CN111879454A - Pressure measurement method based on flexible film sensor bending force compensation - Google Patents

Pressure measurement method based on flexible film sensor bending force compensation Download PDF

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CN111879454A
CN111879454A CN202010563160.2A CN202010563160A CN111879454A CN 111879454 A CN111879454 A CN 111879454A CN 202010563160 A CN202010563160 A CN 202010563160A CN 111879454 A CN111879454 A CN 111879454A
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film sensor
length
flexible film
arc
flexible
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刘洋
胡丽斌
陈杰
何嘉弘
李陈莹
曹京荥
张伟
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Southeast University
Electric Power Research Institute of State Grid Jiangsu Electric Power Co Ltd
State Grid Corp of China SGCC
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Electric Power Research Institute of State Grid Jiangsu Electric Power Co Ltd
State Grid Corp of China SGCC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency

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Abstract

本发明公开了一种基于柔性薄膜传感器弯曲力补偿的压力测量方法，对弯曲状态下柔性薄膜传感器进行建模，并根据传感器长度的不同，做不同的建模计算，较为精确的计算出柔性薄膜传感器自身形变所引起的压力变化，因此应用本发明能够较好地补偿柔性薄膜传感器实际测量时的误差。本发明计算所需数据量小且无需迭代，计算流程清晰可靠性高，对操作者的要求也较低。

Figure 202010563160

The invention discloses a pressure measurement method based on the bending force compensation of a flexible film sensor, which models the flexible film sensor in a bending state, and performs different modeling calculations according to the length of the sensor, so as to calculate the flexible film more accurately. The pressure change caused by the deformation of the sensor itself, so the application of the present invention can better compensate the error during the actual measurement of the flexible film sensor. The calculation of the invention requires a small amount of data without iteration, the calculation process is clear and reliable, and the requirements for operators are also low.

Figure 202010563160

Description

一种基于柔性薄膜传感器弯曲力补偿的压力测量方法A Pressure Measurement Method Based on Bending Force Compensation of Flexible Thin Film Sensors

技术领域technical field

本发明涉及弯曲应力补偿的领域，具体来说，涉及一种基于柔性薄膜传感器弯曲力补偿的压力测量方法。The invention relates to the field of bending stress compensation, in particular, to a pressure measurement method based on bending force compensation of a flexible thin film sensor.

背景技术Background technique

柔性薄膜传感器是目前的第三代传感器，由于柔性薄膜压力传感器采用了物理气相沉积的方法制备，它可弯曲、可折叠、延展性好，能够满足高温、湿热、腐蚀、震动等恶劣的使用环境。柔性薄膜压力传感器由于其优异的稳定性和与恶劣环境的适应性，在航空、航天领域、石油工业以及汽车等领域得到了广泛应用。但也正是因为柔性薄膜压力传感器采用的是高灵敏度的应变材料来提升它的性能，在复杂环境中处于弯曲或拉伸态下测量压力时自身的形变将不可避免地产生机械应力，包括拉伸应力、弯曲应力、压应力等，会对压力的测量结果产生较大的影响。The flexible thin film sensor is the current third-generation sensor. Since the flexible thin film pressure sensor is prepared by physical vapor deposition, it can be bent, folded, and has good ductility, and can meet the harsh environment of high temperature, damp heat, corrosion, and vibration. . Due to its excellent stability and adaptability to harsh environments, flexible thin-film pressure sensors have been widely used in aviation, aerospace, petroleum industry, and automobiles. But it is precisely because the flexible thin-film pressure sensor uses high-sensitivity strain materials to improve its performance. When measuring pressure under bending or tension in a complex environment, its own deformation will inevitably generate mechanical stress, including tension. The tensile stress, bending stress, compressive stress, etc. will have a great influence on the measurement results of the pressure.

目前已有研究表明，将柔性薄膜压力传感器包裹于配网电缆表面，即曲率半径为21mm时，在电缆表面安装冷缩中间接头压力值达到0.3MPa时，柔性薄膜压力传感器自身的形变产生的压力值达到了0.0271MPa，误差接近10％，这对其后的分析与研究造成了非常大的影响。At present, studies have shown that when the flexible film pressure sensor is wrapped on the surface of the distribution network cable, that is, when the curvature radius is 21mm, when the pressure value of the cold shrinkable intermediate joint installed on the cable surface reaches 0.3MPa, the pressure generated by the deformation of the flexible film pressure sensor itself The value reaches 0.0271MPa, and the error is close to 10%, which has a great impact on subsequent analysis and research.

发明内容SUMMARY OF THE INVENTION

发明目的：本发明提出一种基于柔性薄膜传感器弯曲力补偿的压力测量方法，消除了传感器自身所引起的压力误差。Purpose of the invention: The present invention proposes a pressure measurement method based on the bending force compensation of the flexible film sensor, which eliminates the pressure error caused by the sensor itself.

技术方案：本发明采用的技术方案为一种基于柔性薄膜传感器弯曲力补偿的压力测量方法，包括以下步骤：Technical solution: The technical solution adopted in the present invention is a pressure measurement method based on bending force compensation of a flexible film sensor, which includes the following steps:

1)获取柔性薄膜传感器的材料，并测量其尺寸；1) Obtain the material of the flexible thin film sensor and measure its size;

2)根据步骤1)中柔性薄膜传感器的材料和尺寸计算弯曲状态下柔性薄膜传感器的上表面弧长、下表面弧长、上表面弧对应的弦长、下表面弧对应的弦长，并确定弹性模量大小；2) Calculate the arc length of the upper surface, the arc length of the lower surface, the chord length corresponding to the upper surface arc, and the chord length corresponding to the lower surface arc of the flexible film sensor under the bending state according to the material and size of the flexible film sensor in step 1), and determine The size of elastic modulus;

3)基于步骤2)所得参数计算薄膜传感器形变所产生的压力值。3) Calculate the pressure value generated by the deformation of the thin film sensor based on the parameters obtained in step 2).

所述步骤1)中所述柔性薄膜传感器的尺寸包括面积、厚度、边界位置上下表面的间距、上表面曲率半径、下表面曲率半径和中心角。In the step 1), the size of the flexible thin film sensor includes area, thickness, distance between the upper and lower surfaces of the boundary position, the curvature radius of the upper surface, the curvature radius of the lower surface and the central angle.

所述步骤2)中当柔性薄膜传感器长度小于待测物曲率半径1％时，下式视为成立：In the step 2), when the length of the flexible film sensor is less than 1% of the radius of curvature of the object to be measured, the following formula is considered to be established:

C1＝L0 C 1 =L 0

其中C1为下表面弧长，L0为柔性薄膜传感器原始长度；where C 1 is the arc length of the lower surface, and L 0 is the original length of the flexible thin film sensor;

下表面弧对应的弦长L1由下式计算：The chord length L1 corresponding to the arc on the lower surface is calculated by the following formula:

Figure BDA0002546866640000021
Figure BDA0002546866640000021

其中r为下表面曲率半径，再根据下式计算上表面弧对应的弦长L2：where r is the radius of curvature of the lower surface, and then calculate the chord length L 2 corresponding to the arc on the upper surface according to the following formula:

Figure BDA0002546866640000022
Figure BDA0002546866640000022

D为上下表面的间距、R为上表面曲率半径，柔性薄膜传感器的长度变化量ΔL：D is the distance between the upper and lower surfaces, R is the radius of curvature of the upper surface, and the length change ΔL of the flexible film sensor:

ΔL＝L2-L0 ΔL=L 2 -L 0

上式中L0为柔性薄膜传感器的原始长度，而拉伸应变量ε根据下式计算：In the above formula, L 0 is the original length of the flexible thin film sensor, and the tensile strain ε is calculated according to the following formula:

ε＝ΔL/L0。ε=ΔL/L 0 .

所述步骤2)中当柔性薄膜传感器长度大于待测物曲率半径1％，但小于待测物体半圆弧长时，In the step 2), when the length of the flexible thin film sensor is greater than 1% of the radius of curvature of the object to be measured, but less than the semicircular arc length of the object to be measured,

C1＝L0和

Figure BDA0002546866640000023
依然成立，根据下式计算上表面弧长C2：C 1 =L 0 and
Figure BDA0002546866640000023
Still established, the upper surface arc length C 2 is calculated according to the following formula:

Figure BDA0002546866640000024
Figure BDA0002546866640000024

其中，θ为中心角，单位rad。Among them, θ is the center angle, in rad.

而上表面弧对应的弦长L2由如下公式推导得出：The chord length L2 corresponding to the arc on the upper surface is derived from the following formula :

Figure BDA0002546866640000025
Figure BDA0002546866640000025

再由下式计算长度变化量ΔL与拉伸应变量ε：Then calculate the length change ΔL and the tensile strain ε by the following formula:

ΔL＝L2-L0 ΔL=L 2 -L 0

ε＝ΔL/L0。ε=ΔL/L 0 .

所述步骤2)中当柔性薄膜传感器的长度超过待测物体半圆弧的长度甚至接近待测物体一圈时，具体计算如下：In the step 2), when the length of the flexible thin film sensor exceeds the length of the semi-circular arc of the object to be measured or even closes to one circle of the object to be measured, the specific calculation is as follows:

C1＝L0 C 1 =L 0

其中C1为下表面弧长，L0为柔性薄膜传感器原始长度；where C 1 is the arc length of the lower surface, and L 0 is the original length of the flexible thin film sensor;

下表面弧对应的弦长L1由下式计算：The chord length L1 corresponding to the arc on the lower surface is calculated by the following formula:

Figure BDA0002546866640000031
Figure BDA0002546866640000031

其中r为下表面曲率半径，再根据下式计算上表面弧对应的弦长L2：where r is the radius of curvature of the lower surface, and then calculate the chord length L 2 corresponding to the arc on the upper surface according to the following formula:

Figure BDA0002546866640000032
Figure BDA0002546866640000032

D为上下表面的间距、R为上表面曲率半径，柔性薄膜传感器的第二长度变化量ΔL'：D is the distance between the upper and lower surfaces, R is the curvature radius of the upper surface, and the second length change ΔL' of the flexible film sensor:

ΔL'＝L0-L2 ΔL'=L 0 -L 2

上式中L0为柔性薄膜传感器的原始长度，而拉伸应变量ε根据下式计算：In the above formula, L 0 is the original length of the flexible thin film sensor, and the tensile strain ε is calculated according to the following formula:

ε＝ΔL'/L0。ε=ΔL'/L 0 .

所述步骤3)中基于胡克弹性公式计算薄膜传感器形变所产生的压力值，具体公式如下：In the step 3), the pressure value generated by the deformation of the thin film sensor is calculated based on the Hooke's elasticity formula, and the specific formula is as follows:

Figure BDA0002546866640000033
Figure BDA0002546866640000033

其中，E——弹性模量，N/m2；Among them, E——modulus of elasticity, N/m 2 ;

F——拉伸情况下柔性薄膜传感器对物体施加的压力，N；F——The pressure exerted by the flexible film sensor on the object under stretching, N;

A0——柔性薄膜传感器的面积，m2；A 0 ——the area of the flexible thin film sensor, m 2 ;

ΔL——柔性薄膜传感器拉伸态下的长度变化量，m；ΔL——the length change of the flexible film sensor in the stretched state, m;

L0——柔性薄膜传感器的原始长度，m。L 0 ——the original length of the flexible thin film sensor, m.

一种柔性压力传感系统，包括贴附在待测物体表面的柔性薄膜传感器，薄膜FPC排线将柔性薄膜传感器连接至数据处理系统；A flexible pressure sensing system includes a flexible thin film sensor attached to the surface of an object to be measured, and a thin film FPC cable connects the flexible thin film sensor to a data processing system;

所述柔性薄膜传感器在弯曲状态下计算薄膜传感器形变所产生的压力值，补偿由此导致的测量误差。The flexible thin film sensor calculates the pressure value generated by the deformation of the thin film sensor in a bent state, and compensates for the measurement error caused thereby.

有益效果：本发明对弯曲状态下柔性薄膜传感器进行建模，并根据传感器长度的不同，做不同的建模计算，较为精确的计算出柔性薄膜传感器自身形变所引起的压力变化，因此应用本发明能够较好地补偿柔性薄膜传感器实际测量时的误差。本发明计算所需数据量小且无需迭代，计算流程清晰可靠性高，对操作者的要求也较低。Beneficial effects: The present invention models the flexible thin film sensor in a bent state, and performs different modeling calculations according to the length of the sensor, so as to more accurately calculate the pressure change caused by the deformation of the flexible thin film sensor itself, so the present invention is applied. The error in actual measurement of the flexible thin film sensor can be better compensated. The calculation of the invention requires a small amount of data without iteration, the calculation process is clear and reliable, and the requirements for operators are also low.

附图说明Description of drawings

图1为本发明柔性薄膜传感器结构示意图；FIG. 1 is a schematic structural diagram of the flexible thin film sensor of the present invention;

图2为本发明柔性薄膜传感器计算原理示意图；2 is a schematic diagram of the calculation principle of the flexible thin film sensor of the present invention;

图3为本发明柔性薄膜传感器较长时的计算原理示意图。FIG. 3 is a schematic diagram of the calculation principle of the flexible thin film sensor of the present invention when it is long.

具体实施方式Detailed ways

如图1所示，本实施例中柔性薄膜传感器1贴附在待测物体2表面，并通过薄膜FPC排线3连接至数据处理系统，即计算机。柔性薄膜传感器1选取弹性模量介于2.9—3.1GPa的薄膜材料，既可以适应不同环境下的弯曲要求，也可以减小弯曲态时的形变对压力产生的影响。另外应当选取相对于柔性薄膜刚度稍大的测压点基底材料和尽量较小的测压点面积使测压点不产生形变或形变时对压力测量影响不大。测压点面积需要视情况而定，根据工作环境和需要测量的压力大小选择，测压点的最佳直径不大于5mm。As shown in FIG. 1 , in this embodiment, the flexible thin film sensor 1 is attached to the surface of the object to be measured 2 , and is connected to a data processing system, ie, a computer, through a thin film FPC cable 3 . The flexible film sensor 1 selects a film material with an elastic modulus between 2.9-3.1GPa, which can not only adapt to the bending requirements in different environments, but also reduce the influence of the deformation in the bending state on the pressure. In addition, the base material of the pressure measuring point with a slightly larger rigidity relative to the flexible film and the smallest possible pressure measuring point area should be selected so that the pressure measuring point does not deform or has little influence on the pressure measurement. The area of the pressure measuring point needs to be determined according to the situation. It is selected according to the working environment and the pressure to be measured. The optimal diameter of the pressure measuring point is not more than 5mm.

如图2所示，本实施例一种基于柔性薄膜弯曲力补偿的压力测量方法，是柔性薄膜传感器1在弯曲态下测量待测物体2表面压力的方法。根据已有的动态模拟法对二极管弯曲态的研究表明，柔性薄膜传感器1在弯曲态下工作时，除图2所示截面的拉伸应力为主要应力外，其他轴向应力和剪切应力都很小，并且在器件并没有失效或者断裂的情况下属于应力低于极限应力的情况。在这种情况下，可以将柔性薄膜传感器1做类似弹簧的近似分析，直接利用胡克弹性定律对其产生的应力进行分析。As shown in FIG. 2 , a pressure measurement method based on flexible film bending force compensation in this embodiment is a method for the flexible film sensor 1 to measure the surface pressure of the object to be measured 2 in a bending state. The research on the bending state of the diode according to the existing dynamic simulation method shows that when the flexible film sensor 1 works in the bending state, except the tensile stress of the section shown in Fig. 2 is the main stress, other axial stress and shear stress are all is very small, and the stress is below the ultimate stress without the device failing or breaking. In this case, the flexible thin film sensor 1 can be approximated by spring-like analysis, and the stress generated by Hooke's law of elasticity can be directly analyzed.

本实施例一种基于柔性薄膜弯曲力补偿的压力测量方法，具体包括以下步骤：The present embodiment is a pressure measurement method based on flexible film bending force compensation, which specifically includes the following steps:

1)如图3所示，柔性薄膜传感器1贴合在待测物体2表面时，其上下表面弯曲时的曲率半径不同，因此产生了上下表面一系列的数据差异，进而要对上下表面的数据分别测量。即测量柔性薄膜传感器的面积A0、厚度D0、材料、边界位置上下表面的间距D、上表面曲率半径R、下表面曲率半径r和中心角θ这些基础数据。1) As shown in Figure 3, when the flexible film sensor 1 is attached to the surface of the object to be measured 2, the curvature radius of the upper and lower surfaces are different when the upper and lower surfaces are bent, so a series of data differences between the upper and lower surfaces are generated, and the data on the upper and lower surfaces must be compared. measure separately. That is to measure the basic data of area A 0 , thickness D 0 , material, distance D between the upper and lower surfaces of the boundary position, upper surface curvature radius R, lower surface curvature radius r and central angle θ of the flexible thin film sensor.

2)根据上一步获取的柔性薄膜传感器材料确定它的弹性模量E大小，根据数学估算模型计算弯曲态下柔性薄膜传感器的上表面弧长C2、下表面弧长C1、上表面弧对应的弦长L2、下表面弧对应的弦长L1，根据弦长确定长度变化量ΔL，再根据弧长、弦长、间距等确定拉伸应变量ε。2) Determine its elastic modulus E according to the flexible film sensor material obtained in the previous step, and calculate the upper surface arc length C 2 , the lower surface arc length C 1 , and the upper surface arc corresponding to the flexible film sensor under the bending state according to the mathematical estimation model. The chord length L 2 of , and the chord length L 1 corresponding to the arc on the lower surface, determine the length change ΔL according to the chord length, and then determine the tensile strain ε according to the arc length, chord length, spacing, etc.

i)具体地，对于柔性薄膜传感器测压点的长度小于曲率半径1％的情况，以柔性薄膜传感器的原始长度为L0，柔性薄膜传感器下表面完全贴合待测物刚性曲面，所以C1＝L0。i) Specifically, for the case where the length of the pressure measuring point of the flexible thin film sensor is less than 1% of the radius of curvature, and the original length of the flexible thin film sensor is L 0 , the lower surface of the flexible thin film sensor completely fits the rigid curved surface of the object to be measured, so C 1 =L 0 .

下表面弧对应的弦长L1由下式计算：The chord length L1 corresponding to the arc on the lower surface is calculated by the following formula:

Figure BDA0002546866640000051
Figure BDA0002546866640000051

再根据相似原理近似得到上表面弧对应的弦长L2：Then approximate the chord length L 2 corresponding to the upper surface arc according to the similarity principle:

Figure BDA0002546866640000052
Figure BDA0002546866640000052

柔性薄膜传感器上表面发生了沿传感器长度方向的拉伸形变，因此可求得长度变化量ΔL：The upper surface of the flexible film sensor is stretched and deformed along the length of the sensor, so the length change ΔL can be obtained:

ΔL＝L2-L0 ΔL=L 2 -L 0

上式中L0为柔性薄膜传感器的原始长度，而拉伸应变量ε根据下式计算：In the above formula, L 0 is the original length of the flexible thin film sensor, and the tensile strain ε is calculated according to the following formula:

ε＝ΔL/L0 ε=ΔL/L 0

ii)以上都是在柔性薄膜传感器的长度相对于曲率半径很小的情况下进行的计算。而如果柔性薄膜传感器的长度相对于曲率半径并不是很小，即大于1:100，但小于待测物体半圆弧长时，C1＝L0和

Figure BDA0002546866640000053
依然成立，但是L1和L2相对于R不能再用相似原理近似求解，需要重新建立数学估算模型。此时薄膜压力传感器的长度达到一定数值，可以直接测量中心角θ的数值，数学估算模型也将简化：ii) The above calculations are performed when the length of the flexible thin film sensor is small relative to the radius of curvature. And if the length of the flexible thin film sensor is not very small relative to the radius of curvature, that is, greater than 1:100, but less than the semicircular arc length of the object to be measured, C 1 =L 0 and
Figure BDA0002546866640000053
It is still true, but L 1 and L 2 can no longer be approximated by the similarity principle relative to R, and the mathematical estimation model needs to be re-established. At this time, the length of the membrane pressure sensor reaches a certain value, and the value of the central angle θ can be directly measured, and the mathematical estimation model will also be simplified:

Figure BDA0002546866640000054
Figure BDA0002546866640000054

其中，θ为中心角，单位rad。Among them, θ is the center angle, in rad.

而上表面弧对应的弦长L2可由如下公式推导得出：The chord length L2 corresponding to the arc on the upper surface can be derived from the following formula :

Figure BDA0002546866640000055
Figure BDA0002546866640000055

长度变化量ΔL与拉伸应变量ε计算公式不变。The calculation formula of length change ΔL and tensile strain ε remains unchanged.

i ii)如果柔性薄膜传感器的长度远大于曲率半径，即超过待测物体半圆弧的长度甚至接近待测物体一圈时，将柔性薄膜传感器覆盖的范围视为待测物体表面所未覆盖的空白部分，而实际待测物体表面未被传感器覆盖的空白部分则视为长度较小的柔性薄膜压力传感器覆盖的范围。这样图3中柔性薄膜传感器所在位置被视为它环绕物体一圈所未覆盖的空白部分，而实际柔性薄膜传感器接近环绕物体一圈所留下的空白部分则视为需要测量和计算长度变化量和拉伸应变量的区域，也就是假设柔性薄膜传感器的长度依然很小的情况下来计算。此时原理与上述柔性薄膜传感器长度小于待测物曲率半径1％时相同，前一种情况下的长度变化量ΔL在此时应修改为第二长度变化量ΔL'，计算第二长度变化量ΔL'时需注意其公式为：i ii) If the length of the flexible thin film sensor is much larger than the radius of curvature, that is, when it exceeds the length of the semicircular arc of the object to be measured or even closes to the object to be measured for one circle, the range covered by the flexible thin film sensor is regarded as the surface of the object to be measured that is not covered. The blank part, and the blank part of the actual surface of the object to be measured that is not covered by the sensor is regarded as the range covered by the flexible film pressure sensor with a small length. In this way, the position of the flexible film sensor in Figure 3 is regarded as the blank part that is not covered by one circle around the object, while the blank part left by the actual flexible film sensor close to the object is regarded as the need to measure and calculate the length change and the area of tensile strain, which is calculated assuming that the length of the flexible thin-film sensor is still small. At this time, the principle is the same as when the length of the flexible film sensor is less than 1% of the curvature radius of the object to be measured. The length change ΔL in the former case should be modified to the second length change ΔL' at this time, and the second length change is calculated. When ΔL', it should be noted that its formula is:

ΔL'＝L0-L2 ΔL'=L 0 -L 2

因为此时的半径为R的“上表面”弧长和弦长是小于半径为r的“下表面”的弧长和弦长。Because the arc length and chord length of the "upper surface" with radius R at this time are smaller than the arc length and chord length of the "lower surface" with radius r.

3)将前两步得到的柔性薄膜传感器的弹性模量E、面积A0、原始长度为L0和长度变化量ΔL代入胡克弹性公式中，计算得到柔性薄膜传感器自身形变对物体施加的压力F。3) Substitute the elastic modulus E, area A 0 , original length L 0 and length change ΔL of the flexible thin film sensor obtained in the first two steps into Hooke’s elasticity formula, and calculate the pressure exerted by the flexible thin film sensor itself on the object. F.

胡克弹性公式如下：Hooke's elasticity formula is as follows:

Figure BDA0002546866640000061
Figure BDA0002546866640000061

移项，得：Move item, get:

Figure BDA0002546866640000062
Figure BDA0002546866640000062

其中，E——弹性模量，N/m2；Among them, E——modulus of elasticity, N/m 2 ;

F——拉伸情况下柔性薄膜传感器对物体施加的压力，N；F——The pressure exerted by the flexible film sensor on the object under stretching, N;

A0——柔性薄膜传感器的面积，m2；A 0 ——the area of the flexible thin film sensor, m 2 ;

ΔL——柔性薄膜传感器拉伸态下的长度变化量，m；ΔL——the length change of the flexible film sensor in the stretched state, m;

L0——柔性薄膜传感器的原始长度，m。L 0 ——the original length of the flexible thin film sensor, m.

Claims (7)

1. A pressure measurement method based on flexible film sensor bending force compensation is characterized in that: the method comprises the following steps:
1) obtaining a material of the flexible film sensor and measuring the size of the material;
2) calculating the arc length of the upper surface, the arc length of the lower surface, the chord length corresponding to the arc of the upper surface and the chord length corresponding to the arc of the lower surface of the flexible thin film sensor in the bending state according to the material and the size of the flexible thin film sensor in the step 1), and determining the elastic modulus;
3) calculating a pressure value generated by deformation of the film sensor based on the parameters obtained in the step 2).
2. The method for pressure measurement based on bending force compensation of a flexible film sensor according to claim 1, wherein the dimensions of the flexible film sensor in step 1) comprise area, thickness, distance between the upper surface and the lower surface of the boundary position, upper surface curvature radius, lower surface curvature radius and central angle.
3. The method as claimed in claim 1, wherein the following equation is satisfied when the length of the flexible film sensor in step 2) is less than 1% of the curvature radius of the object to be measured:
C1＝L0
wherein C is1Is the arc length of the lower surface, L0Is the original length of the flexible film sensor;
chord length L corresponding to lower surface arc1Calculated from the following formula:
Figure FDA0002546866630000011
wherein r is the radius of curvature of the lower surface, and the chord length L corresponding to the arc of the upper surface is calculated according to the following formula2：
Figure FDA0002546866630000012
D is the interval of upper and lower surface, R is upper surface curvature radius, flexible film sensor's length variation delta L:
ΔL＝L2-L0
in the above formula L0For the raw length of the flexible film sensor, the amount of tensile strain is calculated according to the following equation:
＝ΔL/L0。
4. the method for measuring pressure based on the bending force compensation of the flexible film sensor according to claim 1, wherein in the step 2), when the length of the flexible film sensor is greater than 1% of the curvature radius of the object to be measured, but less than the half-arc length of the object to be measured,
C1＝L0and
Figure FDA0002546866630000013
again, the upper surface arc length C is calculated according to2：
Figure FDA0002546866630000021
Where θ is the central angle, in units rad.
And the chord length L corresponding to the upper surface arc2Derived from the following equation:
Figure FDA0002546866630000022
then, the length variation Δ L and the tensile strain are calculated by the following formula:
ΔL＝L2-L0
＝ΔL/L0。
5. the method for measuring pressure based on bending force compensation of a flexible film sensor according to claim 1, wherein when the length of the flexible film sensor in the step 2) exceeds the length of the semicircular arc of the object to be measured and is even close to the object to be measured for one circle, the following specific calculation is performed:
C1＝L0
wherein C is1Is the arc length of the lower surface, L0Is the original length of the flexible film sensor;
chord length L corresponding to lower surface arc1Calculated from the following formula:
Figure FDA0002546866630000023
wherein r is the radius of curvature of the lower surface, and the chord length L corresponding to the arc of the upper surface is calculated according to the following formula2：
Figure FDA0002546866630000024
D is the distance between the upper and lower surfaces, R is the radius of curvature of the upper surface, and the second length change Δ L' of the flexible film sensor:
ΔL'＝L0-L2
in the above formula L0For the raw length of the flexible film sensor, the amount of tensile strain is calculated according to the following equation:
＝ΔL'/L0。
6. the method for measuring pressure based on bending force compensation of a flexible film sensor according to claim 1, wherein the pressure value generated by deformation of the film sensor in the step 3) is calculated based on hooke's elastic formula, which is as follows:
Figure FDA0002546866630000031
wherein, E-elastic modulus, N/m2；
F is the pressure exerted by the flexible film sensor on the object under the condition of stretching, N;
A0area of the flexible film sensor, m2；
Δ L — length variation m of the flexible film sensor in a stretched state;
L0-original length of flexible film sensor, m.
7. A flexible pressure sensing system is characterized by comprising a flexible film sensor attached to the surface of an object to be measured, wherein a film FPC (flexible printed circuit) cable connects the flexible film sensor to a data processing system;
the flexible film sensor calculates the pressure value generated by the deformation of the film sensor in the bending state, and compensates the measurement error caused by the pressure value.
CN202010563160.2A 2020-06-19 2020-06-19 Pressure measurement method based on flexible film sensor bending force compensation Pending CN111879454A (en)

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CN117807949A (en) * 2024-01-03 2024-04-02 南京工业大学 FPC layout contactless control and curvature optimization method based on iterative trial and discrete point analysis

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CN114323354A (en) * 2021-12-08 2022-04-12 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） Compensation method, device and computer equipment for pressure transmitter
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CN116046532A (en) * 2022-12-27 2023-05-02 钛深科技(深圳)有限公司 Arc-shaped curved surface pressing device with pressure detection function
CN117807949A (en) * 2024-01-03 2024-04-02 南京工业大学 FPC layout contactless control and curvature optimization method based on iterative trial and discrete point analysis

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