CN102732938A - Electroplating device and method for dynamically adjusting anode power supply area - Google Patents
Electroplating device and method for dynamically adjusting anode power supply area Download PDFInfo
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Abstract
Description
技术领域 technical field
本发明是关于一种电镀装置及其方法,主要是在一电镀槽中设置一第一阳极金属板及一第二阳极金属板,且所述阳极金属板是位于不同的深度,并与一被镀物相互平行,其中该第二阳极金属板对应于该被镀物的一侧邻近底端的位置,而连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电,以由动态调整所述阳极金属板供电面积及电量的方式,在该被镀物上形成一均匀的电镀层,且有效避免过多的金属离子附着至该被镀物的一侧邻近底端的表面。The present invention relates to an electroplating device and its method. It mainly includes setting a first anode metal plate and a second anode metal plate in an electroplating tank, and the anode metal plates are located at different depths, and are connected to a The plated objects are parallel to each other, wherein the second anode metal plate corresponds to the position near the bottom end of the side of the plated object, and the anode power supply connected to the second anode metal plate can intermittently power the second anode metal plate Power supply, by dynamically adjusting the power supply area and power of the anode metal plate, a uniform electroplating layer is formed on the object to be plated, and excessive metal ions are effectively prevented from adhering to the side of the object to be plated adjacent to the bottom end surface.
背景技术 Background technique
按,电镀技术是一种相当常见的成膜技术,电镀的目的主要是防止生锈、增加美观或形成电路基底层。电镀的基本作业流程包括磨光、抛光、上挂、脱脂除油、水洗、电解抛光(或化学抛光)、酸洗活化、预镀、电镀、水洗及其它后处理等步骤。施镀前的所有工序一般称为前处理,主要目的在于修整被镀物的表面,以除去被镀物表面的油脂、锈皮、氧化膜等。根据统计,60%的电镀不良品是因前处理不良造成,由此可知前处理的重要性。此外,在作业流程中,磨光是为了除掉被镀物表面的锈蚀、刮痕等可视缺陷,而抛光是进一步降低被镀物表面的粗糙度,以获得光亮的外观。又,酸洗的目的是除掉被镀物的表面锈和氧化膜,且酸洗包括化学酸洗及电化学酸洗两种。在某些物品的电镀作业上,业者可能会根据被镀物的材料特性或实际需求,针对前述基本作业流程进行适度调整,或是适当地省略或增加前述基本作业流程,以达到最佳的电镀效果或产品需求。Press, electroplating technology is a fairly common film-forming technology. The purpose of electroplating is mainly to prevent rust, increase aesthetics or form a circuit base layer. The basic operation process of electroplating includes grinding, polishing, hanging, degreasing and degreasing, water washing, electrolytic polishing (or chemical polishing), pickling activation, pre-plating, electroplating, water washing and other post-treatment steps. All processes before plating are generally called pretreatment, the main purpose is to repair the surface of the object to be plated to remove grease, rust, oxide film, etc. on the surface of the object to be plated. According to statistics, 60% of defective electroplating products are caused by poor pretreatment, which shows the importance of pretreatment. In addition, in the operation process, polishing is to remove visible defects such as rust and scratches on the surface of the plated object, while polishing is to further reduce the roughness of the surface of the plated object to obtain a bright appearance. In addition, the purpose of pickling is to remove the surface rust and oxide film of the plated object, and pickling includes chemical pickling and electrochemical pickling. In the electroplating operation of some items, the industry may make appropriate adjustments to the above-mentioned basic operation process according to the material characteristics or actual needs of the plated object, or appropriately omit or increase the above-mentioned basic operation process to achieve the best electroplating effects or product needs.
电镀主要是利用电解原理,以外加直流电源的方式供应电能,将溶液中的金属离子还原为金属,并使金属沉积于被镀物的表面。虽然电镀技术已是发展相当成熟的技术,但目前仍有许多技术面的问题有待解决。例如在电路板(Printed circuit board,简称PCB)的电镀过程中,常会有电镀层(或称电路基底层)厚度不均匀的问题,针对电镀层厚度不均匀的成因及所产生的缺点,进行说明如下:Electroplating mainly uses the principle of electrolysis to supply electric energy in the form of an external DC power supply to reduce the metal ions in the solution to metal, and to deposit the metal on the surface of the plated object. Although electroplating technology is a fairly mature technology, there are still many technical problems to be solved. For example, in the electroplating process of printed circuit board (referred to as PCB), there is often a problem of uneven thickness of the electroplating layer (or circuit base layer), and the causes and shortcomings of the uneven thickness of the electroplating layer are explained. as follows:
请参阅图1所示,其是已知的电镀装置1,过去业者在进行电路板B的电镀作业时,会先在一电镀槽10内盛装电镀液11,目前业者常采用硫酸铜溶液作为电镀液11,硫酸铜(CuSO4)溶于水后能解离出铜离子(Cu2+)及硫酸根离子(SO4 2-),而形成硫酸铜溶液。在电镀的过程中,当铜离子与电子进行还原反应后,便能结合成为铜原子(Cu),此即为电镀层的成分。复请参阅图1所示,该电镀装置1除了前述电镀槽10外,尚包括两片阳极金属板12及一夹具13,其中所述阳极金属板12位于电镀槽10内,且被浸入在电镀液11中,各该阳极金属板12分别与阳极电源P相连接。Please refer to Fig. 1, which is a known electroplating device 1. In the past, when the electroplating operation of the circuit board B was performed, the
此外,复请参阅图1所示,该夹具13是夹持固定住电路板B的顶端,且将电路板B浸入于电镀液11中。该电路板B与一阴极电源N相连接,当阳极电源P对阳极金属板12供电,且阴极电源N亦对电路板B供电的情况下,该阳极金属板12与该电路板B之间的电位差,能驱使电镀液内的铜离子(以下称金属离子M)朝向电路板B的方向移动,且由于电路板B与阴极电源N相连接,故电路板B的表面将会布满电子(electron),当金属离子M移动至电路板B的表面后,金属离子M即能与电子进行还原反应,使金属离子M与该电路板B表面上的电子相结合,如此,请参与图2所示,金属离子M便能被还原成金属,并在电路板B上形成一电镀层E。此时,复请参阅图1及图2所示,若电路板B的长度(即,电路板B浸入于电镀液11中的深度)小于阳极金属板12的长度(即,阳极金属板12浸入于电镀液11中的深度)时,阳极金属板12上超过电路板B长度的部位D仍会对电路板B表面执行电镀作业,而使阳极金属板12上超出部位D与电路板B间的电镀液11内的金属离子M朝向电路板B的方向移动,且与该电路板B邻近底端表面上的电子相结合,导致在电镀作业完成后,由该电镀层E的断面结构观之,电镀层E邻近电路板B底端的部分,厚度将会大于其它部分,换言之,电镀层E的整体无法呈现出单一均匀的厚度,其底端的厚度远大于其它部分的厚度,造成电镀层E表面不平整的问题,使得日后利用蚀刻技术在电路板B的电镀层E上形成所需的电气线路时,该电气线路将会发生阻抗不均匀,或发生无法控制该电气线路阻抗大小的问题,此一问题,将对电路板B(即,已完成电气线路蚀刻的电路板)的整体电气性能造成严重的负面影响,因此,完成电镀的电路板B将变成瑕疵不良品,而遭淘汰,导致良率太低,不仅造成资源无谓浪费,亦造成电镀成本无法大幅降低,明显不符合预期的效益。另,业者虽可能由再对该电镀层E进行后续磨平等处理作业,以期得到平整的电镀层E表面,惟,此举无疑增加了作业的工序及复杂度,大幅提高电镀作业的成本,更造成不必要的时间耗费,相当不理想。In addition, please refer to FIG. 1 again, the
请参阅图3所示,目前虽有业者为解决上述问题,在电镀装置1中增设阻隔板14,以遮蔽阳极金属板12上超出电路板B的部位D,使阳极金属板12上的超出部位D无法对电路板B表面执行电镀作业,以有效避免前述电镀层E表面不平整等情事发生,其中,两片阻隔板14分别位于邻近各阳极金属板12的位置,该二阻隔板14能隔绝住阳极金属板12上超出电路板B的部位D,使该超出部位D无法对电路板B表面执行电镀作业。由此,当阳极电源P对阳极金属板12供电,且阴极电源N亦对电路板B供电的情况下,介于阳极金属板12及电路板B对应部位间的电镀液11,因未受到阻隔板14的隔绝,其内的金属离子M会朝向电路板B移动,且进行还原反应,以在电路板B上形成一均匀的电镀层。又,该阳极金属板12的超出部位D及电路板B间因受到阻隔板14的隔绝,则其间电镀液11内的金属离子即无法朝向该电路板B,而不会在该电路板B邻近底端的部位形成不均匀的电镀层。如此,即能有效避免过多的金属离子移动至电路板B邻近底端的部位,且防止电镀层厚度不均匀等问题发生。然而,为了在电镀装置1内设置阻隔板14,业者除必须额外增设升降阻隔板14所需的自动化机构及夹具(图中省略),不仅大幅提高电镀装置1的设计及制造成本之外,更大幅增加了电镀装置1的机构复杂度,再者,为了容纳阻隔板14,业者尚必需在设计电镀槽10时,在电镀槽10内预留容纳阻隔板14的额外空间,显然将大幅增加电镀槽10的宽度及体积,不仅造成电镀液11的无谓浪费,更因阳极金属板12与电路板B间的距离加大,导致电镀作业所需的电压大增,使得电力消耗大幅增加,令业者必需付出更高的制作成本,严重压缩了业者的获利空间,实有待立即加以改善。Please refer to Fig. 3 , although there are industry operators who have added a barrier plate 14 in the electroplating device 1 to cover the part D that exceeds the circuit board B on the
因此,如何设计出一种新颖的电镀装置,以有效改善已知电镀装置的前述诸多问题,使得业者在无需增设阻隔板,且无需增大电镀槽宽度与体积的前提下,能在电路板B上形成一均匀的电镀层,且完全避免电路板B上发生电镀层不平整的问题,以期有效减少电镀槽10的宽度及体积,大幅降低电镀作业的电力耗费及成本,即成为本发明在此亟欲探讨的一重要课题。Therefore, how to design a novel electroplating device to effectively improve the above-mentioned problems of the known electroplating device, so that the industry can be installed on the circuit board B without adding a barrier plate and without increasing the width and volume of the electroplating tank. Form a uniform electroplating layer on the circuit board B, and completely avoid the problem of uneven electroplating layer on the circuit board B, in order to effectively reduce the width and volume of the
发明内容 Contents of the invention
有鉴于前揭诸多问题,发明人经过长久努力研究与实验,终于开发设计出本发明的动态调整阳极供电面积的电镀装置及其方法,期防止电镀层厚度不均匀等问题发生,并进一步简化电镀装置的机构设计,且节省电镀时的电力消耗。In view of the many problems disclosed above, the inventor has finally developed and designed the electroplating device and method for dynamically adjusting the anode power supply area of the present invention after long-term hard research and experiments, hoping to prevent problems such as uneven thickness of the electroplating layer and further simplify electroplating. The mechanism design of the device saves power consumption during electroplating.
本发明的一目的,是提供一种动态调整阳极供电面积的电镀装置,该电镀装置包括一电镀槽、一固定装置、一第一阳极金属板及一第二阳极金属板,其中该电镀槽内盛装有电镀液;该固定装置是固定住一被镀物的一端,且该被镀物与一阴极电源相连接,各该阳极金属板分别与一阳极电源相连接,其中该第一阳极金属板的一侧完全对应至该被镀物的一侧,且连接至该第一阳极金属板的阳极电源,能连续地对该第一阳极金属板供电,使该电镀液内的邻近该第一阳极金属板的第一金属离子能移动至该被镀物上,并完成还原反应,另,该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,且连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电,使介于该第二阳极金属板与该被镀物间的该电镀液内的第二金属离子能间歇性地被解离而移动至该被镀物上,并完成还原反应。由于该第二阳极金属板仅会接收到间歇性的输入电源,因此,能由动态调整阳极金属板供电面积及电量的方式,有效避免过多的金属离子附着至该被镀物的一侧邻近另一端的表面,有效防止电镀层厚度不均匀等问题发生,且由于本发明不需使用阻隔板遮蔽阳极金属板上超出被镀物的部位,故能大幅减少电镀槽的宽度及体积,避免造成电镀液的无谓浪费,简化电镀装置的机构设计,并大幅节省电力消耗。An object of the present invention is to provide an electroplating device for dynamically adjusting the anode power supply area, the electroplating device includes an electroplating tank, a fixing device, a first anode metal plate and a second anode metal plate, wherein the electroplating tank Contains electroplating solution; the fixing device is to fix one end of an object to be plated, and the object to be plated is connected to a cathode power supply, and each of the anode metal plates is respectively connected to an anode power supply, wherein the first anode metal plate One side of the plate corresponds completely to one side of the object to be plated, and is connected to the anode power supply of the first anode metal plate, which can continuously supply power to the first anode metal plate, so that adjacent to the first anode in the electroplating solution The first metal ion of the metal plate can move to the object to be plated and complete the reduction reaction. In addition, one side of the second anode metal plate corresponds to the position where one side of the object to be plated is adjacent to the other end, and The anode power supply connected to the second anode metal plate can intermittently supply power to the second anode metal plate, so that the second metal ions in the electroplating solution between the second anode metal plate and the object to be plated It can be dissociated intermittently and move to the plated object, and complete the reduction reaction. Since the second anode metal plate only receives intermittent input power, the power supply area and power of the anode metal plate can be dynamically adjusted to effectively prevent excessive metal ions from adhering to the adjacent side of the object to be plated The surface of the other end effectively prevents problems such as uneven thickness of the electroplating layer from occurring, and since the present invention does not need to use a barrier plate to cover the part of the anode metal plate that exceeds the plated object, it can greatly reduce the width and volume of the electroplating tank and avoid causing The needless waste of the electroplating solution simplifies the mechanism design of the electroplating device and greatly saves power consumption.
本发明的另一目的,乃该电镀装置尚包括一电源供应器及一可编程控制器,其中该电源供应器内设有所述阳极电源及阴极电源,该电源供应器与一外部电源相连接,以取得电力,且该电源供应器与该可编程控制器相连接,该可编程控制器能控制该电源供应器,使连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电。Another object of the present invention is that the electroplating device also includes a power supply and a programmable controller, wherein the anode power supply and the cathode power supply are arranged in the power supply, and the power supply is connected to an external power supply , to obtain power, and the power supply is connected to the programmable controller, the programmable controller can control the power supply, so that the anode power connected to the second anode metal plate can be intermittently connected to the The second anode metal plate supplies power.
本发明的又一目的,是提供一种动态调整阳极供电面积的电镀方法,是应用在一电镀装置上,该电镀装置包括一电镀槽、一第一阳极金属板及一第二阳极金属板,该电镀槽内盛装有电镀液且容置有一被镀物,该被镀物与一阴极电源相连接,该第一阳极金属板的一侧完全对应至该被镀物的一侧,且该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,该方法包括:使连接至该第一阳极金属板的阳极电源,连续地对该第一阳极金属板供电,并使连接至该第二阳极金属板的阳极电源,间歇性地对该第二阳极金属板供电,以由动态调整所述阳极金属板供电面积及电量的方式,在该被镀物的一侧形成厚度均匀的一电镀层,有效防止电镀层厚度不均匀等问题发生。Another object of the present invention is to provide an electroplating method for dynamically adjusting the anode power supply area, which is applied to an electroplating device, and the electroplating device includes an electroplating tank, a first anode metal plate and a second anode metal plate, The electroplating tank is filled with electroplating solution and accommodates an object to be plated, the object to be plated is connected to a cathode power supply, one side of the first anode metal plate is completely corresponding to one side of the object to be plated, and the first One side part of the two anode metal plates corresponds to the position adjacent to the other end of the one side of the object to be plated, and the method includes: making the anode power supply connected to the first anode metal plate continuously supply the first anode metal plate power supply, and make the anode power supply connected to the second anode metal plate intermittently supply power to the second anode metal plate, and dynamically adjust the power supply area and power of the anode metal plate, in the An electroplating layer with a uniform thickness is formed on one side, which effectively prevents problems such as uneven thickness of the electroplating layer from occurring.
附图说明 Description of drawings
为使审查员能对本发明的目的、结构及其功效,做更进一步的认识与了解,以下列举实施例配合附图,详细说明如下,其中:In order to enable the examiner to further understand and understand the purpose, structure and effect of the present invention, the following examples are listed in conjunction with the accompanying drawings, and the detailed description is as follows, wherein:
图1是已知电镀装置的示意图;Fig. 1 is the schematic diagram of known electroplating device;
图2是已知电镀装置的另一示意图;Fig. 2 is another schematic diagram of known electroplating device;
图3是已知电镀装置外加阻隔板的示意图;Fig. 3 is a schematic diagram of a known electroplating device plus a barrier plate;
图4是本发明的第一较佳实施例的示意图;Fig. 4 is the schematic diagram of the first preferred embodiment of the present invention;
图5是本发明的第一较佳实施例的方块示意图;及Figure 5 is a schematic block diagram of a first preferred embodiment of the present invention; and
图6是本发明的第二较佳实施例的示意图。Fig. 6 is a schematic diagram of a second preferred embodiment of the present invention.
具体实施方式 Detailed ways
发明人在长期从事电镀等相关领域的研发及设计中,发现目前的电镀作业常会有电镀层厚度不均匀等情事发生,虽有部分业者利用阻隔板遮蔽阳极金属板上超出被镀物的部位,以求改善上述问题,然而增设阻隔板却大幅增加电镀槽的宽度,更造成用电量增加等问题,业者虽欲进一步寻求上述问题的改善方案,但尚未获得完善的解决办法。有鉴于此,发明人乃思及改良电镀装置的结构,并利用动态调整阳极供电面积的方式,有效解决电镀层厚度不均匀的问题。The inventor has been engaged in the research and development and design of electroplating and other related fields for a long time, and found that the current electroplating operation often has uneven thickness of the electroplating layer. In order to improve the above-mentioned problems, however, the addition of barrier plates greatly increases the width of the electroplating tank, which also causes problems such as increased power consumption. Although the industry wants to further seek improvement solutions for the above-mentioned problems, they have not yet obtained a perfect solution. In view of this, the inventor thought and improved the structure of the electroplating device, and used the method of dynamically adjusting the anode power supply area to effectively solve the problem of uneven thickness of the electroplating layer.
本发明是一种动态调整阳极供电面积的电镀装置及其方法,请参阅图4所示,在本发明的第一较佳实施例中,该电镀装置4包括一电镀槽40、一固定装置43及多个阳极金属板41a、41b,其中该电镀槽40内盛装有电镀液400,在第一较佳实施例中,是采用硫酸铜溶液作为电镀液400,以在一被镀物42上镀上一层铜金属,然而,本发明并不以此为限,业者在根据本发明进行电镀作业时,亦能根据实际需求,以其它电解质溶液替代硫酸铜溶液,以达成电镀的效果,凡本技术领域的人士所轻易思及的变化,均不脱离本发明所欲保护的技术范围。在本较佳实施例中,该被镀物42是一电路板,且该固定装置43是一夹具,该固定装置43的下端夹持住该被镀物42的顶端,且该固定装置43的顶端是与一带动机构(图中省略)相连接,该带动机构能带动该固定装置43,使该固定装置43进行移动,进而使该被镀物42能被浸入至该电镀液400中,需特别一提的是,本较佳实施例是以一夹具作为该固定装置43为例进行说明,惟,本发明并不以此为限,该固定装置43亦可为其它能固定住被镀物42一端的机构或装置,事先说明。The present invention is an electroplating device and its method for dynamically adjusting the anode power supply area. Please refer to FIG. And a plurality of
承上,复请参阅图4所示,该被镀物42与一阴极电源N1相连接,所述阳极金属板41a、41b包括两片第一阳极金属板41a及两片第二阳极金属板41b,其中第一阳极金属板41a分别与阳极电源Pa相连接,第二阳极金属板41b是与阳极电源Pb相连接。该第一阳极金属板41a及该第二阳极金属板42b均位于该电镀槽40内,且被浸泡在电镀液400中。该被镀物42的长度(即被镀物42浸入于电镀液400中的深度)大于该第一阳极金属板41a的长度(即第一阳极金属板41a浸入于电镀液400中的深度),此外,与第一阳极金属板41a相较之下,该第二阳极金属板41b是位于该电镀槽40内深度较深的位置,且该第二阳极金属板41b底端浸入于电镀液400中的深度,大于该被镀物42底端浸入于电镀液400中的深度。该第一阳极金属板41a与该第二阳极金属板41b分别与该被镀物42保持平行,且与该被镀物42保持一预定距离,该预定距离需视该电镀槽40的宽度或其它因素而定,事先说明。Continued, please refer to Figure 4 again, the object to be plated 42 is connected to a cathode power supply N1, and the
在图4中,各该第一阳极金属板41a的侧面分别与该被镀物42的左右侧完全对应,另一方面,各该第二阳极金属板41b的侧面中,仅有其中一部份(接近顶端的部分)分别与该被镀物42的左右两侧相对应,且对应于该被镀物42上邻近底端的位置。此外,在各该第二阳极金属板41b的侧面中,接近底端的部分并未与该被镀物42相对应。业者在实际生产制造该电镀装置4时,亦可在各该第一阳极金属板41a及各该第二阳极金属板41b之间分别设置一绝缘体,以分别连接相邻近的第一阳极金属板41a及第二阳极金属板41b。此外,在本较佳实施例中,是以两片第一阳极金属板41a及两片第二阳极金属板41b作为一最佳实施例,以对被镀物42的两对应侧面进行电镀,但本发明并不以此为限,业者在根据本发明设计制造该电镀装置4时,亦可根据实际需求,或根据被镀物42的材料特性或型态,以一片第一阳极金属板41a及一片第二阳极金属板41b进行电镀,以在被镀物42的其中一侧面上产生一电镀层,事先说明。In Fig. 4, the side surfaces of each of the first
请参阅图5所示,该电镀装置尚包括一电源供应器50及一可编程控制器52,其中该电源供应器50内设有前述阳极电源Pa、Pb及阴极电源N1,该电源供应器50是与一外部电源51相连接,以取得该外部电源51所供应的电力,该电源供应器50与该可编程控制器52(ProgrammableLogic Controller,简称PLC)相连接。所谓可编程控制器,是指一种具有微处理机的数字电子设备,用于自动化控制的可编程控制器,可以将控制指令随时载入存储器内储存与执行。可编程控制器由内部中央处理器、数据存储器、输入输出单元、数字模拟等单元所模块化组成,广泛地被应用于工业控制领域中。该可编程控制器52能控制该电源供应器50,使连接至该第一阳极金属板41a的阳极电源Pa,能连续地对该第一阳极金属板41a供电,请参阅图4、图5所示,如此,介于该第一阳极金属板41a与该被镀物42间的该电镀液400内的第一金属离子M1(铜离子)能被解离而朝向该被镀物42移动,且与该被镀物42表面上的电子相结合,并在完成还原反应后,稳固地附着在该被镀物42上。另一方面,该第二阳极金属板41b的一侧是部份对应于该被镀物42的一侧邻近另一端(底端)的位置,该可编程控制器52能控制该电源供应器50,使连接至该第二阳极金属板41b的阳极电源Pb,能间歇性地对该第二阳极金属板41b供电,如此,便能令介于该第二阳极金属板41b与该被镀物42间的该电镀液400内的第二金属离子M2,能间歇性地朝向该被镀物42移动,且在完成还原反应后,稳固地附着在该被镀物42上,以在该被镀物42的侧面形成电镀层。Please refer to shown in Fig. 5, this electroplating device still comprises a power supply 50 and a programmable controller 52, wherein the anode power supply Pa, Pb and cathode power N1 are provided in the power supply 50, the power supply 50 It is connected with an external power supply 51 to obtain the power supplied by the external power supply 51, and the power supply 50 is connected with the programmable controller 52 (ProgrammableLogic Controller, PLC for short). The so-called programmable controller refers to a digital electronic device with a microprocessor. The programmable controller used for automatic control can load control instructions into the memory for storage and execution at any time. Programmable controller is composed of internal central processing unit, data memory, input and output unit, digital simulation and other units, and is widely used in the field of industrial control. The programmable controller 52 can control the power supply 50 so that the anode power supply Pa connected to the first
由本发明的技术特征,由于对应于该被镀物42的左右两侧邻近另一端的所述第二阳极金属板41b,仅会接收到间歇性的输入电源,因此,本发明能由动态调整所述阳极金属板41a、41b供电面积及电量的方式,有效避免过多的第二金属离子M2附着至该被镀物42的左右两侧邻近另一端(底端)的表面,进而有效防止电镀层厚度不均匀等问题发生,由此,当业者日后利用蚀刻技术在电镀层上形成电气线路时,即能根据产品设计需求,轻易地控制该电气线路阻抗大小,完全无须担心会发生已知阻抗不均匀的问题,不仅大幅提升产品良率,更有效降低电镀成本,并避免资源浪费。不仅如此,由于本发明不需使用隔绝板遮蔽各该第二阳极金属板41b上超过被镀物42长度的部位,故电镀槽40内无须预留容纳阻隔板的额外空间,不仅能大幅减少电镀槽40的宽度与体积,更能节省电镀液400的用量,再者,更能免除升降阻隔板所需的自动化机构及夹具,大幅简化电镀装置4的机构设计,此外,更因为电镀槽40的宽度与体积缩减,故能大幅减少被镀物42与所述阳极金属板41a、41b间的距离,有效降低电镀所需的电压,进而大幅节省电力消耗。According to the technical characteristics of the present invention, since the second
在本发明的第二较佳实施例中,请参阅图6所示,该电镀装置4除了包括前述电镀槽40、固定装置43及所述第一阳极金属板41a、第二阳极金属板41b之外,尚包括二中间阳极金属板41c,其中,各该中间阳极金属板41c分别位于各该第一阳极金属板41a及第二阳极金属板41b之间,换言之,该第一阳极金属板41a、中间阳极金属板41c及第二阳极金属板41b分别位于该电镀槽40内不同深度的位置,且各该中间阳极金属板41c分别与该被镀物42保持平行,各该中间阳极金属板41c分别与阳极电源Pc相连接。在本较佳实施例中,各该中间阳极金属板41c的一侧分别完全对应至该被镀物42的左右两侧,故连接至该中间阳极金属板41c的阳极电源Pc,能连续地对该中间阳极金属板41c供电,使介于该中间阳极金属板41c与该被镀物42间的金属离子能移动至该被镀物42上,并在完成还原反应后,稳定地附着在该被镀物42上。此外,在第二较佳实施例中,所述阳极电源Pa、Pb的供电方式与第一较佳实施例所描述者相同,故不再赘述,事先说明。In the second preferred embodiment of the present invention, as shown in FIG. 6, the electroplating device 4 includes the
由本发明的技术特征,业者在实际进行电镀作业时,可先以一被镀物作为试镀的样品,以决定该阳极电源Pb的间歇性供电的模式(如:供电与停止供电的时间间隔),并将控制间歇性供电模式的参数输入至前述可编程控制器52中,如此,该可编程控制器52便能依照业者预设的参数,控制该阳极电源Pb的供电,以达成本发明的效果。综上所述,本发明所采用的电镀方法,是在该第二阳极金属板41b的一侧部份对应于该被镀物42的一侧邻近另一端(底端)的情况下,使连接至该第二阳极金属板41b的阳极电源Pb,间歇性地对该第二阳极金属板41b供电,以避免过多的金属离子附着至该被镀物42的一侧邻近另一端(底端)的表面,并免除容纳阻隔板所需的额外空间,降低电镀所需的电压。本发明不仅能简化电镀装置的机构设计,降低制作成本,更能节省电镀的电力耗费,使电镀的效率更加提升。By the technical characterictic of the present invention, when carrying out electroplating operation actually, the industry can use a plated object as the sample of trial plating earlier, to determine the pattern of the intermittent power supply of this anode power supply Pb (such as: the time interval of power supply and stop power supply) , and input the parameters for controlling the intermittent power supply mode into the aforementioned programmable controller 52, so that the programmable controller 52 can control the power supply of the anode power supply Pb according to the parameters preset by the operator, so as to achieve the purpose of the present invention Effect. In summary, the electroplating method adopted in the present invention is to make the connection To the anode power supply Pb of the second
按,以上所述,仅为本发明的若干较佳实施例,惟本发明的技术特征并不局限于此,凡任何熟悉该项技术者,在本发明的技术领域内,可轻易思及的变化或修饰,皆应涵盖在本发明的权利要求范围中。According to, the above descriptions are only some preferred embodiments of the present invention, but the technical characteristics of the present invention are not limited thereto. Anyone who is familiar with this technology can easily think of them in the technical field of the present invention. Any change or modification shall fall within the scope of the claims of the present invention.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103225094A (en) * | 2013-05-20 | 2013-07-31 | 深圳市博敏电子有限公司 | Single-sided current protection method for blind hole plate electroplating |
| CN104313657A (en) * | 2014-11-10 | 2015-01-28 | 临安振有电子有限公司 | Electro-deposition device of through hole of HDI printed circuit board |
| CN105628755A (en) * | 2015-12-30 | 2016-06-01 | 上海新阳半导体材料股份有限公司 | Method for detecting plating uniformity of plating solution in double-anode mode |
| CN110172725A (en) * | 2018-07-27 | 2019-08-27 | 新阳硅密(上海)半导体技术有限公司 | Electro-plating method, electroplanting device and its anode assemblies |
| CN110184641A (en) * | 2018-07-27 | 2019-08-30 | 新阳硅密(上海)半导体技术有限公司 | The electro-plating method of electroplanting device |
| CN112701072A (en) * | 2021-03-25 | 2021-04-23 | 西安奕斯伟硅片技术有限公司 | Wafer processing apparatus and wafer defect evaluation method |
| CN113423874A (en) * | 2018-12-28 | 2021-09-21 | 盛美半导体设备(上海)股份有限公司 | Electroplating device and electroplating method |
| CN113943966A (en) * | 2020-07-16 | 2022-01-18 | 南通深南电路有限公司 | Electroplating device and electroplating method for circuit board |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103225094A (en) * | 2013-05-20 | 2013-07-31 | 深圳市博敏电子有限公司 | Single-sided current protection method for blind hole plate electroplating |
| CN104313657A (en) * | 2014-11-10 | 2015-01-28 | 临安振有电子有限公司 | Electro-deposition device of through hole of HDI printed circuit board |
| CN105628755A (en) * | 2015-12-30 | 2016-06-01 | 上海新阳半导体材料股份有限公司 | Method for detecting plating uniformity of plating solution in double-anode mode |
| CN105628755B (en) * | 2015-12-30 | 2018-05-08 | 上海新阳半导体材料股份有限公司 | A kind of method of double anode detection plating solution plating property |
| CN110172725A (en) * | 2018-07-27 | 2019-08-27 | 新阳硅密(上海)半导体技术有限公司 | Electro-plating method, electroplanting device and its anode assemblies |
| CN110184641A (en) * | 2018-07-27 | 2019-08-30 | 新阳硅密(上海)半导体技术有限公司 | The electro-plating method of electroplanting device |
| CN110184641B (en) * | 2018-07-27 | 2021-07-30 | 新阳硅密(上海)半导体技术有限公司 | Electroplating method of electroplating device |
| CN113423874A (en) * | 2018-12-28 | 2021-09-21 | 盛美半导体设备(上海)股份有限公司 | Electroplating device and electroplating method |
| CN113423874B (en) * | 2018-12-28 | 2024-03-15 | 盛美半导体设备(上海)股份有限公司 | Electroplating device and electroplating method |
| CN113943966A (en) * | 2020-07-16 | 2022-01-18 | 南通深南电路有限公司 | Electroplating device and electroplating method for circuit board |
| CN112701072A (en) * | 2021-03-25 | 2021-04-23 | 西安奕斯伟硅片技术有限公司 | Wafer processing apparatus and wafer defect evaluation method |
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