CN113396249B - Workpiece holding fixtures and surface treatment devices - Google Patents

Abstract

A work holding jig (30) which hangs down and holds a work (20) subjected to surface treatment and is capable of being electrically connected to a rectifier, comprising: an electrically conductive upper clamp (510) for clamping an upper edge portion (20 a) of a workpiece; the conductive 1 st side dummy member and the conductive 2 nd side dummy member are disposed near both side edge portions (20 c, 20 d) of the workpiece; a common conductive member (360) capable of conducting electricity with the rectifier; branch 1 conductive members (370A, 370B, 531) electrically connected to the common conductive member, branched from the common conductive member, and electrically connected to the workpiece via the upper clamp; and a 2 nd branch conductive member (900A, 900B) electrically connected to the common conductive member, branched from the common conductive member, and conductive to the 1 st side dummy member and the 2 nd side dummy member.

Description

Workpiece holding fixtures and surface treatment devices

Technical Field

The present invention relates to a workpiece holding jig and a surface treatment device used in surface treatment such as electroplating.

Background Art

A continuous plating device is known that performs electroplating while continuously conveying a workpiece by hanging the workpiece down with a workpiece holding jig and immersing the workpiece in a treatment liquid in a treatment tank (Patent Documents 1 and 2). The workpiece holding jig holds the workpiece and sets the workpiece as a cathode.

Prior art literature

Patent Literature

Patent Document 1: Japanese Patent No. 5898540

Patent Document 2: WO2018/062259

Summary of the invention

Problems to be solved by the invention

For a workpiece held by a workpiece holding fixture, the electric field between the anode and cathode is easily concentrated on the edge of the workpiece, so that the surface treatment of the edge is concentrated, for example, in the case of electroplating, the thickness of the plating film on the edge becomes thicker.

An object of some aspects of the present invention is to adjust the current flowing through the side edge portion of a workpiece held by a workpiece holding jig to improve the in-plane uniformity of the workpiece subjected to surface treatment.

Means for solving problems

(1) One aspect of the present invention relates to a workpiece holding fixture that holds a workpiece to be surface-treated while being suspended and electrically connectable to a rectifier, comprising:

A conductive upper clamp for clamping the upper edge of the workpiece;

The conductive first-side dummy component and the conductive second-side dummy component are arranged close to the two side edges of the workpiece;

A common conductive member capable of conducting electricity with the rectifier;

a first branch conductive member electrically connected to the common conductive member, branched from the common conductive member, and conductively connected to the workpiece via the upper clamp; and

The second branched conductive member is electrically connected to the common conductive member, is branched from the common conductive member, and is conductively connected to the first-side dummy member and the second-side dummy member.

According to one embodiment of the present invention, a workpiece holding fixture electrically connected to a rectifier is electrically connected to the workpiece via a common conductive member and a first branch conductive member, and is electrically connected to a first side dummy member and a second side dummy member via a common conductive member and a second branch conductive member. The total current flowing through the workpiece, the first side dummy member, and the second side dummy member can be set by the rectifier. If there are no first side dummy members and second side dummy members, the electric field is concentrated on the two side edges of the workpiece, or the current flowing through the two side edges will not be as expected due to the influence of the longitudinal frame of the fixture. By setting the resistance value of the second branch conductive member independently relative to the first branch conductive member, the current flowing through the first side dummy member and the second side dummy member can be set independently of the current flowing through the workpiece. Thus, by also performing surface treatment on the first side dummy member and the second side dummy member disposed close to the side edge of the workpiece, the current flowing through the side edge of the workpiece can be adjusted, and the in-plane uniformity of the workpiece subjected to surface treatment can be improved. It should be noted that the jig according to one embodiment of the present invention may be continuously or intermittently transported in the processing tank, or may be supported so as to be freely in and out of the processing tank without being transported.

(2) In one embodiment (1) of the present invention, the second branch conductive component may include: a first dummy conductive component branched from the common conductive component and conductively connected to the first side dummy component; and a second dummy conductive component branched from the common conductive component and conductively connected to the second side dummy component.

By independently setting the resistance values of the first and second dummy conduction members, the currents flowing through the first and second dummy conduction members can be independently set. Thus, the currents flowing through one side edge and the other side edge of the workpiece can be adjusted.

(3) In one aspect (2) of the present invention, the first dummy conduction member may include a first variable resistor having a variable resistance value, and the second dummy conduction member may include a second variable resistor having a variable resistance value.

In this way, by adjusting the resistance value using the first variable resistor and the second variable resistor, the resistance value of the first dummy conduction member and the resistance value of the second-side dummy member can be arbitrarily adjusted within a predetermined range.

(4) In one embodiment (2) or (3) of the present invention, the first dummy conductive component is conductively connected to the upper portion of the first-side dummy component, and the second dummy conductive component is conductively connected to the upper portion of the second-side dummy component. A connecting component can be further provided to electrically connect the lower portion of the first-side dummy component to the lower portion of the second-side dummy component.

By providing the connection member, the current also easily flows to the lower parts of the first side dummy member and the second side dummy member, and the current flowing from the upper part to the lower part can be effectively adjusted at the both side edges of the workpiece.

(5) In one embodiment (2) or (3) of the present invention, the first dummy conductive member is conductively connected to the upper portion of the first side dummy member, and the second dummy conductive member is conductively connected to the upper portion of the second side dummy member. The first side dummy member and the second side dummy member can each be formed such that the width parallel to the thickness direction of the workpiece is narrower at the upper portion than at the lower portion.

The first side dummy component and the second side dummy component have a tendency to be more surface treated at the upper part than at the lower part, and therefore, the upper part of the two side edges of the workpiece tends to be difficult to be surface treated. By reducing the width of the first side dummy component and the second side dummy component at the upper part, the upper part of the two side edges of the workpiece is easy to be surface treated. Thus, the current flowing from the upper part to the lower part can be effectively adjusted at the two side edges of the workpiece.

(6) In one aspect (5) of the present invention, a connection member that electrically connects a lower portion of the first-side dummy member and a lower portion of the second-side dummy member may be further provided.

In this way, the effects of both the above-mentioned methods (4) and (5) can be achieved.

(7) In one embodiment (1) to (6) of the present invention, it is possible to further include: a lower side clamp, clamping the lower edge of the above-mentioned workpiece; and a third branch conductive member, electrically connected to the above-mentioned common conductive member, branching from the above-mentioned common conductive member, and conductively connected to the above-mentioned workpiece via the above-mentioned lower side clamp.

In this way, the current flows to the workpiece via the upper clamp and the lower clamp, so the in-plane uniformity of the workpiece subjected to the surface treatment is improved.

(8) Another aspect of the present invention is a workpiece holding fixture that holds a workpiece to be surface-treated while being suspended and electrically connected to a rectifier, and that can include:

A quadrilateral frame surrounds the workpiece;

A conductive upper clamp is held by the frame, clamps the upper edge of the workpiece, and electrically connects the workpiece to the rectifier;

The conductive first-side dummy member and the second-side dummy member are arranged close to the edge portions of both sides of the workpiece and are electrically connected to the rectifier;

a first dummy support portion for movably supporting the first-side dummy member in a thickness direction of the workpiece; and

The second dummy support portion supports the second side dummy member movably in the thickness direction.

In this way, by moving the first side dummy member and the second side dummy member in the thickness direction of the workpiece, the surface treatment amounts of the front surface and the back surface of the workpiece can be adjusted at both side edges of the workpiece.

(9) In another embodiment of the present invention, the first dummy support portion of the other embodiment (8) of the present invention is capable of movably supporting the first side dummy component in the width direction of the workpiece rather than in the thickness direction, and the second dummy support portion is capable of movably supporting the second side dummy component in the width direction rather than in the thickness direction.

In this way, by moving the first-side dummy member and the second-side dummy member in the width direction of the workpiece, the surface treatment amount of the workpiece can be adjusted at both side edges of the workpiece.

(10) In another embodiment of the present invention, the first dummy support portion of another embodiment (8) of the present invention is capable of movably supporting the first side dummy component in the thickness direction and the width direction of the workpiece, and the second dummy support portion is capable of movably supporting the second side dummy component in the thickness direction and the width direction.

In this way, the effects of both the above-mentioned methods (8) and (9) can be achieved.

(11) Another aspect of the present invention relates to a workpiece holding fixture that holds a workpiece to be surface-treated while being suspended and electrically connectable to a rectifier, comprising:

A quadrilateral frame surrounds the workpiece;

A conductive upper clamp is held by the frame, clamps the upper edge of the workpiece, and electrically connects the workpiece to the rectifier;

The conductive first-side dummy member and the second-side dummy member are arranged close to the first side edge of the workpiece and are electrically connected to the rectifier;

The third side dummy member and the fourth side dummy member are conductive and are arranged close to the second side edge of the workpiece and are electrically connected to the rectifier;

a first dummy support portion, held by the frame, and movably supporting the first-side dummy member and the second-side dummy member in the thickness direction and the width direction of the workpiece; and

The second dummy support portion is held by the frame body and supports the third side dummy member and the fourth side dummy member movably in the thickness direction and the width direction.

In the cross-sectional view, the first side dummy member and the second side dummy member are arranged between the first side edge of the workpiece and the frame body and on both sides of the extension line of the workpiece.

In the cross-sectional view, the third side dummy member and the fourth side dummy member are arranged between the second side edge portion of the workpiece and the frame body and at positions on both sides of an extension line of the workpiece.

In this way, at the first side edge of the workpiece, the surface of the workpiece can adjust the surface treatment amount of the workpiece by using the first side dummy component, and the back of the workpiece can adjust the surface treatment amount of the workpiece by using the second side dummy component. Similarly, at the second side edge of the workpiece, the surface of the workpiece can adjust the surface treatment amount of the workpiece by using the third side dummy component, and the back of the workpiece can adjust the surface treatment amount of the workpiece by using the fourth side dummy component.

(12) In still another embodiment (11) of the present invention, the first dummy support portion can detachably support the first-side dummy component and the second-side dummy component, and the second dummy support portion can detachably support the third-side dummy component and the fourth-side dummy component.

Thus, by selecting and installing the first to fourth side dummy members from a plurality of side dummy members having different lengths parallel to the thickness direction of the workpiece, the surface treatment amounts can be adjusted on the front and back surfaces of the first and second side edge portions of the workpiece.

(13) In another aspect (11) or (12) of the present invention, the first dummy support portion can movably support the first side dummy component and the second side dummy component in the thickness direction of the workpiece, and the second dummy support portion can movably support the third side dummy component and the fourth side dummy component in the thickness direction. Thus, similarly to another aspect (8) of the present invention, the surface treatment amount can be adjusted on the front and back sides of the first side edge portion and the second side edge portion of the workpiece.

(14) In still another aspect (11) or (12) of the present invention, the first dummy support portion is capable of supporting the first side dummy member and the second side dummy member movably in the width direction of the workpiece.

The second dummy support portion can movably support the third and fourth dummy members in the width direction. Thus, similarly to another embodiment (9) of the present invention, the surface treatment amount can be adjusted on the front and back sides of the first and second side edges of the workpiece.

(15) In another aspect (11) or (12) of the present invention, the first dummy support portion can movably support the first side dummy component and the second side dummy component in the thickness direction and the width direction of the workpiece, and the second dummy support portion can movably support the third side dummy component and the fourth side dummy component in the thickness direction and the width direction. Thus, similarly to another aspect (10) of the present invention, the surface treatment amount can be adjusted on the front and back sides of the first side edge portion and the second side edge portion of the workpiece.

(16) Another aspect of the present invention relates to a surface treatment device having:

The workpiece holding fixture according to any one of (1) to (15) above;

a power supply portion connected to the rectifier and in contact with the workpiece holding fixture; and

A surface treatment tank having an anode connected to the above rectifier,

The workpiece holding jig includes a contact portion that contacts the power supply portion and is electrically connected to the common conductive member.

According to another embodiment (16) of the present invention, the uniformity of the surface of the workpiece subjected to surface treatment can be improved through the effects of the above-mentioned embodiments (1) to (15). It should be noted that when the fixture is conveyed in the surface treatment tank, the power supply portion provided in the surface treatment device and in contact with the fixture serves as a power supply rail. When the fixture is not conveyed, the power supply portion can be a fixed contact in contact with the conductive member of the fixture.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a longitudinal sectional view of a surface treatment apparatus according to an embodiment of the present invention.

FIG. 2 is a partial enlarged view of FIG. 1 .

FIG. 3 is a side view of the workpiece holding jig viewed from the conveying direction.

FIG. 4 is a diagram showing a support structure provided at a contact portion of a work holding jig.

FIG5 is a front view of the workpiece holding jig.

FIG. 6 is a diagram schematically showing a jig of a comparative example.

FIG. 7 is a characteristic diagram showing a comparative example of current flowing through the clamp in FIG. 6 .

FIG. 8 is a diagram schematically showing a jig according to an embodiment of the present invention.

FIG. 9 is a characteristic diagram showing the current flowing through the clamp in FIG. 8 according to the present embodiment.

FIG. 10 is an enlarged view showing the upper dummy plate and the insulating plate.

FIG. 11 is a side view of the upper dummy plate.

FIG. 12 is a diagram showing that the upper dummy plate can move between a first position and a second position.

FIG. 13 is a diagram showing a dummy plate and an adjustment member provided on the lower clamp.

FIG. 14 is a plan view showing a state where the adjustment member is overlapped on the dummy plate.

FIG15 is a D-D view of FIG5 .

FIG. 16 is a front view of the first side dummy member.

FIG. 17 is a diagram showing an upper support structure of the first-side dummy member and the second-side dummy member.

FIG. 18 is a plan view of an upper support structure of the first-side dummy member and the second-side dummy member.

FIG. 19 is a diagram showing a lower support structure of the first-side dummy member and the second-side dummy member.

FIG. 20 is a side view of a frame having two side dummy members disposed opposite to the side edge of the workpiece.

FIG. 21 is a partial front view of the frame shown in FIG. 20 .

22 is a plan view showing the positional relationship between two side dummy members, a vertical frame, and a workpiece.

DETAILED DESCRIPTION

In the following disclosure, a plurality of different embodiments and examples for implementing the different features of the proposed subject matter are provided. Of course, these are merely examples and are not intended to be limiting. In addition, in the present disclosure, reference numbers and/or text are sometimes repeated in various examples. This repetition is for simplicity and clarity, and it does not need to have a relationship with the various embodiments and/or the configurations described. In addition, when the first element is described as "connected" or "linked" to the second element, this description includes an embodiment in which the first element and the second element are directly connected or linked to each other, and also includes an embodiment in which the first element and the second element are indirectly connected or linked to each other with more than one other element therebetween. In addition, when it is described as the first element "moving" relative to the second element, this description includes an embodiment in which at least one of the first element and the second element moves relative to the other.

1. Overview of surface treatment equipment

Fig. 1 is a longitudinal cross-sectional view of a surface treatment device, such as a continuous plating treatment device. In the continuous plating treatment device 10, a plurality of workpiece holding fixtures 30 each holding a workpiece 20 such as a circuit substrate are circulated and transported in a direction perpendicular to the paper surface of Fig. 1. Fig. 1 shows two parallel straight transport paths 110 and 120 in a circulating transport path 100. The two straight transport paths 110 and 120 are connected at both ends to form a ring-shaped circulating transport path 100.

The circulating conveying path 100 is provided with: a plating tank (in a broad sense, a surface treatment tank) 200 for performing surface treatment, such as plating treatment, on the workpieces 20 respectively held by a plurality of workpiece holding fixtures 30; a loading section (not shown) for loading untreated workpieces 20 into the plurality of workpiece holding fixtures 30; and a unloading section (not shown) for loading the processed workpieces 20 out of the plurality of workpiece holding fixtures 30.

In this embodiment, the plating tank 200 is arranged along the second linear conveying path 120, and the loading and unloading parts are arranged on the first linear conveying path 110. The circulating conveying path 100 further comprises: a pre-treatment tank group 230 arranged on the upstream side of the plating tank 200; and a post-treatment tank group (not shown) arranged on the downstream side of the plating tank 200.

As shown in FIG1 , the continuous plating treatment device 10 has a plating tank (broadly, a surface treatment tank) 200, which contains a plating solution (broadly, a treatment solution) and has an upper end opening 201. As shown in FIG2 , which is a magnified view of a portion of FIG1 , the continuous plating treatment device 10 further has at least one, for example, two, first guide rails 130 and second guide rails 140 extending in a first direction (a direction perpendicular to the paper surface) parallel to the longitudinal direction of the plating tank 200 at a position above the upper end opening 201 of the plating tank 200. A plurality of workpiece holding fixtures 30 are arranged in the treatment solution of the plating tank 200 to hold the workpieces 20 respectively, and are supported by the first guide rails 130 and the second guide rails 140.

As shown in FIG3 , each of the plurality of workpiece holding fixtures 30 roughly distinguishably includes a conveying portion 300 and a workpiece holding portion 500. As the conveying portion 300, there is a horizontal arm portion 301, a first guided portion 310, and a second guided portion 320. The first guided portion 310 is supported on one end side of the horizontal arm portion 301 and is guided by the first guide rail 130. The second guided portion 320 is supported on the other end side of the horizontal arm portion 301 and is guided by the second guide rail 140. The first guided portion 310 includes rollers 311, 312, 313 that are in rotational contact with the upper surface and both side surfaces of the first guide rail 130. The second guided portion 320 includes a roller 321 that is in rotational contact with the upper surface of the second guide rail 140.

In the plating treatment device 10, the workpiece 20 is used as a cathode, and the plating tank 200 is provided with anode boxes 202 and 203 for accommodating anodes 410L and 410R on both sides of the conveying path clamping the workpiece 20. An electric field is formed between the cathode and the anode by a rectifier not shown in the figure, and the plating solution is electrolyzed to electroplate the workpiece 20. For this purpose, it is necessary to energize the workpiece 20 being conveyed. In order to supply power to the workpiece 20, a power supply unit, such as a power supply rail 210, is provided. In particular, in order to implement the current control method disclosed in Japanese Patent Laid-Open No. 2009-132999, as shown in FIG. 2, the power supply rail 210 of the present embodiment has a plurality of, for example, four, split power supply rails 210A to 210D that are insulated from each other. Each of the plurality of workpiece holding fixtures 30 has a powered portion 340 (FIGS. 2 and 3) that contacts any one of the four split power supply rails 210A to 210D for power supply.

FIG4 shows the details of the powered portion 340. The powered portion 340 has a conductive contact portion (current collector) 341 that contacts the power rail 210 on the support plate 330 fixed to the horizontal arm portion 301. The contact portion 341 is connected to the support plate 330 by a parallel link mechanism 342 having two parallel links 342A and 342B. The two links 342A and 342B are urged to move in the clockwise direction by torsion coil springs 343 and 343 as urging members. As a result, the contact portion 341 can contact the power rail 210 with a moderate contact pressure.

The two parallel links 342A and 342B are inclined with respect to the conveying direction A of the jig 30 so that the upper fulcrum is at the front and the lower fulcrum is at the rear. As a result, the contact portion 341 is operated while being pulled by the workpiece holding jig 30, so the operation is stable.

2. Workpiece holding unit

As shown in Figure 5, the workpiece holding portion 500 has: a plurality of conductive upper clamps 510 for clamping the upper edge portion 20a of the rectangular workpiece 20; a plurality of conductive lower clamps 520 for clamping the lower edge portion 20b of the rectangular workpiece 20; and a quadrilateral frame 530 that surrounds the rectangular workpiece 20 and is configured to support the plurality of upper clamps 510 and the plurality of lower clamps 520.

The frame 530 includes: a conductive upper frame 531 supporting a plurality of upper clips 510; a conductive lower frame 532 supporting a plurality of lower clips 520; and a pair of conductive vertical frames 533 and 534 connected to both ends of the upper frame 531 and both ends of the lower frame 532, respectively. Here, the pair of vertical frames 533 and 534 are electrically insulated from both ends of the upper frame 531 and electrically connected to both ends of the lower frame 532. It should be noted that the upper frame 531 and/or the lower frame 532 are also referred to as supporting portions of the supporting clips (the upper clips 510 and/or the lower clips 520).

3. Set the workpiece as a conductive member for the cathode

In this embodiment, the conductive member provided on the workpiece holding fixture 30 and electrically connectable to the rectifier and the workpiece 20 includes: a first branch conductive member and a second branch conductive member; and a common conductive member electrically connected to the first branch conductive member and the second branch conductive member.

Specifically, as shown in Fig. 5, two of the pair of contact portions 341 are arranged at intervals in the conveying direction A of the workpiece holding fixture 30. The contact portion 341 on the upstream side of the conveying direction A is referred to as a first contact portion 341A, and the contact portion 341 on the downstream side of the conveying direction A is referred to as a second contact portion 341B. One end of each of the pair of first cables 350A and 350B is electrically connected to the first contact portion 341A and the second contact portion 341B.

The other ends of the pair of first cables 350A and 350B are connected to a common connection portion (also referred to as a common conductive member) 360. The common connection portion 360 may include: a first conductive member 361 to which the other ends of the pair of first cables 350A and 350B are electrically connected in common; and a pair of second conductive members 362 and 363 fixed to both ends of the first conductive member 361. The pair of second conductive members 362 and 363 are fixed to both ends of the first conductive member 361 at positions equidistant L from the position where the other ends of the pair of first cables 350A and 350B are electrically connected in common to the first conductive member 361. In order to connect the pair of first cables 350A and 350 in common at positions equidistant L from both ends of the first conductive member 361, one of the pair of first cables 350A and 350 may be connected to the front surface of the first conductive member 361, and the other may be connected to the back surface of the first conductive member 361.

As a conductive member provided in the workpiece holding fixture 30, there is further provided: a pair of first connecting parts 370A, 370B electrically connecting the two ends of the upper frame 531 and the common connecting part 360; and a pair of second connecting parts 380A, 380B electrically connecting the pair of vertical frames 533, 534 electrically connected to the two ends of the lower frame 532 and the common connecting part 360. It should be noted that the pair of vertical frames 533, 534 are electrically insulated from the upper frame 531. By adjusting the shape, thickness, material, etc. of the pair of second connecting parts 380A, 380B to adjust the resistance value, the current flowing through the upper clamp 510 can be adjusted.

The first branched conductive member is formed by a member that makes the common connection portion 360 electrically conductive to one of the plurality of upper clips 510 via one of the pair of first connection portions 370A, 370B and the upper frame 531. In this case, the second branched conductive member is formed by a member that makes the common connection portion 360 electrically conductive to another of the plurality of upper clips 510 via the other of the pair of first connection portions 370A, 370B and the upper frame 531.

Alternatively, the first branched conductive member is formed by a member that makes the common connection portion 360 electrically conductive to one of the plurality of lower clips 520 via one of the pair of second connection portions 380A, 380B, one of the pair of vertical frames 533, 534, and the lower frame 532. In this case, the second branched conductive member is formed by a member that makes the common connection portion 360 electrically conductive to another of the plurality of lower clips 520 via the other of the pair of second connection portions 380A, 380B, the other of the pair of vertical frames 533, 534, and the lower frame 532.

Here, the common connection portion 360 as a common conductive member includes a high resistance material having a resistance value r, which is a resistance value that is 10 ³ times or more of the maximum resistance difference ΔRΩ between the first branch conductive member and the second branch conductive member, and is a resistance value greater than that of copper and aluminum. In this embodiment, in the common connection portion 360, a pair of second conductive members 362 and 363 are formed of a high resistance material, and the first conductive member 361 is formed of a low resistance member.

As a high resistance material, stainless steel (SUS) can be cited. For example, the volume resistivity (Ω·m) of SUS304 is 73.7, which is one order of magnitude larger than 1.7Ω·m of copper and 2.8Ω·m of aluminum. The maximum resistance difference ΔRΩ measured is 10 to 20 mΩ, so the resistance value r of the high resistance material satisfies r≥ΔR×10 ³ . Similarly, titanium with a resistance of 53.3Ω·m is also suitable as a high resistance material.

Here, the rectifier electrically connected to the workpiece holding fixture 30 via the power supply rail 210 adjusts the voltage E according to the impedance Z of the closed loop system of the current path so as to achieve E=R×I in order to flow the set constant current I. In this embodiment, the resistance R of the closed loop system includes a high resistance value r of a pair of second conductive members as common conductive members, which is larger than the resistance value of copper or aluminum, which is generally considered to be low resistance. With respect to the maximum resistance difference ΔRΩ generated between the first branch conductive member and the second branch conductive member (that is, between the plurality of upper clips 510 or the plurality of lower clips 520), if r≥10 ³ ×ΔRΩ, the resistance R of the system including the resistance value r also increases. Therefore, the rectifier is adjusted to a relatively large voltage V to supply a constant current I. In this way, the current (or electrons) flowing through the first branch conductive component and the second branch conductive component converge at the common connection portion 360, and if the current I can flow at a voltage E that significantly exceeds the deviation voltage ΔV corresponding to the deviation ΔRΩ in the resistance between the first branch conductive component and the second branch conductive component, the resistance deviation ΔRΩ can be ignored.

3.1. Current monitor of comparative example

Fig. 6 schematically shows a comparative example jig in which the common connection portion 360 does not include a material with a high resistance value r as in the present embodiment. The current flowing through the contact portion on the upstream side of the conveying direction A of the comparative example jig in Fig. 6 is A1, and the current flowing through the contact portion on the downstream side of the conveying direction A is A2.

In the measurement shown in FIG7, the set current of the rectifier is 204A (= A1 + A2), and the branch set current (A1, A2) flowing in two branches is 102A. The currents A1 and A2 measured while the workpiece holding fixture is conveyed along the conveying direction A of FIG6 fluctuate up and down relative to the branch set current value as shown in FIG7. Before and after the time T1 and T2, as disclosed in Japanese Patent Laid-Open No. 2009-132999, the fixture is transferred from one power supply rail to another power supply rail through the joint between the power supply rails. Therefore, the rectifier is used to implement the control of gradually decreasing the current value of the contact part in contact with one power supply rail and gradually increasing the current value of the contact part in contact with the other power supply rail. In the interval outside the current gradually decreasing/gradually increasing control, the rectifier controls the output according to the set current. However, the currents A1 and A2 of the comparative example shown in FIG7 change little by little in the constant current control interval, and change greatly under the current gradually decreasing/gradually increasing control.

3.2. Current Monitor of This Embodiment

Fig. 8 schematically shows the jig 30 of the present embodiment in which the common connection portion 360 includes a material having a high resistance value r. The current flowing through the contact portion 341A on the upstream side of the conveying direction A of the jig 30 in Fig. 8 is A1, the current flowing through the contact portion 341B on the downstream side of the conveying direction A is A2, the current flowing through the pair of first connection portions 370A and 370B is A3 and A4, and the current flowing through the pair of second connection portions 380A and 380B is A5 and A6.

In the measurement shown in FIG9 , the set current of the rectifier is 131A (= A1 + A2), and the branch set current (A1, A2) flowing in two branches is 65.5A. Before and after the time T, the current is gradually reduced/increased in the same manner as the times T1 and T2 shown in FIG7 , and the output is controlled according to the set current in the other intervals. Regarding the currents A3 to A6 measured while the workpiece holding fixture 30 is conveyed along the conveying direction A of FIG8 , as shown in FIG9 , the branch currents A3 and A4 flowing from the left and right sides of the fixture 30 to the upper clamp 510 are constant, and the branch currents A5 and A6 flowing from the left and right sides of the fixture 30 to the lower clamp 520 are also constant.

In the present embodiment, there is a resistance difference in the conduction path between the rectifier and the common connection portion 360 due to deviations in the contact resistances of the first contact portion 341A and the second contact portion 341B caused by local contamination of the power supply rail 210, and a resistance difference when the power supply rail 210 is continuously loaded. However, these adverse effects can be reduced by providing a common connection portion 360 having the above-mentioned resistance value.

In this embodiment, the pair of first connection parts may include a pair of metal plates 370A and 370B, and the pair of second connection parts may include a pair of second cables 380A and 380B. In this way, the resistance value from the common connection part 360 to the upper clamp 510 may be greater than the resistance value from the common connection part 360 to the lower clamp 520.

Thus, compared with the upper clamp 510 in which only the front end is immersed in the treatment liquid, the lower clamp 520, which is entirely immersed in the treatment liquid, can flow a current as much as the current consumed in the surface treatment to the workpiece through the lower clamp 520. In FIG. 9 , by making the currents A5 and A6 flowing through the lower clamp 520 larger than the currents A3 and A4 flowing through the upper clamp 510, the currents flowing to the workpiece 20 from top to bottom can be made substantially constant.

4. Upper dummy board/lower dummy board

As shown in FIG5 , when the upper frame 531 and/or the lower frame 532 are used as the conductive support portion, the support portion may further include a conductive upper dummy plate 610 and/or a conductive lower dummy plate 620 in addition to the upper clamp 510 and/or the lower clamp 520. The upper dummy plate 610 is disposed close to the upper edge 20a of the workpiece 20 in an area not held by the upper clamp 510. The lower dummy plate 620 is disposed close to the lower edge 20b of the workpiece 20 in an area not held by the lower clamp 520.

The upper dummy plate 610 and the conductive lower dummy plate 620 are each movably supported on at least one surface, such as the front and back surfaces, to cover the front and back surfaces respectively, and can have an insulating plate 630 for adjusting the exposed conductive areas of the dummy plates 610 and 620 respectively.

The upper dummy plate 610 is enlarged and shown in FIG10. The lower dummy plate 620 also adopts the structure shown in FIG10. As shown in FIG10, the upper dummy plate 610 is fixed to the upper frame 531 via a hinge 611 formed integrally or separately from the upper dummy plate 610, for example, by screws 612. The insulating plate 630 covering both sides of the upper dummy plate 610 can include either or both of an insulating plate 630A covering the surface of the upper dummy plate 610 and an insulating plate 630B covering the back of the upper dummy plate 610. The insulating plates 620A and 620B are fastened to the upper dummy plate 610, for example, by means of bolts 641 inserted through longitudinal long holes 631A and 631B (only the long hole 631A is shown in FIG. 10 ) respectively provided on the insulating plates 630A and 630B and holes 613 provided on the upper dummy plate 610, and nuts 642 screwed into the bolts 641.

The insulating plates 620A and 620B can each adjust the position in the up-down direction relative to the upper dummy plate 610 (lower dummy plate 620) within the range of the long holes 631A and 631B. Thus, as shown in FIG10 , the exposed area S of the conductive surface exposed by the front end 610A of the upper dummy plate 610 can be adjusted independently on the surface and the back. By changing the exposed conductive area S of the upper dummy plate 610, the current consumed by the surface treatment of the upper dummy plate 610 can be adjusted. Thus, the current flowing to the upper edge 20a of the workpiece 20 via the upper clamp 510 can be adjusted. In this way, the current flowing through the upper edge 20a of the workpiece 20 can be adjusted to improve the in-plane uniformity of the workpiece subjected to surface treatment. The lower dummy plate 620 is also adjusted in the same manner, thereby adjusting the current flowing through the lower edge 20b of the workpiece 20 to improve the in-plane uniformity of the workpiece subjected to surface treatment.

The upper dummy plate 610 can be bent between a first position P1 shown by a solid line in FIG. 12 and a second position P2 shown by a chain line by a hinge 611. At the first position P1, the upper dummy plate 610 is disposed parallel to the workpiece 20 near a region of the upper edge portion 20a of the workpiece 20 that is not held by the upper clamp 510. At the second position P2, the upper dummy plate 610 is not parallel to the main surface of the workpiece 20, and crosses the main surface of the workpiece 20 at a right angle, for example.

When the workpiece 20 is subjected to surface treatment, the upper dummy plate 610 is set at the first position P1. On the other hand, when the workpiece 20 is loaded and unloaded on the workpiece holding fixture 30 by an automatic device, the upper dummy plate 610 is set at the second position P2. By setting the upper dummy plate 610 at the second position P2, a gap can be ensured between the upper edge 20a of the workpiece 20 and the upper frame 531. Thus, the upper edge of the workpiece 20 can be clamped at a position different from the upper clamp 510 of the workpiece holding fixture 30 by an automatic device. In this case, the upper dummy plate 610 can be pushed by the automatic device so that the upper dummy plate 610 moves from the first position P1 to the second position P2 in the direction of the arrow F1. For example, as shown in FIG. 12, the upper dummy plate 610 can be pushed by the roller 2 of the arm 1 that is provided on the automatic device and moves. As for the lower dummy plate 620, similarly, it can also be bent between the first position P1 and the second position P2.

The upper dummy plate 610 can be moved and forced to the first position P1 by the elasticity of the hinge 611 itself or by a force applying member such as a leaf spring or a coil spring provided on the hinge 611. In this way, the upper dummy plate 610 can be reset from the second position P2 to the first position P1 along the arrow F2 direction without applying a reset external force. Similarly, the lower dummy plate 620 can also be reset from the second position P2 to the first position P1 along the arrow F2 direction without applying a reset external force.

It should be noted that, when the workpiece holding fixture has upper, lower, left, and right clamps for clamping four sides of the rectangular workpiece 20 , a dummy plate and an insulating plate may be provided at each of the four side clamps.

5. Clamping dummy plates and adjustment components

Next, the dummy plate and the adjustment member provided in one or both of the upper clamp 510 and the lower clamp 520 will be described by taking the lower clamp 520 as an example. The dummy plate and the adjustment member provided in the upper clamp 510 can be understood by renaming the "lower clamp 520" in the following description as the "upper clamp 510" and renaming the "lower frame 532" as the "upper frame 531".

FIG. 13 shows a dummy plate 700 and an adjustment member 720 provided on the lower clamp 520. First, the lower clamp 520 includes: a fixed portion 521 fixed to the lower frame 532; and a movable portion 523 supported in a swingable manner relative to the fixed portion 521. The fixed portion 521 has a first surface 521A and a second surface 521B on the opposite side thereof. In the fixed portion 521, the second surface 521B is in surface contact with the lower frame 532 and is fixed to the lower frame 532 by bolts 522. The fixed portion 521 has two side walls 521C vertically erected from the first surface 521A.

The lower edge 20b of the workpiece 20 is partially sandwiched between the swinging movable portion 523 and the first surface 521A of the fixed portion 521. The movable portion 523 can swing around the pin 524 supported by the two side walls 521C of the fixed portion 521. The coil spring 525 is inserted into the pin 524. The movable portion 523 is moved and urged toward the fixed portion 521 by the coil spring 525. The movable portion 523 is electrically connected to the lower frame 532 via the fixed portion 521, the pin 524 or the coil spring 525. In order to reduce the resistance value of the conduction path, the coil spring 525 can also be replaced with a leaf spring or the like.

The conductive dummy plate 700 includes: a third surface 700A facing the second surface 521B of the fixing portion 521; and a fourth surface 700B on the opposite side of the third surface 700A. In addition, one end of the dummy plate 700 is referred to as a base end 701, and the other end is referred to as a front end 704. In the dummy plate 700, the fourth surface 700B is parallel to the second surface 521B of the fixing portion 521, and the base end 701 is supported by the fixing portion 521.

Here, as shown in Fig. 14, two elongated holes 702 and 703 can be formed at the base end 701 of the dummy plate 700. The bolts 710 are inserted into the elongated holes 702 and 703, respectively, and the bolts 710 are fastened to the lower frame 532. The elongated holes 702 and 703 allow the dummy plate 700 to be adjusted in the fixed position along the arrow C direction of Fig. 13.

As shown in Fig. 13 and Fig. 14, the insulating adjustment member 720 covers a portion of the fourth surface 700B of the dummy board 700 and overlaps the dummy board 700. The conductive surface that is not always covered by the adjustment member 720 may be only the front end portion 704. As shown by the hatching in Fig. 13 and Fig. 14, the other surfaces not covered by the adjustment member 720 are coated with insulation.

As shown in FIG14 , two elongated holes 721 and 722 are formed in the adjustment member 720. The bolt 730 is inserted into each of the elongated holes 721 and 722, and the bolt 730 is fastened to the dummy plate 700. The adjustment member 720 can adjust the fixed position along the arrow C direction of FIG13 through the elongated holes 702 and 703. Thus, the adjustment member 720 can adjust the exposed conductive area S2 on the fourth surface 700B side of the front end portion 704 of the dummy plate 700.

The exposed conductive surface on the side of the fourth surface 700B in the front end portion 704 of the dummy plate 700 is subjected to surface treatment. By changing the exposed conductive area S2 of the dummy plate 700, the current consumed for the surface treatment of the dummy plate 700 can be adjusted. Thus, the current flowing to the lower edge portion 20b of the workpiece 20 via the fixed portion 521 of the lower clamp 520 can be adjusted. If there is no dummy plate 700 and the adjustment member 720, the current flowing to the lower edge portion 20b of the workpiece 20 via the fixed portion 521 of the lower clamp 520 increases. This is because, as described above, the resistance value between the movable portion 523 and the lower frame 532 is relatively large. Thus, the current will not be concentrated on the lower edge portion 20b of the workpiece 20 near the area in contact with the movable portion 523 and the surface 20b1 on the side in contact with the movable portion 523 (Figure 13). On the other hand, the current tends to be concentrated on the lower edge portion 20b of the workpiece 20 near the area in contact with the fixing portion 521 and the surface 20b2 on the side in contact with the fixing portion 521 (FIG. 13). As a result, the surface treatment of the workpiece 20 is partially performed in the area near the fixing portion 521. According to this embodiment, the current flowing through the local area 20b2 of the lower edge portion 20b of the workpiece 20 can be adjusted, and the in-plane uniformity of the workpiece subjected to surface treatment can be improved.

In addition, the fixing position of the base end portion 701 of the dummy plate 700 relative to the fixing portion 521 can be changed in a direction parallel to the arrow C direction in which the adjustment member 720 can move, through the long holes 702 and 703. In this way, in the side view observed from a direction perpendicular to the main surface of the workpiece 20, the overlapping area between the second surface 521B of the fixing portion 521 of the lower clamp 520 or the main surface of the workpiece and the dummy plate 700 can be adjusted. By adjusting the position, the current consumed for the surface treatment of the dummy plate 700 can also be adjusted.

Here, the processing liquid Q in the processing tank 200 shown in FIG. 1 sets the liquid level L shown in FIG. 5 relative to the clamp 30. As a result, the entire lower clamp 520 is immersed in the processing liquid Q. Therefore, in the dummy board 700, except for the fourth surface 700B in the front end portion 704, as shown by the hatching in FIG. 13 and FIG. 14, the other surfaces not covered by the adjustment member 720 are subjected to insulation coating. As a result, the surface treatment other than the fourth surface 700B in the front end portion 704 of the dummy board 700 is not performed in vain.

The above-mentioned structures of the dummy plate 700 and the adjustment member 720 provided in the lower clamp 520 can also be applied to the dummy plate and the adjustment member provided in the upper clamp 510. It should be noted that the entire upper clamp 510 is not immersed in the processing liquid Q from the position of the liquid surface L of the processing liquid Q shown in FIG. 5 , which is different from the lower clamp 520. Therefore, the dummy plate provided in the upper clamp 510 can reduce the insulating coating area only in the area immersed in the processing liquid Q. This is because the area not immersed in the processing liquid Q is not subjected to surface treatment, and therefore, does not need to be subjected to insulating coating.

6. Dummy components on the first side and dummy components on the second side

As shown in Fig. 5, the workpiece holding fixture 30 may further include a conductive first side dummy member 800A and a second side dummy member 800B disposed near both side edges of the workpiece 20. As shown in Fig. 15, which is a D-D arrow view of Fig. 5, the first side dummy member 800A is disposed between the side edge 20d of the workpiece 20 and the vertical frame 534. The second side dummy member 800B is disposed between the side edge 20c of the workpiece 20 and the vertical frame 534.

Here, the first branched conductive member electrically connected to the second conductive member 362 of the common conductive member 360, branched from the common conductive member 360, and conductively connected to the workpiece 20 via the upper clamp 510 is defined by a pair of first connecting portions 370A, 370B and an upper frame 531 connected to both ends thereof. The workpiece holding fixture 30 further includes a second branched conductive member 900 (900A, 900B) electrically connected to the common conductive member 360, branched from the common conductive member 360, and conductively connected to the first side dummy member 800A and the second side dummy member 800B. The first dummy conductive member 900A of the second branched conductive member 900 branches from the common conductive member 360 and conductively connected to the first side dummy member 800A. The second dummy conductive member 900B of the second branched conductive member 900 branches from the common conductive member 360 and conductively connected to the second side dummy member 800B.

The common conductive member 360, which can be electrically connected to the rectifier, is connected to the workpiece 20 through the upper clamp 510 via the first branch conductive member 370A, 370B, 531. The common conductive member 360 is connected to the first side dummy member 800A and the second side dummy member 800B via the second branch conductive member 900 (900A, 900B). The total current flowing to the workpiece 20, the first side dummy member 800A and the second side dummy member 800B can be set by the rectifier. Here, the longitudinal frames 533 and 534 are insulated. If there is no first side dummy member 800A and the second side dummy member 800B, the electric field is concentrated on the two side edges 20c and 20d of the workpiece 20, and the current flowing to the two side edges 20c and 20d of the workpiece 20 increases. When the vertical frames 533 and 534 are not coated with insulation, the conductive vertical frames 533 and 534 consume current, and the current flowing through the side edges 20c and 20d of the workpiece 20 is reduced. Therefore, the first dummy conductive member 900A and the second dummy conductive member 900B can be provided to adjust the current flowing through the side edges 20c and 20d of the workpiece 20. In addition, by setting the resistance value of the second branch conductive member 900 (900A, 900B) independently of the first branch conductive member 370A, 370B, 531, the current flowing through the first side dummy member 800A and the second side dummy member 800B can be set independently of the current flowing through the workpiece 20. Thus, by also performing surface treatment on the first side dummy member and the second side dummy member disposed near the side edge portions 20c and 20d of the workpiece 20, the current flowing through the side edge portions 20c and 20d of the workpiece 20 can be adjusted, and the in-plane uniformity of the workpiece subjected to surface treatment can be improved. In addition, by independently setting the resistance values of the first dummy conductive member 900A and the second dummy conductive member 900B, the current flowing through the first side dummy member 800A and the second side dummy member 800B can be independently set. Thus, the current flowing through one side edge portion 20c and the other side edge portion 20d of the workpiece 20 can be adjusted.

The first dummy conductive member 900A includes, for example, a cable 910A having one end connected to the second conductive member 362 of the common conductive member 360, a conductive plate 920A to which the other end of the cable 910A is connected, and a cable 930A having one end connected to the conductive plate and the other end connected to the first-side dummy member 800A. The second dummy conductive member 900B also includes the cable 910B, the conductive plate 920B, and the cable 930B.

The first dummy conductive member 900A and the second dummy conductive member 900B can have a first variable resistor and a second variable resistor. The first variable resistor provided in the first dummy conductive member 900A is composed of a long hole 921A provided in the conductive plate 920A and a movable contact portion 922A moving along the long hole 921A. The long hole 921A has a direction (horizontal direction in FIG. 5) in which the distance from the connecting portion of the cable 910A becomes longer as a length direction. By changing the position of the movable contact portion 922A connected to the cable 930A, the resistance value can be changed. The second variable resistor provided in the second dummy conductive member 900B is also composed of a long hole 921B and a movable contact portion 922B. In this way, by adjusting the resistance value using the first variable resistor and the second variable resistor, the resistance value of the first dummy conductive member 900A and the resistance value of the second side dummy member 800B can be arbitrarily adjusted within a specified range. It should be noted that the positions of the movable contact portion 922A and the movable contact portion 922B can be adjusted manually or automatically.

In this embodiment, as shown in FIG5 , the first dummy conductive member 900A is conductive with the upper portion of the first side dummy member 800A, and the second dummy conductive member 900B is conductive with the upper portion of the second side dummy member 800B. In this case, as shown in FIG16 , the first side dummy member 800A and the second side dummy member 800B are each preferably formed such that the upper portion of the width W1, W2, and W3 parallel to the thickness direction of the workpiece 20 is narrower than the lower portion (W1<W2<W3). The width may change in stages or continuously. The upper portions of the first side dummy member 800A and the second side dummy member 800B are closer to the rectifier, and thus have a tendency to perform more surface treatment on the upper portion than on the lower portion. Therefore, the upper portion of the two side edges 20c and 20d of the workpiece 20 has a tendency to be difficult to perform surface treatment (the plating thickness becomes thinner). By reducing the width of the first side dummy component 800A and the second side dummy component 800B at the upper part, the upper part of the two side edges 20c and 20d of the workpiece 20 can be easily surface treated, and the plating thickness can also be ensured at the upper part. As a result, the current flowing from the upper part to the lower part can be effectively adjusted at the two side edges of the workpiece 20.

The first side dummy support portion and the second side dummy support portion provided in the workpiece holding fixture 30 are described with reference to Fig. 17 to Fig. 19. In Fig. 17 to Fig. 19, the first side dummy support portion and the second side dummy support portion can make the first side dummy member 800A and the second side dummy member 800B variable in the width direction of the workpiece 20, i.e., the direction of arrow E, and the thickness direction of the workpiece 20, i.e., the direction of arrow F, as shown in Fig. 15, for example.

Fig. 17 and Fig. 18 are a front view and a top view of a support portion supporting the upper part of the dummy member 800A on the first side. Two mounting pieces 820A extending toward the inner side of the workpiece holding fixture 30 are provided on the upper part of the longitudinal frame 534. An upper support piece 830A supporting the upper part of the dummy member 800A on the first side is arranged between the two mounting pieces 820A. The two mounting pieces 820A have a long hole 821 with the arrow E direction as the length direction. The bolt 835 inserted into the long hole 821 is screwed into the upper support piece 830A. If the bolt 835 is loosened, the upper support piece 830A can move along the arrow E direction with the dummy member 800A on the first side. If the bolt 835 is tightened, the upper support piece 830A is fixed by the two mounting pieces 820A.

As shown in Figure 18, the upper support piece 830A has a long hole 831 that runs through from top to bottom and has the arrow F direction as the length direction. The bolt 810 inserted into the long hole 831 is screwed into the upper part of the first side virtual component 800A. If the bolt 810 is loosened, the first side virtual component 800A can move along the arrow F direction. If the bolt 810A is tightened, the first side virtual component 800A is fixed by the upper support piece 830A. Although not shown in the figure, the upper part of the second side virtual component 800B is also supported in the same manner as the upper part of the first side virtual component 800A.

FIG. 19 shows a support portion supporting the lower portion of the first side dummy member 800A. Two mounting pieces 820A extending toward the inner side of the workpiece holding fixture 30 are provided on the upper portion of the longitudinal frame 534. A lower support piece 830B supporting the lower portion of the first side dummy member 800A is disposed between the two mounting pieces 820A. The lower support piece 830B has the same structure as the upper support piece 830A except for the structure supporting the connecting portion 850 described later. In addition, the lower portion of the second side dummy member 800B is also supported in the same manner as the lower portion of the first side dummy member 800A.

For example, the first side dummy member 800A and the second side dummy member 800B can be connected to the rectifier by connecting the cables 930A and 930B to the bolts 810 shown in Fig. 18. It should be noted that in order to electrically insulate the first side dummy member 800A and the second side dummy member 800B from the vertical frames 533 and 534, the mounting piece 820A and/or the upper support piece 830A and the lower support piece 830B are formed of an insulator.

By moving the first side dummy component 800A and the second side dummy component 800B in the width direction E of the workpiece 20, the surface treatment amount (plating thickness) of the workpiece can be adjusted at the two side edges 20c and 20d of the workpiece. For example, if the first side dummy component 800A is moved to the left side of Figure 15, the plating thickness of the side edge 20d of the workpiece 20 can be reduced. On the contrary, if the first side dummy component 800A is moved to the right side of Figure 15, the plating thickness of the side edge 20d of the workpiece 20 can be increased. Thus, it is possible to have a structure in which the first side dummy component 800A and the second side dummy component 800B are moved only in the width direction E of the workpiece 20.

By moving the first side dummy component 800A and the second side dummy component 800B in the thickness direction F of the workpiece 20, the surface treatment amount (thickness of the coating) of the surface 20d1 and the back side 20d2 of the workpiece 20 shown in FIG. 15 can be adjusted at the two side edges 20c and 20d of the workpiece 20, respectively. For example, if the first side dummy component 800A is moved upward in FIG. 15, the thickness of the coating on the surface 20d1 of the workpiece 20 can be reduced. On the contrary, if the first side dummy component 800A is moved downward in FIG. 15, the thickness of the coating on the back side 20d2 of the workpiece 20 can be reduced. Thus, a structure in which the first side dummy component 800A and the second side dummy component 800B are moved only in the thickness direction F of the workpiece 20 can be provided.

As shown in Fig. 19, a connecting member 850 can be further provided to electrically connect the lower portion of the first-side dummy member 800A and the lower portion of the second-side dummy member 800B. By providing the connecting member 850, the current can also easily flow to the lower portions of the first-side dummy member 800A and the second-side dummy member 800B, and the current flowing from the upper portion to the lower portion can be effectively adjusted at the two side edges 20c and 20d of the workpiece 20.

The two ends of the connecting member 850 are slidably supported by the two lower support pieces 830B shown in FIG. 19 , for example. Thus, the two lower support pieces 830B are allowed to move in the direction of arrow E shown in FIG. 15 . In addition, the two ends of the connecting member 850 are electrically connected to the lower parts of the first side dummy member 800A and the second side dummy member 800B through a flexible conductive member. Thus, the first side dummy member 800A and the second side dummy member 800B are allowed to move in the directions of arrows E and F shown in FIG. 15 .

7. Dummy components on the 1st side to dummy components on the 4th side

20 to 22 show a workpiece holding fixture in which two side dummy members are arranged facing each other at the side edges 20c and 20d of the workpiece 20. The first side dummy member 1011 and the second side dummy member 1012 are arranged facing each other at the side edge 20d of the workpiece 20. The first dummy support parts 1000A and 1000B are held by, for example, the longitudinal frame 534 of the frame body 530, and support both ends of the first side dummy member 1000 and the second side dummy member 1012. The cable 930A is connected to the first dummy support part 1000A. Thus, the first side dummy member 1011 and the second side dummy member 1012 are electrically connected to the rectifier.

Here, as shown in Fig. 22, in the cross-sectional view, the first side dummy member 1011 and the second side dummy member 1012 are arranged between the side edge portion 20d of the workpiece 20 and the vertical frame 534 of the frame body 530 and at positions on both sides of the extension line of the workpiece 20. In this way, at the side edge portion 20d of the workpiece 20, the surface of the workpiece 20 can be adjusted by the first side dummy member 1011, and the back side of the workpiece 20 can be adjusted by the second side dummy member 1012.

Similarly, the 3rd side dummy member 1013 and the 4th side dummy member 1014 are arranged facing the other side edge 20c of the workpiece 20. The 2nd dummy support parts 1000C and 1000D are held by, for example, the longitudinal frame 533 of the frame body 530, and support both ends of the 3rd side dummy member 1013 and the 4th side dummy member 1014. The cable 930B is connected to the 2nd dummy support part 1000C. Thus, the 3rd side dummy member 1013 and the 4th side dummy member 1014 are electrically connected to the rectifier. In this way, at the other side edge 20c of the workpiece 20, the surface of the workpiece 20 can adjust the processing amount of the workpiece 20 by the 3rd side dummy member 1013, and the back of the workpiece 20 can adjust the processing amount of the workpiece 20 by the 4th side dummy member 1014.

Here, the first dummy support parts 1000A and 1000B can detachably support the first side dummy member 1011 and the second side dummy member 1012, and the second dummy support parts 1000C and 1000D can detachably support the third side dummy member and the fourth side dummy members 1013 and 1014. In this case, by selecting and installing the first side dummy member to the fourth side dummy member 1011 to 1014 from a plurality of side dummy members having different lengths parallel to the thickness direction F of the workpiece 20, the processing amount can be adjusted on the front and back sides of the first side edge portion 20c and the second side edge portion 20d of the workpiece 20.

The 1st side dummy member to the 4th side dummy member 1011 to 1014 are selected from round rods with different diameters, for example, when they are round rods. If a side dummy member with a large diameter is selected, the plating thickness formed on the side edge of the workpiece can be reduced. On the contrary, if a side dummy member with a small diameter is selected, the plating thickness formed on the side edge of the workpiece can be increased. The 1st side dummy member to the 4th side dummy member 1011 to 1014 are not limited to round rods, but can also be rectangular or the like. In addition, for the 1st side dummy member to the 4th side dummy member 1011 to 1014, as shown in Figure 16, the length parallel to the thickness direction F of the workpiece 20 at the lower part can be increased in stages or continuously compared to the upper part.

The first dummy support parts 1000A, 1000B and the second dummy support parts 1000C, 1000D can have the structures of Figures 17 to 19. Thus, as shown in Figure 22, for example, the first side dummy member 1011 and the second side dummy member 1012 can be moved in the thickness direction E of the workpiece 20 and/or in the direction F parallel to the workpiece 20. Thus, the processing amount of the surface and the back of the workpiece 20 can be adjusted at the side edge parts 20c, 20d of the workpiece 20. In addition, as shown in Figure 21, by electrically connecting the dummy support parts 1000B and 1000D on the lower side using the connecting member 850, it is also possible to make it easy for current to flow to the lower parts of the first side dummy member to the fourth side dummy member 1011 to 1014.

Explanation of symbols

30...workpiece holding fixture, 20...workpiece, 20a...upper edge, 20b...lower edge, 20c, 20d...side edge, 210...power supply portion (power supply rail), 341A, 341B...first contact portion, second contact portion, 341A, 350A...first branched conductive member, 341B, 350B...second branched conductive member, 350A, 350B...a pair of first cables, 360...common connecting portion (common conductive member), 361...first conductive member, 362, 363...a pair of second conductive members, 370A, 370B...a pair of first connecting portions ( a pair of metal plates), 370A, 370B, 531 ... a first branch conducting member, 380A, 380B ... a pair of second connecting portions (a pair of second cables), 380A, 380B, 533, 534 ... a first branch conducting member, 410R, 410L ... anode, 510 ... an upper clamp, 520 ... a lower clamp, 521 ... a fixing portion, 521A ... a first surface, 521B ... a second surface, 523 ... a movable portion, 530 ... a frame, 531 ... an upper frame (supporting portion), 532 ... a lower frame (supporting portion), 533, 534 ... a pair of vertical frames, 610 ... an upper dummy plate , 620…lower dummy plate, 611…hinge, 630, 630A, 630B…insulating plates (upper insulating plate, lower insulating plate, surface insulating plate, back insulating plate), 700…dummy plate, 700A…third surface, 700B…fourth surface, 701…base end, 704…front end, 720…adjusting member, 800A…first side dummy member, 800B…second side dummy member, 850…connecting member, 900 (900A, 900B)…second branch conducting member, 900A (910A, 920A, 922A, 930A)… 1st dummy conductive member, 900B (910B, 920B, 922B, 930B)... 2nd dummy conductive member, 920A, 921A, 922A... 1st variable resistor, 920B, 921B, 922B... 2nd variable resistor, 1000A~1000D... 1st dummy supporting member, 2nd dummy supporting member, 1011... 1st side dummy member, 1012... 2nd side dummy member, 1013... 3rd side dummy member, 1014... 2nd side dummy member, P1... 1st position, P2... 2nd position, S, S2... exposed conductive area

Claims (17)

1. A work holding jig which hangs down and holds a work subjected to surface treatment and is capable of being electrically connected to a rectifier, characterized by comprising:

a quadrangular frame surrounding the workpiece;

an electrically conductive upper clamp held by the frame and clamping an upper edge of the workpiece;

a conductive 1 st-side dummy member which is held in the frame, is disposed closer to the 1 st side edge of the workpiece than the frame, and is longer than the 1 st side edge;

A conductive 2 nd side dummy member which is held in the frame, is disposed closer to the 2 nd side edge of the workpiece than the frame, and is longer than the 2 nd side edge;

a common conductive member capable of conducting electricity with the rectifier;

A1 st branch conduction member electrically connected to the common conductive member, branched from the common conductive member, and conducted to the workpiece via the upper clamp; and

And a2 nd branch conductive member electrically connected to the common conductive member, and branched from the common conductive member to be conductive to the 1 st side dummy member and the 2 nd side dummy member.

2. The workpiece holding fixture of claim 1, wherein the 2 nd branch conducting member comprises:

A 1 st dummy conductive member branched from the common conductive member and conductive with the 1 st dummy member; and

And a 2 nd dummy conductive member branched from the common conductive member and conductive with the 2 nd dummy member.

3. The workpiece holding fixture as recited in claim 2, wherein,

The 1 st dummy on-state means includes a1 st variable resistor having a variable resistance value,

The 2 nd dummy conductive member includes a2 nd variable resistor having a variable resistance value.

4. The workpiece holding fixture as recited in claim 2, wherein,

The 1 st dummy conductive member is conductive with an upper portion of the 1 st side dummy member,

The 2 nd dummy conductive member is conductive with an upper portion of the 2 nd dummy member,

Further provided is a connection member that electrically connects the lower portion of the 1 st side dummy member and the lower portion of the 2 nd side dummy member.

5. The workpiece holding fixture as recited in claim 2, wherein,

The 1 st dummy conductive member is conductive with an upper portion of the 1 st side dummy member,

The 2 nd dummy conductive member is conductive with an upper portion of the 2 nd dummy member,

The 1 st side dummy member and the 2 nd side dummy member are each formed as: the width parallel to the thickness direction of the work piece is narrower at the upper portion than at the lower portion.

6. The workpiece holding jig of claim 5, further comprising a connecting member electrically connecting a lower portion of the 1 st side dummy member with a lower portion of the 2 nd side dummy member.

7. The work holding jig according to any one of claims 1 to 6, further comprising:

A lower clamp for clamping a lower edge of the workpiece; and

And a3 rd branch conducting member electrically connected to the common conductive member, and branching from the common conductive member and conducting to the workpiece via the lower clamp.

8. A work holding jig which hangs down and holds a work subjected to surface treatment and is capable of being electrically connected to a rectifier, characterized by comprising:

a quadrangular frame surrounding the workpiece;

A conductive upper clamp held by the frame body and clamping an upper edge portion of the workpiece to electrically connect the workpiece and the rectifier;

a conductive 1 st-side dummy member which is held in the frame, is disposed closer to the 1 st side edge of the workpiece than the frame, is longer than the 1 st side edge, and is electrically connected to the rectifier;

A conductive 2 nd side dummy member which is held in the frame, is disposed closer to the 2 nd side edge of the workpiece than the frame, is longer than the 2 nd side edge, and is electrically connected to the rectifier;

A1 st dummy support portion held in the frame and configured to support the 1 st dummy member so as to be movable in a thickness direction of the workpiece; and

And a 2 nd dummy support portion held by the frame body and supporting the 2 nd dummy member so as to be movable in the thickness direction.

9. A work holding jig which hangs down and holds a work subjected to surface treatment and is capable of being electrically connected to a rectifier, characterized by comprising:

a quadrangular frame surrounding the workpiece;

A conductive upper clamp held by the frame body and clamping an upper edge portion of the workpiece to electrically connect the workpiece and the rectifier;

a conductive 1 st-side dummy member which is held in the frame, is disposed closer to the 1 st side edge of the workpiece than the frame, is longer than the 1 st side edge, and is electrically connected to the rectifier;

A conductive 2 nd side dummy member which is held in the frame, is disposed closer to the 2 nd side edge of the workpiece than the frame, is longer than the 2 nd side edge, and is electrically connected to the rectifier;

a1 st dummy support portion held in the frame and configured to support the 1 st dummy member so as to be movable in a width direction of the workpiece; and

And a 2 nd dummy support portion held by the frame body and supporting the 2 nd dummy member so as to be movable in the width direction.

10. A work holding jig which hangs down and holds a work subjected to surface treatment and is capable of being electrically connected to a rectifier, characterized by comprising:

a quadrangular frame surrounding the workpiece;

A conductive upper clamp held by the frame body and clamping an upper edge portion of the workpiece to electrically connect the workpiece and the rectifier;

a conductive 1 st-side dummy member which is held in the frame, is disposed closer to the 1 st side edge of the workpiece than the frame, is longer than the 1 st side edge, and is electrically connected to the rectifier;

A conductive 2 nd side dummy member which is held in the frame, is disposed closer to the 2 nd side edge of the workpiece than the frame, is longer than the 2 nd side edge, and is electrically connected to the rectifier;

A1 st dummy support portion held in the frame and configured to support the 1 st dummy member so as to be movable in a thickness direction and a width direction of the workpiece; and

And a 2 nd dummy support portion held by the frame body and movably supporting the 2 nd dummy member in the thickness direction and the width direction.

11. A work holding jig which hangs down and holds a work subjected to surface treatment and is capable of being electrically connected to a rectifier, characterized by comprising:

a quadrangular frame surrounding the workpiece;

A conductive upper clamp held by the frame body and clamping an upper edge portion of the workpiece to electrically connect the workpiece and the rectifier;

a1 st side dummy member and a 2 nd side dummy member which are electrically conductive, are held in the frame, are disposed closer to the 1 st side edge portion of the workpiece than the frame, are longer than the 1 st side edge portion, and are electrically connected to the rectifier;

a3 rd side dummy member and a4 th side dummy member which are electrically conductive, are held in the frame, are disposed closer to the 2 nd side edge portion of the workpiece than the frame, are longer than the 2 nd side edge portion, and are electrically connected to the rectifier;

a1 st dummy support portion held by the frame body and supporting the 1 st dummy member and the 2 nd dummy member; and

A2 nd dummy support portion held by the frame body and supporting the 3 rd dummy member and the 4 th dummy member,

In a cross-sectional view, the 1 st side dummy member and the 2 nd side dummy member are disposed between the 1 st side edge portion of the work and the frame at positions sandwiching both sides of an extension line of the work,

In the cross-sectional view, the 3 rd side dummy member and the 4 th side dummy member are disposed between the 2 nd side edge portion of the work and the frame at positions sandwiching both sides of an extension line of the work.

12. The workpiece holding jig according to claim 11, wherein the 1 st dummy support section detachably supports the 1 st side dummy member and the 2 nd side dummy member, and the 2 nd dummy support section detachably supports the 3 rd side dummy member and the 4 th side dummy member.

13. The workpiece holding fixture of claim 11, wherein,

The 1 st dummy support portion movably supports the 1 st side dummy member and the 2 nd side dummy member in a thickness direction of the workpiece,

The 2 nd dummy supporting portion movably supports the 3 rd side dummy member and the 4 th side dummy member in the thickness direction.

14. The workpiece holding fixture of claim 11, wherein,

The 1 st dummy support portion movably supports the 1 st side dummy member and the 2 nd side dummy member in a width direction of the work,

The 2 nd dummy supporting portion movably supports the 3 rd side dummy member and the 4 th side dummy member in the width direction.

15. The workpiece holding fixture of claim 11, wherein,

The 1 st dummy support portion movably supports the 1 st side dummy member and the 2 nd side dummy member in a thickness direction and a width direction of the work,

The 2 nd dummy supporting portion movably supports the 3 rd side dummy member and the 4 th side dummy member in the thickness direction and the width direction.

16. A surface treatment apparatus, comprising:

the workpiece holding jig of any one of claims 1 to 7;

A power supply portion connected to the rectifier in contact with the work holding jig; and

A surface treatment tank having an anode connected to the rectifier,

The work holding jig includes a contact portion that contacts the power supply portion and is in communication with the common conductive member.

17. A surface treatment apparatus, comprising:

The workpiece holding jig of any one of claims 8 to 15;

A power supply portion connected to the rectifier in contact with the work holding jig; and

A surface treatment tank having an anode connected to the rectifier,

The work holding jig includes a contact portion that contacts the power supply portion.