CN207753292U - Two-frequency laser - Google Patents

Two-frequency laser Download PDF

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CN207753292U
CN207753292U CN201721871702.2U CN201721871702U CN207753292U CN 207753292 U CN207753292 U CN 207753292U CN 201721871702 U CN201721871702 U CN 201721871702U CN 207753292 U CN207753292 U CN 207753292U
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laser
frequency
light
dual
coupling system
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郑小平
白胜闯
邓晓娇
叶振强
苏云鹏
李志杰
李佳
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Tsinghua University
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Abstract

本实用新型提供一种双频激光器,包括泵浦源、聚焦耦合系统、谐振腔、工作介质、倍频装置、第一分光装置和光参量振荡器。泵浦源用于产生泵浦光。泵浦源产生的泵浦光输入聚焦耦合系统进行准直聚焦后输入谐振腔。工作介质设置于谐振腔内。输入谐振腔的激光泵浦工作介质后经谐振腔振荡放大后输出。谐振腔输出的激光输入倍频装置。第一分光装置用于使倍频装置射出的激光一部分被反射,另一部分透过第一分光装置射出。聚焦耦合系统、谐振腔、工作介质、倍频装置及第一分光装置依次排列于同一光轴。第一分光装置的反射光输入光参量振荡器,经光参量振荡后输出高功率、大能量的可调谐双频激光。本实用新型结构简单,便于量产,具有广泛的应用前景。

The utility model provides a dual-frequency laser, which includes a pump source, a focusing coupling system, a resonant cavity, a working medium, a frequency doubling device, a first light splitting device and an optical parametric oscillator. The pump source is used to generate pump light. The pump light generated by the pump source is input into the focusing coupling system for collimation and focusing, and then input into the resonant cavity. The working medium is set in the resonant cavity. The laser pumping working medium input into the resonator is output after being oscillated and amplified by the resonator. The laser input frequency doubling device output by the resonator. The first spectroscopic device is used to reflect a part of the laser light emitted by the frequency doubling device, and the other part passes through the first spectroscopic device to emit. The focusing coupling system, the resonant cavity, the working medium, the frequency doubling device and the first light splitting device are arranged on the same optical axis in sequence. The reflected light of the first light splitting device is input into the optical parametric oscillator, and after optical parametric oscillation, a high-power, high-energy tunable dual-frequency laser is output. The utility model has a simple structure, is convenient for mass production, and has wide application prospects.

Description

双频激光器dual frequency laser

技术领域technical field

本实用新型涉及激光领域,特别是涉及一种双频激光器。The utility model relates to the field of lasers, in particular to a dual-frequency laser.

背景技术Background technique

双频激光器在光干涉测量和太赫兹等领域具有广泛的应用。具备高功率的、大能量特性的双频激光器在一定程度上可进一步拓宽双频激光器的应用范围。因此,具备高功率的、大能量特性的双频激光器引起了国内外科研工作者的极大关注和浓厚兴趣。然而,目前很难制备出高功率、大能量的双频激光器。Dual-frequency lasers have a wide range of applications in fields such as optical interferometry and terahertz. Dual-frequency lasers with high power and high energy characteristics can further broaden the application range of dual-frequency lasers to a certain extent. Therefore, dual-frequency lasers with high-power and high-energy characteristics have attracted great attention and interest from researchers at home and abroad. However, it is currently difficult to prepare high-power, high-energy dual-frequency lasers.

实用新型内容Utility model content

基于此,有必要针对现如今很难制备出高功率、大能量的双频激光器的问题,提供一种双频激光器。Based on this, it is necessary to provide a dual-frequency laser to solve the problem that it is difficult to prepare a high-power, high-energy dual-frequency laser.

一种双频激光器,包括:A dual-frequency laser comprising:

泵浦源,用于发出泵浦光;a pumping source for emitting pumping light;

聚焦耦合系统,所述泵浦源产生的泵浦光输入所述聚焦耦合系统;a focusing coupling system, the pump light generated by the pump source is input into the focusing coupling system;

谐振腔,所述聚焦耦合系统输出的激光输入所述谐振腔;a resonant cavity, the laser output by the focusing coupling system is input into the resonant cavity;

工作介质,设置于所述谐振腔内,输入所述谐振腔的激光泵浦所述工作介质,产生的激光经所述谐振腔振荡放大后输出;The working medium is arranged in the resonant cavity, the laser input into the resonant cavity pumps the working medium, and the generated laser is oscillated and amplified by the resonant cavity and then output;

倍频装置,所述谐振腔输出的激光输入所述倍频装置;A frequency doubling device, the laser output from the resonator is input to the frequency doubling device;

第一分光装置,用于使所述倍频装置射出的激光中的一部分被反射,另一部分透过所述第一分光装置射出,所述聚焦耦合系统、所述谐振腔、所述工作介质、所述倍频装置及所述第一分光装置沿着同一光轴依次排列;The first spectroscopic device is used to reflect a part of the laser light emitted by the frequency doubling device, and the other part passes through the first spectroscopic device to emit, the focusing coupling system, the resonant cavity, the working medium, The frequency doubling device and the first spectroscopic device are arranged in sequence along the same optical axis;

光参量振荡器,所述第一分光装置的反射光输入所述光参量振荡器,经光参量振荡后输出可调谐双频激光。An optical parametric oscillator, the reflected light of the first spectroscopic device is input to the optical parametric oscillator, and output tunable dual-frequency laser light after optical parametric oscillation.

在其中一个实施例中,所述泵浦源为半导体激光器。In one of the embodiments, the pump source is a semiconductor laser.

在其中一个实施例中,所述双频激光器还包括:In one of the embodiments, the dual-frequency laser also includes:

光纤,连接于所述泵浦源与所述聚焦耦合系统之间,用于将泵浦光从所述泵浦源输入所述聚焦耦合系统。An optical fiber, connected between the pump source and the focusing coupling system, is used to input pump light from the pump source into the focusing coupling system.

在其中一个实施例中,所述聚焦耦合系统包括至少一个透镜,所述至少一个透镜与输入所述聚焦耦合系统的激光垂直,用于对输入所述聚焦耦合系统的激光聚焦。In one of the embodiments, the focus coupling system includes at least one lens, and the at least one lens is perpendicular to the laser light input into the focus coupling system, and is used for focusing the laser light input into the focus coupling system.

在其中一个实施例中,所述工作介质为增益介质与可饱和吸收体的复合晶体。In one of the embodiments, the working medium is a composite crystal of a gain medium and a saturable absorber.

在其中一个实施例中,所述工作介质面向所述聚焦耦合系统的一侧镀有增透膜和反射膜作为所述谐振腔的前腔镜,所述工作介质远离所述聚焦耦合系统的一侧镀有高反膜和部分反射膜作为所述谐振腔的后腔镜。In one of the embodiments, the side of the working medium facing the focusing coupling system is coated with an anti-reflection film and a reflective film as the front cavity mirror of the resonator, and the working medium is far away from a side of the focusing coupling system. The side is coated with a high reflection film and a partial reflection film as the rear cavity mirror of the resonant cavity.

在其中一个实施例中,所述倍频装置为抗灰迹磷酸氧钛钾晶体。In one of the embodiments, the frequency doubling device is an anti-smudge potassium titanyl phosphate crystal.

在其中一个实施例中,所述第一分光装置用于使所述倍频装置出射的经倍频后产生的激光反射输出,并使所述倍频装置出射的未经倍频转换的激光透过所述第一分光装置输出。In one of the embodiments, the first spectroscopic device is used to reflect and output the frequency-doubled laser emitted by the frequency doubling device, and to transmit the unconverted laser light emitted by the frequency doubling device. output through the first light splitting device.

在其中一个实施例中,所述光参量振荡器为周期极化的抗灰迹磷酸氧钛钾晶体。In one of the embodiments, the optical parametric oscillator is a periodically poled anti-gray trace potassium titanyl phosphate crystal.

在上述任一项实施例中,所述双频激光器还包括:In any one of the above embodiments, the dual-frequency laser further includes:

第二分光装置,用于使所述光参量振荡器出射的激光中的一部分被反射输出,另一部分透过所述第二分光装置射出。The second spectroscopic device is configured to reflect and output a part of the laser light emitted by the optical parametric oscillator, and emit the other part through the second spectroscopic device.

本实用新型提供的所述双频激光器,所述泵浦源产生的泵浦光经所述聚焦耦合系统后对所述工作物质进行泵浦,再经过所述谐振腔振荡放大后输入所述倍频装置进行激光倍频,可以获得具有高输出功率及高光-光转换效率的激光。倍频装置射出的激光中的一部分激光透过第一分光装置射出,另一部分被所述第一分光装置反射到所述光参量振荡器进行光参量振荡,从而产生双频激光的可调谐输出,构成高功率、大能量的双频可调谐激光器。本实用新型的双频激光器结构简单,操作简便,在光干涉测量和太赫兹振荡源等领域具有广泛的应用前景。In the dual-frequency laser provided by the utility model, the pumping light generated by the pumping source pumps the working substance after passing through the focusing coupling system, and then enters the multiplied Laser frequency doubling by frequency device can obtain laser with high output power and high light-to-light conversion efficiency. Part of the laser light emitted by the frequency doubling device is emitted through the first spectroscopic device, and the other part is reflected by the first spectroscopic device to the optical parametric oscillator for optical parametric oscillation, thereby generating a tunable output of the dual-frequency laser, A high-power, high-energy dual-frequency tunable laser is formed. The dual-frequency laser device of the utility model is simple in structure and easy to operate, and has wide application prospects in fields such as optical interferometry and terahertz oscillation sources.

附图说明Description of drawings

图1为本实用新型一实施例提供的双频激光器的结构示意图;Fig. 1 is a schematic structural diagram of a dual-frequency laser provided by an embodiment of the present invention;

图2为本实用新型一实施例提供的倍频装置射出的激光的平均输出功率随吸收泵浦功率的变化曲线;Fig. 2 is the change curve of the average output power of the laser emitted by the frequency doubling device provided by an embodiment of the present invention with the absorbed pump power;

图3为本实用新型一实施例提供的倍频装置射出的激光的光谱特性;Fig. 3 is the spectral characteristic of the laser emitted by the frequency doubling device provided by an embodiment of the present invention;

图4为本实用新型一实施例提供的倍频装置射出的激光的光斑特性。FIG. 4 shows the spot characteristics of the laser light emitted by the frequency doubling device provided by an embodiment of the present invention.

附图标号说明:Explanation of reference numbers:

10 双频激光器10 dual frequency lasers

100 泵浦源100 pump source

110 光纤110 fiber

200 聚焦耦合系统200 focus coupling system

210 透镜210 lens

300 谐振腔300 cavity resonators

310 前腔镜310 front endoscope

320 后腔镜320 rear cavity mirror

400 工作物质400 working substances

410 增益介质410 gain medium

420 可饱和吸收体420 saturable absorber

500 倍频装置500 multiplier

600 第一分光装置600 The first spectroscopic device

700 光参量振荡器700 Optical Parametric Oscillators

800 第二分光装置800 second splitting device

具体实施方式Detailed ways

为使本实用新型的上述目的、特征和优点能够更加明显易懂,下面结合附图对本实用新型的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本实用新型。但是本实用新型能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本实用新型内涵的情况下做类似改进,因此本实用新型不受下面公开的具体实施的限制。In order to make the above purpose, features and advantages of the present utility model more obvious and understandable, the specific implementation of the present utility model will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a full understanding of the present invention. However, the utility model can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific implementation disclosed below .

请参见图1,本实用新型提供一种双频激光器10,包括泵浦源100、聚焦耦合系统200、谐振腔300、工作介质400、倍频装置500、第一分光装置600和光参量振荡器700。所述泵浦源100用于发出泵浦光。所述泵浦源100产生的泵浦光输入所述聚焦耦合系统200。所述聚焦耦合系统200输出的激光输入所述谐振腔300。所述工作介质400设置于所述谐振腔300内。输入所述谐振腔300的激光泵浦所述工作介质400后经所述谐振腔300振荡放大后输出。所述谐振腔300输出的激光输入所述倍频装置500。所述第一分光装置600用于使所述倍频装置500射出的激光中的一部分被反射,另一部分透过所述第一分光装置600射出。所述聚焦耦合系统200、所述谐振腔300、所述工作介质400、所述倍频装置500及所述第一分光装置600沿着同一光轴依次排列。所述第一分光装置600的反射光输入所述光参量振荡器700,经光参量振荡后输出可调谐双频激光。Please refer to Fig. 1, the utility model provides a dual-frequency laser 10, including a pump source 100, a focusing coupling system 200, a resonator 300, a working medium 400, a frequency doubling device 500, a first beam splitting device 600 and an optical parametric oscillator 700 . The pump source 100 is used to emit pump light. The pump light generated by the pump source 100 is input into the focusing coupling system 200 . The laser output from the focusing coupling system 200 is input into the resonant cavity 300 . The working medium 400 is disposed in the resonant cavity 300 . The laser light input into the resonant cavity 300 pumps the working medium 400 and then is oscillated and amplified by the resonant cavity 300 before being output. The laser output from the resonant cavity 300 is input into the frequency doubling device 500 . The first spectroscopic device 600 is used to reflect a part of the laser light emitted by the frequency doubling device 500 , and the other part passes through the first spectroscopic device 600 to emit. The focusing coupling system 200 , the resonant cavity 300 , the working medium 400 , the frequency doubling device 500 and the first spectroscopic device 600 are sequentially arranged along the same optical axis. The reflected light of the first spectroscopic device 600 is input into the optical parametric oscillator 700, and output tunable dual-frequency laser light after optical parametric oscillation.

所述泵浦源100能够产生泵浦光。所述泵浦源100可以为传统的固体激光器,也可以为高功率二极管激光模块或激光阵列。所述泵浦源100的输出波长可以根据需求自行调节。所述泵浦光被输入到所述聚焦耦合系统200中进行准直聚焦,聚焦后形成适合所述谐振腔300的泵浦光斑。聚焦后的激光射入所述谐振腔300。所述谐振腔300内设置有所述工作物质400。激光对所述工作物质400进行端面泵浦,产生的激光经所述谐振腔300振荡后输出基频光λ0。所述基频光λ0射入所述倍频装置500进行激光倍频可以产生频率增大一倍的倍频光λ0/2。通过调节所述倍频装置500的参数可以获得理想的倍频效率。The pump source 100 can generate pump light. The pumping source 100 can be a traditional solid-state laser, or a high-power diode laser module or laser array. The output wavelength of the pump source 100 can be adjusted according to requirements. The pumping light is input into the focusing coupling system 200 for collimation and focusing, and a pumping spot suitable for the resonant cavity 300 is formed after focusing. The focused laser light is injected into the resonant cavity 300 . The working substance 400 is arranged in the resonant cavity 300 . The laser performs end-pumping on the working substance 400, and the generated laser oscillates through the resonant cavity 300 to output fundamental frequency light λ 0 . The fundamental frequency light λ 0 is injected into the frequency doubling device 500 for laser frequency doubling to generate frequency doubled light λ 0 /2 whose frequency is doubled. Ideal frequency doubling efficiency can be obtained by adjusting the parameters of the frequency doubling device 500 .

倍频光λ0/2和未经倍频的基频光λ0混合在一起射出至所述第一分光装置600。所述第一分光装置600将所述倍频光λ0/2反射到所述光参量振荡器700,并且使所述未经倍频转换的基频光λ0透射输出。进入所述光参量振荡器700的倍频光λ0/2进行光参量振荡后输出两个频率不同的出射激光,其中频率较高的出射激光为信号光λ2,频率较低的出射激光为闲频光λ1。通过调节所述光参量振荡器700的参数可以实现λ1和λ2的可调谐输出。The frequency-doubled light λ 0 /2 and the non-frequency-doubled fundamental frequency light λ 0 are mixed together and emitted to the first spectroscopic device 600 . The first spectroscopic device 600 reflects the frequency-doubled light λ 0 /2 to the optical parametric oscillator 700 , and transmits and outputs the base-frequency light λ 0 that has not been frequency-multiplied. The frequency-doubled light λ 0 /2 entering the optical parametric oscillator 700 performs optical parametric oscillation to output two outgoing lasers with different frequencies, wherein the outgoing laser with a higher frequency is signal light λ 2 , and the outgoing laser with a lower frequency is idler light λ 1 . The tunable outputs of λ1 and λ2 can be realized by adjusting the parameters of the optical parametric oscillator 700.

在本实施例中,所述泵浦源100产生的泵浦光经所述聚焦耦合系统200后对所述工作物质400进行泵浦,再经过所述谐振腔300振荡放大后输入所述倍频装置500进行激光倍频,可以获得具有高输出功率及高光-光转换效率的激光。所述倍频装置500射出的激光中的未经倍频的基频光λ0透过所述第一分光装置600射出。倍频后产生的倍频光λ0/2被所述第一分光装置600反射到所述光参量振荡器700进行光参量振荡,从而产生频率较高的信号光λ2和频率较低的闲频光λ1的可调谐输出,构成高功率、大能量的双频可调谐激光器。同时信号光λ2与基频光λ0也可以构成可调谐双频激光器。本实用新型结构简单,易操作,在光干涉测量和太赫兹振荡源等领域具有广泛的应用前景。In this embodiment, the pumping light generated by the pumping source 100 pumps the working substance 400 after passing through the focusing coupling system 200, and then oscillating and amplifying through the resonant cavity 300 and then input into the frequency multiplied The device 500 performs laser frequency doubling to obtain laser light with high output power and high light-to-light conversion efficiency. Among the laser beams emitted by the frequency doubling device 500 , the unmultiplied fundamental frequency light λ 0 passes through the first spectroscopic device 600 and is emitted. The frequency-doubled light λ 0 /2 generated after frequency doubling is reflected by the first spectroscopic device 600 to the optical parametric oscillator 700 for optical parametric oscillation, thereby generating signal light λ 2 with a higher frequency and idler light with a lower frequency. The tunable output of frequency light λ 1 constitutes a high-power, high-energy dual-frequency tunable laser. At the same time, the signal light λ 2 and the fundamental frequency light λ 0 can also constitute a tunable dual-frequency laser. The utility model has the advantages of simple structure and easy operation, and has wide application prospects in the fields of light interference measurement, terahertz oscillation source and the like.

在一个实施例中,所述泵浦源100可以为半导体激光器。具体地,所述泵浦源100为808nm准连续半导体激光器,可产生波长为808nm的泵浦光。在本实施例中,所述泵浦源100采用808nm准连续半导体激光器,输出光的功率高,并且结构紧凑,稳定,寿命长。In one embodiment, the pump source 100 may be a semiconductor laser. Specifically, the pumping source 100 is an 808nm quasi-continuous semiconductor laser, which can generate pumping light with a wavelength of 808nm. In this embodiment, the pumping source 100 adopts an 808nm quasi-continuous semiconductor laser, which has high output light power, compact structure, stable structure and long service life.

在一个实施例中,所述双频激光器10还包括光纤110。所述光纤110连接于所述泵浦源100与所述聚焦耦合系统200之间,用于将泵浦光从所述泵浦源100输入所述聚焦耦合系统200。在一个实施例中,所述光纤110的芯径为400μm,数值孔径NA为0.22。所述泵浦光经所述光纤110耦合输出至所述聚焦耦合系统200。在另一个实施例中,所述泵浦光可以直接射入所述聚焦耦合系统200。In one embodiment, the dual-frequency laser 10 further includes an optical fiber 110 . The optical fiber 110 is connected between the pumping source 100 and the focusing coupling system 200 , and is used for inputting pump light from the pumping source 100 into the focusing coupling system 200 . In one embodiment, the core diameter of the optical fiber 110 is 400 μm, and the numerical aperture NA is 0.22. The pump light is coupled out to the focusing coupling system 200 through the optical fiber 110 . In another embodiment, the pump light can directly enter the focusing coupling system 200 .

在本实施例中,采用所述光纤110进行耦合输出,可压缩发散角。泵浦光在光纤110内进行全反射,传输效率高。In this embodiment, the optical fiber 110 is used for coupling output, which can compress the divergence angle. The pump light is totally reflected in the optical fiber 110, and the transmission efficiency is high.

在一个实施例中,所述聚焦耦合系统200包括至少一个透镜210。所述至少一个透镜210与输入所述聚焦耦合系统200的激光垂直。所述透镜210的形状可以根据需要选择。比如,所述透镜210可以为柱面或球面。在一个实施例中,所述聚焦耦合系统200为两个平行间隔设置的凸透镜,焦距都为8mm。所述泵浦光斑直径大小可以在180μm-220μm之间进行调节。在一个实施例中,聚焦后的光斑直径为200μm。所述聚焦耦合系统200使用的所述透镜210种类及数目不作限定,只要能够实现准直聚焦的功能,使泵浦光光斑整形后尺寸与所述谐振腔300基模振荡光斑尺寸接近,即模式匹配即可。例如,所述聚焦耦合系统200还可以选用自聚焦透镜。为增强耦合效率,所述透镜210的表面还可以镀上泵浦光的增透膜。In one embodiment, the focusing coupling system 200 includes at least one lens 210 . The at least one lens 210 is perpendicular to the laser light input into the focusing coupling system 200 . The shape of the lens 210 can be selected as required. For example, the lens 210 may be cylindrical or spherical. In one embodiment, the focus coupling system 200 is two convex lenses arranged in parallel and spaced apart, both of which have a focal length of 8 mm. The diameter of the pump spot can be adjusted between 180 μm and 220 μm. In one embodiment, the focused spot diameter is 200 μm. The type and number of the lens 210 used in the focusing coupling system 200 are not limited, as long as the function of collimation and focusing can be realized, and the size of the pump light spot after shaping is close to the size of the fundamental mode oscillation spot of the resonator 300, that is, the mode Just match. For example, the focusing coupling system 200 may also use a self-focusing lens. In order to enhance coupling efficiency, the surface of the lens 210 may also be coated with an anti-reflection coating for pump light.

在本实施例中,所述聚焦耦合系统200采用至少一个透镜210进行准直聚焦,可以形成与所述谐振腔300模式匹配的光斑。结构灵活。In this embodiment, the focusing coupling system 200 adopts at least one lens 210 for collimating and focusing, and can form a light spot that is mode-matched with the resonant cavity 300 . The structure is flexible.

在一个实施例中,所述工作介质400可以为增益介质410与可饱和吸收体420的复合晶体。所述增益介质410与所述可饱和吸收体420通过键合技术复合为所述工作介质400。所述工作介质400为微片结构,即所述增益介质410与所述可饱和吸收体420均为晶体微片。微片结构有利于实现小型化和集成化。在一个实施例中,所述工作介质400可以为Nd:YAG/Cr4+:YAG复合晶体。所述增益介质410为Nd:YAG晶体。In one embodiment, the working medium 400 may be a composite crystal of the gain medium 410 and the saturable absorber 420 . The gain medium 410 and the saturable absorber 420 are composited into the working medium 400 through bonding technology. The working medium 400 has a microchip structure, that is, both the gain medium 410 and the saturable absorber 420 are crystal microchips. The microchip structure is conducive to miniaturization and integration. In one embodiment, the working medium 400 may be a Nd:YAG/Cr 4+ :YAG composite crystal. The gain medium 410 is Nd:YAG crystal.

在一个实施例中,所述增益介质410的长度可以在1mm-2.0mm之间进行调节。在一个实施例中,所述增益介质410的长度可以设置为1.2mm、1.4mm、1.6mm、1.8mm中任一数值。在一个实施例中,Nd:YAG晶体中Nd3+的掺杂浓度可以为1at.%。所述可饱和吸收体420为被动调Q开关,用于压缩脉冲宽度和提高峰值功率。在一个实施例中,所述可饱和吸收体420为Cr4+:YAG晶体。在一个实施例中,所述可饱和吸收体420的初始透过率可以设置为50%-95%。在一个实施例中,所述可饱和吸收体420的初始透过率可以设置为60%、70%、80%、90%中任一数值。在另一个实施例中,所述可饱和吸收体420还可以采用LiF色心晶体。In one embodiment, the length of the gain medium 410 can be adjusted between 1mm-2.0mm. In one embodiment, the length of the gain medium 410 can be set to any value among 1.2mm, 1.4mm, 1.6mm, and 1.8mm. In one embodiment, the doping concentration of Nd 3+ in the Nd:YAG crystal can be 1 at.%. The saturable absorber 420 is a passive Q-switch, which is used to compress the pulse width and increase the peak power. In one embodiment, the saturable absorber 420 is Cr 4+ :YAG crystal. In one embodiment, the initial transmittance of the saturable absorber 420 may be set at 50%-95%. In one embodiment, the initial transmittance of the saturable absorber 420 can be set to any value among 60%, 70%, 80%, and 90%. In another embodiment, the saturable absorber 420 may also use a LiF color center crystal.

在一个实施例中,所述泵浦光功率从泵浦阈值连续增加至50W。在一个实施例中,所述泵浦光重复频率为10Hz-5kHz。在一个实施例中,所述泵浦光重复频率为20Hz-1kHz。在另一个实施例中,所述泵浦光重复频率可以选用30Hz、40Hz、50Hz、100Hz、500Hz中任一数值。在一个实施例中,所述泵浦光脉宽为100μs-500μs。在一个实施例中,所述泵浦光脉宽为150μs-450μs。在一个实施例中,所述泵浦光脉宽可以调节为200μs、250μs、300μs、350μs、400μs中任一数值。In one embodiment, the pump light power is continuously increased from the pump threshold to 50W. In one embodiment, the repetition frequency of the pumping light is 10 Hz-5 kHz. In one embodiment, the repetition frequency of the pump light is 20 Hz-1 kHz. In another embodiment, the repetition frequency of the pumping light can be any one of 30 Hz, 40 Hz, 50 Hz, 100 Hz and 500 Hz. In one embodiment, the pump light pulse width is 100 μs-500 μs. In one embodiment, the pump light pulse width is 150 μs-450 μs. In one embodiment, the pump light pulse width can be adjusted to any value among 200 μs, 250 μs, 300 μs, 350 μs, and 400 μs.

在本实施例中,经过所述聚焦耦合系统200聚焦后的激光对所述增益介质410进行端面泵浦。Nd:YAG对808nm泵浦光有很高的吸收系数,与808nm的准连续半导体激光器匹配,可获得高的输出功率和泵浦效率,实现了光谱匹配。Cr4+:YAG结构简单,使用方便,无电磁干扰,可获得峰值功率大、脉宽小的巨脉冲。采用微片结构的所述工作介质400,有利于实现所述太赫兹波振荡器10的小型化和集成化。In this embodiment, the gain medium 410 is end-pumped by the laser beam focused by the focusing coupling system 200 . Nd:YAG has a high absorption coefficient for 808nm pump light, which matches the 808nm quasi-continuous semiconductor laser, and can obtain high output power and pump efficiency, achieving spectral matching. Cr 4+ : YAG has a simple structure, is easy to use, has no electromagnetic interference, and can obtain giant pulses with high peak power and small pulse width. The working medium 400 adopting a microchip structure is beneficial to realize the miniaturization and integration of the terahertz wave oscillator 10 .

在一个实施例中,所述工作介质400面向所述聚焦耦合系统200的一侧镀有增透膜和反射膜作为所述谐振腔300的前腔镜310。所述工作介质400远离所述聚焦耦合系统200的一侧镀有高反膜和部分反射膜作为所述谐振腔300的后腔镜320。所述前腔镜310和所述后腔镜320构成所述谐振腔300。通过调节所述工作介质400的端面的形状可以构成平行平面谐振腔或平凹腔。在一个实施例中,所述谐振腔300为平行平面谐振腔。在一个实施例中,所述增透膜为808nm的增透膜。所述反射膜为1064nm的反射膜。所述高反膜为808nm的高反膜,反射率Roc=90%@1064nm。所述部分反射膜为1064nm的部分反射膜。在一个实施例中,808nm的泵浦光射入所述谐振腔300后,所述泵浦光对所述工作介质400进行端面泵浦产生1064nm的激光并经过所述可饱和吸收体420调Q后产生脉冲激光。所述脉冲激光经过所述谐振腔300振荡放大后从所述部分反射膜射出。In one embodiment, the side of the working medium 400 facing the focusing coupling system 200 is coated with an anti-reflection film and a reflective film as the front cavity mirror 310 of the resonator 300 . The side of the working medium 400 away from the focusing coupling system 200 is coated with a high reflection film and a partial reflection film as the rear cavity mirror 320 of the resonator 300 . The front cavity mirror 310 and the rear cavity mirror 320 constitute the resonant cavity 300 . By adjusting the shape of the end surface of the working medium 400, a parallel plane resonant cavity or a flat concave cavity can be formed. In one embodiment, the resonant cavity 300 is a parallel plane resonant cavity. In one embodiment, the anti-reflection film is an 808nm anti-reflection film. The reflective film is a 1064nm reflective film. The high reflection film is an 808nm high reflection film, and the reflectivity R oc =90%@1064nm. The partial reflection film is a 1064nm partial reflection film. In one embodiment, after the 808nm pumping light is injected into the resonant cavity 300, the pumping light performs end pumping on the working medium 400 to generate 1064nm laser light, which is Q-switched through the saturable absorber 420 A pulsed laser is then generated. The pulsed laser is oscillated and amplified by the resonant cavity 300 and then emitted from the partially reflective film.

在本实施例中,在由所述增益介质410与可饱和吸收体420的复合晶体两端的端面镀膜构建所述谐振腔300。这样的结构的优点是:一、缩短激光器谐振腔的腔长,减小了系统的体积,有利于固体激光器的小型化;二、减少激光在介质端面之间的反射损失,降低了谐振腔的腔内损耗;三、压窄激光脉宽,提高峰值功率。通过对泵浦光功率、泵浦光斑大小、泵浦光重复频率、泵浦光脉宽和所述工作物质400参数的调节,可以实现高平均输出功率、大能量的单频激光输出。In this embodiment, the resonant cavity 300 is constructed by coating the end faces of the compound crystal formed by the gain medium 410 and the saturable absorber 420 . The advantages of such a structure are: 1. Shorten the cavity length of the laser resonator, reduce the volume of the system, and facilitate the miniaturization of the solid-state laser; Intracavity loss; 3. Narrow the laser pulse width and increase the peak power. By adjusting the pump light power, pump spot size, pump light repetition frequency, pump light pulse width and the parameters of the working substance 400, high average output power and large energy single-frequency laser output can be realized.

在一个实施例中,所述倍频装置500可以为抗灰迹磷酸氧钛钾晶体。所述抗灰迹磷酸氧钛钾(GTR-KTP)晶体的长度可以根据需要进行调节。在一个实施例中,所述GTR-KTP晶体的长度为3mm-7mm。在一个实施例中,所述GTR-KTP晶体的长度可以选用4mm、5mm、6mm中的任一数值。在另一个实施例中,所述倍频装置500还可以选用其他非线性光学介质。比如BBO晶体、三硼酸锂(LiB3O5)。In one embodiment, the frequency doubling device 500 may be an anti-smudge potassium titanyl phosphate crystal. The length of the anti-gray trace potassium titanyl phosphate (GTR-KTP) crystal can be adjusted as required. In one embodiment, the length of the GTR-KTP crystal is 3mm-7mm. In one embodiment, the length of the GTR-KTP crystal can be any one of 4mm, 5mm and 6mm. In another embodiment, the frequency doubling device 500 may also use other nonlinear optical media. Such as BBO crystal, lithium triborate (LiB 3 O 5 ).

在本实施例中,所述倍频装置500将所述谐振腔300内射出的激光的频率增加一倍后射出。扩大了激光的波段,可获得更短波长的激光。In this embodiment, the frequency doubling device 500 doubles the frequency of the laser light emitted from the resonant cavity 300 before emitting it. The wavelength band of the laser is expanded, and the laser with a shorter wavelength can be obtained.

请参见图2、图3和图4。图2为本实用新型一实施例中倍频后输出的绿光激光的平均输出功率随吸收泵浦功率的变化曲线。其中,斜率效率ηs为21%。由图2中曲线可得,当吸收泵浦功率为7W时,可获得1.2W的最高平均输出功率,光-光转换效率为17%。为后续获得高转换效率、高平均输出功率的所述双频激光器10做准备。图3为倍频后得到的绿光激光的光谱特性。由图3可知中心波长为532nm。图4为倍频后得到的绿光激光的光斑特性。由图4可知输出激光为接近衍射极限的基模光斑。See Figure 2, Figure 3 and Figure 4. FIG. 2 is a curve showing the average output power of green laser output after frequency doubling as a function of absorbed pump power in an embodiment of the present invention. Among them, the slope efficiency η s is 21%. It can be seen from the curve in Fig. 2 that when the absorbed pump power is 7W, the highest average output power of 1.2W can be obtained, and the light-to-light conversion efficiency is 17%. Preparations are made for the subsequent acquisition of the dual-frequency laser 10 with high conversion efficiency and high average output power. Figure 3 shows the spectral characteristics of the green laser after frequency doubling. It can be seen from Figure 3 that the central wavelength is 532nm. Figure 4 shows the spot characteristics of the green laser light obtained after frequency doubling. It can be seen from Figure 4 that the output laser is a fundamental mode spot close to the diffraction limit.

在一个实施例中,所述第一分光装置600用于使所述倍频装置500出射的激光的经倍频后产生的激光反射输出,并使所述倍频装置500出射的未经倍频转换的激光透过所述第一分光装置600输出。在一个实施例中,所述第一分光装置600为分束镜。在一个实施例中,所述分束镜与所述倍频装置500出射的激光成45°夹角设置,从而使倍频光从与出射激光垂直的方向射出。所述分束镜的种类不限,只要能将所述倍频装置500出射的激光中的倍频光与基频光分向不同的方向输出即可。在本实施例中,使用所述第一分光装置600可将所述倍频装置500出射的激光中的倍频光和基频光分开。在一个实施例中,入射基频光为1064nm激光,通过调节所述GTR-KTP晶体的长度和入射基频光功率大小等参数,并经过分束镜进行分束,可以实现532nm的绿光激光输出,基频光从分束镜另一侧输出。In one embodiment, the first spectroscopic device 600 is used to reflect the output of the laser light emitted by the frequency doubling device 500 after frequency doubling, and to output the laser light emitted by the frequency doubling device 500 without frequency doubling The converted laser light is output through the first spectroscopic device 600 . In one embodiment, the first beam splitting device 600 is a beam splitter. In one embodiment, the beam splitter is set at an angle of 45° to the laser emitted by the frequency doubling device 500 , so that the frequency doubled light is emitted from a direction perpendicular to the outgoing laser. The type of the beam splitter is not limited, as long as it can split the frequency doubled light and the fundamental frequency light in the laser light emitted by the frequency doubling device 500 into different directions for output. In this embodiment, the frequency doubled light and the fundamental frequency light in the laser light emitted by the frequency doubling device 500 can be separated by using the first spectroscopic device 600 . In one embodiment, the incident fundamental frequency light is a 1064nm laser, by adjusting parameters such as the length of the GTR-KTP crystal and the power of the incident fundamental frequency light, and splitting the beam through a beam splitter, a 532nm green laser can be realized Output, the fundamental frequency light is output from the other side of the beam splitter.

在一个实施例中,所述光参量振荡器700为周期极化的抗灰迹磷酸氧钛钾晶体。所述周期极化的抗灰迹磷酸氧钛钾(GTR-KTP)晶体是通过人为地在非线性晶体GTR-KTP中制备出周期性极化光栅,对晶体的非线性系数进行周期调制,来补偿由于色散造成的相位失配,制备出周期极化的GTR-KTP晶体。所述GTR-KTP晶体的长度可以根据需要进行调节。在一个实施例中,所述GTR-KTP晶体的长度为3mm-7mm。在一个实施例中,所述GTR-KTP晶体的长度可以选择4mm、5mm、6mm中任一数值。所述光参量振荡器700并不局限于采用上述晶体,只要能实现光参量振荡的功能即可。比如,在另一个实施例中,所述光参量振荡器700还可以采用周期极化铌酸锂晶体(PPLN)或周期性极化钽酸锂晶体(PPLT)。In one embodiment, the optical parametric oscillator 700 is a periodically poled anti-gray trace potassium titanyl phosphate crystal. The periodically polarized anti-grey trace potassium titanyl phosphate (GTR-KTP) crystal is artificially prepared in the nonlinear crystal GTR-KTP by periodically polarizing a grating, and periodically modulating the nonlinear coefficient of the crystal to achieve To compensate the phase mismatch caused by dispersion, a periodically poled GTR-KTP crystal was prepared. The length of the GTR-KTP crystal can be adjusted as needed. In one embodiment, the length of the GTR-KTP crystal is 3mm-7mm. In one embodiment, the length of the GTR-KTP crystal can be any one of 4mm, 5mm and 6mm. The optical parametric oscillator 700 is not limited to using the above-mentioned crystal, as long as it can realize the function of optical parametric oscillation. For example, in another embodiment, the optical parametric oscillator 700 may also use a periodically poled lithium niobate crystal (PPLN) or a periodically poled lithium tantalate crystal (PPLT).

在本实施例中,所述光参量振荡器700采用周期极化的抗灰迹磷酸氧钛钾晶体。所述倍频装置500出射的倍频光入射到周期极化的GTR-KTP晶体上,利用该非线性晶体的光参量振荡特性,最终实现双频激光(闲频光和信号光,分别对应λ1和λ2)同时振荡。通过调节入射激光功率大小、GTR-KTP晶体的长度、外界温度、极化光栅周期等因素,可实现激光振荡波长(λ1和λ2)的可调谐输出。In this embodiment, the optical parametric oscillator 700 uses a periodically poled anti-gray trace potassium titanyl phosphate crystal. The frequency-doubled light emitted by the frequency doubling device 500 is incident on the periodically polarized GTR-KTP crystal, and the optical parametric oscillation characteristic of the nonlinear crystal is used to finally realize dual-frequency laser (idle frequency light and signal light, respectively corresponding to λ 1 and λ 2 ) oscillate simultaneously. The tunable output of laser oscillation wavelength (λ 1 and λ 2 ) can be realized by adjusting the incident laser power, the length of GTR-KTP crystal, the external temperature, and the period of the polarization grating.

在一个实施例中,所述双频激光器10还包括第二分光装置800。所述第二分光装置800用于使所述光参量振荡器700出射的激光中的一部分被反射,另一部分透过所述第二分光装置800射出。在一个实施例中,所述第二分光装置800为分束镜。所述被反射输出的激光为信号光λ2,透射输出的激光为闲频光λ1。所述分束镜在所述光参量振荡器700的出射激光的延伸方向倾斜设置。在一个实施例中,所述分束镜与所述光参量振荡器700的出射激光的延伸方向成45°夹角设置,使所述光参量振荡器700的出射激光中的信号光λ2垂直于所述出射激光的延伸方向射出,并使闲频光λ1透射出去。在本实施例中,所述第二分光装置800可以将所述光参量振荡器700的出射激光中的闲频光λ1和信号光λ2分别向不同的方向输出。In one embodiment, the dual-frequency laser 10 further includes a second beam splitting device 800 . The second spectroscopic device 800 is used to reflect a part of the laser light emitted by the optical parametric oscillator 700 , and the other part passes through the second spectroscopic device 800 to emit. In one embodiment, the second beam splitting device 800 is a beam splitter. The reflected and output laser is signal light λ 2 , and the transmitted and output laser is idler light λ 1 . The beam splitter is arranged obliquely in the extending direction of the emitted laser light of the optical parametric oscillator 700 . In one embodiment, the beam splitter is set at an angle of 45° to the extension direction of the outgoing laser light of the optical parametric oscillator 700, so that the signal light λ in the outgoing laser light of the optical parametric oscillator 700 is vertical It emits in the extending direction of the emitted laser light, and transmits the idler light λ1 . In this embodiment, the second spectroscopic device 800 can output the idler light λ1 and the signal light λ2 in the emitted laser light of the optical parametric oscillator 700 to different directions respectively.

以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

以上所述实施例仅表达了本实用新型的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对本实用新型专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本实用新型构思的前提下,还可以做出若干变形和改进,这些都属于本实用新型的保护范围。因此,本实用新型专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementations of the utility model, and the description thereof is relatively specific and detailed, but it should not be construed as limiting the patent scope of the utility model. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the scope of protection of the utility model patent should be based on the appended claims.

Claims (10)

1.一种双频激光器,其特征在于,包括:1. A dual-frequency laser, characterized in that, comprising: 泵浦源(100),用于发出泵浦光;pumping source (100), for emitting pumping light; 聚焦耦合系统(200),所述泵浦源(100)产生的泵浦光输入所述聚焦耦合系统(200);a focusing coupling system (200), the pump light generated by the pump source (100) is input into the focusing coupling system (200); 谐振腔(300),所述聚焦耦合系统(200)输出的激光输入所述谐振腔(300);a resonant cavity (300), the laser output from the focusing coupling system (200) is input into the resonant cavity (300); 工作介质(400),设置于所述谐振腔(300)内,输入所述谐振腔(300)的激光泵浦所述工作介质(400),产生的激光经所述谐振腔(300)振荡放大后输出;The working medium (400) is arranged in the resonant cavity (300), the laser input into the resonant cavity (300) pumps the working medium (400), and the generated laser is oscillated and amplified by the resonant cavity (300) post output; 倍频装置(500),所述谐振腔(300)输出的激光输入所述倍频装置(500);A frequency doubling device (500), the laser output from the resonator (300) is input to the frequency doubling device (500); 第一分光装置(600),用于使所述倍频装置(500)射出的激光中的一部分被反射,另一部分透过所述第一分光装置(600)射出,所述聚焦耦合系统(200)、所述谐振腔(300)、所述工作介质(400)、所述倍频装置(500)及所述第一分光装置(600)沿着同一光轴依次排列;The first spectroscopic device (600) is used to reflect a part of the laser light emitted by the frequency doubling device (500), and the other part is emitted through the first spectroscopic device (600), and the focusing coupling system (200 ), the resonant cavity (300), the working medium (400), the frequency doubling device (500) and the first spectroscopic device (600) are arranged in sequence along the same optical axis; 光参量振荡器(700),所述第一分光装置(600)的反射光输入所述光参量振荡器(700),经光参量振荡后输出可调谐双频激光。An optical parametric oscillator (700), the reflected light of the first light splitting device (600) is input into the optical parametric oscillator (700), and output tunable dual-frequency laser light after optical parametric oscillation. 2.根据权利要求1所述的双频激光器,其特征在于,所述泵浦源(100)为半导体激光器。2. The dual-frequency laser according to claim 1, characterized in that the pumping source (100) is a semiconductor laser. 3.根据权利要求1所述的双频激光器,其特征在于,还包括:3. The dual-frequency laser according to claim 1, further comprising: 光纤(110),连接于所述泵浦源(100)与所述聚焦耦合系统(200)之间,用于将泵浦光从所述泵浦源(100)输入所述聚焦耦合系统(200)。An optical fiber (110), connected between the pumping source (100) and the focusing coupling system (200), for inputting pump light from the pumping source (100) into the focusing coupling system (200) ). 4.根据权利要求1所述的双频激光器,其特征在于,所述聚焦耦合系统(200)包括至少一个透镜(210),所述至少一个透镜(210)与输入所述聚焦耦合系统(200)的激光垂直,用于对输入所述聚焦耦合系统(200)的激光聚焦。4. dual-frequency laser according to claim 1, is characterized in that, described focusing coupling system (200) comprises at least one lens (210), and described at least one lens (210) and input described focusing coupling system (200) ) laser vertically, for focusing the laser input into the focusing coupling system (200). 5.根据权利要求1所述的双频激光器,其特征在于,所述工作介质(400)为增益介质(410)与可饱和吸收体(420)的复合晶体。5. The dual-frequency laser according to claim 1, characterized in that, the working medium (400) is a composite crystal of a gain medium (410) and a saturable absorber (420). 6.根据权利要求1所述的双频激光器,其特征在于,所述工作介质(400)面向所述聚焦耦合系统(200)的一侧镀有增透膜和反射膜作为所述谐振腔(300)的前腔镜(310),所述工作介质(400)远离所述聚焦耦合系统(200)的一侧镀有高反膜和部分反射膜作为所述谐振腔(300)的后腔镜(320)。6. dual-frequency laser according to claim 1, is characterized in that, described working medium (400) is coated with anti-reflection film and reflection film as described cavity ( The front cavity mirror (310) of 300), the side of the working medium (400) away from the focusing coupling system (200) is coated with a high reflective film and a partial reflective film as the rear cavity mirror of the resonant cavity (300) (320). 7.根据权利要求1所述的双频激光器,其特征在于,所述倍频装置(500)为抗灰迹磷酸氧钛钾晶体。7. The dual-frequency laser according to claim 1, characterized in that the frequency doubling device (500) is an anti-smudge potassium titanyl phosphate crystal. 8.根据权利要求1所述的双频激光器,其特征在于,所述第一分光装置(600)用于使所述倍频装置(500)出射的经倍频后产生的激光反射输出,并使所述倍频装置(500)出射的未经倍频转换的激光透过所述第一分光装置(600)输出。8. The dual-frequency laser according to claim 1, characterized in that, the first spectroscopic device (600) is used to make the laser reflection output generated after frequency doubling emitted by the frequency doubling device (500), and The laser light emitted by the frequency doubling device (500) without frequency doubling conversion is output through the first light splitting device (600). 9.根据权利要求1所述的双频激光器,其特征在于,所述光参量振荡器(700)为周期极化的抗灰迹磷酸氧钛钾晶体。9. The dual-frequency laser according to claim 1, characterized in that the optical parametric oscillator (700) is a periodically poled anti-gray trace potassium titanyl phosphate crystal. 10.根据权利要求1-9任一项所述的双频激光器,其特征在于,还包括:10. The dual-frequency laser according to any one of claims 1-9, further comprising: 第二分光装置(800),用于使所述光参量振荡器(700)出射的激光中的一部分被反射输出,另一部分透过所述第二分光装置(800)射出。The second spectroscopic device (800) is configured to reflect and output a part of the laser light emitted by the optical parametric oscillator (700), and emit the other part through the second spectroscopic device (800).
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111082299A (en) * 2019-12-16 2020-04-28 北京理工大学 All-solid-state tunable intermediate infrared frequency comb generation device
WO2020207434A1 (en) * 2019-04-10 2020-10-15 上海禾赛光电科技有限公司 Laser and laser radar
CN113937607A (en) * 2021-11-04 2022-01-14 广东粤港澳大湾区硬科技创新研究院 A picosecond seed source excitation device
CN114682908A (en) * 2020-12-31 2022-07-01 苏州创鑫激光科技有限公司 Laser output system, processing platform and output method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020207434A1 (en) * 2019-04-10 2020-10-15 上海禾赛光电科技有限公司 Laser and laser radar
CN111082299A (en) * 2019-12-16 2020-04-28 北京理工大学 All-solid-state tunable intermediate infrared frequency comb generation device
CN111082299B (en) * 2019-12-16 2021-06-04 北京理工大学 All-solid-state tunable intermediate infrared frequency comb generation device
CN114682908A (en) * 2020-12-31 2022-07-01 苏州创鑫激光科技有限公司 Laser output system, processing platform and output method
CN113937607A (en) * 2021-11-04 2022-01-14 广东粤港澳大湾区硬科技创新研究院 A picosecond seed source excitation device

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