CN105811231B - A kind of big energy picosecond laser of volume Bragg grating - Google Patents
A kind of big energy picosecond laser of volume Bragg grating Download PDFInfo
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Abstract
本发明涉及激光技术领域,具体而言,涉及一种体布拉格光栅大能量皮秒激光器。本发明公开的激光器包括:箱体,两个平行的体布拉格光栅端镜VBG分别设置在箱体内部的两端,构成光学谐振腔,在光学谐振腔内依次设置有电光开关、偏振片、饱和吸收体和增益泵浦模块、凹透镜。增益泵浦模块对激光晶体进行强泵浦产生振荡光,振荡光在饱和吸收体的作用下逐渐压缩为短脉冲。同时,在体布拉格光栅端镜VBG的作用下,脉宽进一步压缩。在脉冲能量最大的时刻,电光开关加上高压,即通过腔倒空技术,将大能量皮秒脉冲通过偏振片和全反光镜输出,获得大能量的皮秒脉冲激光,从而解决了现阶段大能量皮秒脉冲激光器体积大、器件复杂、稳定性低的问题。
The invention relates to the field of laser technology, in particular to a volume Bragg grating high-energy picosecond laser. The laser device disclosed by the present invention includes: a box body, two parallel volume Bragg grating end mirrors VBG are respectively arranged at the two ends inside the box body to form an optical resonant cavity, in which an electro-optic switch, a polarizer, a saturation Absorber and gain pump modules, concave lens. The gain pump module strongly pumps the laser crystal to generate oscillating light, and the oscillating light is gradually compressed into short pulses under the action of the saturable absorber. At the same time, under the action of the volume Bragg grating end mirror VBG, the pulse width is further compressed. At the moment when the pulse energy is the largest, the electro-optical switch is added with high voltage, that is, through the cavity emptying technology, the high-energy picosecond pulse is output through the polarizer and the full mirror, and a high-energy picosecond pulse laser is obtained, thus solving the current large-scale problem. Energy picosecond pulsed lasers have the problems of large volume, complex devices and low stability.
Description
技术领域technical field
本发明涉及激光技术领域,具体而言,涉及一种体布拉格光栅大能量皮秒激光器。The invention relates to the field of laser technology, in particular to a volume Bragg grating high-energy picosecond laser.
背景技术Background technique
皮秒激光器在工业加工,表面改性处理,卫星测距、生命科学等领域应用越来越广泛。生命体的各种代谢时间约在10-12s,采用皮秒脉冲光能够影响这一时间段的代谢作用,由此,在生命科学各研究中,皮秒激光器得到了广泛的应用,其对哺乳动物细胞DAN的研究,有利的促进了人类对自己的认识。皮秒激光脉冲窄,光的强度大,测距精度高,测量距离远,在卫星测距中其精度可达3mm。在皮秒加工过程中,产生热量少,加工精度高,对材料没有选择性,冲击强度大,在微纳加工及材料表面改性中应用广泛。同时,皮秒激光也是激光频率变换的有效泵浦源。Picosecond lasers are more and more widely used in industrial processing, surface modification, satellite ranging, life science and other fields. The various metabolic times of living organisms are about 10 -12 s, and the use of picosecond pulsed light can affect the metabolism of this time period. Therefore, picosecond lasers have been widely used in various researches in life sciences. The study of mammalian cell DNA has beneficially promoted human beings' understanding of themselves. The picosecond laser pulse is narrow, the light intensity is high, the distance measurement accuracy is high, and the measurement distance is long. In satellite ranging, its accuracy can reach 3mm. During picosecond processing, it generates less heat, has high processing precision, has no selectivity for materials, and has high impact strength. It is widely used in micro-nano processing and surface modification of materials. At the same time, the picosecond laser is also an effective pump source for laser frequency conversion.
通常情况下,大能量的皮秒脉冲,一般先由锁模产生重复频率为百兆赫兹,单脉冲为纳焦量级皮秒脉冲种子光,接着进行再生放大,获得单脉冲能量毫焦级的皮秒脉冲,再采用行波放大,获得更高能量的皮秒脉冲。锁模腔长越长,模式数越多,越容易实现锁模,在考虑腔的损耗下,一般的稳定锁模腔长为1.5m左右,而再生放大腔中,受电光开关开关时间(约5ns)作用的限制,一般腔长达1.2m左右。由此,锁模加再生放大获得大能量的皮秒脉冲,激光器体积大,器件复杂,稳定性也随之下降。Usually, the picosecond pulse with high energy is first generated by mode-locking with a repetition rate of 100 MHz, and the single pulse is a nanojoule-level picosecond pulse seed light, and then regenerated and amplified to obtain a single-pulse energy of millijoule level. Picosecond pulses are amplified by traveling waves to obtain higher energy picosecond pulses. The longer the mode-locking cavity, the more the number of modes, and the easier it is to achieve mode-locking. Considering the loss of the cavity, the general stable mode-locking cavity length is about 1.5m, and in the regenerative amplifier cavity, the switching time of the electro-optic switch (approx. 5ns) effect, the general cavity length is about 1.2m. As a result, high-energy picosecond pulses are obtained by mode-locking plus regenerative amplification. The laser is bulky, the device is complex, and the stability is also reduced.
发明内容Contents of the invention
本发明的目的在于一种体布拉格光栅大能量皮秒激光器,以解决现阶段获得大能量的皮秒脉冲的激光器体积大、器件复杂、稳定性低的问题。The object of the present invention is a volume Bragg grating high-energy picosecond laser, to solve the problems of large volume, complex devices and low stability of lasers for obtaining high-energy picosecond pulses at the present stage.
本发明提供了一种体布拉格光栅大能量皮秒激光器,其包括:The invention provides a volume Bragg grating high-energy picosecond laser, which includes:
箱体,两个平行的体布拉格光栅端镜VBG分别设置在所述箱体内部的两端,构成光学谐振腔,在所述光学谐振腔内依次设置有电光开关、偏振片、饱和吸收体和增益泵浦模块;所述偏振片的反射光路上设置有全反镜,所述全反镜用于将所述激光器产生的激光通过激光输出口输出,所述激光输出口设置在所述箱体上;A box body, two parallel volume Bragg grating end mirrors VBG are respectively arranged at both ends inside the box body to form an optical resonant cavity, in which an electro-optic switch, a polarizer, a saturable absorber and Gain pumping module; a total reflection mirror is arranged on the reflection optical path of the polarizer, and the total reflection mirror is used to output the laser light generated by the laser through the laser output port, and the laser output port is arranged in the box superior;
所述箱体上还设置有一个以上电接线端接口,所述电光开关和增益泵浦模块分别通过接线端接口连接有供电装置。The box body is also provided with more than one electrical terminal interface, and the electro-optic switch and gain pump module are respectively connected to a power supply device through the terminal interface.
在一些实施例中,优选为,所述体布拉格光栅端镜VBG、饱和吸收体和增益泵浦模块放置在热沉中。所述热沉为微型散热片,是通过冷却水或冷却气体冷却的装置,所述箱体上设置有冷却循环接口。In some embodiments, preferably, the volume Bragg grating end mirror VBG, the saturable absorber and the gain pump module are placed in a heat sink. The heat sink is a miniature heat sink, which is a device cooled by cooling water or cooling gas, and a cooling circulation interface is provided on the box.
所述增益泵浦模块为连续泵浦或准连续泵浦。当所述增益泵浦模块为准连续泵浦时,所述电光开关所加电压的频率与准连续泵浦频率一致。The gain pumping module is continuous pumping or quasi-continuous pumping. When the gain pumping module is quasi-continuous pumping, the frequency of the voltage applied by the electro-optical switch is consistent with the quasi-continuous pumping frequency.
并且,所述光学谐振腔内还设置有四分之一波片,所述增益泵浦模块、凹透镜和所述四分之一波片依次设置。所述体布拉格光栅端镜VBG、偏振片、饱和吸收体、凹透镜、四分之一波片、全反镜和增益泵浦模块内的激光晶体都镀有与振荡光的波段一致的增透膜或高反射膜。In addition, a quarter-wave plate is further arranged in the optical resonant cavity, and the gain pump module, the concave lens and the quarter-wave plate are arranged in sequence. The volume Bragg grating end mirror VBG, polarizer, saturable absorber, concave lens, quarter-wave plate, total reflection mirror and laser crystal in the gain pump module are all coated with an anti-reflection coating consistent with the wave band of the oscillating light or high reflective film.
所述光学谐振腔内还设置有小孔光阑,所述小孔光阑设置在所述电压装置和所述偏振片之间;所述小孔光阑孔径小于所述增益泵浦模块内激光晶体的尺寸,用于抑制高阶模振荡,提高光束质量。A small hole diaphragm is also arranged in the optical resonant cavity, and the small hole diaphragm is arranged between the voltage device and the polarizer; the aperture of the small hole diaphragm is smaller than that of the laser light in the gain pump module The size of the crystal is used to suppress high-order mode oscillations and improve beam quality.
所述全反镜为45°全反镜。The total reflection mirror is a 45° total reflection mirror.
本发明实施例提供的体布拉格光栅大能量皮秒激光器,与现有技术相比,箱体内的两端平行设置的体布拉格光栅端镜VBG形成光学谐振腔,在光学谐振腔内依次设置有电光开关、偏振片、饱和吸收体和增益泵浦模块。利用增益泵浦模块对激光晶体进行强泵浦产生振荡光,振荡光在饱和吸收体的作用下逐渐压缩为短脉冲。而且,该激光器还设置有凹透镜,凹透镜补偿增益泵浦模块由热效应引用的热透镜,保证了谐振腔内振荡光斑的大小,避免光斑过小,大能量时的器件损坏。同时,在两端平行设置的体布拉格光栅端镜VBG的作用下,脉宽进一步压缩。在脉冲能量最大的时刻,电光开关加上高压,即通过腔倒空技术,将大能量皮秒脉冲通过偏振片和全反光镜输出。因此,有效的解决了现阶段获得大能量的皮秒脉冲的激光器体积大、器件复杂、稳定性低的问题。The volume Bragg grating high-energy picosecond laser provided by the embodiment of the present invention, compared with the prior art, the volume Bragg grating end mirror VBG arranged in parallel at both ends of the box forms an optical resonant cavity, and the optical resonant cavity is sequentially arranged with electro-optic Switches, polarizers, saturable absorbers, and gain pump blocks. The laser crystal is strongly pumped by the gain pump module to generate oscillating light, and the oscillating light is gradually compressed into short pulses under the action of the saturable absorber. Moreover, the laser is also equipped with a concave lens, which compensates the thermal lens used by the thermal effect of the gain pump module to ensure the size of the oscillation spot in the resonator and avoid device damage when the spot is too small and the energy is high. At the same time, under the action of the volume Bragg grating end mirror VBG arranged in parallel at both ends, the pulse width is further compressed. At the moment of maximum pulse energy, the electro-optic switch is applied with high voltage, that is, through the cavity emptying technology, the high-energy picosecond pulse is output through the polarizer and the total reflection mirror. Therefore, it effectively solves the problems of large volume, complex devices and low stability of lasers for obtaining high-energy picosecond pulses at the present stage.
附图说明Description of drawings
图1为本发明一个实施例中体布拉格光栅大能量皮秒激光器结构示意图;Fig. 1 is a schematic structural diagram of a volume Bragg grating high-energy picosecond laser in an embodiment of the present invention;
图2为本发明一个实施例中体布拉格光栅大能量皮秒激光器箱体侧视图;Fig. 2 is a side view of a box of a volume Bragg grating high-energy picosecond laser in an embodiment of the present invention;
图3为本发明一个实施例中体布拉格光栅大能量皮秒激光器箱体侧视图。Fig. 3 is a side view of a box of a volume Bragg grating high-energy picosecond laser in an embodiment of the present invention.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
针对现阶段获得大能量的皮秒脉冲的激光器体积大、器件复杂、稳定性低的问题,本发明提出了一种体布拉格光栅大能量皮秒激光器。如图1、图2、图3所示,其具体包括:Aiming at the problems of large volume, complex devices and low stability of lasers for obtaining high-energy picosecond pulses at the present stage, the present invention proposes a volume Bragg grating high-energy picosecond laser. As shown in Figure 1, Figure 2, and Figure 3, it specifically includes:
箱体,两个平行的体布拉格光栅端镜VBG分别设置在箱体内部的两端,构成光学谐振腔,在光学谐振腔内依次设置有电光开关2、偏振片4、饱和吸收体5和增益泵浦模块6、凹透镜7。凹透镜7用于补偿增益泵浦模块热效应引用的热透镜,保证谐振腔内振荡光斑的大小,避免光斑过小,大能量时的器件损坏。偏振片4的反射光路上设置有全反镜10,全反镜10用于将激光器产生的激光通过激光输出口14输出,激光输出口14设置在箱体上。箱体上还设置有一个以上电接线端接口12,电光开关和增益泵浦模块通过电接线端接口12连接有供电装置。In the box, two parallel volume Bragg grating end mirrors VBG are respectively arranged at both ends inside the box to form an optical resonant cavity, in which an electro-optic switch 2, a polarizer 4, a saturable absorber 5 and a gain Pump module 6, concave lens 7. The concave lens 7 is used to compensate the thermal lens used by the thermal effect of the gain pump module, to ensure the size of the oscillation spot in the resonator, and to avoid damage to the device when the spot is too small and the energy is large. A total reflection mirror 10 is arranged on the reflection optical path of the polarizer 4, and the total reflection mirror 10 is used for outputting the laser light generated by the laser through the laser output port 14, which is arranged on the box body. The box body is also provided with more than one electrical terminal interface 12 through which the electro-optical switch and the gain pump module are connected to a power supply device.
对于激光器,Q值越高,其损耗越小,效率越高。而在增益泵浦模块开始泵浦激光工作时,谐振腔一直处于高损耗状态,激光无法在谐振腔内建立振荡,直到上能级反转粒子数达到最大时,开关闭合,加上高压,则腔内损耗迅速由高损耗变为低损耗,激光在腔内起振。虽然调Q获得短脉冲器件简单,体积小,但一般只能获得纳秒或亚纳秒级的短脉冲,由此往往限制了短腔调Q过程在皮秒脉冲产生过程中的应用。体布拉格光栅(VBG)在脉宽的展宽与压缩中得到了广泛的应用,特别是在皮秒脉冲中。本发明专利巧妙的将主被动调Q腔倒空与体布拉格光栅(VBG)相结合,将VBG作为谐振腔的两端镜,对饱和吸收体所产生的脉冲在腔内多次压缩,最后经腔倒空输出。For lasers, the higher the Q value, the smaller the loss and the higher the efficiency. When the gain pump module starts to pump the laser, the resonant cavity is always in a state of high loss, and the laser cannot establish oscillation in the resonant cavity. When the number of upper energy level inversion particles reaches the maximum, the switch is closed and high voltage is applied. The intracavity loss quickly changes from high loss to low loss, and the laser starts to oscillate in the cavity. Although Q-switching to obtain short pulse devices is simple and small in size, generally only nanosecond or sub-nanosecond short pulses can be obtained, which often limits the application of short-cavity Q-switching processes in picosecond pulse generation. Volume Bragg grating (VBG) has been widely used in stretching and compressing pulse width, especially in picosecond pulses. The invention patent cleverly combines active and passive Q-switching cavity emptying with volume Bragg grating (VBG), uses VBG as the two-end mirror of the resonant cavity, compresses the pulse generated by the saturated absorber multiple times in the cavity, and finally passes through chamber empty output.
电光开关2未加高压时,增益泵浦模块6加电流泵浦,则腔内激光振荡产生振荡光,振荡光在饱和吸收体5的作用下逐渐压缩为短脉冲,短脉冲在腔内振荡放大,脉冲宽度随饱和吸收体5调Q过程逐渐变短。在振荡过程中,经体布拉格光栅端镜1和体布拉格光栅端镜9的压缩,脉宽进一步变窄。然后,经电光腔倒空输出,即:在脉冲能量最大时刻,电光开关2加上高压,大能量皮秒激光脉冲从偏振片4输出,经全反镜10反射,然后从箱体右侧面输出口14输出。本实施例中,全反镜为45°全反镜,脉冲先是经过一次电光开关2,变成圆偏振光,产生π/2的相位差。之后经过体布拉格光栅端镜1的反射,圆偏振光再次经过电光开关2,变成线偏振光,又产生π/2的相位差。偏振光两次经过电光开关2,共产生π的相位差,其偏振方向共偏转了90°,正好和偏转片的偏振方向垂直。本申请在腔倒空中,同时采用了饱和吸收体5和体布拉格光栅端镜对脉冲进行双重多次压缩,获得脉宽可以小于2L/C(L为激光腔长)的脉宽,突破了腔倒空中对脉宽的限制,从而经过偏振片以及45°全反镜反射,从激光输出口输出几十至几百皮秒的大能量皮秒激光。When the electro-optical switch 2 is not applied with high voltage, the gain pump module 6 is pumped with current, and the intracavity laser oscillates to generate oscillating light, which is gradually compressed into short pulses under the action of the saturable absorber 5, and the short pulses oscillate and amplify in the cavity , the pulse width gradually shortens with the Q-switching process of the saturable absorber 5 . During the oscillation process, the pulse width is further narrowed by the compression of the volume Bragg grating end mirror 1 and the volume Bragg grating end mirror 9 . Then, it is emptied and output through the electro-optic cavity, that is, at the moment of maximum pulse energy, the electro-optic switch 2 applies high voltage, and the high-energy picosecond laser pulse is output from the polarizer 4, reflected by the total reflection mirror 10, and then from the right side of the box. Output port 14 outputs. In this embodiment, the total reflection mirror is a 45° total reflection mirror, and the pulse first passes through the electro-optic switch 2 once to become circularly polarized light, generating a phase difference of π/2. After reflection by the end mirror 1 of the volume Bragg grating, the circularly polarized light passes through the electro-optic switch 2 again to become linearly polarized light, and a phase difference of π/2 is generated. The polarized light passes through the electro-optic switch 2 twice, and a phase difference of π is generated in total, and its polarization direction is totally deflected by 90°, which is just perpendicular to the polarization direction of the deflector. In this application, while emptying the cavity, a saturable absorber 5 and a volume Bragg grating end mirror are used to compress the pulse multiple times to obtain a pulse width that can be less than 2L/C (L is the length of the laser cavity), breaking through the cavity The limitation of the pulse width is eliminated, so that after the reflection of the polarizer and the 45° total reflection mirror, a high-energy picosecond laser of tens to hundreds of picoseconds is output from the laser output port.
其中,增益泵浦模块可以为连续泵浦,也可以是准连续泵浦。当增益泵浦模块6为连续泵浦时,电光开关2根据需求确定其所加电压频率。当增益泵浦模6块为准连续泵浦时,电光开关2所加电压的频率与准连续泵浦频率一致。Wherein, the gain pumping module may be continuous pumping or quasi-continuous pumping. When the gain pumping module 6 is continuous pumping, the electro-optic switch 2 determines the frequency of the applied voltage according to the requirement. When the 6 gain pumping modules are quasi-continuous pumping, the frequency of the voltage applied by the electro-optic switch 2 is consistent with the quasi-continuous pumping frequency.
在增益泵浦模块6对激光晶体进行强泵浦中,激光晶体中热致双折射引起的退偏与热透镜比较强,因而光学谐振腔内还设置有四分之一波片8,增益泵浦模块、凹透镜和所述四分之一波片依次设置,其中四分之一波片用于补偿增益泵浦模块由热效应引起的热退偏。同时,光学谐振腔内还设置有小孔光阑,小孔光阑设置在电光开关和偏振片之间;小孔光阑孔径小于增益泵浦模块内激光晶体的尺寸,用于抑制高阶模振荡,提高光束质量。When the laser crystal is strongly pumped by the gain pump module 6, the depolarization caused by the thermally induced birefringence in the laser crystal is stronger than that of the thermal lens, so a quarter-wave plate 8 is also arranged in the optical resonant cavity, and the gain pump The pump module, the concave lens and the quarter-wave plate are arranged in sequence, and the quarter-wave plate is used to compensate the thermal depolarization caused by the thermal effect of the gain pump module. At the same time, a small hole diaphragm is also arranged in the optical resonant cavity, and the small hole diaphragm is arranged between the electro-optic switch and the polarizer; the aperture of the small hole diaphragm is smaller than the size of the laser crystal in the gain pump module, and is used to suppress high-order mode oscillations. Improve beam quality.
体布拉格光栅端镜VBG、饱和吸收体和增益泵浦模块放置在热沉中。热沉为微型散热片,是通过冷却水或冷却气体冷却的装置。由于输出的皮秒激光能量较大、功率高,则对激光器件的散热性要求较高。特别是饱和吸收体5吸收激光多,热积累大,若不及时散热,吸收体吸热,温度上升过高容易碎裂。体布拉格光栅VBG受温度影响大,若吸收的热不能及时散去,影响脉宽压缩的效果。所以,需要均对上述器件进行冷却散热处理。The volume Bragg grating end mirror VBG, saturable absorber and gain pump module are placed in the heat sink. The heat sink is a miniature heat sink, which is a device cooled by cooling water or cooling gas. Due to the high energy and high power of the output picosecond laser, the heat dissipation requirements of the laser device are relatively high. Especially the saturated absorber 5 absorbs a lot of laser light and accumulates a lot of heat. If the heat is not dissipated in time, the absorber absorbs heat, and the temperature rises too high and it is easy to break. Volume Bragg grating VBG is greatly affected by temperature, if the absorbed heat cannot be dissipated in time, the effect of pulse width compression will be affected. Therefore, it is necessary to perform cooling and heat dissipation treatment on the above-mentioned devices.
体布拉格光栅端镜VBG、偏振片、饱和吸收体、凹透镜、四分之一波片、全反镜和增益泵浦模块内的激光晶体都镀有与振荡光的波段一致的增透膜或高反射膜,提升穿透或反射效果。The volume Bragg grating end mirror VBG, polarizer, saturable absorber, concave lens, quarter wave plate, total reflection mirror and laser crystal in the gain pump module are all coated with anti-reflection coating or high Reflective film to enhance the penetration or reflection effect.
以上仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
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