CN104953892A - Closed-loop micro-displacement stepping driving device with displacement sensing function and variable stepping distance - Google Patents
Closed-loop micro-displacement stepping driving device with displacement sensing function and variable stepping distance Download PDFInfo
- Publication number
- CN104953892A CN104953892A CN201410115929.9A CN201410115929A CN104953892A CN 104953892 A CN104953892 A CN 104953892A CN 201410115929 A CN201410115929 A CN 201410115929A CN 104953892 A CN104953892 A CN 104953892A
- Authority
- CN
- China
- Prior art keywords
- displacement
- micrometric
- mechanism unit
- movement
- groups
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 122
- 230000033001 locomotion Effects 0.000 claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims description 104
- 238000009434 installation Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 238000012163 sequencing technique Methods 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 8
- 230000005611 electricity Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 2
- 238000007514 turning Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009699 high-speed sintering Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004899 motility Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a high-precision closed-loop micro-displacement driving device with a displacement sensing function and variable stepping distance. The high-precision closed-loop micro-displacement driving device belongs to the field of mechanotronics. Closed-loop variable-distance fixed-length stepping can be performed, thereby realizing a purpose of repeating high-precision positioning. A large-stroke accurate motion can be realized without an expensive large-stroke displacement sensor. The high-precision closed-loop micro-displacement driving device has advantages of simple structure, small size, high positioning precision, high repeated positioning precision, high displacement resolution, high response speed, good control characteristic, low energy consumption, no noise, low cost, etc.
Description
Technical field
The present invention is the variable high precision closed loop micro-displacement driving device of a kind of step distance carrying displacement sensing function, is again a kind of high accuracy displacement sensor carrying out measuring in a stepwise manner simultaneously.The present invention
Relate to field of electromechanical integration and sensing measurement and control area, can be used as the driver of a kind of high precision closed loop straight line or twist motion mechanism, can be used as again the sensing device of high precision position shift measurement.Can be applicable to Ultra-precision Turning, precision engineering, MEMS (micro electro mechanical system) (MEMS), micro-robot, semiconductor manufacturing, biomedical, Aero-Space, the processing of laser high-speed sintering, the scientific domain manufacture field such as high-resolution laser projection, and consumer electronics field.
Background technology
Along with the development of modern science and technology, the research of the mankind to microscopic fields is more and more darker.Especially at Ultra-precision Turning, MEMS (micro electro mechanical system) (MEMS), the fields such as micro-robot, to precision positioning, the requirement of micro-displacement is more and more higher, traditional drive unit, as common electric machine, feed screw nut, macroscopical large scale drive unit such as worm and gear can not meet its required precision, compared to traditional drives, piezoelectricity, the device drive devices such as magnetostriction are because volume is little, displacement resolution is high, fast response time, control characteristic is good, energy consumption is low, the advantages such as noiseless, more and more be applied to precision engineering, MEMS (micro electro mechanical system) (MEMS), the fields such as micro-robot.Along with the development of the laser sintered manufacturing technology of new generation for representative, as high-precision fixed bit function and the response time of laser galvanometer, become an important technical bottleneck, traditional galvanometer mode cannot provide high-resolution Angle Position, the processing dimension of drastic delimitations laser sintering technology and machining accuracy.Simultaneously along with the development of laser television and Color Laser Projection Technology, laser replaces conventional light source, achieves high brightness, high reliability, the features such as the simple cost of structure is low.But can the anaclasis galvanometer that important limiting factors is exactly laser projection provide high-precision position location, if can provide high-precision position location and high response speed, the resolution of laser projection and laser television technology and the scope of application then can promote greatly.Current traditional drives often brings physical dimension deviation large, the features such as not only precision is low, and reciprocating motion positioning precision is low, and stroke is little.The drive unit of some Micro-displacement Techniques such as applying piezoelectric and magnetostriction, also there is driver and be separated with transducer, driver stroke is limited, and the displacement transducer of wide range is expensive, the defects such as complicated integral structure.Seriously govern the development in microtechnic field, and the utilization in precision engineering field.
Summary of the invention
The object of the present invention is to provide and a kind ofly carry the variable high precision closed loop micro-displacement driving device of displacement sensing function step distance, be also a kind of high accuracy displacement sensor carrying out measuring in a stepwise manner simultaneously.Solve current micro-displacement driver physical dimension large, complex structure, delivery stroke is little, positioning precision and repetitive positioning accuracy low, the problems such as during closed-loop control, driver is separated with transducer, and Long Distances displacement transducer is expensive.The present invention adopts two groups or more stepping micro-displacement driving mechanism unit, and two groups or more stepping micro-displacement driving mechanism is upwards consistent at kinematic axis, and position is parallel.The crossbeam position often organizing mechanism unit is provided with the displacement transducer of little stroke and high precision, and the moved end of two groups or more stepping micro-displacement driving mechanism unit difference installation position displacement sensor and quiet end.Two groups or more stepping micro-displacement driving mechanism drives respectively chronologically successively, the position data this moment of first tape deck, then one group of mechanism unit axial motion is wherein driven, sensing data changes, then drive another group micro-displacement mechanism unit to move in the same way, sensing data is reduced.Complete the fixed length stepping of the distance variable of a closed loop, thus the hi-Fix of closed loop can be reached, realize Long Distances motion, but without the need to the Long Distances displacement transducer of costliness.During as a kind of high accuracy displacement sensor measured in a stepwise manner, compare other step-wise displacement transducers, the present invention has the character of resolution changable, for measuring process, Fast Measurement can be carried out with large step distance, measure more accurately to using little step distance when closing to an end instead, thus both ensure that certainty of measurement, turn improve measuring speed.
To use two groups of stepping drive mechanism unit, above-mentioned purpose of the present invention is achieved through the following technical solutions:
Drive unit is divided into upper and lower two mechanism units, and two mechanism units are all traditional bidirectional-movement step piezoelectric driver, namely uses hoop position, two, left and right piezoelectric stack, two, left and right stroke piezoelectric stack.Hoop position piezoelectric stack is perpendicular to guide rail, and stroke piezoelectric stack is parallel to guide rail.Minimum gap is there is in tight latch mechanism with between guide rail, its gap can be free to slide on guide rail for mechanism unit, but be no more than the stroke of hoop position piezoelectric stack, hoop position piezoelectric stack is installed in tight latch mechanism, make it can controlling organization unit free movement or be lockedly fixed on guide rail as required, stroke piezoelectric stack then needs pretension to be arranged on the crossbeam two ends of mechanism.Liang Zu mechanism is axially consistent at moving on rails, and position is parallel, and keeps certain distance.At this apart from the high-precision small-range displacement transducer of interior installation, its installation site and two mechanism shaft are to consistent.At moved end or the quiet end of upper mechanism fixed displacement transducer, fix other one end in lower mechanism.Upper and lower mechanism all adopts thin shelf flexible hinge to carry out transmission, and existing certain intensity, can keep motility again.Wherein displacement transducer can adopt LVDT formula, condenser type, the various kinds of sensors such as raster pattern, and has extremely strong adaptability for the displacement transducer that the range of linearity is less, avoids using expensive sensors of large measurement range simultaneously.
Its course of work is simply described as, and is powered on by all hoop positions piezoelectric stack in an initial condition, is separately fixed on guide rail, the then numerical value of recorded bit displacement sensor, and is decided to be initial point by upper mechanism unit and lower mechanism unit.First by electricity under the hoop position piezoelectric stack of one end when motion starts, allow the retaining mechanism of this end and guide rail unclamp, then give other end stroke piezoelectric stack certain voltage, produce displacement.This makes the displacement transducer numerical value being fixed on mechanism change, and this numerical value is then the step distance of driver, can determine voluntarily according to voltage-regulation.Then powered on by electric down hoop position piezoelectric stack, retaining mechanism relocks on guide rail.Then by electricity under the piezoelectric stack of rightabout hoop position, retaining mechanism is allowed to follow guide rail separately, then electricity under the stroke piezoelectric stack powered on that just now moved will be caused, go up mechanism like this to move to locked direction, and then just now electric down hoop position piezoelectric stack is powered on, allow retaining mechanism follow guide rail again locked.Like this, upper mechanism is then overall moves a step distance to a direction.Then move lower mechanism in the same way, Shi Xia mechanism, to same direction motion step distance equally, can complete a step motion of drive unit.Meanwhile drive unit restPoses, so that step motion next time, needs then only to need inverted repeat said process to opposite side motion.
As during as displacement transducer, general operation mode is identical with said method, as long as the number of times of record stepping, is multiplied by each step-length, just can draws the numerical value of measurement.
Detailed execution sequence can refer to the execution mode of embodiment.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a application's part, and illustrative example of the present invention and explanation thereof, for explaining the present invention, do not form inappropriate limitation of the present invention.
Fig. 1 is overall structure schematic diagram of the present invention.
In figure: 1. guide rail, 2. go up the left hoop position piezoelectric stack of mechanism, 3. use the upper mechanism unit of thin shelf flexible hinge transmission, 4. go up the left lateral journey piezoelectric stack of mechanism, 5. displacement transducer is in the installation position of lower mechanism, 6, displacement transducer, 7. displacement transducer is in the installation position of upper mechanism, 8. go up the right lateral journey piezoelectric stack of mechanism, 9. go up the right hoop position piezoelectric stack of mechanism, 10, the right retaining mechanism of upper mechanism, the right hoop position piezoelectric stack of 11. times mechanisms, the right retaining mechanism of 12. times mechanisms, the right lateral journey piezoelectric stack of 13. times mechanisms, the left lateral journey piezoelectric stack of 14. times mechanisms, the lower mechanism unit of 15. use thin shelf flexible hinge transmissions, retaining mechanism makees in 16. times mechanisms, the left piezoelectric stack of 17. times mechanisms, the left retaining mechanism of mechanism on 18..On 19., the displacement transducer alignment error alignment of mechanism regulates piezoelectric stack, and the displacement transducer alignment error alignment of 20. times mechanisms regulates piezoelectric stack.
Embodiment
Face further illustrates detailed content of the present invention and embodiment by reference to the accompanying drawings.
When using two groups of stepping drive mechanism unit as displacement driver:
Position piezoelectric stack (2) (9) (17) (11) will be bound round in an initial condition power on, and upper mechanism (3) and lower mechanism (15) will be fixed on guide rail (1), then the numerical value of recorded bit displacement sensor (6), and are decided to be initial point.Electric under first binding round position piezoelectric stack (9) when motion starts, retaining mechanism (10) and guide rail (1) unclamp, and then give stroke piezoelectric stack (4) certain voltage, produce displacement.This makes displacement transducer (6) numerical value being fixed on mechanism (3) change, and this numerical value is then the step distance of driver, can determine voluntarily according to voltage-regulation.Then will bind round position piezoelectric stack (9) to power on, upper mechanism (3) is locked on guide rail (1) by retaining mechanism (10), then electric under binding round position piezoelectric stack (2), allow retaining mechanism (18) with guide rail (1) separately, then by electricity under stroke piezoelectric stack (4), position piezoelectric stack (2) will be bound round again power on, and make retaining mechanism (18) locked with guide rail (1).Like this, upper mechanism (3) is then overall moves a step distance to a direction.Then lower mechanism (15) is moved in the same way, electric under first binding round position piezoelectric stack (11), retaining mechanism (12) is allowed to unclamp with guide rail (1), then appropriate voltage is given by stroke piezoelectric stack (14), the reading of displacement transducer (6) is allowed to come back to initial reading, then will bind round position piezoelectric stack (11) to power on, locking mechanism (12) is locked with guide rail (1), then electric under binding round position piezoelectric stack (17), locking mechanism (16) is allowed to unclamp with guide rail (1), then by electricity under stroke piezoelectric stack (14), finally will bind round position piezoelectric stack (17) again to power on, retaining mechanism (16) is relocked on guide rail (1), then whole whole mechanism to a direction stepping self-defining distance.
Counter motion is following process.
Normal condition hoop position piezoelectric stack (2) (9) (17) (11) is power-up state, is fixed on guide rail (1), then the numerical value of recorded bit displacement sensor (6), and is decided to be initial point by upper mechanism (3) and lower mechanism (15).Electric under first binding round position piezoelectric stack (2) when motion starts, retaining mechanism (18) and guide rail (1) unclamp, and then give stroke piezoelectric stack (8) certain voltage, produce displacement.This makes displacement transducer (6) numerical value being fixed on mechanism (3) change, and this numerical value is then the step distance of driver, can determine voluntarily according to voltage-regulation.Then will bind round position piezoelectric stack (2) to power on, upper mechanism (3) is locked on guide rail (1) by retaining mechanism (18), then electric under binding round position piezoelectric stack (9), allow retaining mechanism (10) with guide rail (1) separately, then by electricity under stroke piezoelectric stack (8), position piezoelectric stack (9) will be bound round again power on, and make retaining mechanism (10) locked with guide rail (1).Like this, upper mechanism (3) is then overall moves a step distance to a direction.Then lower mechanism (15) is moved in the same way, electric under first binding round position piezoelectric stack (17), retaining mechanism (16) is allowed to unclamp with guide rail (1), then appropriate voltage is given by stroke piezoelectric stack (13), the reading of displacement transducer (6) is allowed to come back to initial reading, then will bind round position piezoelectric stack (17) to power on, locking mechanism (16) is locked with guide rail (1), then electric under binding round position piezoelectric stack (11), locking mechanism (12) is allowed to unclamp with guide rail (1), then by electricity under stroke piezoelectric stack (13), finally will bind round position piezoelectric stack (11) again to power on, retaining mechanism (12) is relocked on guide rail (1), then whole whole mechanism to another direction stepping self-defining distance.
During as displacement transducer, the mode of operation of measurement is identical with said method, as long as the number of times of record stepping, is multiplied by each step-length, just can draws the numerical value of measurement.
The foregoing is only preferred embodiment of the present invention, be not limited to the present invention, for those skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improves, all should be included within protection scope of the present invention.
Claims (10)
1. one kind with the variable closed loop micrometric displacement step drive device of displacement sensing function step pitch, it is characterized in that: comprise two groups or more, with the element that can carry out microspur motion, can bidirectional-movement micrometric displacement stepping mechanism unit, two groups or more bidirectional-movement micrometric displacement stepping mechanism unit with same kinematic axis to installation, certain space is there is between two groups or more bidirectional-movement micrometric displacement stepping mechanism unit, for installation position displacement sensor, and the moved end of displacement transducer and quiet end are arranged on two groups or more bidirectional-movement micrometric displacement stepping mechanism unit respectively, the sensing shaft of displacement transducer to the kinematic axis of two groups or more bidirectional-movement micrometric displacement stepping mechanism unit to consistent, during operation, two groups or more bidirectional-movement micrometric displacement stepping mechanism unit carries out stepper drive according to certain sequence of movement at the volley, this device can also use as the high accuracy displacement sensor that a kind of stepping resolution is adjustable except as except micrometric displacement step drive device.
2. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: described two groups or more, with the element that can carry out microspur motion, can bidirectional-movement micrometric displacement stepping mechanism unit, refer to and can carry out the element of microspur motion as executive component, carry out the mechanism unit of displacement transmission with thin shelf flexible hinge.
3. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: the described element that can carry out microspur motion, for piezoelectric stack, magnetostrictive device, and there is the material or mechanical structure that can control micro-displacement feature, position for device is fixed, the travel displacement of device, and the alignment of displacement transducer alignment error regulates.
4. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: between two groups or more described mechanism unit, there is certain space, refer to the space that two groups or more mechanism unit any direction is formed.
5. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: described displacement transducer is laser displacement sensor, capacitive displacement transducer, optical fiber type displacement transducer, grating displacement transducer, displacement sensor of variable capacitor, inductive frequency displacement transducer, inductance differential transformer displacement transducer, and other can produce the sensing equipment of physical quantity rule change according to displacement state.
6. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: described and the moved end of displacement transducer and quiet end are arranged on two groups or more bidirectional-movement micrometric displacement stepping mechanism unit respectively, refer to moving part and the standing part of displacement transducer, be connected on two groups of micrometric displacement stepping mechanism unit, the displacement transducer of any amount can be installed on two groups of bidirectional-movement micrometric displacement stepping mechanism unit, and can installation position displacement sensor on any two groups of bidirectional-movement micrometric displacement stepping mechanism unit in bidirectional-movement micrometric displacement stepping mechanism unit more than two.
7. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: the sensing shaft of described displacement transducer to the kinematic axis of two groups or more bidirectional-movement micrometric displacement stepping mechanism unit to consistent, refer to that the kinematic axis of two groups or more bidirectional-movement micrometric displacement stepping mechanism unit is consistent to direction when correctly can detect displacement with displacement transducer.
8. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: during described operation, two groups or more bidirectional-movement micrometric displacement stepping mechanism unit carries out stepper drive according to certain sequence of movement at the volley, refer to two groups or more bidirectional-movement micrometric displacement stepping mechanism unit at the volley with single bidirectional-movement micrometric displacement stepping mechanism unit for motor unit, there is the sequencing of motion, and be in the same way for moving.
9. the closed loop micrometric displacement step drive device that band displacement sensing function step pitch according to claim 1 is variable, it is characterized in that: this described device can also use as the high accuracy displacement sensor that a kind of stepping resolution is adjustable except as except micrometric displacement step drive device, refer to this device except the closed loop micrometric displacement stepper drive function providing band displacement sensing function step pitch variable, also provide and measure ohject displacement state, measure the function of object length.
10. micro-nano motion and a detection machine, possess the closed loop micrometric displacement step drive device that the band displacement sensing function step pitch of any one of claim 1 ~ 9 record is variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410115929.9A CN104953892B (en) | 2014-03-26 | 2014-03-26 | A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410115929.9A CN104953892B (en) | 2014-03-26 | 2014-03-26 | A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104953892A true CN104953892A (en) | 2015-09-30 |
| CN104953892B CN104953892B (en) | 2018-02-02 |
Family
ID=54168306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410115929.9A Expired - Fee Related CN104953892B (en) | 2014-03-26 | 2014-03-26 | A kind of closed loop micro-displacement step drive device variable with displacement sensing function step pitch |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104953892B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751949A (en) * | 2019-01-10 | 2019-05-14 | 中国石油化工股份有限公司 | High-precision linear displacement measuring device and adjustment measuring method for actuator |
| CN113332109A (en) * | 2021-06-16 | 2021-09-03 | 吉林大学 | Recovered device of taking exercise of orthopedics of angularly adjustable |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6285681A (en) * | 1985-10-07 | 1987-04-20 | Nec Corp | Piezoelectric drive mechanism |
| JPH04140073A (en) * | 1990-09-28 | 1992-05-14 | Toshiba Corp | Micro movement driver |
| CN1474504A (en) * | 2003-07-16 | 2004-02-11 | 沈阳工业大学 | Magnetic Shape Memory Alloy Peristaltic Linear Motor |
| CN2692626Y (en) * | 2004-03-30 | 2005-04-13 | 宝鸡市渭滨区金陵小学 | Rolling distometer |
| JP2006288165A (en) * | 2005-04-05 | 2006-10-19 | Yaskawa Electric Corp | Inchworm actuator and position calculation method thereof |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
| CN102291041A (en) * | 2011-08-25 | 2011-12-21 | 苏州海兹思纳米科技有限公司 | Nano motor based on inchworm motion |
| CN203148413U (en) * | 2013-04-06 | 2013-08-21 | 蔡心雨 | Single-person operation gauge for straight length measurement |
-
2014
- 2014-03-26 CN CN201410115929.9A patent/CN104953892B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6285681A (en) * | 1985-10-07 | 1987-04-20 | Nec Corp | Piezoelectric drive mechanism |
| JPH04140073A (en) * | 1990-09-28 | 1992-05-14 | Toshiba Corp | Micro movement driver |
| CN1474504A (en) * | 2003-07-16 | 2004-02-11 | 沈阳工业大学 | Magnetic Shape Memory Alloy Peristaltic Linear Motor |
| CN2692626Y (en) * | 2004-03-30 | 2005-04-13 | 宝鸡市渭滨区金陵小学 | Rolling distometer |
| JP2006288165A (en) * | 2005-04-05 | 2006-10-19 | Yaskawa Electric Corp | Inchworm actuator and position calculation method thereof |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
| CN102291041A (en) * | 2011-08-25 | 2011-12-21 | 苏州海兹思纳米科技有限公司 | Nano motor based on inchworm motion |
| CN203148413U (en) * | 2013-04-06 | 2013-08-21 | 蔡心雨 | Single-person operation gauge for straight length measurement |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751949A (en) * | 2019-01-10 | 2019-05-14 | 中国石油化工股份有限公司 | High-precision linear displacement measuring device and adjustment measuring method for actuator |
| CN109751949B (en) * | 2019-01-10 | 2020-12-18 | 中国石油化工股份有限公司 | High-precision linear displacement measuring device for actuating mechanism and adjusting measuring method |
| CN113332109A (en) * | 2021-06-16 | 2021-09-03 | 吉林大学 | Recovered device of taking exercise of orthopedics of angularly adjustable |
| CN113332109B (en) * | 2021-06-16 | 2023-03-10 | 温振杰 | Recovered device of taking exercise of orthopedics of angularly adjustable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104953892B (en) | 2018-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107461580B (en) | High-precision and high-load linear displacement platform | |
| CN102323432B (en) | Full-automatic three-dimensional precision positioning motion sample injector | |
| CN102136300A (en) | Three-section combined type ultraprecise positioning table and positioning method thereof | |
| CN101841295A (en) | Linear motor motion control method based on fixed-step speed measurement | |
| WO2006099924A1 (en) | Optical objective module | |
| CN208399786U (en) | A kind of zoom lens controlled using voice coil motor | |
| CN101586939B (en) | An automatic static calibration device for variable gap eddy current sensor | |
| CN104953892A (en) | Closed-loop micro-displacement stepping driving device with displacement sensing function and variable stepping distance | |
| CN107192407A (en) | A kind of code-disc, slew gear, yardstick and translation mechanism | |
| Dong et al. | A two-dimensional nano-positioner: Design, modelling and experiments | |
| CN101551226B (en) | Device and method for improving positioning precision of absolute position of precise machining equipment moving platform | |
| Tang et al. | Research on closed-loop control of step motor based on magnetic encoder | |
| CN207439386U (en) | A kind of mechanism for gap automatic measurement | |
| CN210400292U (en) | Detection apparatus for arm brushless motor positioning accuracy | |
| CN108548670A (en) | A kind of planetary roller screw pair driving error measurement method | |
| CN204064228U (en) | Digital display type turbine-generator units clearance measurement mechanism | |
| CN113114067A (en) | Piezoelectric stick-slip type driving device capable of measuring distance in large stroke and distance measuring method | |
| Kamenar et al. | Micropositioning mechatronics system based on FPGA architecture | |
| CN105629813A (en) | Micro-displacement control system | |
| CN102801354A (en) | Integrated micro-step rotating device using flexible hinge | |
| CN102455682A (en) | Method for compensating machine tool geometric errors based on VB program | |
| TW201947185A (en) | Linear displacement sensing device capable of accurately obtaining a position of a magnetic test object in a measurement section | |
| DE10045306A1 (en) | Inclination angle measuring method has precision inclination sensor incorporated in rotor provided with angle sensor | |
| CN202600426U (en) | Hard drive type macro and micro automatic positioning control device | |
| WO2019200492A1 (en) | Positioning device for positioning an object within a plane in at least two degrees of freedom |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180202 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |