CN111370359A - Fixtures for Open Wafer Cassettes - Google Patents

Abstract

The invention discloses a jig for an open wafer box, comprising a jig base, a positioning organization, a sensor and an intelligent adjustment safety mechanism. The positioning organization, the sensor and the intelligent adjustment safety mechanism are all mounted on the jig base, and the jig base The lower surface can be installed on the driver. The base of the fixture consists of a vertical plate, a lower bottom plate and an upper bottom plate. A positioning organization consists of two upper positioning mechanisms, two side centering mechanisms, and a lower positioning mechanism. The lower positioning mechanism, The side centering mechanism and the upper positioning mechanism are used for the positioning of the wafer cassette to improve its positioning accuracy so that the robot can grasp it. The intelligent adjustment safety mechanism judges and adjusts the position of the wafer cassette to place it in place. Open wafer cassette. The jig for the open wafer cassette of the present invention greatly improves the safety of wafers during transportation, and has the advantages of high safety and cost saving.

Description

Fixtures for Open Wafer Cassettes

technical field

The invention relates to the field of semiconductor, photovoltaic, sapphire wafer or silicon wafer or sapphire wafer handling, in particular to a jig for an open wafer box.

Background technique

Semiconductors, photovoltaics, sapphire wafers or silicon or sapphire wafers are very valuable products that must not be damaged during placement and transport. Among them, the open wafer box is a common device for loading wafers and sapphire in its industry. It has a lot of turnover in the production process. Now it is generally handled by hand, or put into a trolley, and it is finely attached and fixed, and then slowly Slowly push it to the edge of the machine, and then disassemble it for loading and unloading. It needs to be very careful during the handling process, which requires high quality of operators and low efficiency. At the same time, if it is damaged or dropped by manual handling, it will bring great loss of benefits to the company.

In recent years, with the rapid development of intelligent equipment technology such as industrial robots and the continuous rise of labor costs, the industry's demand for automated manufacturing is also increasing. Traditional manual production is difficult to manage, quality and cost control are too difficult, and the automation of open wafer cassette handling, turnover and loading and unloading is increasingly urgent. Therefore, there is a solution for grasping and transporting with a composite robot. The composite robot is a robot + AGV + vision, and a clamp is installed on the composite robot to grab the open wafer box on the machine table. However, this solution has to solve the problem that the grasping area has been placed. There is a risk of damage to the product during assembly, and the risk that the product may slip out of the opening during shipping and be damaged. At the same time, the visual positioning time is long, and multiple visual positioning takes more time, which affects the production efficiency. If it is solved by adding a composite robot, the cost is too high.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a jig for an open wafer cassette in view of the above problems.

The present invention achieves the above object through the following technical solutions: a jig for an open wafer cassette, which includes a jig base, a positioning organization, a sensor, and an intelligent adjustment safety mechanism, the positioning organization, the sensor, and the intelligent adjustment safety mechanism are installed on the base of the fixture;

The base of the fixture is composed of a vertical plate, a lower bottom plate and an upper bottom plate, and the upper bottom plate is inclined and fixed on the lower bottom plate through a plurality of vertical plates;

The positioning mechanism is composed of an upper positioning mechanism, a side centering mechanism, and a lower positioning mechanism. The upper positioning mechanism is installed at the highest end of the upper base plate, the side centering mechanism is installed at the middle of the upper base plate, and the lower positioning mechanism is installed at the lowest point of the upper base plate. end;

The intelligent adjustment safety mechanism is composed of an adjustment safety mechanism seat and a shooting sensor. The adjustment safety mechanism seat is movably arranged at the four corners of the upper bottom plate. Each adjustment safety mechanism seat is provided with a shooting sensor, and two pairs of the same height are installed. The transmitter side of the radiation sensor is opposite.

As a further optimized solution of the present invention, the upper positioning mechanism is composed of an upper positioning seat, a spring 1, a guide block, and a rotating shaft. A first elastic space is formed between the seat and the guide block, a spring one is installed in the first elastic space, and two ends of the spring one are respectively connected to the upper positioning seat and the guide block.

As a further optimized solution of the present invention, the side centering mechanism consists of a side centering seat, a baffle plate, a bearing, and an elastic member. The side centering seat is fixed on the upper bottom plate, and the baffle plate is arranged on the side of the side centering seat. The bearing is laterally fixed in the side centering seat through the elastic piece, the baffle plate is provided with a through hole, and the bearing passes through the through hole.

As a further optimized solution of the present invention, the lower positioning mechanism consists of a fixed plate, a positioning plate, a second spring, and a guide rod. The fixed plate is fixed on the upper bottom plate, the guide rod is fixed on the fixed plate, and the positioning plate is movably fixed on the guide rod. A second elastic space is formed between the plate and the fixing plate, the second elastic space is provided with a second spring, and two ends of the second spring are respectively connected to the positioning plate and the fixing plate.

As a further optimized solution of the present invention, the minimum elastic force of spring two is greater than or equal to the maximum elastic force of spring one plus the static friction force between the wafer cassette and the upper bottom plate, and the minimum elastic force of spring one is greater than or equal to the static friction between the wafer box and the upper bottom plate force. Since the upper base plate has a certain inclination, in order to prevent the wafer cassette from sliding out of the upper base plate after being placed, the minimum elastic force of spring 2 is greater than or equal to the maximum elastic force of spring 1 plus the gap between the wafer cassette and the upper base plate. of static friction. And the minimum elastic force of spring 1 is greater than or equal to the static friction force between the wafer box and the upper bottom plate, so as to ensure that the wafer box can rest on the positioning plate and prevent sliding during transportation.

As a further optimized solution of the present invention, the minimum elastic force of the elastic member is greater than or equal to the frictional force between the bearing and the wafer cassette plus the static frictional force between the wafer cassette and the upper bottom plate. It is ensured that the elastic member can clamp the wafer cassette.

As a further optimized solution of the present invention, the distance between the two side centering mechanisms is greater than the width of the wafer cassette. The distance between the two side centering mechanisms is slightly larger than the width of the wafer box, which can effectively ensure the rapid insertion of the wafer box, and can effectively ensure that the bearing clamps the wafer box.

As a further optimized solution of the present invention, one positioning organization is composed of two upper positioning mechanisms, two side centering mechanisms, and one lower positioning mechanism.

As a further optimized solution of the present invention, the guide block has a concave structure. By arranging the guide block of the concave structure, the convex on the side wall of the wafer box can be effectively matched, and the stable placement of the wafer box can be realized.

The beneficial effects of the present invention are:

By setting the upper positioning mechanism, the side centering mechanism, and the lower positioning mechanism, the stable placement of the wafer cassette is realized to prevent misalignment during transportation.

By arranging the guide block of the concave structure, the convex on the side wall of the wafer box can be effectively matched, and the stable placement of the wafer box can be realized.

By setting the shot sensor, the precise placement of the wafer cassette is realized, and the misplacement of the wafer cassette is prevented.

Description of drawings

1 is a schematic structural diagram of a jig for an open wafer cassette of the present invention;

2 is a schematic structural diagram of a jig base for an open-type wafer cassette of the present invention;

3 is a schematic diagram of the positioning organization structure of the jig for the open wafer cassette of the present invention;

4 is a schematic structural diagram of the upper positioning mechanism, the side centering mechanism and the lower positioning mechanism of the jig for the open wafer cassette according to the present invention;

5 is a schematic structural diagram of an intelligent adjustment safety mechanism for a fixture for an open wafer cassette according to the present invention;

6 is a side view of the side centering mechanism of the jig for an open wafer cassette of the present invention;

7 is a schematic diagram of the internal structure of the side centering mechanism of the jig for an open wafer cassette according to the present invention;

1- Fixture base, 3- Sensor, 4- Intelligent adjustment safety mechanism, 11- Vertical plate, 12- Lower base plate, 13- Upper base plate, 21- Upper positioning mechanism, 22- Side centering mechanism, 23- Lower positioning Mechanism, 41-adjustment safety mechanism seat, 42-air sensor, 211-upper positioning seat, 212-spring 1, 213-guide block, 214-rotating shaft, 221-side centering seat, 222-baffle plate, 223 -Bearing, 224-Elastic piece, 231-Fixing plate, 232-Locating plate, 233-Spring II, 234-Guide rod, 41-Adjustment safety mechanism seat, 42-On-shoot sensor.

Detailed ways

The application will be described in further detail below in conjunction with the accompanying drawings. It is necessary to point out that the following specific embodiments are only used to further illustrate the application, and should not be construed as limiting the protection scope of the application. Those skilled in the art can The above application content makes some non-essential improvements and adjustments to this application.

Example 1

As shown in FIG. 1, a jig for an open wafer cassette includes a jig base 1, a positioning organization, a sensor 3, and an intelligent adjustment safety mechanism 4. The positioning organization, the sensor 3, and the intelligent adjustment safety mechanism 4 are all installed On the jig base 1, the structure is simple and the manufacturing cost is relatively low.

As shown in FIG. 2 , the jig base 1 is composed of a vertical plate 11 , a lower bottom plate 12 , and an upper bottom plate 13 . The vertical plate 11 may be a right-angled triangle, so that the upper bottom plate 13 has a certain inclination when being fixed on the lower bottom plate 12 through the vertical plate 11 . When the open wafer cassette is placed on the upper bottom plate 13, the opening is upward, so that the wafers will not slip out of the open wafer cassette due to inertia or vibration during the movement.

As shown in FIG. 3 , the positioning organization consists of an upper positioning mechanism 21, a side centering mechanism 22, and a lower positioning mechanism 23. The upper positioning mechanism 21 is installed on the highest end of the upper bottom plate 13, and the side centering mechanism 22 is installed on the upper In the middle of the bottom plate 13 , the lower positioning mechanism 23 is installed on the lowest end of the upper bottom plate 13 . And one positioning organization is composed of two upper positioning mechanisms 21 , two side centering mechanisms 22 , and one lower positioning mechanism 23 . The upper positioning mechanism 21 , the side centering mechanism 22 , and the lower positioning mechanism 23 cooperate with each other, so that the open wafer cassette is stably placed on the upper bottom plate 13 .

As shown in FIG. 5 , the intelligent adjustment safety mechanism 4 is composed of an adjustment safety mechanism seat 41 and a shooting sensor 42 . The adjustment safety mechanism seat 41 is movably arranged at the four corners of the upper bottom plate 13 , and each adjustment safety mechanism seat 41 is provided with a The through-beam sensor 42, and the emission ends of the two through-beam sensors 42 at the same height are opposite to each other. One end of the through-beam sensor 42 emits light, and one end receives the light. When the light is blocked, the through-beam sensor 42 can trigger a signal. When the robot is placing the open wafer cassette, if the light is blocked, the beam sensor 42 can trigger a signal to the robot, and the robot moves the wafer cassette in the opposite direction until no signal is triggered, indicating that the wafer cassette is in the placeable range inside, can be safely put down. If both the upper and lower lights are blocked, it will not work after the robot rotates a small amount on both sides, stop and alarm.

Example 2

As shown in Embodiment 1, an open-type wafer cassette jig is only different in that, as shown in FIG. The upper positioning seat 211 is fixed on the upper bottom plate 13, the guide block 213 is installed on the upper positioning seat 211 through the rotating shaft 214, and a first elastic space is formed between the upper positioning seat 211 and the guide block 213, and the first elastic space is formed between the upper positioning seat 211 and the guide block 213. A spring one 212 is installed in the space, and two ends of the spring one 212 are respectively connected to the upper positioning seat 211 and the guide block 213 .

As shown in FIGS. 4 , 6 and 7 , the side centering mechanism 22 consists of a side centering seat 221 , a baffle plate 222 , a bearing 223 , and an elastic member 224 , and the side centering seat 221 is fixed on the upper bottom plate 13 . The baffle plate 222 is disposed on the side of the side centering seat 221 , the bearing 223 is laterally fixed in the side centering seat 221 by the elastic member 224 , the baffle plate 222 is provided with a through hole 2221 , and the bearing 223 passes through the through hole 2221 . And the distance between the two side centering mechanisms 22 is slightly larger than the width of the wafer box, and the open wafer box is in the middle of the two side centering mechanisms 22 with a small gap. During the placement process, the bearing can move backward. After the bearing 223 is placed, the open wafer cassette is pushed between the two bearings 223. At this time, at least one bearing 223 has a certain gap with the open wafer cassette.

As shown in FIG. 4 , the lower positioning mechanism 23 consists of a fixing plate 231 , a positioning plate 232 , a second spring 233 and a guide rod 234 . The fixing plate 231 is fixed on the upper bottom plate 13 , the guide rod 234 is fixed on the fixing plate 231 , and the positioning plate 232 The second elastic space is formed between the positioning plate 232 and the fixing plate 231. The second elastic space is provided with a second spring 233. The two ends of the second spring 233 are respectively connected to the positioning plate 232 and the fixing plate. 231.

The minimum elastic force of the second spring 233 is F ₁ , the maximum elastic force of the spring one 212 is F ₂ , the minimum elastic force is F ₃ , the minimum elastic force of the elastic member 224 is F ₄ , and the static friction force between the wafer cassette and the upper bottom plate 13 is F ₀ , the frictional force between the wafer cassette and the bearing 223 is _F5 after placement. Among them, F ₁ ≥F ₂ +F ₀ , F ₃ ≥F ₀ , and F ₄ ≥F ₀ +F ₅ . Since the upper base plate 13 has a certain inclination, in order to prevent the wafer cassette from sliding out of the upper base plate after being placed, the minimum elastic force F1 of the spring 2 is greater than or equal to the maximum elastic force F2 of the spring ₁ plus the wafer cassette and the upper base plate. Static friction force F ₀ between the bottom plates. And the minimum elastic force F ₃ of spring 1 is greater than or equal to the static friction force F ₀ between the wafer cassette and the upper bottom plate, so as to ensure that the wafer cassette can rest on the positioning plate and prevent sliding during transportation. The upper positioning mechanism 21, the side centering mechanism 22, and the lower positioning mechanism 23 are not necessarily limited to this one structure, and other elastic mechanisms can be interchanged between the structures. For example, the positioning mechanism above can be used without external driving force. Precise positioning of the open wafer cassette enables the compound robot to grasp it without using visual positioning, reducing time takt and improving production efficiency at very little cost.

Example 3

A jig for an open wafer cassette as shown in Embodiment 1, the difference is only that the guide block 213 has a concave structure. Since a small protrusion is provided on the side wall of the wafer box, in order to better match the wafer box, the guide block 213 has a concave structure, which can better fix the wafer box.

The above-mentioned embodiments are only to describe the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention. On the premise of not departing from the design concept of the present invention, various modifications and improvements made by those of ordinary skill in the art to the technical solutions of the present invention should fall within the protection scope of the present invention, and the technical content claimed in the present invention has been fully recorded in the claims.

Claims (9)

1. The utility model provides an open wafer jig for box which characterized in that: the jig comprises a jig base (1), a positioning tissue, a sensor (3) and an intelligent adjusting safety mechanism (4), wherein the positioning tissue, the sensor (3) and the intelligent adjusting safety mechanism (4) are all arranged on the jig base (1);

the jig base (1) consists of vertical plates (11), a lower bottom plate (12) and an upper bottom plate (13), and the upper bottom plate (13) is obliquely fixed on the lower bottom plate (12) through a plurality of vertical plates (11);

the positioning mechanism consists of an upper positioning mechanism (21), a lateral centering mechanism (22) and a lower positioning mechanism (23), the upper positioning mechanism (21) is installed at the highest end of the upper bottom plate (13), the lateral centering mechanism (22) is installed in the middle of the upper bottom plate (13), and the lower positioning mechanism (23) is installed at the lowest end of the upper bottom plate (13);

the intelligent adjustment safety mechanism (4) is composed of adjustment safety mechanism seats (41) and correlation sensors (42), the adjustment safety mechanism seats (41) are movably arranged at four corners of the upper base plate (13), the correlation sensors (42) are arranged on each adjustment safety mechanism seat (41), and the transmitting ends of the two correlation sensors (42) at the same height are opposite.

2. The jig for an open wafer cassette of claim 1, wherein: upper portion positioning mechanism (21) comprises upper portion positioning seat (211), spring (212), guide block (213), rotation axis (214), and upper portion positioning seat (211) are fixed in on upper plate (13), and install on upper portion positioning seat (211) guide block (213) through rotation axis (214), and form first elastic space between upper portion positioning seat (211) and guide block (213), install spring (212) in the first elastic space, upper portion positioning seat (211) and guide block (213) are connected respectively to the both ends of spring (212).

3. The jig for an open wafer cassette of claim 2, wherein: the side centering mechanism (22) comprises a side centering seat (221), a baffle (222), a bearing (223) and an elastic piece (224), wherein the side centering seat (221) is fixed on the upper base plate (13), the baffle (222) is arranged on the side surface of the side centering seat (221), the bearing (223) is transversely fixed in the side centering seat (221) through the elastic piece (224), a through hole (2221) is formed in the baffle (222), and the bearing (223) penetrates through the through hole (2221).

4. The jig for an open wafer cassette of claim 1, wherein: lower part positioning mechanism (23) is by fixed plate (231), locating plate (232), spring two (233), guide bar (234), and fixed plate (231) is fixed in on upper plate (13), and guide bar (234) are fixed in on fixed plate (231), and on locating plate (232) activity was fixed in guide bar (234), formed second elastic space between locating plate (232) and fixed plate (231), be equipped with spring two (233) in the second elastic space, locating plate (232) and fixed plate (231) are connected respectively to the both ends of spring two (233).

5. The jig for an open wafer cassette of claim 1, wherein: the minimum elastic force of the second spring (233) is greater than or equal to the maximum elastic force of the first spring (212) plus the static friction force between the wafer box and the upper base plate (13), and the minimum elastic force of the first spring (212) is greater than or equal to the static friction force between the wafer box and the upper base plate (13).

6. The jig for an open wafer cassette of claim 1, wherein: the minimum elastic force of the elastic member (224) is greater than or equal to the sum of the frictional force between the bearing (223) and the wafer cassette and the static frictional force between the wafer cassette and the upper base plate (13).

7. The jig for an open wafer cassette of claim 1, wherein: the distance between the two side centering mechanisms (22) is larger than the width of the wafer box.

8. The jig for an open wafer cassette of claim 1, wherein: a positioning tissue consists of two upper positioning mechanisms (21), two side centering mechanisms (22) and a lower positioning mechanism (23).

9. The jig for an open wafer cassette of claim 1, wherein: the guide block (213) is of a concave structure.

Images