CN101804568A - Linear motor driven air suspension motion platform - Google Patents

Abstract

The invention discloses an air suspension motion platform driven by a linear motor, which solves the problems of low structural rigidity and slow dynamic response existing in the existing motion platform. Including a granite base (1) with a mountain-shaped longitudinal section, a Y-axis motion platform (5) is arranged above the left, middle and right bearing platforms, and a Y-axis motion platform (5) is arranged on the lower surface of the Y-axis motion platform (5). The Y-bearing heavy air cushion (8) fixedly arranged on the right and right positions respectively, the first Y-axis linear motor (9) is fixedly arranged on the left side of the middle load-bearing platform (3), and the first Y-axis linear motor (9) The mover is fixedly connected to the Y-axis motion platform (5), and is provided with a first Y-axis grating reading head (15), and is fixedly provided with a second Y-axis linear motor (10) on the right side of the middle load-bearing platform (3). ), the mover of the second Y-axis linear motor (10) is fixedly connected with the Y-axis motion platform (5), and the present invention adopts a linear motor drive, an air suspension platform structure, simple structure, and high cost performance.

Description

Air Suspension Motion Platform Driven by Linear Motor

technical field

The invention relates to an air-suspension motion platform driven by a linear motor, which is installed on a punching machine for raw porcelain belts, and realizes fast and high-precision positioning in X and Y directions, and can also be used in precise and high-speed processing occasions.

Background technique

Precision and high-speed machining put forward higher requirements for motion positioning and control, higher dynamic characteristics and control accuracy, higher speed and acceleration, lower vibration noise and smaller wear. The traditional motion platform is mostly driven by a rotating motor and a ball screw. The torque output by the rotating motor drives the platform through multiple intermediate links such as a reducer, a coupling, and a ball screw. This structure has a large system inertia. The structural rigidity is low, the elastic deformation of the ball screw is large, and multiple error sources such as friction, clearance, and hysteresis in the transmission chain inhibit the performance of the controller to a large extent, and it is easy to generate mechanical resonance, which makes the dynamic response of the system slow down.

Contents of the invention

The invention provides an air suspension motion platform driven by a linear motor, which solves the technical problems of large system inertia, low structural rigidity, large elastic deformation of a ball screw and slow dynamic response of the system existing in the existing motion platform.

The present invention solves the above problems through the following solutions:

The air-suspended motion platform driven by a linear motor includes a granite base with a mountain-shaped longitudinal section. The left load-bearing platform of the Y-axis motion platform and the Y-axis motion platform are respectively fixed on the three top surfaces of the mountain-shaped granite base. The middle load-bearing platform and the right bearing platform of the Y-axis motion platform are provided with a Y-axis motion platform above the left, middle, and right three load-bearing platforms, and the left, middle, and right positions of the lower surface of the Y-axis motion platform are They are respectively fixed with Y-bearing heavy air cushions, and the surface of the Y-bearing heavy air cushions is provided with compressed gas outlets. The compressed gas in the Y-bearing heavy air cushions is ejected from these compressed air outlets to suspend the Y-axis motion platform on the left and middle. , Above the three load-bearing platforms on the right, Y-axis guiding air cushion fixing blocks are fixedly installed at the four corners of the lower surface of the Y-axis motion platform, and Y-axis guiding air cushions are fixedly installed on the side of the Y-axis guiding air cushion fixing block. The two Y-axis guide air cushions on the left side of the lower surface of the Y-axis motion platform cooperate with the suspension guide on the right inner side of the left load-bearing platform, and the two Y-axis guide air cushions on the right side of the lower surface of the Y-axis motion platform cooperate with the right load-bearing platform The left inner surface of the left inner side is suspended and guided, and the first Y-axis linear motor is fixedly installed on the left side of the middle load-bearing platform. The first Y-axis connecting block is fixedly installed on the mover of the first Y-axis linear motor. The first Y-axis The connecting block is fixedly connected with the lower surface of the Y-axis motion platform. The first Y-axis grating reading head is also arranged on the mover of the first Y-axis linear motor. The granite base under the first Y-axis grating reading head The grating scale of the first Y-axis grating reading head is arranged on the top, the first Y-axis grating reading head is electrically connected with the first Y-axis linear motor, and the second Y-axis linear motor is fixedly installed on the right side of the middle load-bearing platform , the mover of the second Y-axis linear motor is fixedly provided with a second Y-axis connecting block, the second Y-axis connecting block is fixedly connected with the lower surface of the Y-axis motion platform, and the mover of the second Y-axis linear motor The second Y-axis grating reading head is also arranged on the top, and the grating scale of the second Y-axis grating reading head is arranged on the granite base below the second Y-axis grating reading head. The second Y-axis grating reading head is connected with the second Y-axis shaft linear motors are electrically connected together.

On the Y-axis motion platform, the front load-bearing platform of the X-axis motion platform and the rear load-bearing platform of the X-axis motion platform are fixed in parallel, and the inner surface of the front load-bearing platform of the X-axis motion platform is connected with the rear load-bearing platform of the X-axis motion platform. The inner sides of the table are all inner slopes and form a dovetail shape. An X-axis motion platform is set above the front load-bearing platform of the X-axis motion platform and the rear load-bearing platform of the X-axis motion platform, and the lower surfaces of the X-axis motion platform are respectively fixed. There is an X-bearing heavy air cushion, and the compressed gas ejected from the nozzle of the X-axis heavy air cushion makes the X-axis motion platform suspend above the front load-bearing platform of the X-axis motion platform and the rear load-bearing platform of the X-axis motion platform, and under the X-axis motion platform. The middle part of the surface is fixed with a dovetail-shaped X-axis guided air cushion fixed block, and the X-axis guided air cushion is fixedly installed on the outer side of the dovetail of the X-axis guided air cushion fixed block, and the compressed gas ejected from the nozzles of the two X-axis guided air cushions Cooperate with the inner inclined surface of the front load-bearing platform of the X-axis motion platform and the inner inclined surface of the rear load-bearing platform of the X-axis movement platform respectively, and the first X-axis straight line is fixedly arranged on the outer surface of the front load-bearing platform of the X-axis movement platform. The motor, the mover connection block of the first X-axis linear motor is fixedly arranged on the upper surface of the mover of the first X-axis linear motor, and the mover connection block of the first X-axis linear motor is fixedly connected with the lower surface of the X-axis motion platform, The first X-axis grating reading head is fixedly installed on the side of the mover of the first X-axis linear motor, and the first X-axis grating ruler is fixedly installed on the Y-axis motion platform below the first X-axis grating reading head. An X-axis grating reading head is electrically connected with the first X-axis linear motor, and a second X-axis linear motor is fixedly installed on the outer surface of the rear load-bearing platform of the X-axis motion platform, and the mover of the second X-axis linear motor The mover connecting block of the second X-axis linear motor is fixedly arranged on the upper surface of the second X-axis linear motor, and the mover connecting block of the second X-axis linear motor is fixedly connected with the lower surface of the X-axis motion platform. A second X-axis grating reading head is fixedly installed on the side, and a second X-axis grating ruler is fixedly installed on the Y-axis motion platform below the second X-axis grating reading head. The second X-axis grating reading head is connected to the second X-axis The linear motors are electrically connected together.

The invention is driven by a linear motor and has an air-suspended platform structure, which is simple in structure, convenient in maintenance and high in cost performance.

Description of drawings:

Fig. 1 is a structural representation of the present invention

Fig. 2 is a structural representation of the Y-axis motion platform of the present invention

Fig. 3 is a structural representation of the X-axis motion platform of the present invention

Detailed ways

The air-suspended motion platform driven by a linear motor includes a granite base 1 with a mountain-shaped longitudinal section. On the three top surfaces of the granite base 1, the left load-bearing platform 2 and Y The middle load-bearing platform 3 of the axis motion platform and the right load-bearing platform 4 of the Y-axis motion platform are provided with a Y-axis motion platform 5 above the three load-bearing platforms of the left, middle and right, and on the lower surface of the Y-axis motion platform 5 The left, middle and right positions of the Y bearing heavy air cushion 8 are respectively fixedly provided with compressed air outlets on the surface of the Y bearing heavy air cushion 8, and the compressed gas in the Y bearing heavy air cushion 8 is ejected from these compressed air outlets. Suspend the Y-axis motion platform 5 above the left, middle and right three load-bearing platforms, and the four corners of the lower surface of the Y-axis motion platform 5 are respectively fixed with Y-axis guiding air cushion fixing blocks 6, which are guided by the Y-axis The side of the air cushion fixed block 6 is fixedly provided with a Y-axis guide air cushion 7, and the two Y-axis guide air cushions 7 on the left side of the lower surface of the Y-axis motion platform 5 cooperate with the suspension guide on the right inner side of the left load-bearing platform 2, and the Y-axis moves The two Y-axis guide air cushions 7 on the right side of the lower surface of the platform 5 cooperate with the suspension guide on the left inner surface of the right load-bearing platform 4, and the first Y-axis linear motor 9 is fixedly arranged on the left side of the middle load-bearing platform 3. The mover 11 of a Y-axis linear motor 9 is fixedly provided with a first Y-axis connection block 13, and the first Y-axis connection block 13 is fixedly connected with the lower surface of the Y-axis motion platform 5. In the first Y-axis linear motor The mover 11 of 9 is also provided with a first Y-axis grating reading head 15, and the grating ruler of the first Y-axis grating reading head 15 is arranged on the granite base 1 below the first Y-axis grating reading head 15. The Y-axis grating reading head 15 is electrically connected with the first Y-axis linear motor 9, and the second Y-axis linear motor 10 is fixedly arranged on the right side of the middle load-bearing platform 3, and the mover 12 of the second Y-axis linear motor 10 A second Y-axis connection block 14 is fixedly arranged on the top, and the second Y-axis connection block 14 is fixedly connected with the lower surface of the Y-axis motion platform 5. On the mover 12 of the second Y-axis linear motor 10, a first Two Y-axis grating reading head 16, the grating scale of the second Y-axis grating reading head 16 is arranged on the granite base 1 below the second Y-axis grating reading head 16, the second Y-axis grating reading head 16 and the second Y The shaft linear motors 10 are electrically connected together.

On the Y-axis motion platform 5, the front load-bearing platform 17 of the X-axis movement platform and the rear load-bearing platform 18 of the X-axis movement platform are fixed in parallel, and the inner surface of the front load-bearing platform 17 of the X-axis movement platform moves with the X-axis. The inner surface of the rear load-bearing platform 18 of the platform is an inner slope and forms a dovetail shape. An X-axis motion platform 19 is arranged above the front load-bearing platform 17 of the X-axis motion platform and the rear load-bearing platform 18 of the X-axis motion platform. The lower surface of the motion platform 19 is respectively fixed with an X-bearing heavy air cushion 22, and the compressed gas ejected from the nozzle of the X-bearing heavy air cushion 22 makes the X-axis motion platform 19 suspend on the front load-bearing platform 17 of the X-axis motion platform and the X-axis motion platform. Above the rear load-bearing platform 18, a dovetail-shaped X-axis guiding air cushion fixing block 20 is fixedly arranged in the middle part of the lower surface of the X-axis moving platform 19, and X-axis guiding air cushion fixing blocks 20 are respectively fixed on the outer side of the dovetail of the X-axis guiding air cushion fixing block 20. Axis-guided air cushions 21, the compressed gas ejected from the nozzles of the two X-axis guided air cushions 21 are respectively coordinated with the inner slope of the front load-bearing platform 17 of the X-axis motion platform and the inner slope of the rear load-bearing platform 18 of the X-axis motion platform. The first X-axis linear motor 23 is fixedly arranged on the outer surface of the front load-bearing platform 17 of the X-axis motion platform, and the mover 25 of the first X-axis linear motor 23 is fixedly arranged on the first X-axis linear motor. The connecting block 27, the mover connecting block 27 of the first X-axis linear motor is fixedly connected to the lower surface of the X-axis motion platform 19, and the first X-axis grating is fixedly arranged on the side of the mover 25 of the first X-axis linear motor 23 The reading head 29 is fixedly provided with a first X-axis grating ruler on the Y-axis motion platform 5 below the first X-axis grating reading head, and the first X-axis grating reading head 29 is electrically connected to the first X-axis linear motor 23. Together, a second X-axis linear motor 24 is fixedly installed on the outer surface of the rear load-bearing platform 18 of the X-axis motion platform, and a second X-axis linear motor is fixedly installed on the upper surface of the mover 26 of the second X-axis linear motor 24. The mover connection block 28, the mover connection block 28 of the second X-axis linear motor is fixedly connected to the lower surface of the X-axis motion platform 19, and the second X-axis is fixedly arranged on the side of the mover 26 of the second X-axis linear motor 24. axis grating reading head 30, a second X-axis grating ruler is fixedly arranged on the Y-axis motion platform 5 below the second X-axis grating reading head, and the second X-axis grating reading head 30 is electrically connected to the second X-axis linear motor 24 connected together.

The main advantages of using linear motors as the drive system and air suspension guide rail support are as follows:

(1) The structure is simple. Since the linear motor does not need an additional device to change the rotary motion into a linear motion, the weight and volume are greatly reduced, and the motion inertia of the system is significantly reduced;

(2) High positioning accuracy. The linear motor can realize direct transmission, so it can eliminate various positioning errors caused by the intermediate links, so the positioning accuracy is high, and the positioning accuracy of the whole system is greatly improved by using high-precision grating ruler feedback and microcomputer control;

(3) Fast response, high sensitivity and good follow-up. The air suspension support is used, so that the moving parts and the guide rail always maintain a certain air gap without contact, which eliminates the contact friction resistance of the fixed and moving parts, thus greatly improving the sensitivity, rapidity and follow-up of the system;

(4) safe and reliable work, long life. The linear motor-air suspension structure can realize non-contact transmission force, and the mechanical friction loss is almost zero, so there are few failures and maintenance-free, so the work is safe and reliable, and the service life is long.

Claims (2)

1. An air-suspended motion platform driven by a linear motor, comprising a mountain-shaped granite base (1) in longitudinal section, on three top surfaces of the mountain-shaped granite base (1), Y-axis motion is fixedly arranged respectively The left load-bearing platform (2) of the platform, the middle load-bearing platform (3) of the Y-axis motion platform and the right load-bearing platform (4) of the Y-axis motion platform are provided with a Y-axis motion platform above the three load-bearing platforms of the left, middle and right (5), it is characterized in that, the left, middle and right positions of the lower surface of the Y-axis motion platform (5) are respectively fixedly provided with a Y bearing heavy air cushion (8), and the Y bearing heavy air cushion (8) The surface is provided with compressed air outlets, and the compressed gas in the Y bearing heavy air cushion (8) is ejected from these compressed air outlets to suspend the Y-axis motion platform (5) above the left, middle and right bearing platforms. The positions of the four corners of the lower surface of the Y-axis motion platform (5) are respectively fixedly provided with a Y-axis guiding air cushion fixing block (6), and a Y-axis guiding air cushion (6) is fixedly arranged on the side of the Y-axis guiding air cushion fixing block (6). 7), the two Y-axis guide air cushions (7) on the left side of the lower surface of the Y-axis motion platform (5) cooperate with the suspension guide on the right inner surface of the left load-bearing platform (2), and the lower surface of the Y-axis motion platform (5) The two Y-axis guide air cushions (7) on the right side of the surface cooperate with the suspension guidance of the left inner surface of the right load-bearing platform (4), and the first Y-axis linear motor ( 9), the mover (11) of the first Y-axis linear motor (9) is fixedly provided with a first Y-axis connecting block (13), the first Y-axis connecting block (13) and the Y-axis motion platform (5) The lower surfaces are fixedly connected together, and a first Y-axis grating reading head (15) is also arranged on the mover (11) of the first Y-axis linear motor (9), below the first Y-axis grating reading head (15) The grating scale of the first Y-axis grating reading head (15) is arranged on the granite base (1), and the first Y-axis grating reading head (15) is electrically connected with the first Y-axis linear motor (9). A second Y-axis linear motor (10) is fixedly arranged on the right side of the middle load-bearing platform (3), and a second Y-axis connecting block (14) is fixedly arranged on the mover (12) of the second Y-axis linear motor (10). ), the second Y-axis connecting block (14) is fixedly connected with the lower surface of the Y-axis motion platform (5), and a second Y-axis is also arranged on the mover (12) of the second Y-axis linear motor (10). axis grating reading head (16), the grating scale of the second Y-axis grating reading head (16) is arranged on the granite base (1) below the second Y-axis grating reading head (16), the second Y-axis grating reading head The head (16) is electrically connected with the second Y-axis linear motor (10). 2. the air-suspension motion platform driven by linear motor according to claim 1 is characterized in that, on the described Y-axis motion platform (5), the front load-bearing platform (17) and The rear load-bearing platform (18) of the X-axis motion platform, the inner surface of the front load-bearing platform (17) of the X-axis movement platform and the inner surface of the rear load-bearing platform (18) of the X-axis motion platform are all inner slopes and form a dovetail shape, An X-axis motion platform (19) is arranged above the front load-bearing platform (17) of the X-axis movement platform and the rear load-bearing platform (18) of the X-axis movement platform, and the lower surface of the X-axis movement platform (19) is fixedly provided with The X-bearing heavy air cushion (22), the compressed gas ejected from the nozzle of the X-bearing heavy air cushion (22) makes the X-axis motion platform (19) suspended on the front bearing platform (17) of the X-axis motion platform and the rear of the X-axis motion platform Above the bearing platform (18), a dovetail-shaped X-axis guiding air cushion fixing block (20) is fixedly arranged in the middle part of the lower surface of the X-axis moving platform (19), and on the outer side of the dovetail of the X-axis guiding air cushion fixing block (20) X-axis guide air cushions (21) are respectively fixedly arranged on the top, and the compressed gas ejected from the nozzles of the two X-axis guide air cushions (21) is respectively connected to the inner slope of the front bearing platform (17) of the X-axis movement platform and the X-axis movement platform. The inner slope of the rear load-bearing platform (18) is suspended and guided, and the outer surface of the front load-bearing platform (17) of the X-axis motion platform is fixedly provided with the first X-axis linear motor (23), and the first X-axis linear motor ( 23) The mover connection block (27) of the first X-axis linear motor is fixedly arranged on the top of the mover (25), and the mover connection block (27) of the first X-axis linear motor and the X-axis motion platform (19) The lower surface of the first X-axis linear motor (23) is fixedly connected on the side of the mover (25) of the first X-axis grating reading head (29), and the Y axis below the first X-axis grating reading head The first X-axis grating scale is fixedly arranged on the axis motion platform (5), and the first X-axis grating reading head (29) is electrically connected with the first X-axis linear motor (23), and is loaded on the back of the X-axis motion platform. A second X-axis linear motor (24) is fixedly arranged on the outer surface of the table (18), and a mover of the second X-axis linear motor (26) is fixedly arranged on the top of the mover (26) of the second X-axis linear motor (24). The connecting block (28), the mover connecting block (28) of the second X-axis linear motor is fixedly connected with the lower surface of the X-axis motion platform (19), and the mover (26) of the second X-axis linear motor (24) A second X-axis grating reading head (30) is fixedly arranged on the side of the second X-axis grating reading head, and a second X-axis grating scale is fixedly arranged on the Y-axis motion platform (5) below the second X-axis grating reading head. The reading head (30) is electrically connected with the second X-axis linear motor (24).

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