CN102732938A - Electroplating device and method for dynamically adjusting anode power supply area - Google Patents

Electroplating device and method for dynamically adjusting anode power supply area Download PDF

Info

Publication number
CN102732938A
CN102732938A CN2011100879091A CN201110087909A CN102732938A CN 102732938 A CN102732938 A CN 102732938A CN 2011100879091 A CN2011100879091 A CN 2011100879091A CN 201110087909 A CN201110087909 A CN 201110087909A CN 102732938 A CN102732938 A CN 102732938A
Authority
CN
China
Prior art keywords
metal plate
power supply
electroplating
anode
anode metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100879091A
Other languages
Chinese (zh)
Inventor
郑振华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hung K'uan Technology Co ltd
Original Assignee
Hung K'uan Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hung K'uan Technology Co ltd filed Critical Hung K'uan Technology Co ltd
Priority to CN2011100879091A priority Critical patent/CN102732938A/en
Publication of CN102732938A publication Critical patent/CN102732938A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Electroplating Methods And Accessories (AREA)

Abstract

An electroplating device and method for dynamically adjusting the power supply area of an anode, the electroplating device comprises: an electroplating bath, wherein the electroplating solution is contained in the electroplating bath; a fixing device for fixing one end of a plated object to immerse the plated object into the electroplating solution, wherein the plated object is connected with a cathode power supply; a first anode metal plate connected with an anode power supply, wherein the first anode metal plate is positioned in the electroplating bath and is parallel to the plated object, one side of the first anode metal plate completely corresponds to one side of the plated object, and the anode power supply connected to the first anode metal plate can continuously supply power to the first anode metal plate; and a second anode metal plate connected with another anode power supply, the first anode metal plate is positioned in the electroplating bath and is parallel to the plated object, one side part of the second anode metal plate corresponds to the position of one side of the plated object adjacent to the other end, and the another anode power supply connected to the second anode metal plate can intermittently supply power to the second anode metal plate.

Description

动态调整阳极供电面积的电镀装置及其方法Electroplating device and method for dynamically adjusting anode power supply area

技术领域 technical field

本发明是关于一种电镀装置及其方法,主要是在一电镀槽中设置一第一阳极金属板及一第二阳极金属板,且所述阳极金属板是位于不同的深度,并与一被镀物相互平行,其中该第二阳极金属板对应于该被镀物的一侧邻近底端的位置,而连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电,以由动态调整所述阳极金属板供电面积及电量的方式,在该被镀物上形成一均匀的电镀层,且有效避免过多的金属离子附着至该被镀物的一侧邻近底端的表面。The present invention relates to an electroplating device and its method. It mainly includes setting a first anode metal plate and a second anode metal plate in an electroplating tank, and the anode metal plates are located at different depths, and are connected to a The plated objects are parallel to each other, wherein the second anode metal plate corresponds to the position near the bottom end of the side of the plated object, and the anode power supply connected to the second anode metal plate can intermittently power the second anode metal plate Power supply, by dynamically adjusting the power supply area and power of the anode metal plate, a uniform electroplating layer is formed on the object to be plated, and excessive metal ions are effectively prevented from adhering to the side of the object to be plated adjacent to the bottom end surface.

背景技术 Background technique

按,电镀技术是一种相当常见的成膜技术,电镀的目的主要是防止生锈、增加美观或形成电路基底层。电镀的基本作业流程包括磨光、抛光、上挂、脱脂除油、水洗、电解抛光(或化学抛光)、酸洗活化、预镀、电镀、水洗及其它后处理等步骤。施镀前的所有工序一般称为前处理,主要目的在于修整被镀物的表面,以除去被镀物表面的油脂、锈皮、氧化膜等。根据统计,60%的电镀不良品是因前处理不良造成,由此可知前处理的重要性。此外,在作业流程中,磨光是为了除掉被镀物表面的锈蚀、刮痕等可视缺陷,而抛光是进一步降低被镀物表面的粗糙度,以获得光亮的外观。又,酸洗的目的是除掉被镀物的表面锈和氧化膜,且酸洗包括化学酸洗及电化学酸洗两种。在某些物品的电镀作业上,业者可能会根据被镀物的材料特性或实际需求,针对前述基本作业流程进行适度调整,或是适当地省略或增加前述基本作业流程,以达到最佳的电镀效果或产品需求。Press, electroplating technology is a fairly common film-forming technology. The purpose of electroplating is mainly to prevent rust, increase aesthetics or form a circuit base layer. The basic operation process of electroplating includes grinding, polishing, hanging, degreasing and degreasing, water washing, electrolytic polishing (or chemical polishing), pickling activation, pre-plating, electroplating, water washing and other post-treatment steps. All processes before plating are generally called pretreatment, the main purpose is to repair the surface of the object to be plated to remove grease, rust, oxide film, etc. on the surface of the object to be plated. According to statistics, 60% of defective electroplating products are caused by poor pretreatment, which shows the importance of pretreatment. In addition, in the operation process, polishing is to remove visible defects such as rust and scratches on the surface of the plated object, while polishing is to further reduce the roughness of the surface of the plated object to obtain a bright appearance. In addition, the purpose of pickling is to remove the surface rust and oxide film of the plated object, and pickling includes chemical pickling and electrochemical pickling. In the electroplating operation of some items, the industry may make appropriate adjustments to the above-mentioned basic operation process according to the material characteristics or actual needs of the plated object, or appropriately omit or increase the above-mentioned basic operation process to achieve the best electroplating effects or product needs.

电镀主要是利用电解原理,以外加直流电源的方式供应电能,将溶液中的金属离子还原为金属,并使金属沉积于被镀物的表面。虽然电镀技术已是发展相当成熟的技术,但目前仍有许多技术面的问题有待解决。例如在电路板(Printed circuit board,简称PCB)的电镀过程中,常会有电镀层(或称电路基底层)厚度不均匀的问题,针对电镀层厚度不均匀的成因及所产生的缺点,进行说明如下:Electroplating mainly uses the principle of electrolysis to supply electric energy in the form of an external DC power supply to reduce the metal ions in the solution to metal, and to deposit the metal on the surface of the plated object. Although electroplating technology is a fairly mature technology, there are still many technical problems to be solved. For example, in the electroplating process of printed circuit board (referred to as PCB), there is often a problem of uneven thickness of the electroplating layer (or circuit base layer), and the causes and shortcomings of the uneven thickness of the electroplating layer are explained. as follows:

请参阅图1所示,其是已知的电镀装置1,过去业者在进行电路板B的电镀作业时,会先在一电镀槽10内盛装电镀液11,目前业者常采用硫酸铜溶液作为电镀液11,硫酸铜(CuSO4)溶于水后能解离出铜离子(Cu2+)及硫酸根离子(SO4 2-),而形成硫酸铜溶液。在电镀的过程中,当铜离子与电子进行还原反应后,便能结合成为铜原子(Cu),此即为电镀层的成分。复请参阅图1所示,该电镀装置1除了前述电镀槽10外,尚包括两片阳极金属板12及一夹具13,其中所述阳极金属板12位于电镀槽10内,且被浸入在电镀液11中,各该阳极金属板12分别与阳极电源P相连接。Please refer to Fig. 1, which is a known electroplating device 1. In the past, when the electroplating operation of the circuit board B was performed, the electroplating bath 11 was first filled in an electroplating tank 10. At present, the electroplating solution 11 is often used by the industry. Solution 11, copper sulfate (CuSO 4 ) can dissociate into copper ions (Cu 2+ ) and sulfate ions (SO 4 2− ) after dissolving in water, forming a copper sulfate solution. During the electroplating process, after the reduction reaction between copper ions and electrons, they can combine to form copper atoms (Cu), which is the composition of the electroplating layer. Referring back to Fig. 1, the electroplating device 1 includes two anode metal plates 12 and a clamp 13 in addition to the aforementioned electroplating tank 10, wherein the anode metal plate 12 is located in the electroplating tank 10 and is immersed in the electroplating tank 10. In the liquid 11, each of the anode metal plates 12 is connected to the anode power supply P respectively.

此外,复请参阅图1所示,该夹具13是夹持固定住电路板B的顶端,且将电路板B浸入于电镀液11中。该电路板B与一阴极电源N相连接,当阳极电源P对阳极金属板12供电,且阴极电源N亦对电路板B供电的情况下,该阳极金属板12与该电路板B之间的电位差,能驱使电镀液内的铜离子(以下称金属离子M)朝向电路板B的方向移动,且由于电路板B与阴极电源N相连接,故电路板B的表面将会布满电子(electron),当金属离子M移动至电路板B的表面后,金属离子M即能与电子进行还原反应,使金属离子M与该电路板B表面上的电子相结合,如此,请参与图2所示,金属离子M便能被还原成金属,并在电路板B上形成一电镀层E。此时,复请参阅图1及图2所示,若电路板B的长度(即,电路板B浸入于电镀液11中的深度)小于阳极金属板12的长度(即,阳极金属板12浸入于电镀液11中的深度)时,阳极金属板12上超过电路板B长度的部位D仍会对电路板B表面执行电镀作业,而使阳极金属板12上超出部位D与电路板B间的电镀液11内的金属离子M朝向电路板B的方向移动,且与该电路板B邻近底端表面上的电子相结合,导致在电镀作业完成后,由该电镀层E的断面结构观之,电镀层E邻近电路板B底端的部分,厚度将会大于其它部分,换言之,电镀层E的整体无法呈现出单一均匀的厚度,其底端的厚度远大于其它部分的厚度,造成电镀层E表面不平整的问题,使得日后利用蚀刻技术在电路板B的电镀层E上形成所需的电气线路时,该电气线路将会发生阻抗不均匀,或发生无法控制该电气线路阻抗大小的问题,此一问题,将对电路板B(即,已完成电气线路蚀刻的电路板)的整体电气性能造成严重的负面影响,因此,完成电镀的电路板B将变成瑕疵不良品,而遭淘汰,导致良率太低,不仅造成资源无谓浪费,亦造成电镀成本无法大幅降低,明显不符合预期的效益。另,业者虽可能由再对该电镀层E进行后续磨平等处理作业,以期得到平整的电镀层E表面,惟,此举无疑增加了作业的工序及复杂度,大幅提高电镀作业的成本,更造成不必要的时间耗费,相当不理想。In addition, please refer to FIG. 1 again, the clamp 13 clamps and fixes the top of the circuit board B, and immerses the circuit board B in the electroplating solution 11 . The circuit board B is connected to a cathode power supply N. When the anode power supply P supplies power to the anode metal plate 12, and the cathode power supply N also supplies power to the circuit board B, the anode metal plate 12 and the circuit board B will The potential difference can drive the copper ions (hereinafter referred to as metal ions M) in the electroplating solution to move towards the direction of the circuit board B, and since the circuit board B is connected to the cathode power supply N, the surface of the circuit board B will be covered with electrons ( electron), when the metal ions M move to the surface of the circuit board B, the metal ions M can undergo a reduction reaction with the electrons, so that the metal ions M can combine with the electrons on the surface of the circuit board B. In this way, please refer to Figure 2 Shown, the metal ions M can be reduced to metal, and an electroplating layer E is formed on the circuit board B. Now, please refer to Fig. 1 and shown in Fig. 2 again, if the length of circuit board B (that is, the depth that circuit board B is immersed in the electroplating solution 11) is less than the length of anode metal plate 12 (that is, anode metal plate 12 is immersed in depth in the electroplating solution 11), the part D on the anode metal plate 12 that exceeds the length of the circuit board B will still carry out the electroplating operation on the surface of the circuit board B, so that the distance between the part D and the circuit board B on the anode metal plate 12 The metal ions M in the electroplating solution 11 move towards the direction of the circuit board B, and combine with the electrons on the surface of the adjacent bottom end of the circuit board B, resulting in that after the electroplating operation is completed, as viewed from the cross-sectional structure of the electroplating layer E, The thickness of the part of the electroplating layer E adjacent to the bottom of the circuit board B will be greater than that of other parts. The problem of flatness makes it possible to use etching technology to form the required electrical lines on the electroplating layer E of the circuit board B in the future, and the impedance of the electrical lines will be uneven, or the impedance of the electrical lines cannot be controlled. The problem will have a serious negative impact on the overall electrical performance of circuit board B (that is, the circuit board on which the electrical circuit has been etched). Therefore, the circuit board B that has been electroplated will become defective and be eliminated, resulting If the rate is too low, it will not only cause unnecessary waste of resources, but also cause the cost of electroplating to be greatly reduced, which obviously does not meet the expected benefits. In addition, although the industry may carry out follow-up grinding and other processing operations on the electroplating layer E in order to obtain a smooth surface of the electroplating layer E, this will undoubtedly increase the process and complexity of the operation, and greatly increase the cost of electroplating operations. Cause unnecessary time consumption, quite undesirable.

请参阅图3所示,目前虽有业者为解决上述问题,在电镀装置1中增设阻隔板14,以遮蔽阳极金属板12上超出电路板B的部位D,使阳极金属板12上的超出部位D无法对电路板B表面执行电镀作业,以有效避免前述电镀层E表面不平整等情事发生,其中,两片阻隔板14分别位于邻近各阳极金属板12的位置,该二阻隔板14能隔绝住阳极金属板12上超出电路板B的部位D,使该超出部位D无法对电路板B表面执行电镀作业。由此,当阳极电源P对阳极金属板12供电,且阴极电源N亦对电路板B供电的情况下,介于阳极金属板12及电路板B对应部位间的电镀液11,因未受到阻隔板14的隔绝,其内的金属离子M会朝向电路板B移动,且进行还原反应,以在电路板B上形成一均匀的电镀层。又,该阳极金属板12的超出部位D及电路板B间因受到阻隔板14的隔绝,则其间电镀液11内的金属离子即无法朝向该电路板B,而不会在该电路板B邻近底端的部位形成不均匀的电镀层。如此,即能有效避免过多的金属离子移动至电路板B邻近底端的部位,且防止电镀层厚度不均匀等问题发生。然而,为了在电镀装置1内设置阻隔板14,业者除必须额外增设升降阻隔板14所需的自动化机构及夹具(图中省略),不仅大幅提高电镀装置1的设计及制造成本之外,更大幅增加了电镀装置1的机构复杂度,再者,为了容纳阻隔板14,业者尚必需在设计电镀槽10时,在电镀槽10内预留容纳阻隔板14的额外空间,显然将大幅增加电镀槽10的宽度及体积,不仅造成电镀液11的无谓浪费,更因阳极金属板12与电路板B间的距离加大,导致电镀作业所需的电压大增,使得电力消耗大幅增加,令业者必需付出更高的制作成本,严重压缩了业者的获利空间,实有待立即加以改善。Please refer to Fig. 3 , although there are industry operators who have added a barrier plate 14 in the electroplating device 1 to cover the part D that exceeds the circuit board B on the anode metal plate 12 in order to solve the above problems, so that the protruding part on the anode metal plate 12 D cannot perform electroplating operations on the surface of the circuit board B, so as to effectively avoid the occurrence of the aforementioned uneven surface of the electroplating layer E, etc., wherein the two barrier plates 14 are respectively located adjacent to each anode metal plate 12, and the two barrier plates 14 can isolate The position D on the anode metal plate 12 that exceeds the circuit board B prevents the excess position D from performing electroplating operations on the surface of the circuit board B. Thus, when the anode power supply P supplies power to the anode metal plate 12, and the cathode power supply N also supplies power to the circuit board B, the electroplating solution 11 between the anode metal plate 12 and the corresponding part of the circuit board B is not blocked. With the isolation of the board 14, the metal ions M in it will move towards the circuit board B and undergo a reduction reaction to form a uniform electroplating layer on the circuit board B. Also, because of being isolated by the barrier plate 14 between the protruding portion D of the anode metal plate 12 and the circuit board B, the metal ions in the electroplating solution 11 cannot face the circuit board B, and will not be adjacent to the circuit board B. An uneven plating layer is formed at the bottom portion. In this way, excessive metal ions can be effectively prevented from moving to the portion near the bottom of the circuit board B, and problems such as uneven thickness of the electroplating layer can be prevented. However, in order to install the barrier plate 14 in the electroplating device 1, the operator must additionally add the automation mechanism and fixtures (omitted in the figure) required for lifting the barrier plate 14, which not only greatly increases the design and manufacturing costs of the electroplating device 1, but also The complexity of the mechanism of the electroplating device 1 is greatly increased. Moreover, in order to accommodate the barrier plate 14, the industry must reserve an extra space for the barrier plate 14 in the electroplating tank 10 when designing the electroplating tank 10, which will obviously greatly increase the electroplating capacity. The width and volume of the tank 10 not only cause unnecessary waste of the electroplating solution 11, but also increase the distance between the anode metal plate 12 and the circuit board B, resulting in a large increase in the voltage required for the electroplating operation, resulting in a substantial increase in power consumption, which makes the industry Higher production costs must be paid, which severely reduces the profit margin of the industry, and needs to be improved immediately.

因此,如何设计出一种新颖的电镀装置,以有效改善已知电镀装置的前述诸多问题,使得业者在无需增设阻隔板,且无需增大电镀槽宽度与体积的前提下,能在电路板B上形成一均匀的电镀层,且完全避免电路板B上发生电镀层不平整的问题,以期有效减少电镀槽10的宽度及体积,大幅降低电镀作业的电力耗费及成本,即成为本发明在此亟欲探讨的一重要课题。Therefore, how to design a novel electroplating device to effectively improve the above-mentioned problems of the known electroplating device, so that the industry can be installed on the circuit board B without adding a barrier plate and without increasing the width and volume of the electroplating tank. Form a uniform electroplating layer on the circuit board B, and completely avoid the problem of uneven electroplating layer on the circuit board B, in order to effectively reduce the width and volume of the electroplating tank 10, and greatly reduce the power consumption and cost of the electroplating operation, which becomes the present invention. An important topic to be explored.

发明内容 Contents of the invention

有鉴于前揭诸多问题,发明人经过长久努力研究与实验,终于开发设计出本发明的动态调整阳极供电面积的电镀装置及其方法,期防止电镀层厚度不均匀等问题发生,并进一步简化电镀装置的机构设计,且节省电镀时的电力消耗。In view of the many problems disclosed above, the inventor has finally developed and designed the electroplating device and method for dynamically adjusting the anode power supply area of the present invention after long-term hard research and experiments, hoping to prevent problems such as uneven thickness of the electroplating layer and further simplify electroplating. The mechanism design of the device saves power consumption during electroplating.

本发明的一目的,是提供一种动态调整阳极供电面积的电镀装置,该电镀装置包括一电镀槽、一固定装置、一第一阳极金属板及一第二阳极金属板,其中该电镀槽内盛装有电镀液;该固定装置是固定住一被镀物的一端,且该被镀物与一阴极电源相连接,各该阳极金属板分别与一阳极电源相连接,其中该第一阳极金属板的一侧完全对应至该被镀物的一侧,且连接至该第一阳极金属板的阳极电源,能连续地对该第一阳极金属板供电,使该电镀液内的邻近该第一阳极金属板的第一金属离子能移动至该被镀物上,并完成还原反应,另,该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,且连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电,使介于该第二阳极金属板与该被镀物间的该电镀液内的第二金属离子能间歇性地被解离而移动至该被镀物上,并完成还原反应。由于该第二阳极金属板仅会接收到间歇性的输入电源,因此,能由动态调整阳极金属板供电面积及电量的方式,有效避免过多的金属离子附着至该被镀物的一侧邻近另一端的表面,有效防止电镀层厚度不均匀等问题发生,且由于本发明不需使用阻隔板遮蔽阳极金属板上超出被镀物的部位,故能大幅减少电镀槽的宽度及体积,避免造成电镀液的无谓浪费,简化电镀装置的机构设计,并大幅节省电力消耗。An object of the present invention is to provide an electroplating device for dynamically adjusting the anode power supply area, the electroplating device includes an electroplating tank, a fixing device, a first anode metal plate and a second anode metal plate, wherein the electroplating tank Contains electroplating solution; the fixing device is to fix one end of an object to be plated, and the object to be plated is connected to a cathode power supply, and each of the anode metal plates is respectively connected to an anode power supply, wherein the first anode metal plate One side of the plate corresponds completely to one side of the object to be plated, and is connected to the anode power supply of the first anode metal plate, which can continuously supply power to the first anode metal plate, so that adjacent to the first anode in the electroplating solution The first metal ion of the metal plate can move to the object to be plated and complete the reduction reaction. In addition, one side of the second anode metal plate corresponds to the position where one side of the object to be plated is adjacent to the other end, and The anode power supply connected to the second anode metal plate can intermittently supply power to the second anode metal plate, so that the second metal ions in the electroplating solution between the second anode metal plate and the object to be plated It can be dissociated intermittently and move to the plated object, and complete the reduction reaction. Since the second anode metal plate only receives intermittent input power, the power supply area and power of the anode metal plate can be dynamically adjusted to effectively prevent excessive metal ions from adhering to the adjacent side of the object to be plated The surface of the other end effectively prevents problems such as uneven thickness of the electroplating layer from occurring, and since the present invention does not need to use a barrier plate to cover the part of the anode metal plate that exceeds the plated object, it can greatly reduce the width and volume of the electroplating tank and avoid causing The needless waste of the electroplating solution simplifies the mechanism design of the electroplating device and greatly saves power consumption.

本发明的另一目的,乃该电镀装置尚包括一电源供应器及一可编程控制器,其中该电源供应器内设有所述阳极电源及阴极电源,该电源供应器与一外部电源相连接,以取得电力,且该电源供应器与该可编程控制器相连接,该可编程控制器能控制该电源供应器,使连接至该第二阳极金属板的阳极电源,能间歇性地对该第二阳极金属板供电。Another object of the present invention is that the electroplating device also includes a power supply and a programmable controller, wherein the anode power supply and the cathode power supply are arranged in the power supply, and the power supply is connected to an external power supply , to obtain power, and the power supply is connected to the programmable controller, the programmable controller can control the power supply, so that the anode power connected to the second anode metal plate can be intermittently connected to the The second anode metal plate supplies power.

本发明的又一目的,是提供一种动态调整阳极供电面积的电镀方法,是应用在一电镀装置上,该电镀装置包括一电镀槽、一第一阳极金属板及一第二阳极金属板,该电镀槽内盛装有电镀液且容置有一被镀物,该被镀物与一阴极电源相连接,该第一阳极金属板的一侧完全对应至该被镀物的一侧,且该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,该方法包括:使连接至该第一阳极金属板的阳极电源,连续地对该第一阳极金属板供电,并使连接至该第二阳极金属板的阳极电源,间歇性地对该第二阳极金属板供电,以由动态调整所述阳极金属板供电面积及电量的方式,在该被镀物的一侧形成厚度均匀的一电镀层,有效防止电镀层厚度不均匀等问题发生。Another object of the present invention is to provide an electroplating method for dynamically adjusting the anode power supply area, which is applied to an electroplating device, and the electroplating device includes an electroplating tank, a first anode metal plate and a second anode metal plate, The electroplating tank is filled with electroplating solution and accommodates an object to be plated, the object to be plated is connected to a cathode power supply, one side of the first anode metal plate is completely corresponding to one side of the object to be plated, and the first One side part of the two anode metal plates corresponds to the position adjacent to the other end of the one side of the object to be plated, and the method includes: making the anode power supply connected to the first anode metal plate continuously supply the first anode metal plate power supply, and make the anode power supply connected to the second anode metal plate intermittently supply power to the second anode metal plate, and dynamically adjust the power supply area and power of the anode metal plate, in the An electroplating layer with a uniform thickness is formed on one side, which effectively prevents problems such as uneven thickness of the electroplating layer from occurring.

附图说明 Description of drawings

为使审查员能对本发明的目的、结构及其功效,做更进一步的认识与了解,以下列举实施例配合附图,详细说明如下,其中:In order to enable the examiner to further understand and understand the purpose, structure and effect of the present invention, the following examples are listed in conjunction with the accompanying drawings, and the detailed description is as follows, wherein:

图1是已知电镀装置的示意图;Fig. 1 is the schematic diagram of known electroplating device;

图2是已知电镀装置的另一示意图;Fig. 2 is another schematic diagram of known electroplating device;

图3是已知电镀装置外加阻隔板的示意图;Fig. 3 is a schematic diagram of a known electroplating device plus a barrier plate;

图4是本发明的第一较佳实施例的示意图;Fig. 4 is the schematic diagram of the first preferred embodiment of the present invention;

图5是本发明的第一较佳实施例的方块示意图;及Figure 5 is a schematic block diagram of a first preferred embodiment of the present invention; and

图6是本发明的第二较佳实施例的示意图。Fig. 6 is a schematic diagram of a second preferred embodiment of the present invention.

具体实施方式 Detailed ways

发明人在长期从事电镀等相关领域的研发及设计中,发现目前的电镀作业常会有电镀层厚度不均匀等情事发生,虽有部分业者利用阻隔板遮蔽阳极金属板上超出被镀物的部位,以求改善上述问题,然而增设阻隔板却大幅增加电镀槽的宽度,更造成用电量增加等问题,业者虽欲进一步寻求上述问题的改善方案,但尚未获得完善的解决办法。有鉴于此,发明人乃思及改良电镀装置的结构,并利用动态调整阳极供电面积的方式,有效解决电镀层厚度不均匀的问题。The inventor has been engaged in the research and development and design of electroplating and other related fields for a long time, and found that the current electroplating operation often has uneven thickness of the electroplating layer. In order to improve the above-mentioned problems, however, the addition of barrier plates greatly increases the width of the electroplating tank, which also causes problems such as increased power consumption. Although the industry wants to further seek improvement solutions for the above-mentioned problems, they have not yet obtained a perfect solution. In view of this, the inventor thought and improved the structure of the electroplating device, and used the method of dynamically adjusting the anode power supply area to effectively solve the problem of uneven thickness of the electroplating layer.

本发明是一种动态调整阳极供电面积的电镀装置及其方法,请参阅图4所示,在本发明的第一较佳实施例中,该电镀装置4包括一电镀槽40、一固定装置43及多个阳极金属板41a、41b,其中该电镀槽40内盛装有电镀液400,在第一较佳实施例中,是采用硫酸铜溶液作为电镀液400,以在一被镀物42上镀上一层铜金属,然而,本发明并不以此为限,业者在根据本发明进行电镀作业时,亦能根据实际需求,以其它电解质溶液替代硫酸铜溶液,以达成电镀的效果,凡本技术领域的人士所轻易思及的变化,均不脱离本发明所欲保护的技术范围。在本较佳实施例中,该被镀物42是一电路板,且该固定装置43是一夹具,该固定装置43的下端夹持住该被镀物42的顶端,且该固定装置43的顶端是与一带动机构(图中省略)相连接,该带动机构能带动该固定装置43,使该固定装置43进行移动,进而使该被镀物42能被浸入至该电镀液400中,需特别一提的是,本较佳实施例是以一夹具作为该固定装置43为例进行说明,惟,本发明并不以此为限,该固定装置43亦可为其它能固定住被镀物42一端的机构或装置,事先说明。The present invention is an electroplating device and its method for dynamically adjusting the anode power supply area. Please refer to FIG. And a plurality of anode metal plates 41a, 41b, wherein the electroplating tank 40 is filled with electroplating solution 400, in the first preferred embodiment, copper sulfate solution is used as electroplating solution 400, to plate on an object 42 to be plated The upper layer of copper metal, however, the present invention is not limited thereto, and the industry can also replace the copper sulfate solution with other electrolyte solutions according to actual needs when performing electroplating operations according to the present invention, so as to achieve the effect of electroplating. Changes easily conceived by those in the technical field do not depart from the technical scope to be protected by the present invention. In this preferred embodiment, the object to be plated 42 is a circuit board, and the fixing device 43 is a clamp, the lower end of the fixing device 43 clamps the top of the object to be plated 42, and the fixing device 43 The top is connected with a driving mechanism (omitted in the figure), and the driving mechanism can drive the fixing device 43 to make the fixing device 43 move so that the object to be plated 42 can be immersed in the electroplating solution 400. In particular, this preferred embodiment is described with a clamp as the fixing device 43 as an example, but the present invention is not limited thereto, and the fixing device 43 can also be other materials that can fix the object to be plated. 42. The mechanism or device at one end shall be explained in advance.

承上,复请参阅图4所示,该被镀物42与一阴极电源N1相连接,所述阳极金属板41a、41b包括两片第一阳极金属板41a及两片第二阳极金属板41b,其中第一阳极金属板41a分别与阳极电源Pa相连接,第二阳极金属板41b是与阳极电源Pb相连接。该第一阳极金属板41a及该第二阳极金属板42b均位于该电镀槽40内,且被浸泡在电镀液400中。该被镀物42的长度(即被镀物42浸入于电镀液400中的深度)大于该第一阳极金属板41a的长度(即第一阳极金属板41a浸入于电镀液400中的深度),此外,与第一阳极金属板41a相较之下,该第二阳极金属板41b是位于该电镀槽40内深度较深的位置,且该第二阳极金属板41b底端浸入于电镀液400中的深度,大于该被镀物42底端浸入于电镀液400中的深度。该第一阳极金属板41a与该第二阳极金属板41b分别与该被镀物42保持平行,且与该被镀物42保持一预定距离,该预定距离需视该电镀槽40的宽度或其它因素而定,事先说明。Continued, please refer to Figure 4 again, the object to be plated 42 is connected to a cathode power supply N1, and the anode metal plates 41a, 41b include two first anode metal plates 41a and two second anode metal plates 41b , wherein the first anode metal plate 41a is respectively connected to the anode power supply Pa, and the second anode metal plate 41b is connected to the anode power supply Pb. Both the first anode metal plate 41 a and the second anode metal plate 42 b are located in the electroplating bath 40 and immersed in the electroplating solution 400 . The length of the object to be plated 42 (i.e. the depth of the object to be plated 42 immersed in the electroplating solution 400) is greater than the length of the first anode metal plate 41a (i.e. the depth of the first anode metal plate 41a immersed in the electroplating solution 400), In addition, compared with the first anode metal plate 41a, the second anode metal plate 41b is located at a deeper position in the electroplating tank 40, and the bottom end of the second anode metal plate 41b is immersed in the electroplating solution 400 The depth is greater than the depth at which the bottom of the object to be plated 42 is immersed in the electroplating solution 400 . The first anode metal plate 41a and the second anode metal plate 41b are kept parallel to the object to be plated 42 respectively, and keep a predetermined distance from the object to be plated 42, and the predetermined distance depends on the width of the electroplating tank 40 or other conditions. Depends on factors, explained in advance.

在图4中,各该第一阳极金属板41a的侧面分别与该被镀物42的左右侧完全对应,另一方面,各该第二阳极金属板41b的侧面中,仅有其中一部份(接近顶端的部分)分别与该被镀物42的左右两侧相对应,且对应于该被镀物42上邻近底端的位置。此外,在各该第二阳极金属板41b的侧面中,接近底端的部分并未与该被镀物42相对应。业者在实际生产制造该电镀装置4时,亦可在各该第一阳极金属板41a及各该第二阳极金属板41b之间分别设置一绝缘体,以分别连接相邻近的第一阳极金属板41a及第二阳极金属板41b。此外,在本较佳实施例中,是以两片第一阳极金属板41a及两片第二阳极金属板41b作为一最佳实施例,以对被镀物42的两对应侧面进行电镀,但本发明并不以此为限,业者在根据本发明设计制造该电镀装置4时,亦可根据实际需求,或根据被镀物42的材料特性或型态,以一片第一阳极金属板41a及一片第二阳极金属板41b进行电镀,以在被镀物42的其中一侧面上产生一电镀层,事先说明。In Fig. 4, the side surfaces of each of the first anode metal plates 41a completely correspond to the left and right sides of the object to be plated 42, on the other hand, only a part of the sides of each of the second anode metal plates 41b (The portion near the top) respectively corresponds to the left and right sides of the object to be plated 42 , and corresponds to the position on the object to be plated 42 near the bottom end. In addition, among the side surfaces of each of the second anode metal plates 41b, the portion close to the bottom end does not correspond to the object to be plated 42 . When actually manufacturing the electroplating device 4, an insulator can also be provided between each of the first anode metal plates 41a and each of the second anode metal plates 41b to respectively connect adjacent first anode metal plates 41a and the second anode metal plate 41b. In addition, in this preferred embodiment, two first anode metal plates 41a and two second anode metal plates 41b are used as a preferred embodiment to electroplate the two corresponding sides of the object to be plated 42, but The present invention is not limited thereto, and when designing and manufacturing the electroplating device 4 according to the present invention, the industry can also use a piece of the first anode metal plate 41a and A piece of the second anode metal plate 41b is electroplated to produce an electroplated layer on one side of the object to be plated 42, as explained in advance.

请参阅图5所示,该电镀装置尚包括一电源供应器50及一可编程控制器52,其中该电源供应器50内设有前述阳极电源Pa、Pb及阴极电源N1,该电源供应器50是与一外部电源51相连接,以取得该外部电源51所供应的电力,该电源供应器50与该可编程控制器52(ProgrammableLogic Controller,简称PLC)相连接。所谓可编程控制器,是指一种具有微处理机的数字电子设备,用于自动化控制的可编程控制器,可以将控制指令随时载入存储器内储存与执行。可编程控制器由内部中央处理器、数据存储器、输入输出单元、数字模拟等单元所模块化组成,广泛地被应用于工业控制领域中。该可编程控制器52能控制该电源供应器50,使连接至该第一阳极金属板41a的阳极电源Pa,能连续地对该第一阳极金属板41a供电,请参阅图4、图5所示,如此,介于该第一阳极金属板41a与该被镀物42间的该电镀液400内的第一金属离子M1(铜离子)能被解离而朝向该被镀物42移动,且与该被镀物42表面上的电子相结合,并在完成还原反应后,稳固地附着在该被镀物42上。另一方面,该第二阳极金属板41b的一侧是部份对应于该被镀物42的一侧邻近另一端(底端)的位置,该可编程控制器52能控制该电源供应器50,使连接至该第二阳极金属板41b的阳极电源Pb,能间歇性地对该第二阳极金属板41b供电,如此,便能令介于该第二阳极金属板41b与该被镀物42间的该电镀液400内的第二金属离子M2,能间歇性地朝向该被镀物42移动,且在完成还原反应后,稳固地附着在该被镀物42上,以在该被镀物42的侧面形成电镀层。Please refer to shown in Fig. 5, this electroplating device still comprises a power supply 50 and a programmable controller 52, wherein the anode power supply Pa, Pb and cathode power N1 are provided in the power supply 50, the power supply 50 It is connected with an external power supply 51 to obtain the power supplied by the external power supply 51, and the power supply 50 is connected with the programmable controller 52 (ProgrammableLogic Controller, PLC for short). The so-called programmable controller refers to a digital electronic device with a microprocessor. The programmable controller used for automatic control can load control instructions into the memory for storage and execution at any time. Programmable controller is composed of internal central processing unit, data memory, input and output unit, digital simulation and other units, and is widely used in the field of industrial control. The programmable controller 52 can control the power supply 50 so that the anode power supply Pa connected to the first anode metal plate 41a can continuously supply power to the first anode metal plate 41a, please refer to FIG. 4 and FIG. 5 In this way, the first metal ions M1 (copper ions) in the electroplating solution 400 between the first anode metal plate 41a and the object to be plated 42 can be dissociated and move toward the object to be plated 42, and Combine with the electrons on the surface of the object to be plated 42, and firmly attach to the object to be plated 42 after completing the reduction reaction. On the other hand, one side of the second anode metal plate 41b is partly corresponding to the position adjacent to the other end (bottom end) of the side of the object to be plated 42, and the programmable controller 52 can control the power supply 50 , so that the anode power supply Pb connected to the second anode metal plate 41b can intermittently supply power to the second anode metal plate 41b, so that the plated object 42 between the second anode metal plate 41b and the The second metal ion M2 in the electroplating solution 400 can intermittently move towards the object to be plated 42, and after the reduction reaction is completed, it is firmly attached to the object to be plated 42, so as to be on the object to be plated The sides of 42 form an electroplating layer.

由本发明的技术特征,由于对应于该被镀物42的左右两侧邻近另一端的所述第二阳极金属板41b,仅会接收到间歇性的输入电源,因此,本发明能由动态调整所述阳极金属板41a、41b供电面积及电量的方式,有效避免过多的第二金属离子M2附着至该被镀物42的左右两侧邻近另一端(底端)的表面,进而有效防止电镀层厚度不均匀等问题发生,由此,当业者日后利用蚀刻技术在电镀层上形成电气线路时,即能根据产品设计需求,轻易地控制该电气线路阻抗大小,完全无须担心会发生已知阻抗不均匀的问题,不仅大幅提升产品良率,更有效降低电镀成本,并避免资源浪费。不仅如此,由于本发明不需使用隔绝板遮蔽各该第二阳极金属板41b上超过被镀物42长度的部位,故电镀槽40内无须预留容纳阻隔板的额外空间,不仅能大幅减少电镀槽40的宽度与体积,更能节省电镀液400的用量,再者,更能免除升降阻隔板所需的自动化机构及夹具,大幅简化电镀装置4的机构设计,此外,更因为电镀槽40的宽度与体积缩减,故能大幅减少被镀物42与所述阳极金属板41a、41b间的距离,有效降低电镀所需的电压,进而大幅节省电力消耗。According to the technical characteristics of the present invention, since the second anode metal plate 41b adjacent to the other end corresponding to the left and right sides of the object to be plated 42 only receives intermittent input power, the present invention can be dynamically adjusted. The power supply area and electricity of the anode metal plates 41a, 41b can effectively prevent excessive second metal ions M2 from adhering to the surface of the left and right sides of the object to be plated 42 adjacent to the other end (bottom end), thereby effectively preventing the plating layer Therefore, when the industry uses etching technology to form electrical circuits on the electroplating layer in the future, it can easily control the impedance of the electrical circuits according to product design requirements, and there is no need to worry about the known impedance. The problem of uniformity not only greatly improves the product yield, but also effectively reduces the cost of electroplating and avoids waste of resources. Not only that, because the present invention does not need to use an insulating plate to cover the position exceeding the length of the object to be plated 42 on each of the second anode metal plates 41b, so there is no need to reserve an extra space for accommodating the insulating plate in the electroplating tank 40, which not only greatly reduces the amount of electroplating. The width and volume of the tank 40 can save the consumption of the electroplating solution 400. Moreover, the automatic mechanism and fixtures required for lifting the barrier plate can be avoided, which greatly simplifies the mechanism design of the electroplating device 4. In addition, because the electroplating tank 40 The width and volume are reduced, so the distance between the object to be plated 42 and the anode metal plates 41a, 41b can be greatly reduced, and the voltage required for electroplating can be effectively reduced, thereby greatly saving power consumption.

在本发明的第二较佳实施例中,请参阅图6所示,该电镀装置4除了包括前述电镀槽40、固定装置43及所述第一阳极金属板41a、第二阳极金属板41b之外,尚包括二中间阳极金属板41c,其中,各该中间阳极金属板41c分别位于各该第一阳极金属板41a及第二阳极金属板41b之间,换言之,该第一阳极金属板41a、中间阳极金属板41c及第二阳极金属板41b分别位于该电镀槽40内不同深度的位置,且各该中间阳极金属板41c分别与该被镀物42保持平行,各该中间阳极金属板41c分别与阳极电源Pc相连接。在本较佳实施例中,各该中间阳极金属板41c的一侧分别完全对应至该被镀物42的左右两侧,故连接至该中间阳极金属板41c的阳极电源Pc,能连续地对该中间阳极金属板41c供电,使介于该中间阳极金属板41c与该被镀物42间的金属离子能移动至该被镀物42上,并在完成还原反应后,稳定地附着在该被镀物42上。此外,在第二较佳实施例中,所述阳极电源Pa、Pb的供电方式与第一较佳实施例所描述者相同,故不再赘述,事先说明。In the second preferred embodiment of the present invention, as shown in FIG. 6, the electroplating device 4 includes the electroplating tank 40, the fixing device 43, and the first anode metal plate 41a and the second anode metal plate 41b. In addition, it also includes two intermediate anode metal plates 41c, wherein each of the intermediate anode metal plates 41c is located between each of the first anode metal plates 41a and the second anode metal plates 41b, in other words, the first anode metal plates 41a, The middle anode metal plate 41c and the second anode metal plate 41b are located at positions of different depths in the electroplating tank 40, and each of the middle anode metal plates 41c is kept parallel to the object to be plated 42, and each of the middle anode metal plates 41c is respectively Connect to the anode power supply Pc. In this preferred embodiment, one side of each of the middle anode metal plates 41c is completely corresponding to the left and right sides of the object to be plated 42, so the anode power supply Pc connected to the middle anode metal plate 41c can continuously The intermediate anode metal plate 41c supplies power, so that the metal ions between the intermediate anode metal plate 41c and the object to be plated 42 can move to the object to be plated 42, and after the reduction reaction is completed, they are stably attached to the object to be plated. Plating 42 on. In addition, in the second preferred embodiment, the power supply method of the anode power supply Pa, Pb is the same as that described in the first preferred embodiment, so it will not be repeated, but will be described in advance.

由本发明的技术特征,业者在实际进行电镀作业时,可先以一被镀物作为试镀的样品,以决定该阳极电源Pb的间歇性供电的模式(如:供电与停止供电的时间间隔),并将控制间歇性供电模式的参数输入至前述可编程控制器52中,如此,该可编程控制器52便能依照业者预设的参数,控制该阳极电源Pb的供电,以达成本发明的效果。综上所述,本发明所采用的电镀方法,是在该第二阳极金属板41b的一侧部份对应于该被镀物42的一侧邻近另一端(底端)的情况下,使连接至该第二阳极金属板41b的阳极电源Pb,间歇性地对该第二阳极金属板41b供电,以避免过多的金属离子附着至该被镀物42的一侧邻近另一端(底端)的表面,并免除容纳阻隔板所需的额外空间,降低电镀所需的电压。本发明不仅能简化电镀装置的机构设计,降低制作成本,更能节省电镀的电力耗费,使电镀的效率更加提升。By the technical characterictic of the present invention, when carrying out electroplating operation actually, the industry can use a plated object as the sample of trial plating earlier, to determine the pattern of the intermittent power supply of this anode power supply Pb (such as: the time interval of power supply and stop power supply) , and input the parameters for controlling the intermittent power supply mode into the aforementioned programmable controller 52, so that the programmable controller 52 can control the power supply of the anode power supply Pb according to the parameters preset by the operator, so as to achieve the purpose of the present invention Effect. In summary, the electroplating method adopted in the present invention is to make the connection To the anode power supply Pb of the second anode metal plate 41b, this second anode metal plate 41b is powered intermittently, so as to avoid excessive metal ions from being attached to one side of the object to be plated 42 adjacent to the other end (bottom end) surface and eliminates the extra space required to accommodate the barrier plate, reducing the voltage required for plating. The invention not only simplifies the mechanism design of the electroplating device, reduces the production cost, but also saves the power consumption of electroplating, and further improves the efficiency of electroplating.

按,以上所述,仅为本发明的若干较佳实施例,惟本发明的技术特征并不局限于此,凡任何熟悉该项技术者,在本发明的技术领域内,可轻易思及的变化或修饰,皆应涵盖在本发明的权利要求范围中。According to, the above descriptions are only some preferred embodiments of the present invention, but the technical characteristics of the present invention are not limited thereto. Anyone who is familiar with this technology can easily think of them in the technical field of the present invention. Any change or modification shall fall within the scope of the claims of the present invention.

Claims (4)

1.一种动态调整阳极供电面积的电镀装置,包括:1. An electroplating device for dynamically adjusting the anode power supply area, comprising: 一电镀槽,其内盛装有电镀液;An electroplating tank, which is filled with electroplating solution; 一固定装置,固定住一被镀物的一端,使该被镀物被浸入至该电镀液中,且该被镀物与一阴极电源相连接;A fixing device, fixing one end of an object to be plated, so that the object to be plated is immersed in the electroplating solution, and the object to be plated is connected to a cathode power supply; 一第一阳极金属板,与一阳极电源相连接,该第一阳极金属板位于该电镀槽内,且与该被镀物保持平行,该第一阳极金属板的一侧完全对应至该被镀物的一侧,且连接至该第一阳极金属板的该阳极电源,能连续地对该第一阳极金属板供电;及A first anode metal plate, connected to an anode power supply, the first anode metal plate is located in the electroplating tank, and kept parallel to the object to be plated, one side of the first anode metal plate is completely corresponding to the plated object one side of the object, and the anode power supply connected to the first anode metal plate is capable of continuously supplying power to the first anode metal plate; and 一第二阳极金属板,与另一阳极电源相连接,该第一阳极金属板位于该电镀槽内,且与该被镀物保持平行,该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,且连接至该第二阳极金属板的该另一阳极电源,能间歇性地对该第二阳极金属板供电。A second anode metal plate is connected with another anode power supply. The first anode metal plate is located in the electroplating tank and kept parallel to the object to be plated. One side part of the second anode metal plate corresponds to the One side of the object to be plated is adjacent to the other end, and the other anode power supply connected to the second anode metal plate can intermittently supply power to the second anode metal plate. 2.如权利要求1所述的动态调整阳极供电面积的电镀装置,尚包括一电源供应器及一可编程控制器,该电源供应器内设有所述阳极电源及该阴极电源,该电源供应器与一外部电源相连接以取得电力,且该电源供应器与该可编程控制器相连接,该可编程控制器能控制该电源供应器,使连接至该第二阳极金属板的该另一阳极电源,能间歇性地对该第二阳极金属板供电。2. The electroplating device for dynamically adjusting the anode power supply area as claimed in claim 1, further comprising a power supply and a programmable controller, the anode power supply and the cathode power supply are provided in the power supply, and the power supply The device is connected to an external power supply to obtain power, and the power supply is connected to the programmable controller, and the programmable controller can control the power supply so that the other connected to the second anode metal plate The anode power supply can intermittently supply power to the second anode metal plate. 3.如权利要求2所述的动态调整阳极供电面积的电镀装置,其中该固定装置是一夹具,该固定装置夹持固定住该被镀物的一端。3. The electroplating device for dynamically adjusting the anode power supply area as claimed in claim 2, wherein the fixing device is a clamp, and the fixing device clamps and fixes one end of the object to be plated. 4.一种动态调整阳极供电面积的电镀方法,是应用在一电镀装置上,该电镀装置包括一电镀槽、一第一阳极金属板及一第二阳极金属板,该电镀槽内盛装有电镀液且容置有一被镀物,该被镀物与一阴极电源相连接,该第一阳极金属板的一侧完全对应至该被镀物的一侧,且该第二阳极金属板的一侧部份对应于该被镀物的一侧邻近另一端的位置,该方法包括:4. An electroplating method for dynamically adjusting the anode power supply area, which is applied to an electroplating device, the electroplating device includes an electroplating tank, a first anode metal plate and a second anode metal plate, the electroplating tank is filled with electroplating liquid and contains an object to be plated, the object to be plated is connected to a cathode power supply, one side of the first anode metal plate completely corresponds to one side of the object to be plated, and one side of the second anode metal plate The portion corresponds to a position where one side of the object to be plated is adjacent to the other end, the method comprising: 使连接至该第一阳极金属板的阳极电源,连续地对该第一阳极金属板供电;及causing an anode power supply connected to the first anode metal plate to continuously power the first anode metal plate; and 使连接至该第二阳极金属板的阳极电源,间歇性地对该第二阳极金属板供电,以在该被镀物的一侧形成一电镀层。The anode power supply connected to the second anode metal plate is intermittently powered to the second anode metal plate to form an electroplating layer on one side of the object to be plated.
CN2011100879091A 2011-04-06 2011-04-06 Electroplating device and method for dynamically adjusting anode power supply area Pending CN102732938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011100879091A CN102732938A (en) 2011-04-06 2011-04-06 Electroplating device and method for dynamically adjusting anode power supply area

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011100879091A CN102732938A (en) 2011-04-06 2011-04-06 Electroplating device and method for dynamically adjusting anode power supply area

Publications (1)

Publication Number Publication Date
CN102732938A true CN102732938A (en) 2012-10-17

Family

ID=46989214

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011100879091A Pending CN102732938A (en) 2011-04-06 2011-04-06 Electroplating device and method for dynamically adjusting anode power supply area

Country Status (1)

Country Link
CN (1) CN102732938A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103225094A (en) * 2013-05-20 2013-07-31 深圳市博敏电子有限公司 Single-sided current protection method for blind hole plate electroplating
CN104313657A (en) * 2014-11-10 2015-01-28 临安振有电子有限公司 Electro-deposition device of through hole of HDI printed circuit board
CN105628755A (en) * 2015-12-30 2016-06-01 上海新阳半导体材料股份有限公司 Method for detecting plating uniformity of plating solution in double-anode mode
CN110172725A (en) * 2018-07-27 2019-08-27 新阳硅密(上海)半导体技术有限公司 Electro-plating method, electroplanting device and its anode assemblies
CN110184641A (en) * 2018-07-27 2019-08-30 新阳硅密(上海)半导体技术有限公司 The electro-plating method of electroplanting device
CN112701072A (en) * 2021-03-25 2021-04-23 西安奕斯伟硅片技术有限公司 Wafer processing apparatus and wafer defect evaluation method
CN113423874A (en) * 2018-12-28 2021-09-21 盛美半导体设备(上海)股份有限公司 Electroplating device and electroplating method
CN113943966A (en) * 2020-07-16 2022-01-18 南通深南电路有限公司 Electroplating device and electroplating method for circuit board

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3251238A (en) * 1963-10-04 1966-05-17 Gen Motors Corp Remotely controlled rear view mirror
CN1972853A (en) * 2004-06-23 2007-05-30 埃托特克德国有限公司 Translatory manipulator, processing line and method of processing work pieces
US20080179192A1 (en) * 2007-01-26 2008-07-31 International Business Machines Corporation Multi-anode system for uniform plating of alloys

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3251238A (en) * 1963-10-04 1966-05-17 Gen Motors Corp Remotely controlled rear view mirror
CN1972853A (en) * 2004-06-23 2007-05-30 埃托特克德国有限公司 Translatory manipulator, processing line and method of processing work pieces
US20080179192A1 (en) * 2007-01-26 2008-07-31 International Business Machines Corporation Multi-anode system for uniform plating of alloys

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103225094A (en) * 2013-05-20 2013-07-31 深圳市博敏电子有限公司 Single-sided current protection method for blind hole plate electroplating
CN104313657A (en) * 2014-11-10 2015-01-28 临安振有电子有限公司 Electro-deposition device of through hole of HDI printed circuit board
CN105628755A (en) * 2015-12-30 2016-06-01 上海新阳半导体材料股份有限公司 Method for detecting plating uniformity of plating solution in double-anode mode
CN105628755B (en) * 2015-12-30 2018-05-08 上海新阳半导体材料股份有限公司 A kind of method of double anode detection plating solution plating property
CN110172725A (en) * 2018-07-27 2019-08-27 新阳硅密(上海)半导体技术有限公司 Electro-plating method, electroplanting device and its anode assemblies
CN110184641A (en) * 2018-07-27 2019-08-30 新阳硅密(上海)半导体技术有限公司 The electro-plating method of electroplanting device
CN110184641B (en) * 2018-07-27 2021-07-30 新阳硅密(上海)半导体技术有限公司 Electroplating method of electroplating device
CN113423874A (en) * 2018-12-28 2021-09-21 盛美半导体设备(上海)股份有限公司 Electroplating device and electroplating method
CN113423874B (en) * 2018-12-28 2024-03-15 盛美半导体设备(上海)股份有限公司 Electroplating device and electroplating method
CN113943966A (en) * 2020-07-16 2022-01-18 南通深南电路有限公司 Electroplating device and electroplating method for circuit board
CN112701072A (en) * 2021-03-25 2021-04-23 西安奕斯伟硅片技术有限公司 Wafer processing apparatus and wafer defect evaluation method

Similar Documents

Publication Publication Date Title
CN102732938A (en) Electroplating device and method for dynamically adjusting anode power supply area
JP6411741B2 (en) Electrolytic treatment method and electrolytic treatment apparatus
US8926820B2 (en) Working electrode design for electrochemical processing of electronic components
CN114836808A (en) Electroplating device and electroplating method
CN102373497B (en) Electroplating apparatus and electroplating method
CN110172717B (en) Copper plating method for ceramic substrate
CN104962964A (en) Electroplating method capable of improving thickness uniformity of basket plating cadmium coating
CN102011159B (en) Device and method for implementing local electroplating of parts
CN104419957A (en) Nickel electroplating assembly line pretreatment device
WO2023040116A1 (en) Circuit board processing method and circuit board
CN107090589B (en) PCB electroplating device and electroplating thickness control method
CN102392292B (en) Electroplating method for encapsulation substrates
CN103225094A (en) Single-sided current protection method for blind hole plate electroplating
CN105297096A (en) Electroplating device and electroplating method for electrodepositing different platings on double sides
CN104328465A (en) High-uniformity electroplating device for through holes of HDI (high density inverter) printed wiring board
CN103643269A (en) Process of ultrasonic wave electroplating of copper foil
CN202284230U (en) Plating tank
CN107190307A (en) Electroplating anode device
HK1175214A (en) Electroplating device for dynamically adjusting anode power-supply area and method thereof
JP2001140100A (en) Device for electrolyzing metallic sheet and electrode for electrolyzing metallic sheet
CN205152363U (en) Electroplating device of two -sided electro -deposition xenogenesis cladding material
CN207002846U (en) A kind of circuit board in electroless nickel immersion gold treatment coating bath with electric field
CN203128687U (en) Electroplate liquid stirring and monitoring device
CN110042445A (en) One kind covering copper equipment and covers copper method
CN103147113A (en) Communication filter electroplating equipment and electroplating method of communication filter electroplating equipment

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1175214

Country of ref document: HK

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20121017

REG Reference to a national code

Ref country code: HK

Ref legal event code: WD

Ref document number: 1175214

Country of ref document: HK