CN103343867B - Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams - Google Patents
Layered parallel connection two-degree-of-freedom precise positioning platform based on flexible beams Download PDFInfo
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Abstract
本发明公开了一种基于柔性梁的层叠式的并联二自由度精密定位平台，该定位平台包括有下层导向平台、上层解耦平台、X轴驱动组件和Y轴驱动组件。下层导向平台为上层运动结构平台提供运动导向，其结构主要包括四组基于柔性铰链的柔性导轨；上层运动解耦平台由用于实现运动解耦的四组柔性铰链、承载台组成；电机安装与锁紧机构包括电机连接器、柔性推杆、电机安装板以及电机轴锁紧机构。上层的运动解耦平台通过八颗锁紧螺钉与下层的柔性导向平台相连接；精密直线电机通过螺钉与电机连接器相连接；电机安装板通过螺钉与导向柔性平台刚性连接，并分别提供二个螺纹孔用于电机连接器的安装。
The invention discloses a laminated parallel two-degree-of-freedom precision positioning platform based on flexible beams. The positioning platform includes a lower guiding platform, an upper decoupling platform, an X-axis driving assembly and a Y-axis driving assembly. The lower guide platform provides motion guidance for the upper motion structure platform, and its structure mainly includes four sets of flexible guide rails based on flexible hinges; the upper motion decoupling platform is composed of four sets of flexible hinges and a bearing platform for motion decoupling; the motor installation and The locking mechanism includes a motor connector, a flexible push rod, a motor mounting plate and a motor shaft locking mechanism. The upper motion decoupling platform is connected to the lower flexible guiding platform through eight locking screws; the precision linear motor is connected to the motor connector through screws; the motor mounting plate is rigidly connected to the guiding flexible platform through screws, and two Threaded holes are used for motor connector mounting.
Description
Technical field
The present invention relates to and a kind ofly the present invention relates to a kind of two degrees of freedom precisely locating platform in parallel based on flexible hinge, its adopts Double-layer flexible structure to realize, and has the advantages such as compact structure, low coupled motions error, working space are large.
Background technique
Precision positioning is precision manufactureing and the key technology of the subjects such as operation received, and precisely locating platform has a wide range of applications in fields such as semiconductor machining, optics manufacture and micro assemby.Along with the continuous progress of science and technology, people have higher requirement to parameters such as precisely locating platform resolution, working spaces.In order to obtain nano grade positioning precision, compliant mechanism is more and more used as precisely locating platform.
Compliant mechanism utilizes the distortion of elastic material to carry out output displacement, realizes the novel mechanism of hi-Fix or operation.Compliant mechanism normally utilizes line cutting technology to process on one block of base material, thus can remove complicated assembly process from.In addition, relatively traditional rigid mechanism, it has gapless, without friction, without the need to advantages such as lubrications, utilizes piezoelectricity direct driving technologies, can carry out precise position control easily, realizes nano high-precision location.In precision engineering, compliant mechanism has increasing application.
For two-degree-of-freedoparallel parallel compliant mechanism, the displacement in a direction exports the micro-displacement often causing its Vertical direction, Here it is hunt effect, the existence of hunt effect can affect the positioning precision of locating platform, and therefore the Decoupling design of parallel flexible mechanism is very crucial.Although can eliminate hunt effect in theory by symmetric design, due to processing and the existence of alignment error, hunt effect is still difficult to avoid.
Summary of the invention
The object of this invention is to provide a kind of stacked two degrees of freedom precisely locating platform in parallel based on flexible beam, this locating platform adopts Double-layer flexible Platform Designing thought.In order to eliminate the coupled motions of parallel flexible mechanism in X and Y-direction, locating platform of the present invention not use only symmetric type design, adds lower floor's guiding compliant mechanism, the coupled motions of restriction X-direction and Y-direction further simultaneously.
A kind of stacked two degrees of freedom precisely locating platform in parallel based on flexible beam of the present invention, this locating platform includes lower floor's guide table (1), upper strata decoupling zero platform (2), X-axis driven unit (3) and Y-axis driven unit (4); Realize fixedly mounting by the 9th screw (5), the tenth screw (6) and the 11 screw (9) between lower floor's guide table (1) and upper strata decoupling zero platform (2).
The center of lower floor's guide table (1) is cavity (1G), described cavity (1G) surrounding is respectively equipped with X-axis lower floor input end flexible hinge (1C), X-axis lower floor output terminal flexible hinge (1D), Y-axis lower floor input end flexible hinge (1E) and X-axis lower floor output terminal flexible hinge (1F), X-axis lower floor input end flexible hinge (1C) and X-axis lower floor output terminal flexible hinge (1D) are oppositely arranged, and Y-axis lower floor input end flexible hinge (1E) and X-axis lower floor output terminal flexible hinge (1F) are oppositely arranged.
The center of upper strata decoupling zero platform (2) is bearing table (2G), described bearing table (2G) surrounding is respectively equipped with X-axis upper strata input end flexible hinge (2C), X-axis upper strata output terminal flexible hinge (2D), Y-axis upper strata input end flexible hinge (2E) and X-axis upper strata output terminal flexible hinge (2F), X-axis upper strata input end flexible hinge (2C) and X-axis upper strata output terminal flexible hinge (2D) are oppositely arranged, and Y-axis upper strata input end flexible hinge (2E) and X-axis upper strata output terminal flexible hinge (2F) are oppositely arranged.
X-axis driven unit (3) includes X-axis drive motor (31), X-axis motor contact (32), X-axis mounting plate (33) and X-axis push rod (34).
Y-axis driven unit (4) includes Y-axis drive motor (41), y-axis motor link (42), X-axis mounting plate (43) and X-axis push rod (44).
Two degrees of freedom precisely locating platform of the present invention, lower floor's guide table provides motion guide for upper layer motion structure platform, and its structure mainly comprises four groups of flexible guide rails based on flexible hinge; Upper layer motion decoupling zero platform is made up of group flexible hinge of four for realizing mobile decoupling, bearing table; Motor is installed and is comprised motor connectors, flexible push rod, motor mounting plate and motor shaft locking mechanism with locking mechanism.The mobile decoupling platform on upper strata is connected with the flexible guiding platform of lower floor by eight lock screws; Precision linear motor is connected with motor connectors by screw; Motor mounting plate is rigidly connected by screw and guiding flexibility platform, and provides two tapped holes for the installation of motor connectors respectively.
The advantage that the present invention is based on the stacked two degrees of freedom precisely locating platform in parallel of flexible beam is:
1. locating platform adopts Double-layer flexible mechanism, and realize guiding and the mobile decoupling merit function of locating platform respectively, compared with single layer structure, compact structure, determinants space is little.
2. adopt modular design method, upper strata realizes mobile decoupling, and reconstruct and the expansion of locating platform, as motion guide, is convenient in lower floor.
3. the present invention is utilized to utilize the thought of layering, process every layer of flexible unit respectively, different layers is connected finally by screw, the function of implementation space compliant mechanism, utilize this conception of species even can extend to layer flexible mechanism, realize more complicated function, but with regard to its difficulty of processing, remain the processing of single-layer flexible mechanism, difficulty of processing is low.
4. in order to eliminate the coupled motions of parallel flexible mechanism in X and Y-direction, locating platform of the present invention not use only symmetric type design, adds lower floor's guiding compliant mechanism, the coupled motions of restriction X-direction and Y-direction further simultaneously.The locating platform of the present invention's design has good mobile decoupling characteristic, ensure that and can not produce obvious hunt effect in Long Distances (± 1mm) scope.
Accompanying drawing explanation
Fig. 1 is the structural drawing of the stacked two degrees of freedom precisely locating platform in parallel that the present invention is based on flexible beam.
Figure 1A is the exploded view of Fig. 1.
Figure 1B is another exploded view of Fig. 1.
Fig. 2 is the structural drawing under the invention layer guide table marking hinge.
Fig. 2 A is the structural drawing under the invention layer guide table marking tapped hole.
Fig. 2 B is the front view under the invention layer guide table marking joint-cutting contrast.
Fig. 2 C is the front view under the invention layer guide table marking beam.
Fig. 2 D be lower floor of the present invention guide table bear X-axis motor export driving force FX time distortion schematic diagram.
Fig. 3 is the structural drawing on the invention layer decoupling zero platform marking hinge.
Fig. 3 A is the structural drawing on the invention layer decoupling zero platform marking locking block.
Fig. 3 B is the front view on the invention layer decoupling zero platform marking joint-cutting contrast.
Fig. 3 C is the front view on the invention layer decoupling zero platform marking beam.
Fig. 3 D is the rear view of decoupling zero platform in upper strata of the present invention.
Fig. 3 E be decoupling zero platform in upper strata of the present invention bear X-axis motor export driving force FX time distortion schematic diagram.
Fig. 4 is the structural drawing of the X-axis motor contact in X-axis driven unit of the present invention.
Fig. 4 A is the structural drawing of the X-axis mounting plate in X-axis driven unit of the present invention.
Fig. 4 B is the structural drawing of the X-axis push rod in X-axis driven unit of the present invention.
Fig. 5 is the structural drawing of the y-axis motor link in Y-axis driven unit of the present invention.
Fig. 5 A is the structural drawing of the Y-axis mounting plate in Y-axis driven unit of the present invention.
Fig. 5 B is the structural drawing of the Y-axis push rod in Y-axis driven unit of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Shown in Fig. 1, Figure 1A, Figure 1B, a kind of stacked two degrees of freedom precisely locating platform in parallel based on flexible beam of the present invention, its locating platform includes lower floor's guide table 1, upper strata decoupling zero platform 2, X-axis driven unit 3 and Y-axis driven unit 4.
Wherein, realize fixedly mounting by 8 the 9th screws, 5,2 the tenth screws 6 and 2 the 11 screws 9 between lower floor's guide table 1 and upper strata decoupling zero platform 2.Namely the upper through hole 2K rear thread that 8 the 9th screws 5 are each passed through upper strata decoupling zero platform 2 is connected in the lower tapped hole 1K of lower floor's guide table 1.Namely 2 the tenth screws 6 are connected in the AC tapped hole 154 of lower floor's guide table 1 through the 3rd counter sink 252 rear thread of upper strata decoupling zero platform 2.Namely 2 the tenth screws 6 are connected in the AF tapped hole 164 of lower floor's guide table 1 through the 4th counter sink 262 rear thread of upper strata decoupling zero platform 2.
(1) lower floor's guide table 1
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 2, Fig. 2 A, Fig. 2 B, lower floor's guide table 1 is the integrated structural member adopting wire cutting technology to process, and such structural member can reduce the assembly error between each component.For convenience of description, the structural drawing with joint-cutting shown in Fig. 2 B is referred to.In figure, excise joint-cutting (i.e. joint-cutting 1H, rectangle joint-cutting 1J) by wire cutting technology and form flexible beam, under the condition having active force, flexible beam can be out of shape.
In the present invention, lower floor's guide table 1 is square shape.
Shown in Figure 2, the center of lower floor's guide table 1 is the cavity 1G of square, described cavity 1G surrounding is respectively equipped with X-axis lower floor input end flexible hinge 1C, X-axis lower floor output terminal flexible hinge 1D, Y-axis lower floor input end flexible hinge 1E and X-axis lower floor output terminal flexible hinge 1F, X-axis lower floor input end flexible hinge 1C and X-axis lower floor output terminal flexible hinge 1D is oppositely arranged, and Y-axis lower floor input end flexible hinge 1E and X-axis lower floor output terminal flexible hinge 1F is oppositely arranged.
Shown in Fig. 2 C, X-axis lower floor input end flexible hinge 1C is provided with AA flexible beam 111, AB flexible beam 112, AC flexible beam 113, AD flexible beam 114, AE flexible beam 115, AF flexible beam 116, AG flexible beam 117, AH flexible beam 118, AA rigidity side bar 119A, AA rigidity central sill 119B, AB rigidity central sill 119C; Wherein, AA flexible beam 111, AB flexible beam 112, AC flexible beam 113 and AD flexible beam 114 are parallel to Y-axis, and form first module parallel girder; Wherein, AE flexible beam 115, AF flexible beam 116, AG flexible beam 117 and AH flexible beam 118 are parallel to Y-axis, and form second unit parallel girder; AA rigidity central sill 119B and AB rigidity central sill 119C is oppositely arranged between first module parallel girder and second unit parallel girder.AA rigidity side bar 119A is arranged on the outside of first module parallel girder and second unit parallel girder, and the inner side of first module parallel girder and second unit parallel girder is cavity 1G.
X-axis lower floor output terminal flexible hinge 1D is provided with BA flexible beam 121, BB flexible beam 122, BC flexible beam 123, BD flexible beam 124, BE flexible beam 125, BF flexible beam 126, BG flexible beam 127, BH flexible beam 128, AB rigidity side bar 129A, AC rigidity central sill 129B, AD rigidity central sill 129C; Wherein, BA flexible beam 121, BB flexible beam 122, BC flexible beam 123 and BD flexible beam 124 are parallel to Y-axis, and form the 3rd unit parallel girder; Wherein, BE flexible beam 125, BF flexible beam 126, BG flexible beam 127 and BH flexible beam 128 are parallel to Y-axis, and form the 4th unit parallel girder; AC rigidity central sill 129B and AD rigidity central sill 129C is oppositely arranged between the 3rd unit parallel girder and the 4th unit parallel girder.AB rigidity side bar 129A is arranged on the outside of the 3rd unit parallel girder and the 4th unit parallel girder, and the inner side of the 3rd unit parallel girder and the 4th unit parallel girder is cavity 1G.
Shown in Fig. 2 A, X-axis lower floor input end flexible hinge 1C is provided with the 3rd half-round cross hole 151, AA tapped hole 152, AB tapped hole 153 and AC tapped hole 154;
Described 3rd half-round cross hole 151 and the first half-round cross hole 33C on X-axis mounting plate 33, the 5th half-round cross hole on X-axis locking block 2A is conformal obtains X-axis holes for clamping 7, and this X-axis holes for clamping 7 is for placing the gripping section 34C of X-axis push rod 34; The gripping section 34C inserting the X-axis push rod 34 in X-axis holes for clamping 7 is compressed by the X-axis locking block 2A of upper strata decoupling zero platform 2, and X-axis locking block 2A is fixed on the X-axis lower floor input end flexible hinge 1C of lower floor's guide table 1 by the tenth screw 6.Described AA tapped hole 152 is for second screw 35 that is threaded.Described AB tapped hole 153 is for first screw 37 that is threaded.Described AC tapped hole 154 is for the tenth screw 6 that is threaded.
Shown in Fig. 2 C, Y-axis lower floor input end flexible hinge 1E is provided with CA flexible beam 131, CB flexible beam 132, CC flexible beam 133, CD flexible beam 134, CE flexible beam 135, CF flexible beam 136, CG flexible beam 137, CH flexible beam 138, AC rigidity side bar 139A, AE rigidity central sill 139B, AF rigidity central sill 139C; Wherein, CA flexible beam 131, CB flexible beam 132, CC flexible beam 133 and CD flexible beam 134 are parallel to X-axis, and form the 5th unit parallel girder; Wherein, CE flexible beam 135, CF flexible beam 136, CG flexible beam 137 and CH flexible beam 138 are parallel to X-axis, and form the 6th unit parallel girder; AE rigidity central sill 139B and AF rigidity central sill 139C is oppositely arranged between the 5th unit parallel girder and the 6th unit parallel girder.AC rigidity side bar 139A is arranged on the outside of the 5th unit parallel girder and the 6th unit parallel girder, and the inner side of the 5th unit parallel girder and the 6th unit parallel girder is cavity 1G.
Y-axis lower floor output terminal flexible hinge 1F is provided with DA flexible beam 141, DB flexible beam 142, DC flexible beam 143, DD flexible beam 144, DE flexible beam 145, DF flexible beam 146, DG flexible beam 147, DH flexible beam 148, AD rigidity side bar 149A, AG rigidity central sill 149B, AH rigidity central sill 149C; Wherein, DA flexible beam 141, DB flexible beam 142, DC flexible beam 143 and DD flexible beam 144 are parallel to X-axis, and form the 7th unit parallel girder; Wherein, DE flexible beam 145, DF flexible beam 146, DG flexible beam 147 and DH flexible beam 148 are parallel to X-axis, and form the 8th unit parallel girder; AG rigidity central sill 149B and AH rigidity central sill 149C is oppositely arranged between the 7th unit parallel girder and the 8th unit parallel girder.AD rigidity side bar 149A is arranged on the outside of the 7th unit parallel girder and the 8th unit parallel girder, and the inner side of the 7th unit parallel girder and the 8th unit parallel girder is cavity 1G.
Shown in Fig. 2 A, Y-axis lower floor input end flexible hinge 1E is provided with the 4th half-round cross hole 161, AD tapped hole 162, AE tapped hole 163 and AF tapped hole 164;
Described 4th half-round cross hole 161 and the second half-round cross hole 43C on Y-axis mounting plate 43, the 6th half-round cross hole 261 on Y-axis locking block 2B is conformal obtains Y-axis holes for clamping 8, and this Y-axis holes for clamping 8 is for placing the gripping section 44C of Y-axis push rod 44; The gripping section 44C inserting the Y-axis push rod 44 in Y-axis holes for clamping 8 is compressed by the Y-axis locking block 2B of upper strata decoupling zero platform 2, and Y-axis locking block 2B is fixed on the Y-axis lower floor input end flexible hinge 1E of lower floor's guide table 1 by the 11 screw 9.Described AD tapped hole 162 is for the 6th screw 45 that is threaded.Described AE tapped hole 163 is for the 5th screw 47 that is threaded.Described AF tapped hole 164 is for the 11 screw 9 that is threaded.
(2) upper strata decoupling zero platform 2
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 3, Fig. 3 A, Fig. 3 B, upper strata decoupling zero platform 2 is the integrated structural member adopting wire cutting technology to process, and such structural member can reduce the assembly error between each component.For convenience of description, the structural drawing with joint-cutting shown in Fig. 3 B is referred to.In figure, excise joint-cutting (i.e. joint-cutting 2H, rectangle joint-cutting 2J) by wire cutting technology and form flexible beam, under the condition having active force, flexible beam can be out of shape.
Shown in Figure 3, the center of upper strata decoupling zero platform 2 is the bearing table 2G of square, described bearing table 2G surrounding is respectively equipped with X-axis upper strata input end flexible hinge 2C, X-axis upper strata output terminal flexible hinge 2D, Y-axis upper strata input end flexible hinge 2E and X-axis upper strata output terminal flexible hinge 2F, X-axis upper strata input end flexible hinge 2C and X-axis upper strata output terminal flexible hinge 2D is oppositely arranged, and Y-axis upper strata input end flexible hinge 2E and X-axis upper strata output terminal flexible hinge 2F is oppositely arranged.In the present invention, bearing table 2G is for installing the equipment needing to carry out precision positioning.
Shown in Fig. 3 C, X-axis upper strata input end flexible hinge 2C is provided with EA flexible beam 211, EB flexible beam 212, EC flexible beam 213, ED flexible beam 214, AA trave lling girder 215, BA rigidity side bar 216; Wherein, EA flexible beam 211, EB flexible beam 212, EC flexible beam 213 and ED flexible beam 214 are parallel to X-axis, and form the 9th unit parallel girder; The inner side of the 9th unit parallel girder is bearing table 2G, and the outside of the 9th unit parallel girder is AA trave lling girder 215; The outside of AA trave lling girder 215 is X-axis locking block 2A; Upper and lower (namely in the Y direction) of the 9th unit parallel girder is BA rigidity side bar 216.
X-axis upper strata output terminal flexible hinge 2D is provided with FA flexible beam 221, FB flexible beam 222, FC flexible beam 223, FD flexible beam 224, AB trave lling girder 225, BB rigidity side bar 216; Wherein, FA flexible beam 221, FB flexible beam 222, FC flexible beam 223 and FD flexible beam 224 are parallel to X-axis, and form the tenth unit parallel girder; The inner side of the tenth unit parallel girder is bearing table 2G, and the outside of the tenth unit parallel girder is AB trave lling girder 225; BB rigidity side bar 226 is enclosed in the outside of AB trave lling girder 225 and the tenth unit parallel girder.
Shown in Fig. 3 A, the BA rigidity side bar 216 of X-axis upper strata input end flexible hinge 2C is provided with X-axis locking block 2A, and the below of described X-axis locking block 2A is provided with the 5th half-round cross hole 251, the 3rd counter sink 252; X-axis locking block 2A and X-axis mounting plate 33 are parallel to Y-axis and place, and the 5th half-round cross hole 251 and the first half-round cross hole 33C obtain X-axis holes for clamping 7 with the 3rd half-round cross hole 151 is conformal jointly.
This X-axis holes for clamping 7 is for placing the gripping section 34C of X-axis push rod 34; The gripping section 34C inserting the X-axis push rod 34 in X-axis holes for clamping 7 is compressed by the X-axis locking block 2A of upper strata decoupling zero platform 2, and X-axis locking block 2A is fixed on the X-axis lower floor input end flexible hinge 1C of lower floor's guide table 1 by the tenth screw 6.
Described 3rd counter sink 252 passes for the tenth screw 6, and the tenth screw 6 after passing is threaded in AC tapped hole 154.Realized on the AA rigidity side bar 119A of the X-axis lower floor input end flexible hinge 1C X-axis locking block 2A of upper strata decoupling zero platform 2 being fixed on lower floor's guide table 1 by the tenth screw 6.
Shown in Fig. 3 C, Y-axis upper strata input end flexible hinge 2E is provided with GA flexible beam 231, GB flexible beam 232, GC flexible beam 233, GD flexible beam 234, AC trave lling girder 235, BC rigidity side bar 236; Wherein, GA flexible beam 231, GB flexible beam 232, GC flexible beam 233 and GD flexible beam 234 are parallel to Y-axis, and form the 11 unit parallel girder; The inner side of the 11 unit parallel girder is bearing table 2G, and the outside of the 11 unit parallel girder is AC trave lling girder 235; The outside of AC trave lling girder 235 is Y-axis locking block 2B; The left and right (namely in X-axis direction) of the 11 unit parallel girder is BC rigidity side bar 236.
Y-axis upper strata output terminal flexible hinge 2F is provided with HA flexible beam 241, HB flexible beam 242, HC flexible beam 243, HD flexible beam 244, AD trave lling girder 245, BD rigidity side bar 246; Wherein, HA flexible beam 241, HB flexible beam 242, HC flexible beam 243 and HD flexible beam 244 are parallel to Y-axis, and form the 12 unit parallel girder; The inner side of the 12 unit parallel girder is bearing table 2G, and the outside of the 12 unit parallel girder is AD trave lling girder 245; BD rigidity side bar 246 is enclosed in the outside of AD trave lling girder the 245 and the 12 unit parallel girder.
Shown in Fig. 3 A, the BC rigidity side bar 236 of Y-axis upper strata input end flexible hinge 2E is provided with Y-axis locking block 2B, and the below of described Y-axis locking block 2B is provided with the 6th half-round cross hole 261, the 4th counter sink 262; Y-axis locking block 2B and Y-axis mounting plate 43 are parallel to X-axis and place, and the 6th half-round cross hole 261 and the second half-round cross hole 43C obtain Y-axis holes for clamping 8 with the 4th half-round cross hole 161 is conformal jointly.
This Y-axis holes for clamping 8 is for placing the gripping section 44C of Y-axis push rod 44; The gripping section 44C inserting the Y-axis push rod 44 in Y-axis holes for clamping 8 is compressed by the Y-axis locking block 2B of upper strata decoupling zero platform 2, and Y-axis locking block 2B is fixed on the Y-axis lower floor input end flexible hinge 1E of lower floor's guide table 1 by the 11 screw 9.
Described 4th counter sink 262 passes for the 11 screw 9, and the 11 screw 9 after passing is threaded in AE tapped hole 164.Realized on the AC rigidity side bar 139A of the Y-axis lower floor input end flexible hinge 1E Y-axis locking block 2B of upper strata decoupling zero platform 2 being fixed on lower floor's guide table 1 by the 11 screw 9.
In the present invention, lower floor's guide table 1 pair of upper strata decoupling zero platform 2 plays leading role.
(3) X-axis driven unit 3
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 4, X-axis driven unit 3 includes X-axis drive motor 31, X-axis motor contact 32, X-axis mounting plate 33 and X-axis push rod 34.Described X-axis drive motor 31 chooses precision linear motor.
Shown in Figure 4, X-axis motor contact 32 is integrated and is processed into shaped piece.The center portion of X-axis motor contact 32 is provided with central through bore 32B, and the output shaft that this central through bore 32B is used for X-axis drive motor 31 passes;
The dual-side of X-axis motor contact 32 is provided with the first connecting body 32E and the second connecting body 32F, first connecting body 32E is provided with CA through hole 32D and CC through hole 32H, second connecting body 32F is provided with CB through hole 32G and CD through hole 32J, wherein, CA through hole 32D and CB through hole 32G is used for the second screw 35 and passes, and can realize being arranged on by X-axis motor contact 32 on first side plate 1A of lower floor's guide table 1 by this second screw 35; CC through hole 32H and CD through hole 32J is used for the 3rd screw 36 and passes, and X-axis motor contact 32 can be realized to be arranged on X-axis mounting plate 33 by the 3rd screw 36;
The corner of the installation panel 32A of X-axis motor contact 32 is provided with CE through hole 32C, and this CE through hole 32C is used for the 4th screw 38 and passes, and is realized the installation of X-axis drive motor 31 and X-axis motor contact 32 by the 4th screw 38.
Shown in Fig. 4 A, X-axis mounting plate 33 is provided with the first counter sink 33A, the first half-round cross hole 33C and the first tapped hole 33B; Described first counter sink 33A is used for the first screw 37 and passes, and realizes X-axis mounting plate 33 to be arranged on lower floor's guide table 1 by this first screw 37; One end that described first half-round cross hole 33C is used for X-axis push rod 34 is passed; Described first tapped hole 33B is for placing the 3rd screw 36, and this first tapped hole 33B realizes the connection between the connecting body (32E, 32F) of X-axis mounting plate 33 and X-axis motor contact 32.
Shown in Fig. 4 B, X-axis push rod 34 is provided with thread section 34A, rods 34B and gripping section 34C.Described thread section 34A is connected with the output shaft of X-axis drive motor 31, described gripping section 34C is placed in X-axis holes for clamping 7, and this X-axis holes for clamping 7 is obtained with the 3rd half-round cross hole 151 on lower floor's guide table 1 is conformal by the 5th half-round cross hole 251 on the first half-round cross hole 33C on X-axis mounting plate 33 and X-axis locking block 2A.
(4) Y-axis driven unit 4
Shown in Fig. 1, Figure 1A, Figure 1B, Fig. 5, Y-axis driven unit 4 includes Y-axis drive motor 41, y-axis motor link 42, X-axis mounting plate 43 and X-axis push rod 44.Described Y-axis drive motor 41 chooses precision linear motor.
Shown in Figure 5, y-axis motor link 42 is integrated and is processed into shaped piece.The center portion of y-axis motor link 42 is provided with central through bore 42B, and the output shaft that this central through bore 42B is used for Y-axis drive motor 41 passes;
The dual-side of y-axis motor link 42 is provided with the 3rd connecting body 42E and the 4th connecting body 42F, 3rd connecting body 42E is provided with DA through hole 42D and DC through hole 42H, 4th connecting body 42F is provided with DB through hole 42G and DD through hole 42J, wherein, DA through hole 42D and DB through hole 42G is used for the 6th screw 45 and passes, and can realize being arranged on by y-axis motor link 42 on second side plate 1B of lower floor's guide table 1 by the 6th screw 45; DC through hole 42H and DD through hole 42J is used for the 7th screw 46 and passes, and y-axis motor link 42 can be realized to be arranged on Y-axis mounting plate 43 by the 7th screw 46;
The corner of the installation panel 42A of y-axis motor link 42 is provided with DE through hole 42C, and this DE through hole 42C is used for the 8th screw 48 and passes, and is realized the installation of Y-axis drive motor 41 and y-axis motor link 42 by the 8th screw 48.
Shown in Fig. 5 A, Y-axis mounting plate 43 is provided with the second counter sink 43A, the second half-round cross hole 43C and the second tapped hole 43B; Described second counter sink 43A is used for the 5th screw 47 and passes, and realizes Y-axis mounting plate 43 to be arranged on lower floor's guide table 1 by the 5th screw 47; One end that described second half-round cross hole 43C is used for Y-axis push rod 44 is passed; Described second tapped hole 43B realizes the connection between the connecting body (42E, 42F) of Y-axis mounting plate 43 and y-axis motor link 42 for placing the 7th screw the 46, seven tapped hole 43B.
Shown in Fig. 5 B, Y-axis push rod 44 is provided with thread section 44A, rods 44B and gripping section 44C.Described thread section 44A is connected with the output shaft of Y-axis drive motor 41, described gripping section 44C is placed in Y-axis holes for clamping 8, and this Y-axis holes for clamping 8 is obtained with the 4th half-round cross hole 161 on lower floor's guide table 1 is conformal by the 6th half-round cross hole 261 on the second half-round cross hole 43C on Y-axis mounting plate 43 and Y-axis locking block 2B.
In the present invention, flexible push rod (i.e. X-axis push rod 34, Y-axis push rod 44) is the parts connecting precision linear motor and double-decked platform (i.e. upper strata decoupling zero platform, lower floor's guide table), and its one end is worm structure, is connected with motor output shaft; The other end is round column structure, is held tightly by the input end of X-axis, Y-axis locking scene and double-decked platform.Flexible push rod can absorb the alignment errors of motor output shaft and upper strata decoupling zero platform input end, reduces motor bearings by radial stress, avoids motor damage.
(5) motion mode
See the bearing table 2G shown in Fig. 2 D, Fig. 3 E bear X-axis motor export driving force FX time flexible hinge distortion schematic diagram.To be out of shape with the flexible hinge in X-axis be identical in flexible hinge distortion when bearing for bearing table 2G the driving force FY that y-axis motor exports, therefore eliminate the schematic diagram of Y-axis strength.When carrying out precision positioning, the output drive strength while that X-axis and Y-axis being.The mechanism of the present invention's design can realize the precision actuation of Long Distances, low coupling error.
Locating platform of the present invention adopts symmetric type design philosophy, and application parallelogram flexible hinge realizes the decoupling zero of motion, and namely the driving in x-axis direction can not bring the hunt effect in y-axis direction, and vice versa.Because the rigidity side bar (215,225,235,245) in upper strata decoupling zero platform 2 is connected by the 9th screw 5 with the rigidity side bar (119A, 129A, 139A, 149A) in lower floor guide table 1 respectively, the motion of the rigidity side bar in Ze You lower floor guide table 1 will produce leading role to the motion of the rigidity side bar in upper strata decoupling zero platform 2.
Stressed and the movement process of lower floor's guide table 1 under x-axis drive motor directed force F X is:
Structure on the four direction of lower floor's guide table 1 realizes guiding and the decoupling zero transmission of X-axis or y-axis motor drive displacement respectively.For X-axis, when X-axis drive motor to act on the AA rigidity side bar 119A of flexible guiding platform with power FX, AA rigidity side bar 119A will move in the X-axis direction, directed force F X is passed to rigidity central sill 119B and 119C via flexible beam 111 ~ 114 and 115 ~ 118 simultaneously, thus drives it to move in the X-axis direction; The motion of rigidity central sill 119B and 119C drives flexible beam 121 ~ 124 and 125 ~ 128 further, rigidity central sill 129B and 129C occurs bending and deformation.Center portion due to lower floor's guide table 1 is cavity 1G, and therefore directed force F X can alleviate.In this process, 111 ~ 114 and 115 ~ 118,121 ~ 124 and 125 ~ 128 constitute four groups of parallel-crank mechanisms, play good leading role, limit the degrees of freedom of Y-direction simultaneously in X-axis direction to rigidity side bar and rigidity central sill.The flexible substructure that parts 111 ~ 114 and 115 ~ 118 form can be regarded as first group of single-freedom and flexible guide rail along X-axis direction.In like manner, 121 ~ 124 and 126 ~ 128 is second group of single-freedom and flexible guide rail.In like manner, 131 ~ 134 and 135 ~ 138 is the 3rd group of single-freedom and flexible guide rail.In like manner, 141 ~ 144 and 145 ~ 148 is the 4th group of single-freedom and flexible guide rail.
Under FX effect, the Movement transmit of the AA rigidity side bar 119A of lower floor's guide table 1 to the BA rigidity side bar 216 of upper strata decoupling zero platform 2, and is passed to BA rigidity side bar 216 by the AA trave lling girder 215 of upper strata decoupling zero platform 2 and makes it move in the X-axis direction.BA rigidity side bar 216 pulls rigidity central sill 119B and 119C to produce displacement along X-axis via flexible beam 211 ~ 214, and rigidity central sill 119B and 119C drives flexible beam 121 ~ 124 and 126 ~ 128 to be subjected to displacement further.And rigidity side bar 139A and 139A has larger rigidity in X-axis direction, movement can not be produced.
Stressed and the movement process of upper strata decoupling zero platform 2 under x-axis drive motor directed force F X is:
Under the effect of X-axis drive motor, the beam structure on upper strata decoupling zero platform 2 and bearing table 2G have enough rigidity in X-axis direction, therefore entirety are moved in the X-axis direction.And rigidity side bar 236,246 is due to the leading role of lower floor's guide table 1, moving along X-axis direction can not be there is.The X-axis direction motion of object table 2G will drive rigidity trave lling girder 235,245 to move to X-axis direction by flexible beam 232 and 233,242 and 243.Rigidity trave lling girder 235,245 drives flexible beam 231 and 234,241 and 246 to deform.In movement process, flexible beam 231 ~ 234,241 ~ 246 play motion guide effect, prevent rigidity trave lling girder 215,235 from producing rotary motion, and then bring hunt effect.In addition, due to flexible beam 231 ~ 234,241 ~ 246 deform, and decrease the pulling force effect to rigidity trave lling girder 215,235 produced because bearing table moves in the X-axis direction, and improve mobile decoupling performance.
The two degrees of freedom precisely locating platform of the present invention's design comprises: the composition such as mobile decoupling platform, motor installation locking mechanism being positioned at the flexible guiding platform of bottom, upper strata.Wherein, lower floor's guide table provides motion guide for upper layer motion structure platform, and its structure mainly comprises four groups of flexible guide rails based on flexible hinge; Upper layer motion decoupling zero platform is made up of group flexible hinge of four for realizing mobile decoupling, bearing table; Motor is installed and is comprised motor connectors, flexible push rod, motor mounting plate and motor shaft locking mechanism with locking mechanism.The mobile decoupling platform on upper strata is connected with the flexible guiding platform of lower floor by eight lock screws; Precision linear motor is connected with motor connectors by screw; Motor mounting plate is rigidly connected by screw and guiding flexibility platform, and provides two tapped holes for the installation of motor connectors respectively.
Claims (4)
1. based on a stacked two degrees of freedom precisely locating platform in parallel for flexible beam, it is characterized in that: this locating platform includes lower floor's guide table (1), upper strata decoupling zero platform (2), X-axis driven unit (3) and Y-axis driven unit (4); Realize fixedly mounting by the 9th screw (5), the tenth screw (6) and the 11 screw (9) between lower floor's guide table (1) and upper strata decoupling zero platform (2);
The center of lower floor's guide table (1) is cavity (1G), described cavity (1G) surrounding is respectively equipped with X-axis lower floor input end flexible hinge (1C), X-axis lower floor output terminal flexible hinge (1D), Y-axis lower floor input end flexible hinge (1E) and X-axis lower floor output terminal flexible hinge (1F), X-axis lower floor input end flexible hinge (1C) and X-axis lower floor output terminal flexible hinge (1D) are oppositely arranged, and Y-axis lower floor input end flexible hinge (1E) and X-axis lower floor output terminal flexible hinge (1F) are oppositely arranged;
X-axis lower floor input end flexible hinge (1C) is provided with AA flexible beam (111), AB flexible beam (112), AC flexible beam (113), AD flexible beam (114), AE flexible beam (115), AF flexible beam (116), AG flexible beam (117), AH flexible beam (118), AA rigidity side bar (119A), AA rigidity central sill (119B), AB rigidity central sill (119C); Wherein, AA flexible beam (111), AB flexible beam (112), AC flexible beam (113) and AD flexible beam (114) are parallel to Y-axis, and form first module parallel girder; Wherein, AE flexible beam (115), AF flexible beam (116), AG flexible beam (117) and AH flexible beam (118) are parallel to Y-axis, and form second unit parallel girder; AA rigidity central sill (119B) and AB rigidity central sill (119C) are oppositely arranged between first module parallel girder and second unit parallel girder; AA rigidity side bar (119A) is arranged on the outside of first module parallel girder and second unit parallel girder, and the inner side of first module parallel girder and second unit parallel girder is cavity (1G);
X-axis lower floor output terminal flexible hinge (1D) is provided with BA flexible beam (121), BB flexible beam (122), BC flexible beam (123), BD flexible beam (124), BE flexible beam (125), BF flexible beam (126), BG flexible beam (127), BH flexible beam (128), AB rigidity side bar (129A), AC rigidity central sill (129B), AD rigidity central sill (129C); Wherein, BA flexible beam (121), BB flexible beam (122), BC flexible beam (123) and BD flexible beam (124) are parallel to Y-axis, and form the 3rd unit parallel girder; Wherein, BE flexible beam (125), BF flexible beam (126), BG flexible beam (127) and BH flexible beam (128) are parallel to Y-axis, and form the 4th unit parallel girder; AC rigidity central sill (129B) and AD rigidity central sill (129C) are oppositely arranged between the 3rd unit parallel girder and the 4th unit parallel girder; AB rigidity side bar (129A) is arranged on the outside of the 3rd unit parallel girder and the 4th unit parallel girder, and the inner side of the 3rd unit parallel girder and the 4th unit parallel girder is cavity (1G);
X-axis lower floor input end flexible hinge (1C) is provided with the 3rd half-round cross hole (151), AA tapped hole (152), AB tapped hole (153) and AC tapped hole (154); The first half-round cross hole (33C) on described 3rd half-round cross hole (151) and X-axis mounting plate (33), the 5th half-round cross hole on X-axis locking block (2A) combine and obtain X-axis holes for clamping (7), and this X-axis holes for clamping (7) is for placing the gripping section (34C) of X-axis push rod (34); The gripping section (34C) of inserting the X-axis push rod (34) in X-axis holes for clamping (7) is compressed by the X-axis locking block (2A) of upper strata decoupling zero platform (2), and X-axis locking block 2A is fixed in X-axis lower floor input end flexible hinge (1C) of lower floor's guide table (1) by the tenth screw (6); Described AA tapped hole (152) is for the second screw (35) that is threaded; Described AB tapped hole (153) is for the first screw (37) that is threaded; Described AC tapped hole (154) is for the tenth screw (6) that is threaded;
Y-axis lower floor input end flexible hinge (1E) is provided with CA flexible beam (131), CB flexible beam (132), CC flexible beam (133), CD flexible beam (134), CE flexible beam (135), CF flexible beam (136), CG flexible beam (137), CH flexible beam (138), AC rigidity side bar (139A), AE rigidity central sill (139B), AF rigidity central sill (139C); Wherein, CA flexible beam (131), CB flexible beam (132), CC flexible beam (133) and CD flexible beam (134) are parallel to X-axis, and form the 5th unit parallel girder; Wherein, CE flexible beam (135), CF flexible beam (136), CG flexible beam (137) and CH flexible beam (138) are parallel to X-axis, and form the 6th unit parallel girder; AE rigidity central sill (139B) and AF rigidity central sill (139C) are oppositely arranged between the 5th unit parallel girder and the 6th unit parallel girder; AC rigidity side bar (139A) is arranged on the outside of the 5th unit parallel girder and the 6th unit parallel girder, and the inner side of the 5th unit parallel girder and the 6th unit parallel girder is cavity (1G);
Y-axis lower floor output terminal flexible hinge (1F) is provided with DA flexible beam (141), DB flexible beam (142), DC flexible beam (143), DD flexible beam (144), DE flexible beam (145), DF flexible beam (146), DG flexible beam (147), DH flexible beam (148), AD rigidity side bar (149A), AG rigidity central sill (149B), AH rigidity central sill (149C); Wherein, DA flexible beam (141), DB flexible beam (142), DC flexible beam (143) and DD flexible beam (144) are parallel to X-axis, and form the 7th unit parallel girder; Wherein, DE flexible beam (145), DF flexible beam (146), DG flexible beam (147) and DH flexible beam (148) are parallel to X-axis, and form the 8th unit parallel girder; AG rigidity central sill (149B) and AH rigidity central sill (149C) are oppositely arranged between the 7th unit parallel girder and the 8th unit parallel girder; AD rigidity side bar (149A) is arranged on the outside of the 7th unit parallel girder and the 8th unit parallel girder, and the inner side of the 7th unit parallel girder and the 8th unit parallel girder is cavity (1G);
Y-axis lower floor input end flexible hinge (1E) is provided with the 4th half-round cross hole (161), AD tapped hole (162), AE tapped hole (163) and AF tapped hole (164); The second half-round cross hole (43C) on described 4th half-round cross hole (161) and Y-axis mounting plate (43), the 6th half-round cross hole (261) on Y-axis locking block (2B) combine and obtain Y-axis holes for clamping (8), and this Y-axis holes for clamping (8) is for placing the gripping section (44C) of Y-axis push rod 44; The gripping section (44C) of inserting the Y-axis push rod (44) in Y-axis holes for clamping (8) is compressed by the Y-axis locking block (2B) of upper strata decoupling zero platform (2), and Y-axis locking block (2B) is fixed in Y-axis lower floor input end flexible hinge (1E) of lower floor's guide table (1) by the 11 screw (9); Described AD tapped hole (162) is for the 6th screw (45) that is threaded; Described AE tapped hole (163) is for the 5th screw (47) that is threaded; Described AF tapped hole (164) is for the 11 screw (9) that is threaded;
The center of upper strata decoupling zero platform (2) is bearing table (2G), described bearing table (2G) surrounding is respectively equipped with X-axis upper strata input end flexible hinge (2C), X-axis upper strata output terminal flexible hinge (2D), Y-axis upper strata input end flexible hinge (2E) and X-axis upper strata output terminal flexible hinge (2F), X-axis upper strata input end flexible hinge (2C) and X-axis upper strata output terminal flexible hinge (2D) are oppositely arranged, and Y-axis upper strata input end flexible hinge (2E) and X-axis upper strata output terminal flexible hinge (2F) are oppositely arranged;
X-axis upper strata input end flexible hinge (2C) is provided with EA flexible beam (211), EB flexible beam (212), EC flexible beam (213), ED flexible beam (214), AA trave lling girder (215), BA rigidity side bar (216); Wherein, EA flexible beam (211), EB flexible beam (212), EC flexible beam (213) and ED flexible beam (214) are parallel to X-axis, and form the 9th unit parallel girder; The inner side of the 9th unit parallel girder is bearing table (2G), and the outside of the 9th unit parallel girder is AA trave lling girder (215); The outside of AA trave lling girder (215) is X-axis locking block (2A); 9th unit parallel girder be BA rigidity side bar (216) up and down;
X-axis upper strata output terminal flexible hinge (2D) is provided with FA flexible beam (221), FB flexible beam (222), FC flexible beam (223), FD flexible beam (224), AB trave lling girder (225), BB rigidity side bar (216); Wherein, FA flexible beam (221), FB flexible beam (222), FC flexible beam (223) and FD flexible beam (224) are parallel to X-axis, and form the tenth unit parallel girder; The inner side of the tenth unit parallel girder is bearing table (2G), and the outside of the tenth unit parallel girder is AB trave lling girder (225); BB rigidity side bar (226) is enclosed in the outside of AB trave lling girder (225) and the tenth unit parallel girder;
The BA rigidity side bar (216) on X-axis upper strata input end flexible hinge (2C) is provided with X-axis locking block (2A), and the below of described X-axis locking block (2A) is provided with the 5th half-round cross hole (251), the 3rd counter sink (252); X-axis locking block (2A) and X-axis mounting plate (33) are parallel to Y-axis and place, and the 5th half-round cross hole (251) and common the combination with the 3rd half-round cross hole (151) of the first half-round cross hole (33C) obtain X-axis holes for clamping (7); This X-axis holes for clamping (7) is for placing the gripping section (34C) of X-axis push rod (34); The gripping section (34C) of inserting the X-axis push rod (34) in X-axis holes for clamping (7) is compressed by the X-axis locking block (2A) of upper strata decoupling zero platform (2), and X-axis locking block (2A) is fixed in X-axis lower floor input end flexible hinge (1C) of lower floor's guide table (1) by the tenth screw (6); Described 3rd counter sink (252) passes for the tenth screw (6), and the tenth screw (6) after passing is threaded in AC tapped hole (154);
Y-axis upper strata input end flexible hinge (2E) is provided with GA flexible beam (231), GB flexible beam (232), GC flexible beam (233), GD flexible beam (234), AC trave lling girder (235), BC rigidity side bar (236); Wherein, GA flexible beam (231), GB flexible beam (232), GC flexible beam (233) and GD flexible beam (234) are parallel to Y-axis, and form the 11 unit parallel girder; The inner side of the 11 unit parallel girder is bearing table (2G), and the outside of the 11 unit parallel girder is AC trave lling girder (235); The outside of AC trave lling girder (235) is Y-axis locking block (2B); The left and right of the 11 unit parallel girder is BC rigidity side bar (236);
Y-axis upper strata output terminal flexible hinge (2F) is provided with HA flexible beam (241), HB flexible beam (242), HC flexible beam (243), HD flexible beam (244), AD trave lling girder (245), BD rigidity side bar (246); Wherein, HA flexible beam (241), HB flexible beam (242), HC flexible beam (243) and HD flexible beam (244) are parallel to Y-axis, and form the 12 unit parallel girder; The inner side of the 12 unit parallel girder is bearing table (2G), and the outside of the 12 unit parallel girder is AD trave lling girder (245); BD rigidity side bar (246) is enclosed in the outside of AD trave lling girder (245) and the 12 unit parallel girder;
The BC rigidity side bar (236) on Y-axis upper strata input end flexible hinge (2E) is provided with Y-axis locking block (2B), and the below of described Y-axis locking block (2B) is provided with the 6th half-round cross hole (261), the 4th counter sink (262); Y-axis locking block (2B) and Y-axis mounting plate (43) are parallel to X-axis and place, and the 6th half-round cross hole (261) and common the combination with the 4th half-round cross hole (161) of the second half-round cross hole (43C) obtain Y-axis holes for clamping (8); This Y-axis holes for clamping (8) is for placing the gripping section (44C) of Y-axis push rod (44); The gripping section (44C) of inserting the Y-axis push rod (44) in Y-axis holes for clamping (8) is compressed by the Y-axis locking block (2B) of upper strata decoupling zero platform (2), and Y-axis locking block (2B) is fixed in Y-axis lower floor input end flexible hinge (1E) of lower floor's guide table (1) by the 11 screw (9); Described 4th counter sink (262) passes for the 11 screw (9), and the 11 screw (9) after passing is threaded in AE tapped hole (164);
X-axis driven unit (3) includes X-axis drive motor (31), X-axis motor contact (32), X-axis mounting plate (33) and X-axis push rod (34);
The center portion of X-axis motor contact (32) is provided with central through bore (32B), and this central through bore (32B) passes for the output shaft of X-axis drive motor (31), the dual-side of X-axis motor contact (32) is provided with the first connecting body (32E) and the second connecting body (32F), first connecting body (32E) is provided with CA through hole (32D) and CC through hole (32H), second connecting body (32F) is provided with CB through hole (32G) and CD through hole (32J), wherein, CA through hole (32D) and CB through hole (32G) pass for the second screw (35), X-axis motor contact (32) can be realized to be arranged on first side plate (1A) of lower floor's guide table (1) by this second screw (35), CC through hole (32H) and CD through hole (32J) pass for the 3rd screw (36), X-axis motor contact (32) can be realized to be arranged on X-axis mounting plate (33) by the 3rd screw (36),
The corner of the installation panel (32A) of X-axis motor contact (32) is provided with CE through hole (32C), this CE through hole (32C) passes for the 4th screw (38), is realized the installation of X-axis drive motor 31 and X-axis motor contact (32) by the 4th screw (38);
X-axis mounting plate (33) is provided with the first counter sink (33A), the first half-round cross hole (33C) and the first tapped hole (33B); Described first counter sink (33A) is passed for the first screw (37), realizes X-axis mounting plate (33) to be arranged on lower floor's guide table (1) by this first screw (37); Described first half-round cross hole (33C) is passed for one end of X-axis push rod (34); Described first tapped hole (33B) is for placing the 3rd screw (36);
X-axis push rod (34) is provided with thread section (34A), rods (34B) and gripping section (34C); Described thread section (34A) is connected with the output shaft of X-axis drive motor (31), described gripping section (34C) is placed in X-axis holes for clamping (7), and this X-axis holes for clamping (7) is combined by the 3rd half-round cross hole (151) on the 5th half-round cross hole (251) on the first half-round cross hole (33C) on X-axis mounting plate (33) and X-axis locking block (2A) and lower floor's guide table (1) to obtain;
Y-axis driven unit (4) includes Y-axis drive motor (41), y-axis motor link (42), X-axis mounting plate (43) and X-axis push rod (44);
The center portion of y-axis motor link (42) is provided with central through bore (42B), and this central through bore (42B) passes for the output shaft of Y-axis drive motor (41);
The dual-side of y-axis motor link (42) is provided with the 3rd connecting body (42E) and the 4th connecting body (42F), 3rd connecting body (42E) is provided with DA through hole (42D) and DC through hole (42H), 4th connecting body (42F) is provided with DB through hole (42G) and DD through hole (42J), wherein, DA through hole (42D) and DB through hole (42G) pass for the 6th screw (45), y-axis motor link (42) can be realized to be arranged on the second side plate 1B of lower floor's guide table (1) by the 6th screw (45), DC through hole (42H) and DD through hole (42J) pass for the 7th screw (46), y-axis motor link (42) can be realized to be arranged on Y-axis mounting plate (43) by the 7th screw (46),
The corner of the installation panel (42A) of y-axis motor link (42) is provided with DE through hole (42C), this DE through hole (42C) passes for the 8th screw (48), is realized the installation of Y-axis drive motor (41) and y-axis motor link (42) by the 8th screw (48);
Y-axis mounting plate (43) is provided with the second counter sink (43A), the second half-round cross hole (43C) and the second tapped hole (43B); Described second counter sink (43A) is passed for the 5th screw (47), realizes Y-axis mounting plate (43) to be arranged on lower floor's guide table (1) by the 5th screw (47); Described second half-round cross hole (43C) is passed for one end of Y-axis push rod (44); Described second tapped hole (43B) is for placing the 7th screw (46);
Y-axis push rod (44) is provided with thread section (44A), rods (44B) and gripping section (44C); Described thread section (44A) is connected with the output shaft of Y-axis drive motor (41), described gripping section (44C) is placed in Y-axis holes for clamping (8), and this Y-axis holes for clamping (8) is combined by the 4th half-round cross hole (161) on the 6th half-round cross hole (261) on the second half-round cross hole (43C) on Y-axis mounting plate (43) and Y-axis locking block (2B) and lower floor's guide table (1) to obtain.
2. the stacked two degrees of freedom precisely locating platform in parallel based on flexible beam according to claim 1, is characterized in that: lower floor's guide table (1) plays leading role to upper strata decoupling zero platform (2).
3. the stacked two degrees of freedom precisely locating platform in parallel based on flexible beam according to claim 1, is characterized in that: described X-axis drive motor (31) and Y-axis drive motor (41) choose precision linear motor.
4. the stacked two degrees of freedom precisely locating platform in parallel based on flexible beam according to claim 1, is characterized in that: this locating platform adopts symmetric type design, and application parallelogram flexible hinge realizes the decoupling zero of motion.
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| CN103531252B (en) * | 2013-10-22 | 2015-06-03 | 大连交通大学 | Micrometric displacement working table |
| CN104196952B (en) * | 2014-07-14 | 2016-01-13 | 西安电子科技大学 | Two-degree-of-freedom micro-flexible hinge damping platform and vibration damping method |
| CN104895913B (en) * | 2015-05-04 | 2017-11-14 | 清华大学 | Two-freedom mobile decoupling flexure hinge mechanism |
| CN106739504B (en) * | 2016-12-12 | 2017-12-26 | 北京航空航天大学 | A kind of five degree of freedom fine alignment mechanism based on flexible hinge |
| DE102018128911A1 (en) * | 2018-11-16 | 2020-05-20 | Physik Instrumente (Pi) Gmbh & Co. Kg | Multi-axis guiding device |
| CN110136771B (en) * | 2019-04-01 | 2021-09-21 | 华南理工大学 | High-bandwidth two-degree-of-freedom parallel flexible precision positioning platform |
| CN112959304B (en) * | 2021-02-10 | 2022-09-06 | 北京航空航天大学 | Layered two-degree-of-freedom flexible parallel platform |
| CN114198481B (en) * | 2021-12-16 | 2023-11-10 | 北京航空航天大学 | Parallel two-degree-of-freedom precise motion executing mechanism based on flexible hinge |
| CN115144107B (en) * | 2022-07-07 | 2023-03-03 | 大连理工大学 | Two-freedom decoupling force sensor capable of realizing high-precision and integrated processing |
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| FR783431A (en) * | 1934-12-29 | 1935-07-12 | Boilot Ets | Trailer for airplanes or the like |
| CN100486413C (en) * | 2007-10-26 | 2009-05-06 | 华南理工大学 | Positioning platform for fully automatic lead-free tin oil imprinter based on flexible machine |
| CN101241314B (en) * | 2008-03-11 | 2010-06-23 | 上海微电子装备有限公司 | 6 freedom degrees precision positioning station capable of compensating Z-direction position |
| CA2641010A1 (en) * | 2008-10-07 | 2010-04-07 | Dennis Wood | Camera mounting system |
| CN101858477B (en) * | 2010-04-20 | 2011-09-14 | 郑福胜 | Two-degree-of-freedom high-precision positioning platform |
| CN202563898U (en) * | 2012-04-19 | 2012-11-28 | 无锡工艺职业技术学院 | Two-dimensional precision positioning platform |
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