CN119787068B - A femtosecond disk laser generating an eye-safe wavelength - Google Patents

A femtosecond disk laser generating an eye-safe wavelength

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CN119787068B
CN119787068B CN202411982359.3A CN202411982359A CN119787068B CN 119787068 B CN119787068 B CN 119787068B CN 202411982359 A CN202411982359 A CN 202411982359A CN 119787068 B CN119787068 B CN 119787068B
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crystal
femtosecond
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disk
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CN119787068A (en
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张金伟
刘贺言
杨婷婷
陈子阳
夏贵淳
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Huazhong University of Science and Technology
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Abstract

The invention discloses a femtosecond disc laser generating a human eye safety wave band, belonging to the technical field of femtosecond laser. The femtosecond disc laser for generating the human eye safety wave band comprises a pump source, a disc crystal, a pump cavity and a resonant cavity, wherein the pump cavity enables pump light emitted by the pump source to pass through the disc laser crystal for multiple times and then excite to generate oscillation laser, a first branch in the resonant cavity comprises a high-dispersion mirror and an output mirror which are sequentially arranged along a light path, the oscillation laser is transmitted to the output mirror along the first branch, returns to the disc laser crystal along the original path and is reflected to a second branch, the second branch comprises a first concave mirror, a second concave mirror, a Cr 4+:YAG crystal and a high-reflection mirror which are sequentially arranged along the light path, and the Cr 4+:YAG crystal is used as a passive mode locking device and is used as a gain medium to generate a femtosecond laser pulse sequence of the human eye safety wave band. The femtosecond disk laser has a simple structure and can generate stable femtosecond laser output with a specific wave band.

Description

一种产生人眼安全波段的飞秒碟片激光器A femtosecond disk laser generating an eye-safe wavelength

技术领域Technical Field

本发明属于碟片激光器领域,更具体地,涉及一种产生人眼安全波段的飞秒碟片激光器。The present invention belongs to the field of disk lasers, and more particularly, relates to a femtosecond disk laser that generates an eye-safe wavelength band.

背景技术Background Art

碟片技术是将增益介质直径制作成10mm以上,厚度为100-300μm的薄片状结构,同时将碟片焊接在钨铜热沉或胶粘在导热性更好的金刚石热沉上并通过冲击式的水冷方式高效率地带走碟片上的热量,使得晶体仅存在一维方向的热梯度分布,有效地避免了增益介质的热透镜、热畸变以及非线性激发等问题,为高峰值功率、高平均功率与高光束质量的飞秒激光的产生提供了保障。The disk technology is to make the gain medium into a thin sheet structure with a diameter of more than 10mm and a thickness of 100-300μm. At the same time, the disk is welded to a tungsten-copper heat sink or glued to a diamond heat sink with better thermal conductivity. The heat on the disk is efficiently removed by an impact water cooling method, so that the crystal has only a one-dimensional thermal gradient distribution, effectively avoiding problems such as thermal lensing, thermal distortion and nonlinear excitation of the gain medium, and providing a guarantee for the generation of femtosecond lasers with high peak power, high average power and high beam quality.

目前高功率人眼安全的波段的飞秒激光主要基于块状晶体以及非线性频率变换的方式产生,采用的主要方式包括使用Cr4+:YAG晶体结合被动锁模机制、飞秒拉曼频移和光学参量振荡器等、飞秒拉曼频移和光学参量振荡器等,通过这些方法可以实现特定波段飞秒激光输出。但是现有激光器存在一些问题,如采用块状晶体受限于高功率泵浦条件下晶体的热效应与热畸变等问题,搭建的全固态飞秒激光器在没有后续放大的条件下飞秒脉冲的平均功率只有毫瓦量级,较低的平均功率会大幅度降低飞秒脉冲激光的信噪比。而采用飞秒拉曼频移与光参量振荡技术,则受限于自陡峭、受激拉曼散射以及非线性走离等问题,飞秒激光转换效率较低。因此,如何寻找一种能够直接输出高功率人眼安全波段飞秒脉冲成为目前所需解决的重要问题。Currently, high-power eye-safe femtosecond lasers are primarily generated using bulk crystals and nonlinear frequency conversion. Key approaches include using Cr 4+ :YAG crystals in combination with passive mode-locking mechanisms, femtosecond Raman frequency shifting, and optical parametric oscillators (OPOs). These methods can achieve femtosecond laser output in specific wavelength bands. However, existing lasers present several challenges. For example, the use of bulk crystals is limited by thermal effects and thermal distortion of the crystal under high-power pumping conditions. Without subsequent amplification, the average power of femtosecond pulses in all-solid-state femtosecond lasers is only in the milliwatt range. This low average power significantly reduces the signal-to-noise ratio of femtosecond pulses. Furthermore, the use of femtosecond Raman frequency shifting and optical parametric oscillation techniques is limited by self-steepening, stimulated Raman scattering, and nonlinear walk-off, resulting in low femtosecond laser conversion efficiency. Therefore, finding a method that can directly output high-power eye-safe femtosecond pulses has become a critical challenge.

发明内容Summary of the Invention

针对现有技术的缺陷和改进需求,本发明提供一种产生人眼安全波段的飞秒激光器,旨在解决现有激光器无法直接产生高功率人眼安全波段的飞秒激光脉冲序列。In response to the defects of the existing technology and the need for improvement, the present invention provides a femtosecond laser that generates a waveband that is safe for the human eye, aiming to solve the problem that the existing laser cannot directly generate a high-power femtosecond laser pulse sequence in the waveband that is safe for the human eye.

为实现上述目的,本发明提供了一种产生人眼安全波段的飞秒碟片激光器,其特征在于,包括:泵浦源,碟片激光晶体,泵浦腔和谐振腔;To achieve the above-mentioned object, the present invention provides a femtosecond disk laser that generates an eye-safe wavelength band, characterized in that it comprises: a pump source, a disk laser crystal, a pump cavity and a resonant cavity;

所述泵浦腔设置于所述泵浦源的出射光路上;所述碟片激光晶体,设置于所述泵浦腔内;所述泵浦腔使所述泵浦源发出的泵浦激光多次穿过所述碟片激光晶体后激发所述碟片激光晶体产生振荡激光;The pump cavity is arranged on the output light path of the pump source; the disk laser crystal is arranged in the pump cavity; the pump cavity allows the pump laser emitted by the pump source to pass through the disk laser crystal multiple times and then excite the disk laser crystal to generate oscillating laser light;

所述谐振腔设置于所述振荡激光描述碟片激光晶体输出的一侧,所述谐振腔包括第一分支和第二分支;The resonant cavity is arranged on one side of the output of the oscillating laser describing the disk laser crystal, and the resonant cavity includes a first branch and a second branch;

所述第一分支包括沿光路依次设置的色散镜组、硬光阑和输出镜;所述硬光阑用于辅助被动锁模;振荡激光沿所述第一分支传输至所述输出镜后,部分激光透过所述输出镜输出后,剩余激光沿原路返回至所述碟片激光晶体,并被反射至所述的第二分支;The first branch includes a dispersion mirror group, a hard aperture, and an output mirror arranged in sequence along the optical path; the hard aperture is used to assist in passive mode locking; after the oscillating laser is transmitted along the first branch to the output mirror, a portion of the laser light is output through the output mirror, and the remaining laser light returns to the disk laser crystal along the original path and is reflected to the second branch;

所述第二分支包括沿光路依次设置的第一凹面镜、第二凹面镜、Cr4+:YAG晶体和高反射镜;所述第一凹面镜和所述第二凹面镜的焦点重合,所述Cr4+:YAG晶体位于焦点处,所述第一凹面镜与第二凹面镜之间的距离位于谐振腔稳区中心;The second branch includes a first concave mirror, a second concave mirror, a Cr 4+ :YAG crystal, and a high-reflection mirror sequentially arranged along the optical path; the focal points of the first concave mirror and the second concave mirror coincide with each other, the Cr 4+ :YAG crystal is located at the focal points, and the distance between the first concave mirror and the second concave mirror is located at the center of the stable region of the resonant cavity;

所述Cr4+:YAG晶体作为可饱和吸收体,用于被动锁模,所述Cr4+:YAG晶体还作为增益介质,用于在振荡激光的作用下产生人眼安全波段的飞秒激光脉冲序列;人眼安全波段的飞秒激光脉冲序列经过所述高反射镜反射,沿原路返回至所述碟片激光晶体,经过所述碟片激光晶体反射后再次进入所述第一分支,所述输出镜输出人眼安全波段的飞秒激光脉冲序列。The Cr 4+ :YAG crystal serves as a saturable absorber for passive mode locking. The Cr 4+ :YAG crystal also serves as a gain medium for generating a femtosecond laser pulse sequence in an eye-safe band under the action of an oscillating laser. The femtosecond laser pulse sequence in the eye-safe band is reflected by the high-reflection mirror, returns along the original path to the disk laser crystal, and then enters the first branch again after being reflected by the disk laser crystal. The output mirror outputs the femtosecond laser pulse sequence in the eye-safe band.

可选的,所述碟片激光晶体为Yb:YAG晶体,其中,Yb3+掺杂浓度为7%;Optionally, the disk laser crystal is a Yb:YAG crystal, wherein the Yb 3+ doping concentration is 7%;

所述Cr4+:YAG晶体的Cr4+掺杂浓度范围为2%-7%,所述Cr4+:YAG晶体的长度范围为10mm-30mm;The Cr 4+ doping concentration of the Cr 4+ :YAG crystal is in the range of 2%-7%, and the length of the Cr 4+ :YAG crystal is in the range of 10 mm-30 mm;

所述人眼安全波段的飞秒激光脉冲序列的中心波长为1500nm。The central wavelength of the femtosecond laser pulse sequence in the human eye-safe band is 1500 nm.

可选的,所述Cr4+:YAG晶体表面两侧镀有对1000nm-1070nm和1300-1600nm波段的宽带增透膜,透射率大于99.9%。Optionally, both sides of the surface of the Cr 4+ :YAG crystal are coated with broadband antireflection films for wavelengths of 1000nm-1070nm and 1300-1600nm, with a transmittance greater than 99.9%.

可选的,所述色散镜组、第一凹面镜、第二凹面镜和高反镜的迎光面上镀有对1000nm-1070nm波段和1300-1600nm波段的宽带高反膜,反射率大于99.9%。Optionally, the light-facing surfaces of the dispersion mirror group, the first concave mirror, the second concave mirror and the high-reflection mirror are coated with broadband high-reflection films for the 1000nm-1070nm band and the 1300-1600nm band, with a reflectivity greater than 99.9%.

可选的,所述色散镜组包括沿光路依次设置的第一高色散镜和第二高色散镜。Optionally, the dispersion mirror group includes a first high dispersion mirror and a second high dispersion mirror arranged in sequence along the optical path.

可选的,所述输出镜的迎光面上镀有对1000nm-1070nm波段振荡激光全部反射的膜层以及对1300-1600nm波段部分透过的膜层,透过率范围为1%~20%;Optionally, the light-facing surface of the output mirror is coated with a film layer that fully reflects the oscillating laser in the 1000nm-1070nm band and partially transmits the 1300-1600nm band, with a transmittance range of 1% to 20%;

所述输出镜的出光面上镀有对1300-1600nm波段振荡激光的增透膜。The light-emitting surface of the output mirror is coated with an anti-reflection film for oscillating lasers in the 1300-1600nm band.

可选的,所述碟片激光晶体面向所述谐振腔的一侧镀有对泵浦激光和振荡激光的增透膜,在背向所述谐振腔的一侧镀有对泵浦激光和振荡激光的高反膜。Optionally, the side of the disk laser crystal facing the resonant cavity is coated with an anti-reflection film for the pump laser and the oscillator laser, and the side facing away from the resonant cavity is coated with a high-reflection film for the pump laser and the oscillator laser.

可选的,所述碟片激光晶体中镀有高反膜的表面固定在水冷热沉上。Optionally, the surface of the disk laser crystal coated with a high-reflection film is fixed on a water-cooled heat sink.

可选的,所述飞秒碟片激光器还包括晶体夹具;Optionally, the femtosecond disk laser further includes a crystal fixture;

所述晶体夹具夹持所述Cr4+:YAG晶体,所述晶体夹具内通有外循环冷却水,用于对所述Cr4+:YAG晶体进行散热。The crystal fixture clamps the Cr 4+ :YAG crystal, and external circulating cooling water is passed through the crystal fixture to dissipate heat from the Cr 4+ :YAG crystal.

通过本发明所构思的以上技术方案,与现有技术相比,能够取得以下有益效果:Compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

1、本发明提供了一种产生特定波段的飞秒碟片激光器,采用近似于一维薄片形状的碟片激光晶体作为增益介质,在较高功率的泵浦下可以有效散热,最大限度地减小热效应的产生,产生的少量热量可通过冲程式水冷结构高效带走。因此,碟片晶体更支持高功率的泵浦条件,从而可以输出高功率飞秒激光,同时谐振腔内也具有较高的平均功率。采用吸收谱线范围包含碟片激光晶体产生的振荡激光的中心波长的被动可饱和吸收体(Cr4+:YAG晶体),用于被动锁模,同时,还作为增益介质,用于在振荡激光的作用下产生目标波段(人眼安全波段)的飞秒激光脉冲序列;从而实现直接产生高功率、人眼安全波段的飞秒激光脉冲,扩宽了飞秒碟片激光器的应用场景。1. The present invention provides a femtosecond disk laser that generates a specific wavelength band. It uses a disk laser crystal with a shape similar to a one-dimensional thin sheet as a gain medium. Under high-power pumping, it can effectively dissipate heat, minimize the generation of thermal effects, and the small amount of heat generated can be efficiently removed by a stroke-type water-cooling structure. Therefore, the disk crystal is more compatible with high-power pumping conditions, thereby outputting high-power femtosecond lasers, while also having a high average power within the resonant cavity. A passive saturable absorber (Cr 4+ :YAG crystal) whose absorption spectrum range includes the central wavelength of the oscillating laser generated by the disk laser crystal is used for passive mode locking. At the same time, it also serves as a gain medium for generating a femtosecond laser pulse sequence in the target wavelength band (eye-safe band) under the action of the oscillating laser. This achieves the direct generation of high-power, eye-safe femtosecond laser pulses, broadening the application scenarios of femtosecond disk lasers.

2、本发明提供了一种产生特定波段的飞秒碟片激光器,采用Yb:YAG碟片作为增益介质,碟片厚度为130μm、直径为10mm的薄圆盘状;Cr4+:YAG晶体作为被动锁模器件,同时作为人眼安全波段激光产生的增益介质,在谐振腔内直接输出高功率人眼安全波段飞秒激光输出。2. The present invention provides a femtosecond disk laser that generates light in a specific wavelength band. This device uses a thin, 10mm-diameter, 130μm-thick Yb:YAG disk as a gain medium. A Cr 4+ :YAG crystal serves as both a passive mode-locking device and the gain medium for generating laser light in the eye-safe wavelength band. This device directly outputs high-power femtosecond laser light in the eye-safe wavelength band within the resonant cavity.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本发明实施例提供了一种产生特定波段的飞秒碟片激光器的结构示意图;FIG1 is a schematic structural diagram of a femtosecond disk laser generating a specific wavelength band according to an embodiment of the present invention;

附图中的附图标记如下:The reference numerals in the accompanying drawings are as follows:

1、泵浦源,2、碟片激光晶体,3、泵浦腔,4、谐振腔,5、Cr4+:YAG晶体,6、第一高色散镜,7、第二高色散镜,8、硬光阑,9、输出镜,10、第一凹面镜,11、第二凹面镜,12、高反射镜。1. Pump source, 2. Disk laser crystal, 3. Pump cavity, 4. Resonant cavity, 5. Cr 4+ :YAG crystal, 6. First high-dispersion mirror, 7. Second high-dispersion mirror, 8. Hard aperture, 9. Output mirror, 10. First concave mirror, 11. Second concave mirror, 12. High-reflection mirror.

具体实施方式DETAILED DESCRIPTION

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

下面结合一个优选实施例,对上述实施例中涉及的内容进行说明。The contents involved in the above embodiment are described below in conjunction with a preferred embodiment.

如图1所示,一种产生人眼安全波段的飞秒碟片激光器,包括:泵浦源1,碟片激光晶体2,泵浦腔3和谐振腔4;As shown in FIG1 , a femtosecond disk laser generating an eye-safe wavelength band includes: a pump source 1, a disk laser crystal 2, a pump cavity 3, and a resonant cavity 4;

所述泵浦腔3设置于所述泵浦源1的出射光路上;所述碟片激光晶体2,设置于所述泵浦腔3内;所述泵浦腔3使所述泵浦源1发出的泵浦激光多次穿过所述碟片激光晶体2后激发所述碟片激光晶体2产生振荡激光;The pump cavity 3 is arranged on the output light path of the pump source 1; the disk laser crystal 2 is arranged in the pump cavity 3; the pump cavity 3 allows the pump laser emitted by the pump source 1 to pass through the disk laser crystal 2 multiple times and then excite the disk laser crystal 2 to generate oscillating laser light;

所述谐振腔4设置于所述振荡激光描述碟片激光晶体输出的一侧,所述谐振腔4包括第一分支和第二分支;The resonant cavity 4 is arranged on one side of the output of the oscillating laser describing the disk laser crystal, and the resonant cavity 4 includes a first branch and a second branch;

所述第一分支包括沿光路依次设置的色散镜组、硬光阑8和输出镜9;所述硬光阑8用于辅助被动锁模;振荡激光沿所述第一分支传输至所述输出镜9后,部分激光透过所述输出镜9输出后,剩余激光沿原路返回至所述碟片激光晶体2,并被反射至所述的第二分支;The first branch includes a dispersion mirror group, a hard aperture 8, and an output mirror 9 arranged in sequence along the optical path; the hard aperture 8 is used to assist in passive mode locking; after the oscillating laser is transmitted along the first branch to the output mirror 9, a portion of the laser light is output through the output mirror 9, and the remaining laser light returns to the disk laser crystal 2 along the original path and is reflected to the second branch;

所述第二分支包括沿光路依次设置的第一凹面镜10、第二凹面镜11、Cr4+:YAG晶体5和高反射镜12;所述第一凹面镜11和所述第二凹面镜11的焦点重合,所述Cr4+:YAG晶体5位于焦点处,所述第一凹面镜10与第二凹面镜11之间的距离位于谐振腔稳区中心;The second branch includes a first concave mirror 10, a second concave mirror 11, a Cr 4+ :YAG crystal 5, and a high-reflection mirror 12, which are sequentially arranged along the optical path. The focal points of the first concave mirror 11 and the second concave mirror 11 coincide with each other, the Cr 4+ :YAG crystal 5 is located at the focal points, and the distance between the first concave mirror 10 and the second concave mirror 11 is located at the center of the stable region of the resonant cavity.

所述Cr4+:YAG晶体5作为可饱和吸收体,用于被动锁模,所述Cr4+:YAG晶体还作为增益介质,用于在振荡激光的作用下产生人眼安全波段的飞秒激光脉冲序列;人眼安全波段的飞秒激光脉冲序列经过所述高反射镜12反射,沿原路返回至所述碟片激光晶体2,经过所述碟片激光晶体2反射后再次进入所述第一分支,所述输出镜9输出人眼安全波段的飞秒激光脉冲序列。The Cr 4+ :YAG crystal 5 serves as a saturable absorber for passive mode locking. The Cr 4+ :YAG crystal also serves as a gain medium for generating a femtosecond laser pulse sequence in the eye-safe band under the action of the oscillating laser. The femtosecond laser pulse sequence in the eye-safe band is reflected by the high-reflection mirror 12 and returns along the original path to the disk laser crystal 2. After being reflected by the disk laser crystal 2, it enters the first branch again. The output mirror 9 outputs the femtosecond laser pulse sequence in the eye-safe band.

其中,所述碟片激光晶体2产生的振荡激光的中心波长在所述Cr4+:YAG晶体5的吸收谱线范围内,所述振荡激光作为所述Cr4+:YAG晶体5的泵浦光源使其产生人眼安全波段的飞秒激光脉冲序列。The central wavelength of the oscillating laser generated by the disk laser crystal 2 is within the absorption spectrum of the Cr 4+ :YAG crystal 5 . The oscillating laser serves as the pump light source of the Cr 4+ :YAG crystal 5 to generate a femtosecond laser pulse sequence in the human eye-safe band.

为了在不增加结构复杂度和能量损耗的情况下,使碟片激光器产生稳定且可持续运转的飞秒脉冲输出,本发明提供了一种产生人眼安全波段飞秒碟片激光器,使用Cr4+:YAG晶体5作为可饱和吸收体,用于1030nm波段的被动锁模,同时,由于碟片激光晶体2产生的振荡激光的中心波长处于选择的Cr4+:YAG晶体5荧光吸收谱线范围内,因此,Cr4+:YAG晶体5还作为增益介质,用于在碟片激光晶体2产生的振荡激光的作用下产生人眼安全波段的飞秒激光脉冲序列。该飞秒碟片激光器输出的飞秒激光脉冲序列的宽度达到飞秒量级,并且飞秒激光脉冲具有高功率和高稳定,显著地简化了装置的设计和操作。To ensure stable and sustainable femtosecond pulse output from a disk laser without increasing structural complexity or energy loss, the present invention provides a femtosecond disk laser that generates eye-safe wavelengths. This device uses a Cr 4+ :YAG crystal 5 as a saturable absorber for passive mode locking in the 1030nm band. Furthermore, because the central wavelength of the oscillating laser light generated by the disk laser crystal 2 falls within the selected fluorescence absorption spectrum of the Cr 4+ :YAG crystal 5, the Cr 4+ :YAG crystal 5 also serves as a gain medium, generating an eye-safe femtosecond laser pulse train under the influence of the oscillating laser light generated by the disk laser crystal 2. The femtosecond laser pulse train output by this femtosecond disk laser has a femtosecond-scale width, and the femtosecond laser pulses are both high power and highly stable, significantly simplifying the design and operation of the device.

其中,碟片激光晶体2作为增益介质,吸收泵浦激光产生的能量后产生振荡激光,同时,碟片激光晶体2作为谐振腔的折返镜以反射振荡激光,故在碟片激光晶体2的两侧镀有不同的介质膜,面向谐振腔的一侧镀有泵浦激光和振荡激光的增透膜,背向谐振腔的一侧镀有泵浦激光和振荡激光的高反膜。其中,碟片激光晶体2镀高反膜的表面固定在具有冲程结构的水冷热沉上。The disk laser crystal 2 serves as a gain medium, absorbing the energy from the pump laser to generate oscillating laser light. It also acts as a reflective mirror within the resonant cavity, reflecting the oscillating laser light. Therefore, different dielectric coatings are applied to both sides of the disk laser crystal 2: an anti-reflection coating for the pump and oscillating laser light on the side facing the resonant cavity, and a high-reflection coating for both the pump and oscillating laser light on the side facing away from the resonant cavity. The surface of the disk laser crystal 2 coated with the high-reflection coating is fixed to a water-cooled heat sink with a stroke structure.

可选的,根据腔内模式分布,采用不同大小的硬光阑8设置在腔内不同位置,用于提高腔内的衍射损耗,用以辅助锁模。Optionally, according to the mode distribution in the cavity, hard apertures 8 of different sizes are set at different positions in the cavity to increase the diffraction loss in the cavity to assist in mode locking.

如图1所示,泵浦源1用于产生泵浦激光,可选用半导体激光器、光纤激光器和固体激光器等,在本实施例中具体使用光纤耦合输出的半导体激光器作为泵浦源,泵浦激光波长为940nm或969nm。在本实施例中,泵浦腔3包括抛物面镜和一系列折返棱镜,抛物面镜和一系列折返棱镜按照设定规律置于泵浦源1和碟片激光晶体2之间的光路中,碟片激光晶体2被放置在抛物面镜的焦点处,输入的泵浦光经过抛物面镜和折返棱镜的多次反射聚焦到碟片晶体2上。碟片激光晶体2采用直径10mm、厚度130μm的圆盘状的Yb:YAG(掺杂浓度为7%)激光晶体,其材料为工艺成熟的Yb:YAG材料,用于提供1030nm激光产生的增益介质,其设置于泵浦腔3内。泵浦腔3使泵浦源1发出的泵浦激光多次穿过碟片激光晶体2后激发碟片激光晶体2产生振荡激光。As shown in Figure 1, a pump source 1 is used to generate pump laser light. Semiconductor lasers, fiber lasers, and solid-state lasers can be used. In this embodiment, a fiber-coupled semiconductor laser is used as the pump source, with a pump laser wavelength of 940 nm or 969 nm. In this embodiment, a pump cavity 3 comprises a parabolic mirror and a series of refraction prisms, which are positioned in the optical path between the pump source 1 and a disk laser crystal 2 according to a predetermined pattern. The disk laser crystal 2 is positioned at the focal point of the parabolic mirror. The input pump light is focused onto the disk laser crystal 2 after multiple reflections from the parabolic mirror and the refraction prisms. The disk laser crystal 2 is a disc-shaped Yb:YAG (doping concentration 7%) laser crystal with a diameter of 10 mm and a thickness of 130 μm. Made from the well-established Yb:YAG material, it provides the gain medium for 1030 nm laser generation and is located within the pump cavity 3. The pump cavity 3 allows the pump laser emitted by the pump source 1 to pass through the disk laser crystal 2 multiple times and then excite the disk laser crystal 2 to generate oscillating laser light.

进一步的,本实施例中采用48通泵浦结构,即泵浦激光48次穿过碟片激光晶体2,大大提高了碟片晶体对泵浦光的吸收效率。在其他的一些实施例中,也可根据实际需要,采用24通泵浦结构、36通泵浦结构或更高的72通泵浦结构等。Furthermore, this embodiment employs a 48-pass pumping structure, meaning the pump laser passes through the disk laser crystal 2 48 times, significantly improving the disk crystal's absorption efficiency of the pump light. In other embodiments, a 24-pass pumping structure, a 36-pass pumping structure, or even a 72-pass pumping structure may be employed, depending on actual needs.

在本实施例中,谐振腔4用于输出1300-1600nm宽波段的飞秒脉冲,其设置于振荡激光自碟片激光晶体输出的一侧,包括第一分支和第二分支;In this embodiment, the resonant cavity 4 is used to output femtosecond pulses in a wide wavelength band of 1300-1600 nm. It is located on one side of the oscillating laser output from the disk laser crystal and includes a first branch and a second branch.

本实施例中,色散镜具体包括沿光路依次设置的第一高色散镜6和第二高色散镜7;振荡激光自碟片激光晶体2入射到第一分支后,首先入射到第一高色散镜6上,而后被反射到第二高色散镜7上,之后被反射到输出镜9上,部分激光透过所述输出镜9输出,剩余激光被所述输出镜6反射,沿原路返回至碟片激光晶体2,并被反射至第二分支。In this embodiment, the dispersion mirror specifically includes a first high-dispersion mirror 6 and a second high-dispersion mirror 7 arranged in sequence along the optical path; after the oscillating laser is incident on the first branch from the disk laser crystal 2, it first enters the first high-dispersion mirror 6, and then is reflected on the second high-dispersion mirror 7, and then is reflected on the output mirror 9. Part of the laser light is output through the output mirror 9, and the remaining laser light is reflected by the output mirror 6, returns to the disk laser crystal 2 along the original path, and is reflected to the second branch.

在该飞秒碟片激光器种,Cr4+:YAG晶体5作为1030nm波段被动锁模的调制器件。同时,Cr4+:YAG晶体5在970nm-1100nm范围之间具有较强的荧光吸收谱线;因此,谐振腔内1030nm的飞秒激光可作为Cr4+:YAG晶体人眼安全波段飞秒激光产生的泵浦光源。In this femtosecond disk laser, the Cr 4+ :YAG crystal 5 serves as the modulation device for passive mode locking in the 1030nm band. Furthermore, the Cr 4+ :YAG crystal 5 exhibits strong fluorescence absorption lines between 970nm and 1100nm; therefore, the 1030nm femtosecond laser within the resonant cavity serves as the pump source for the Cr 4+ :YAG crystal's eye-safe femtosecond laser.

飞秒碟片激光器的碟片激光晶体2为Yb:YAG晶体,产生中心波长为1030nm的振荡激光,振荡激光在第一分支、碟片激光晶体与第二分支之间往复振荡增强,并不断被Cr4+:YAG晶体进行调制,从而形成以1030nm为中心波长的高功率稳定飞秒激光脉冲序列。The disk laser crystal 2 of the femtosecond disk laser is a Yb:YAG crystal, which generates an oscillating laser with a central wavelength of 1030nm. The oscillating laser oscillates and strengthens back and forth between the first branch, the disk laser crystal, and the second branch, and is continuously modulated by the Cr 4+ :YAG crystal, thereby forming a high-power stable femtosecond laser pulse sequence with a central wavelength of 1030nm.

进一步地,Cr4+:YAG晶体5不断吸收谐振腔内1030nm波段的飞秒激光,当1300-1600nm波段激光的增益大于损耗时,谐振腔内将产生宽带的人眼安全波段飞秒激光,并经过谐振腔内的反射镜不断放大,形成稳定的脉冲序列,并部分透过输出镜6输出,剩余部分沿原路返回至碟片激光晶体2,并被反射至第二分支,实现振荡激光在谐振腔中的往返振荡。Furthermore, the Cr 4+ :YAG crystal 5 continuously absorbs the 1030nm band femtosecond laser in the resonant cavity. When the gain of the laser in the 1300-1600nm band is greater than the loss, a broadband eye-safe band femtosecond laser will be generated in the resonant cavity. The laser is continuously amplified by the reflector in the resonant cavity to form a stable pulse sequence. Part of the laser is output through the output mirror 6, and the remaining part returns to the disk laser crystal 2 along the original path and is reflected to the second branch, realizing the round-trip oscillation of the oscillating laser in the resonant cavity.

进一步地,Cr4+:YAG晶体5的长度在10mm-30mm范围内进行选择,Cr4+离子的掺杂浓度2%-7%范围内可选择,即晶体的不同长度和掺杂浓度之间互相组合,根据实验现象进行相应调整。Furthermore, the length of the Cr 4+ :YAG crystal 5 is selected within the range of 10 mm to 30 mm, and the doping concentration of Cr 4+ ions is selectable within the range of 2% to 7%. That is, different crystal lengths and doping concentrations are combined and adjusted accordingly based on experimental phenomena.

为进一步降低谐振腔内能量的损耗,对Cr4+:YAG晶体5的通光面进行了优化。具体为,所述Cr4+:YAG晶体表面两侧镀有对1000nm-1070nm和1300-1600nm波段的宽带增透膜,透射率大于99.9%。To further reduce energy loss in the resonant cavity, the light-transmitting surface of the Cr 4+ :YAG crystal 5 was optimized. Specifically, both sides of the Cr 4+ :YAG crystal surface were coated with broadband antireflection coatings for the 1000nm-1070nm and 1300-1600nm bands, with a transmittance greater than 99.9%.

可选的,所述色散镜组、第一凹面镜10、第二凹面镜11和高反镜12的迎光面上镀有对1000nm-1070nm波段和1300-1600nm波段的宽带高反膜,反射率大于99.9%。Optionally, the light-facing surfaces of the dispersion mirror group, the first concave mirror 10, the second concave mirror 11 and the high-reflection mirror 12 are coated with broadband high-reflection films for the 1000nm-1070nm band and the 1300-1600nm band, with a reflectivity greater than 99.9%.

可选的,所述输出镜9的迎光面上镀有对1000nm-1070nm波段振荡激光全部反射的膜层以及对1300-1600nm波段部分透过的膜层,透过率范围为1%~20%;Optionally, the light-facing surface of the output mirror 9 is coated with a film layer that fully reflects the oscillating laser in the 1000nm-1070nm band and partially transmits the 1300-1600nm band, with a transmittance range of 1% to 20%;

所述输出镜9的出光面上镀有对1300-1600nm波段振荡激光的增透膜。The light-emitting surface of the output mirror 9 is coated with an anti-reflection film for oscillating lasers in the 1300-1600 nm band.

其中,输出镜9的反射面上也镀有对1000nm-1070nm和振荡激光的高反膜,反射率大于99.9%。The reflective surface of the output mirror 9 is also coated with a high-reflective film for 1000nm-1070nm and oscillating lasers, with a reflectivity greater than 99.9%.

谐振腔4内第一凹面镜10、第二凹面镜11与高反镜12的迎面镀有1300-1600nm高反射膜,输出镜9的迎面镀有1300-1600nm部分透射膜,从而保证1300-1600nm的飞秒激光在第一分支、碟片激光晶体与第二分支之间往复振荡增强,最终输出高功率人眼安全波段飞秒激光脉冲。The front surfaces of the first concave mirror 10, the second concave mirror 11 and the high-reflection mirror 12 in the resonant cavity 4 are coated with a 1300-1600nm high-reflection film, and the front surface of the output mirror 9 is coated with a 1300-1600nm partially transmissive film, thereby ensuring that the 1300-1600nm femtosecond laser oscillates and strengthens back and forth between the first branch, the disk laser crystal and the second branch, and ultimately outputs high-power femtosecond laser pulses in the human eye-safe band.

可选的,所述飞秒碟片激光器还包括晶体夹具;Optionally, the femtosecond disk laser further includes a crystal fixture;

所述晶体夹具夹持所述Cr4+:YAG晶体5,所述晶体夹具内通有外循环冷却水,用于对所述Cr4+:YAG晶体5进行散热。The crystal fixture holds the Cr 4+ :YAG crystal 5 , and external circulating cooling water is passed through the crystal fixture for dissipating heat from the Cr 4+ :YAG crystal 5 .

进一步地,Cr4+:YAG晶体5周围包裹银箔并被晶体夹具夹持,晶体夹具采用紫铜材料,晶体夹具有外循环冷却水,并根据谐振腔内的平均功率进行温度调整。包裹的银箔用于Cr4+:YAG晶体5和紫铜材料贴合更加紧密,提升冷却效果。Furthermore, the Cr 4+ :YAG crystal 5 is wrapped with silver foil and held in a copper fixture. The fixture has external cooling water and adjusts its temperature based on the average power within the resonant cavity. The silver foil ensures a tighter fit between the Cr 4+ :YAG crystal 5 and the copper, improving cooling efficiency.

采取上述飞秒碟片激光器,将Cr4+:YAG晶体同时作为1μm波段被动锁模的元器件,又可作为人眼安全飞秒激光产生的增益介质,可以获得稳定的高功率人眼安全波段(目标波段)的飞秒激光脉冲,显著地简化了装置的设计和操作。本发明提供的产生特定波段的飞秒碟片激光器的结构简单、结构紧凑,可广泛用于激光雷达、工业测距以及眼科手术等领域,具有良好的发展与应用前景。By employing the aforementioned femtosecond disk laser, the Cr 4+ :YAG crystal serves both as a passive mode-locking component in the 1μm band and as a gain medium for eye-safe femtosecond laser generation. This allows for stable, high-power femtosecond laser pulses in the eye-safe band (the target band), significantly simplifying the design and operation of the device. The femtosecond disk laser generating a specific wavelength, provided by the present invention, possesses a simple and compact structure and is widely applicable in fields such as lidar, industrial ranging, and ophthalmic surgery, with promising development and application prospects.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It will be easily understood by those skilled in the art that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims (9)

1.一种产生人眼安全波段的飞秒碟片激光器,其特征在于,包括:泵浦源(1),碟片激光晶体(2),泵浦腔(3)和谐振腔(4);1. A femtosecond disk laser generating an eye-safe wavelength band, characterized by comprising: a pump source (1), a disk laser crystal (2), a pump cavity (3) and a resonant cavity (4); 所述泵浦腔(3)设置于所述泵浦源(1)的出射光路上;所述碟片激光晶体(2),设置于所述泵浦腔(3)内;所述泵浦腔(3)使所述泵浦源(1)发出的泵浦激光多次穿过所述碟片激光晶体(2)后激发所述碟片激光晶体(2)产生振荡激光;The pump cavity (3) is arranged on the output light path of the pump source (1); the disk laser crystal (2) is arranged in the pump cavity (3); the pump cavity (3) allows the pump laser emitted by the pump source (1) to pass through the disk laser crystal (2) multiple times and then excite the disk laser crystal (2) to generate oscillating laser light; 所述谐振腔(4)设置于所述振荡激光描述碟片激光晶体输出的一侧,所述谐振腔(4)包括第一分支和第二分支;The resonant cavity (4) is arranged on one side of the output of the oscillating laser describing the disk laser crystal, and the resonant cavity (4) comprises a first branch and a second branch; 所述第一分支包括沿光路依次设置的色散镜组、硬光阑(8)和输出镜(9);所述硬光阑(8)用于辅助被动锁模;振荡激光沿所述第一分支传输至所述输出镜(9)后,部分激光透过所述输出镜(9)输出后,剩余激光沿原路返回至所述碟片激光晶体(2),并被反射至所述的第二分支;The first branch includes a dispersion mirror group, a hard aperture (8), and an output mirror (9) arranged in sequence along the optical path; the hard aperture (8) is used to assist passive mode locking; after the oscillating laser is transmitted along the first branch to the output mirror (9), a portion of the laser is output through the output mirror (9), and the remaining laser returns to the disk laser crystal (2) along the original path and is reflected to the second branch; 所述第二分支包括沿光路依次设置的第一凹面镜(10)、第二凹面镜(11)、Cr4+:YAG晶体(5)和高反射镜(12);所述第一凹面镜(11)和所述第二凹面镜(11)的焦点重合,所述Cr4+:YAG晶体(5)位于焦点处,所述第一凹面镜(10)与第二凹面镜(11)之间的距离位于谐振腔稳区中心;The second branch comprises a first concave mirror (10), a second concave mirror (11), a Cr 4+ :YAG crystal (5) and a high reflective mirror (12) arranged in sequence along the optical path; the focal points of the first concave mirror (11) and the second concave mirror (11) coincide with each other, the Cr 4+ :YAG crystal (5) is located at the focal point, and the distance between the first concave mirror (10) and the second concave mirror (11) is located at the center of the stable region of the resonant cavity; 所述Cr4+:YAG晶体(5)作为可饱和吸收体,用于被动锁模,所述Cr4+:YAG晶体还作为增益介质,用于在振荡激光的作用下产生人眼安全波段的飞秒激光脉冲序列;人眼安全波段的飞秒激光脉冲序列经过所述高反射镜(12)反射,沿原路返回至所述碟片激光晶体(2),经过所述碟片激光晶体(2)反射后再次进入所述第一分支,所述输出镜(9)输出人眼安全波段的飞秒激光脉冲序列。The Cr 4+ :YAG crystal (5) serves as a saturable absorber for passive mode locking, and the Cr 4+ :YAG crystal also serves as a gain medium for generating a femtosecond laser pulse sequence in the human eye-safe band under the action of an oscillating laser; the femtosecond laser pulse sequence in the human eye-safe band is reflected by the high-reflection mirror (12), returns along the original path to the disk laser crystal (2), and enters the first branch again after being reflected by the disk laser crystal (2); the output mirror (9) outputs the femtosecond laser pulse sequence in the human eye-safe band. 2.如权利要求1所述的飞秒碟片激光器,其特征在于,所述碟片激光晶体(2)为Yb:YAG晶体,其中,Yb3+掺杂浓度为7%;2. The femtosecond disk laser according to claim 1, wherein the disk laser crystal (2) is a Yb:YAG crystal, wherein the Yb 3+ doping concentration is 7%; 所述Cr4+:YAG晶体(5)的Cr4+掺杂浓度范围为2%-7%,所述Cr4+:YAG晶体(5)的长度范围为10mm-30mm;The Cr 4+ doping concentration of the Cr 4+ :YAG crystal (5) is in the range of 2%-7%, and the length of the Cr 4+ :YAG crystal (5) is in the range of 10 mm-30 mm; 所述人眼安全波段的飞秒激光脉冲序列的中心波长为1500nm。The central wavelength of the femtosecond laser pulse sequence in the eye-safe band is 1500 nm. 3.如权利要求2所述的飞秒碟片激光器,其特征在于,所述Cr4+:YAG晶体(5)表面两侧镀有对1000nm-1070nm和1300-1600nm波段的宽带增透膜,透射率大于99.9%。3. The femtosecond disk laser according to claim 2, characterized in that both sides of the surface of the Cr 4+ :YAG crystal (5) are coated with broadband antireflection coatings for the 1000nm-1070nm and 1300-1600nm bands, and the transmittance is greater than 99.9%. 4.如权利要求2所述的飞秒碟片激光器,其特征在于,所述色散镜组、第一凹面镜(10)、第二凹面镜(11)和高反镜(12)的迎光面上镀有对1000nm-1070nm波段和1300-1600nm波段的宽带高反膜,反射率大于99.9%。4. The femtosecond disk laser according to claim 2, characterized in that the light-facing surfaces of the dispersion mirror assembly, the first concave mirror (10), the second concave mirror (11), and the high-reflection mirror (12) are coated with a broadband high-reflection film for the 1000nm-1070nm band and the 1300-1600nm band, with a reflectivity greater than 99.9%. 5.如权利要求4所述的飞秒碟片激光器,其特征在于,所述色散镜组包括沿光路依次设置的第一高色散镜(6)和第二高色散镜(7)。5. The femtosecond disk laser according to claim 4, wherein the dispersion mirror assembly comprises a first high-dispersion mirror (6) and a second high-dispersion mirror (7) sequentially arranged along the optical path. 6.如权利要求2所述的飞秒碟片激光器,其特征在于,所述输出镜(9)的迎光面上镀有对1000nm-1070nm波段振荡激光全部反射的膜层以及对1300-1600nm波段部分透过的膜层,透过率范围为1%~20%;6. The femtosecond disk laser according to claim 2, characterized in that the light-facing surface of the output mirror (9) is coated with a film layer that fully reflects the oscillating laser in the 1000nm-1070nm band and a film layer that partially transmits the 1300-1600nm band, with a transmittance range of 1% to 20%; 所述输出镜(9)的出光面上镀有对1300-1600nm波段振荡激光的增透膜。The light-emitting surface of the output mirror (9) is coated with an anti-reflection film for oscillating laser light in the 1300-1600 nm band. 7.如权利要求1~6任一项所述的飞秒碟片激光器,其特征在于,所述碟片激光晶体(2)面向所述谐振腔(4)的一侧镀有对泵浦激光和振荡激光的增透膜,在背向所述谐振腔(4)的一侧镀有对泵浦激光和振荡激光的高反膜。7. The femtosecond disk laser according to any one of claims 1 to 6, characterized in that the disk laser crystal (2) is coated with an anti-reflection film for pump laser and oscillator laser on the side facing the resonant cavity (4), and is coated with a high-reflection film for pump laser and oscillator laser on the side facing away from the resonant cavity (4). 8.如权利要求7所述的飞秒碟片激光器,其特征在于,所述碟片激光晶体(2)中镀有高反膜的表面固定在水冷热沉上。8. The femtosecond disk laser according to claim 7, characterized in that the surface of the disk laser crystal (2) coated with the high-reflection film is fixed on a water-cooled heat sink. 9.如权利要求1所述的飞秒碟片激光器,其特征在于,所述飞秒碟片激光器还包括晶体夹具;9. The femtosecond disk laser according to claim 1, further comprising a crystal holder; 所述晶体夹具夹持所述Cr4+:YAG晶体,所述晶体夹具内通有外循环冷却水,用于对所述Cr4+:YAG晶体进行散热。The crystal fixture clamps the Cr 4+ :YAG crystal, and external circulating cooling water is passed through the crystal fixture to dissipate heat from the Cr 4+ :YAG crystal.
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