of laser diodes forms, the reflection mirror with a plurality of narrow slits and a total reflection mirror form the rectangular reflection pump chamber, and the reflection mirror of narrow slit The planar waveguide working medium is arranged in parallel with the total reflection mirror.
所述的光纤透镜和柱面镜组成柱面扩束系统，并在其表面镀增透膜，倾斜放置在谐振腔内。The fiber optic lens and the cylindrical mirror form a cylindrical beam expander system, and an anti-reflection film is coated on the surface thereof, and placed obliquely in the resonant cavity.
所说的调制器，是一台电光调制器，倾斜放置在谐振腔内，尽量靠近在反射镜处放置。The said modulator is an electro-optic modulator, which is placed obliquely in the resonant cavity and placed as close as possible to the reflector.
所述的反射镜是一块全反射镜，它呈劈形，包含两个面，所说的反射镜是一块输出耦合镜，它呈劈形，包含两个面，只有反射镜的内腔镜面和输出耦合镜的后腔镜面构成振荡器。The reflector is a total reflection mirror, which is split-shaped and includes two faces. The reflector is an output coupling mirror, which is split-shaped and includes two faces. Only the inner cavity mirror surface of the reflector and The cavity-back mirror of the output coupler constitutes the oscillator.
本实用新型的技术效果是：迄今还没有看到过一篇介绍关于主动锁模的激光二极管泵浦固体平面波导激光器的文章。本实用新型考虑到固体波导激光器，由于工作介质厚度很薄，最大尺寸仅为200μm，衍射损耗非常大，在腔内很难插入光学元件，故在腔内加了一个柱面扩束系统，相当于将波导厚度扩大到2mm，然后再进行主动锁模。The technical effect of the utility model is that there has not been an article introducing an active mode-locked laser diode pumped solid planar waveguide laser so far. The utility model considers that the thickness of the solid waveguide laser is very thin, the maximum size is only 200 μm, the diffraction loss is very large, and it is difficult to insert optical elements in the cavity, so a cylindrical beam expander system is added in the cavity, which is quite In order to expand the thickness of the waveguide to 2mm, and then carry out active mode locking.
附图说明：Description of drawings:
图1为在先技术泵浦源装置图Figure 1 is a diagram of the pump source device in the prior art
其中：A-激光泵浦室视图 B-从激光二极管棒发射的泵浦光路程图。Among them: A - View of laser pumping chamber B - Diagram of pump light path emitted from laser diode bar.
图2为本实用新型激光二极管泵浦皮秒主动锁模固体平面波导激光器示意图。Fig. 2 is a schematic diagram of the laser diode pumped picosecond active mode-locked solid planar waveguide laser of the present invention.
具体实施方式：Detailed ways:
本实用新型的激光二极管泵浦皮秒主动锁模固体平面波导激光器实施例示意图如图2所示，它由7部分组成：平面波导工作介质1，激光二极管泵浦源2，光纤透镜3，柱面镜4，调制器5，全反射镜6，输出耦合镜7。The schematic diagram of an embodiment of the laser diode pumped picosecond active mode-locked solid planar waveguide laser of the present invention is shown in Figure 2. It consists of seven parts: planar waveguide working medium 1, laser diode pumping source 2, fiber optic lens 3, column Mirror 4, modulator 5, total reflection mirror 6, output coupling mirror 7.
所说的平面波导工作介质1是一块Nd:YAG晶体，其厚度为200μm，宽为11mm，长为60mm，上、下两面各被不掺杂Nd离子的YAG包边，两端面切成布儒斯特角。The working medium 1 of the planar waveguide is a piece of Nd:YAG crystal with a thickness of 200 μm, a width of 11 mm, and a length of 60 mm. ster point.
所说的泵浦源2是由10根激光二极管组成的列阵，并带有泵浦室，用来泵浦波导工作介质1(参见在先技术：A.Faulstich，H.J.Baker，and D.R.Hall，optics Letters，1996，21(8)，594)，如图1所示，(a)激光泵浦室视图(b)从激光二极管棒发射的泵浦光路程图。Said pumping source 2 is an array composed of 10 laser diodes, and has a pumping chamber, which is used to pump the waveguide working medium 1 (see prior art: A.Faulstich, H.J.Baker, and D.R.Hall, Optics Letters, 1996, 21(8), 594), as shown in Figure 1, (a) the view of the laser pumping chamber (b) the path diagram of the pumping light emitted from the laser diode bar.
由于平面波导通常是很薄的，一般为200-400μm，因此泵浦功率的单程吸收非常低，为了解决这一问题，他们设计了一矩形反射泵浦室：所述的激光二极管泵浦源2的组成为：多个激光二极管组成的列阵21、带有多条窄缝的反射镜22和一全反射镜23构成一矩形反射泵浦室，在窄缝的反射镜22和全反射镜23之间平行设置该波导工作介质1。Since the planar waveguide is usually very thin, generally 200-400 μm, the single-pass absorption of the pump power is very low. In order to solve this problem, they designed a rectangular reflective pump chamber: the laser diode pump source 2 The composition is: the array 21 that a plurality of laser diodes forms, the reflection mirror 22 with a plurality of narrow slits and a total reflection mirror 23 form a rectangular reflection pump chamber, the reflection mirror 22 and total reflection mirror 23 in the narrow slit The waveguide working medium 1 is arranged in parallel between them.
从激光二极管列阵21辐射的泵浦光通过一个紧靠它的带有多条窄缝的窄缝反射镜22，入射到待泵浦的波导工作介质1中去，透过工作介质1的泵浦光被另一全反射镜23反射后，再一次进入工作介质1中，再被带有窄缝的反射镜22反射，第三次进入工作介质1，经多次入射反射，可以获得均匀的泵浦。The pumping light radiated from the laser diode array 21 is incident on the waveguide working medium 1 to be pumped through a narrow slit mirror 22 with multiple slits close to it, and passes through the pumping light of the working medium 1. After being reflected by another total reflection mirror 23, the Pu light enters the working medium 1 again, is reflected by the reflector 22 with a narrow slit, and enters the working medium 1 for the third time. After multiple incident reflections, a uniform pump.
所说的柱面扩束系统是由光纤透镜3和柱面镜4组成(参见在先技术：D.P.Shepherd，C.L.Bonner，C.T.A.Brown等，optics Communications 1999，160，47)，并在其表面镀增透膜，倾斜放置在谐振腔内。Said cylindrical beam expander system is made up of fiber optic lens 3 and cylindrical lens 4 (referring to prior art: D.P.Shepherd, C.L.Bonner, C.T.A.Brown etc., optics Communications 1999,160,47), and on its surface The transparent membrane is placed obliquely in the resonant cavity.
所说的调制器5，是一台电光调制器，倾斜放置在谐振腔内，尽量靠近反射镜6处放置。The modulator 5 is an electro-optic modulator, which is placed obliquely in the resonant cavity and placed as close to the reflector 6 as possible.
所说的反射镜6是一块全反射镜，它呈劈形，包含61，62两个面。Said reflection mirror 6 is a total reflection mirror, and it is split shape, comprises 61,62 two surfaces.
所说的反射镜7是一输出耦合镜，它呈劈形，包含71，72两个面，只有反射镜6的内腔镜面61和输出耦合镜7的后腔镜面71构成振荡器。Said reflector 7 is an output coupling mirror, which is split-shaped and includes two surfaces 71 and 72. Only the inner cavity mirror surface 61 of the reflector 6 and the rear cavity mirror surface 71 of the output coupling mirror 7 constitute an oscillator.
平面波导激光器的工作介质1被激光二极管泵浦源2激励以后，产生粒子数反转，产生受激辐射，这个辐射被柱面扩束系统光纤透镜3和柱面镜4放大，进入到电光调制器5，振荡模的振幅经调制以后，被全反射镜61反射，重复上述过程，经输出耦合镜71以后，获得一序列等间距脉冲。After the working medium 1 of the planar waveguide laser is excited by the laser diode pump source 2, the number of particles is reversed and stimulated radiation is generated. This radiation is amplified by the fiber lens 3 and the cylindrical mirror 4 of the cylindrical beam expander system and enters the electro-optic modulation. 5. After the amplitude of the oscillation mode is modulated, it is reflected by the total reflection mirror 61. The above process is repeated. After passing through the output coupling mirror 71, a sequence of equally spaced pulses is obtained.
这一序列脉冲，用一开关选择进入到下一级放大器中去进行功率放大，可获得皮秒量级脉冲，工作稳定可靠。它在国防工业、高速摄影方面有着广泛的用途。This sequence of pulses is selected by a switch to enter the next-stage amplifier for power amplification, and picosecond-level pulses can be obtained, and the work is stable and reliable. It has a wide range of applications in the defense industry, high-speed photography.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112009000018T5 (en) | 2009-05-04 | 2011-05-05 | Beijing Gk Laser Technology Co., Ltd. | Passive mode-locked picosecond laser device |
| CN117374723A (en) * | 2023-11-27 | 2024-01-09 | 重庆师范大学 | Pulse modulation system of external cavity semiconductor self-mode-locked laser based on double pumping |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112009000018T5 (en) | 2009-05-04 | 2011-05-05 | Beijing Gk Laser Technology Co., Ltd. | Passive mode-locked picosecond laser device |
| CN117374723A (en) * | 2023-11-27 | 2024-01-09 | 重庆师范大学 | Pulse modulation system of external cavity semiconductor self-mode-locked laser based on double pumping |
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